JPH0196819A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH0196819A JPH0196819A JP25254287A JP25254287A JPH0196819A JP H0196819 A JPH0196819 A JP H0196819A JP 25254287 A JP25254287 A JP 25254287A JP 25254287 A JP25254287 A JP 25254287A JP H0196819 A JPH0196819 A JP H0196819A
- Authority
- JP
- Japan
- Prior art keywords
- protective film
- oxide layer
- oxygen
- recording medium
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 46
- 230000001681 protective effect Effects 0.000 claims abstract description 31
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 25
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 23
- 239000001301 oxygen Substances 0.000 claims abstract description 23
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 10
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract 14
- 229910017052 cobalt Inorganic materials 0.000 claims abstract 7
- 239000010941 cobalt Substances 0.000 claims abstract 7
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims abstract 7
- 239000010408 film Substances 0.000 claims description 31
- 239000002184 metal Substances 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 239000010409 thin film Substances 0.000 claims description 8
- 229910052742 iron Inorganic materials 0.000 claims description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 6
- 230000007797 corrosion Effects 0.000 abstract description 21
- 238000005260 corrosion Methods 0.000 abstract description 21
- 239000000758 substrate Substances 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 24
- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 12
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 9
- 229910001882 dioxygen Inorganic materials 0.000 description 9
- 229910045601 alloy Inorganic materials 0.000 description 7
- 239000000956 alloy Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 229910052804 chromium Inorganic materials 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- XTQHKBHJIVJGKJ-UHFFFAOYSA-N sulfur monoxide Chemical class S=O XTQHKBHJIVJGKJ-UHFFFAOYSA-N 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- -1 Co-5i Inorganic materials 0.000 description 3
- 229910003271 Ni-Fe Inorganic materials 0.000 description 3
- 230000002378 acidificating effect Effects 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- 229910052815 sulfur oxide Inorganic materials 0.000 description 3
- 229910020598 Co Fe Inorganic materials 0.000 description 2
- 229910020630 Co Ni Inorganic materials 0.000 description 2
- 229910002519 Co-Fe Inorganic materials 0.000 description 2
- 229910002440 Co–Ni Inorganic materials 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 229910020632 Co Mn Inorganic materials 0.000 description 1
- 229910020678 Co—Mn Inorganic materials 0.000 description 1
- 229910020676 Co—N Inorganic materials 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- 239000003570 air Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- TXKMVPPZCYKFAC-UHFFFAOYSA-N disulfur monoxide Inorganic materials O=S=S TXKMVPPZCYKFAC-UHFFFAOYSA-N 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 229910000037 hydrogen sulfide Inorganic materials 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は強磁性金属薄膜型の磁気記録媒体に係り、さら
に詳しくは耐食性に優れた無機質保護膜を有する信頼性
の高い磁気記録媒体に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a ferromagnetic metal thin film type magnetic recording medium, and more particularly to a highly reliable magnetic recording medium having an inorganic protective film with excellent corrosion resistance.
従来、真空蒸着法、スパッタリング法あるいはイオンブ
レーティング法などによって成膜されるＣｏ、Ｃｏ−Ｎ
ｉ、Ｃｏ−Ｎ１−Ｐなど、Ｃｏを主成分とする強磁性金
１＠薄膜を磁性層とする磁気記録媒体は、高密度磁気記
録に適した優れた磁気特性を有する反面、磁気ヘッドな
どとの摺動接触の際に摩耗や損傷を被り易く、また磁性
層が腐食され易いＣｏ系の強磁性金属薄膜であるので、
大気中における耐食性が低く、そのため磁気特性が劣化
し耐久性ならびに信頼性に劣るという欠点があった。Conventionally, Co and Co-N films are formed by vacuum evaporation, sputtering, ion blating, etc.
Magnetic recording media, such as Co-N1-P, whose magnetic layer is a ferromagnetic gold 1@ thin film mainly composed of Co, have excellent magnetic properties suitable for high-density magnetic recording, but are difficult to use with magnetic heads. Because it is a Co-based ferromagnetic metal thin film that is easily subject to wear and damage during sliding contact, and the magnetic layer is easily corroded,
It has the drawback of low corrosion resistance in the atmosphere, resulting in deterioration of magnetic properties and inferior durability and reliability.
この欠点を解消するために、磁性層表面にレーザ光線を
照射して熱酸化させる方法（特開昭５８−１３０４２８
号公報）や、グロー放電によって酸化物保護層を形成さ
せる方法（特開昭５８−４１４３９号公報、同５８−２
０８９３５号公報）、水蒸気処理により安定な耐食性被
膜を形成させる方法（特開昭５７−１２３５３３号公報
）、オゾン雰囲気に曝すことにより酸化物保護層を形成
させる方法（特開昭５９−６３０３１号公報）あるいは
高温高湿の雰囲気下で処理して安定な酸化物保護層を形
成させる方法（米国特許第３４６０９６８号）などがあ
り、これらの方法は、少なくともスピネル（Ｃｏ：１０
４）またはＣｏ２０．・ｎＨ，ｏの形で表わされる安定
な結晶性の高次酸化物もしくは含水酸化物を磁性層表面
に形成させるものである。また、Ｃｒ、Ｔｉなどの金属
またはこれらの酸化物よりなる保護膜を磁性層上に形成
させて耐食性の改善をはかる方法（特開昭５１−４７４
０１号公報、同５８−２６３２０号公報）など多く提案
されている。In order to eliminate this drawback, a method of thermally oxidizing the surface of the magnetic layer by irradiating it with a laser beam (Japanese Unexamined Patent Publication No. 58-130428
JP-A-58-41439, JP-A-58-2
08935), a method of forming a stable corrosion-resistant film by steam treatment (JP-A-57-123533), and a method of forming an oxide protective layer by exposing to an ozone atmosphere (JP-A-59-63031). ) or a method in which a stable oxide protective layer is formed by treatment in a high temperature and high humidity atmosphere (US Pat. No. 3,460,968).
4) or Co20. - Stable crystalline higher-order oxide or hydrated oxide expressed in the form of nH, o is formed on the surface of the magnetic layer. In addition, a method of improving corrosion resistance by forming a protective film made of metals such as Cr and Ti or their oxides on the magnetic layer (Japanese Patent Laid-Open No. 51-474
Many proposals have been made, such as Publication No. 01 and Publication No. 58-26320).
しかし、上記の安定な結晶性高次酸化物の形成あるいは
磁性層上にＣｒ、Ｔｉなとの金属またはこれらの酸化物
の保護膜の形成だけでは必ずしも所望する耐食性を得る
ことができず、長時間にわたる高温高湿の雰囲気中、あ
るいは硫黄酸化物、窒素酸化物などを含む酸性の雰囲気
中に放置すると磁性層の腐食が著しく進行し磁気特性な
らびに走行性などが著しく低下するという問題があった
。However, it is not always possible to obtain the desired corrosion resistance simply by forming the above-mentioned stable crystalline higher-order oxide or by forming a protective film of metals such as Cr and Ti or oxides of these on the magnetic layer. If the magnetic layer is left in a high temperature and high humidity atmosphere for a long period of time, or in an acidic atmosphere containing sulfur oxides, nitrogen oxides, etc., corrosion of the magnetic layer will progress significantly, resulting in a significant decrease in magnetic properties and runnability. .
本発明は、上述した従来技術において高温高湿の雰囲気
下におけるＣＯもしくはＣＯを主成分とする強磁性金属
薄膜からなる磁性層の腐食の問題。The present invention solves the problem of corrosion of a magnetic layer made of CO or a ferromagnetic metal thin film containing CO as a main component in a high temperature and high humidity atmosphere in the prior art described above.
特に硫黄酸化物、窒素酸化物などを含む雰囲気下におけ
る腐食の問題を解消し、硫黄酸化物、窒素酸化物などを
含む高温高湿の雰囲気下、特に酸性の還元性雰囲気下に
極めて強い耐食性保護膜を形成させることによって、耐
食性ならびに走行性が極めて良好で、耐久性および信頼
性に優れた磁気記録媒体を提供することを目的とする。Eliminates corrosion problems especially in atmospheres containing sulfur oxides, nitrogen oxides, etc., and provides extremely strong corrosion resistance protection in high temperature, high humidity atmospheres containing sulfur oxides, nitrogen oxides, etc., especially in acidic reducing atmospheres. The object of the present invention is to provide a magnetic recording medium that has extremely good corrosion resistance and runnability, and is excellent in durability and reliability by forming a film.
本発明者らは、種々研究を重ねた結果、ＣＯもしくはＧ
ｏを主成分とする強磁性金属薄膜よりなる磁性層表面に
、Ｃｏの高次酸化物（Ｃ０３ｏ４など）層または含水酸
化物（Ｃｏ２０．・ｎＨ２Ｏなど）層を形成させた後、
その上にＮｉと酸素を主成分とする保護膜を設けると、
比較的良好な耐食性を得ることができるが、しかしこれ
だけでは高温高湿の雰囲気下、特に酸性の還元性雰囲気
下における耐食性が十分でなく、ＣＯの高次酸化物層が
その上に形成された無機質保護膜によって還元されたり
して、ＣＯの高次酸化物が化学的に不安定となり、その
ため耐食性が劣化することを知見した。As a result of various studies, the present inventors discovered that CO or G
After forming a layer of a higher-order oxide of Co (such as CO3o4) or a layer of hydrated oxide (such as Co20.nH2O) on the surface of the magnetic layer made of a ferromagnetic metal thin film mainly composed of o,
If a protective film containing Ni and oxygen as main components is provided on top of that,
Although relatively good corrosion resistance can be obtained, this alone does not provide sufficient corrosion resistance in a high temperature and high humidity atmosphere, especially in an acidic reducing atmosphere, and a higher order oxide layer of CO is formed on top of it. It has been found that higher-order oxides of CO become chemically unstable due to being reduced by the inorganic protective film, and as a result, corrosion resistance deteriorates.
本発明の目的は、磁性層の表面に形成されたＧｏの高次
酸化物層の上に形成させるＮｉと酸素を主成分とする無
機質保護膜において、上記Ｇｏの高次酸化物層との界面
近傍における無機質保護中の酸素含有量を２０原子％以
上とすることにより、達成される。An object of the present invention is to provide an inorganic protective film containing Ni and oxygen as main components to be formed on a Go higher oxide layer formed on the surface of a magnetic layer. This is achieved by setting the oxygen content in the inorganic protection in the vicinity to 20 atomic % or more.
そして、本発明のＮｉと酸素を主成分とする無機質保護
膜中の酸素含有量は１５〜５０原子％の範囲が好ましく
、１５原子％未満では上記保護膜が軟らかくなり、また
５０原子％を超えると脆くなって耐摩耗性が低下するの
で好ましくない。The oxygen content in the inorganic protective film containing Ni and oxygen as main components of the present invention is preferably in the range of 15 to 50 at. This is not preferable because it becomes brittle and reduces wear resistance.
本発明の無機質保護膜において、Ｎｉを主成分とし、酸
素を１５〜５０ａ子％含有し、さらにＦｅを、ＮｉとＦ
ｅの合計量に対して、原子比で０．０５〜０．４の範囲
含有させると、さらに優れた耐食性が得られる。この場
合、上記原子比がＯ，ＯＳ未満または０．４を超えると
、たとえ無機質保護膜中の酸素含有量が１５〜５０原子
％の範囲であっても十分な耐食性は得られない。The inorganic protective film of the present invention contains Ni as a main component, contains 15 to 50% of oxygen, and further contains Fe, Ni and F.
Even better corrosion resistance can be obtained by containing e in an atomic ratio of 0.05 to 0.4 with respect to the total amount. In this case, if the above atomic ratio is less than O, OS or more than 0.4, sufficient corrosion resistance cannot be obtained even if the oxygen content in the inorganic protective film is in the range of 15 to 50 at %.
また、本発明のＮｉと酸素を主成分とする無機質保護膜
中に、Ｃｒ、Ｔｉ、Ｓｉなどの元素を適量添加しても有
効である。It is also effective to add an appropriate amount of elements such as Cr, Ti, and Si to the inorganic protective film of the present invention whose main components are Ni and oxygen.
本発明の無機質保護膜の膜厚は、５０人未満では耐食性
の向上効果が少なく、１０００人を超えるとスペーシン
グロスが大きくなり再生出力が低下するので好ましくな
く、その膜厚は５０〜１０００人の範囲が好ましく、よ
り好ましい範囲は１００〜５００人である。If the thickness of the inorganic protective film of the present invention is less than 50 people, the effect of improving corrosion resistance will be small, and if it exceeds 1000 people, the spacing loss will increase and the reproduction output will decrease, so it is not preferable. The range is preferably 100 to 500, and the more preferred range is 100 to 500.
本発明の無機質保護膜の形成は、酸化性の雰囲気中で、
真空蒸着法、スパッタリング法あるいはイオンブレーテ
ィング法などの物理蒸着法によって成膜することができ
る。酸化性のガスとしては、酸素、オゾン、酸素リッチ
ガス、空気、あるいはＨｅ、Ａｒなどの不活性ガスに希
釈された酸素ガスを用いることができる。The inorganic protective film of the present invention is formed in an oxidizing atmosphere.
The film can be formed by a physical vapor deposition method such as a vacuum evaporation method, a sputtering method, or an ion blating method. As the oxidizing gas, oxygen, ozone, oxygen-rich gas, air, or oxygen gas diluted with an inert gas such as He or Ar can be used.
本発明のＣｏを主成分とする強磁性金属材料として、Ｃ
ｏの他、Ｇｏ −Ｃｒ、 Ｃｏ −Ｔｉ、 Ｇｏ −Ｐ
。As the ferromagnetic metal material mainly composed of Co of the present invention, C
In addition to o, Go -Cr, Co -Ti, Go -P
.
Ｃｏ −Ｎｉ、 Ｃｏ −Ｆｅ、 Ｇｏ−Ｎｉ −Ｃｒ
、 Ｃｏ −Ｍｎ。Co-Ni, Co-Fe, Go-Ni-Cr
, Co-Mn.
Ｃｏ−Ｎ１−Ｐ、Ｇｏ−Ｐｄ、Ｃｏ−５ｉ、Ｃｏ−Ｆｅ
−Ｃｒなどを用いることができる。Co-N1-P, Go-Pd, Co-5i, Co-Fe
-Cr etc. can be used.
また、本発明の無機質保護膜が適用できる磁気記録媒体
は、ポリエチレンテレフタレート、ポリエステル、ポリ
イミド、ポリアミド、ポリ塩化ビニルなどの合成樹脂製
のフィルムあるいはＡＱ。Further, the magnetic recording medium to which the inorganic protective film of the present invention can be applied is a film made of synthetic resin such as polyethylene terephthalate, polyester, polyimide, polyamide, polyvinyl chloride, or AQ.
Ａｆ１合金、Ｔｉ、Ｔｉ合金、ステンレスなどの金属板
を基体とするテープ、シート、カード、ディスク状など
の種々の形態の磁気記録媒体を包含するものである。It includes various forms of magnetic recording media such as tapes, sheets, cards, disks, etc., which are based on metal plates such as Af1 alloy, Ti, Ti alloy, and stainless steel.
以下に本発明の一実施例を挙げ１図面を参照しながらさ
らに詳細に説明する。Hereinafter, one embodiment of the present invention will be described in more detail with reference to one drawing.
第２図に示す真空斜め入射蒸着装置を使用し、第１図に
示す断面構造の磁気テープを作製した。A magnetic tape having the cross-sectional structure shown in FIG. 1 was produced using the vacuum oblique incidence deposition apparatus shown in FIG.
基体１として、１０−厚さのポリエチレンテレフタレー
トフィルムを用い、強磁性金属材料の蒸発源１３よりＣ
ｏ−Ｎ１（重量比８０ ： ２０）合金を ５×１Ｏ−
ｓＴ ｏｒｒの真空下で電子ビーム溶解により加熱蒸発
させ、最低入射角５０度で斜め入射蒸着を開始すると同
時に最低入射角部に設けた酸素ガス導入口１６より酸素
ガスを２００ｍＱ／ｍｉｎ導入しつつＧｏ−Ｎｉ合金よ
りなる膜厚が１５００人の強磁性金属薄膜を形成させた
後、大気中に曝し、ついで１気圧の酸素ガスの容器中に
１週間放置して、磁性層２である強磁性金属薄膜の表面
にＣｏの高次含水酸化物（Ｃｒ２０３・ｎＨｔＯ）層３
を形成させた。A 10-thick polyethylene terephthalate film is used as the substrate 1, and C is
o-N1 (weight ratio 80:20) alloy 5×1O-
Heat evaporation by electron beam melting in a vacuum of sT orr, start oblique incidence evaporation at a minimum incident angle of 50 degrees, and at the same time introduce oxygen gas at 200 mQ/min from the oxygen gas inlet 16 provided at the lowest incident angle. - After forming a ferromagnetic metal thin film of Ni alloy with a thickness of 1,500 mm, it is exposed to the atmosphere, and then left in a container of oxygen gas at 1 atm for one week. Higher-order hydrated oxide of Co (Cr203/nHtO) layer 3 on the surface of the thin film
was formed.
次に、同じく第２図に示す真空斜め入射蒸着装置を用い
、Ｎｉ−Ｆｅ合金を加熱蒸発させ、最低入射角５０度で
蒸着させると同時に、酸素ガス導入口１６および１７か
ら酸素ガスを導入し、加熱蒸発させるＮｉ−Ｆｅ合金の
組成と導入する酸素ガスの量を変化させて、第１表の実
施例１〜１１に示すＮｉ −Ｆｅ−０よりなる種々の組
成を有する無機質保護膜４を１５０人の膜厚に成膜し、
磁気テープを作製した。Next, using the vacuum oblique incidence evaporation apparatus shown in FIG. 2, the Ni-Fe alloy is heated and evaporated at a minimum incidence angle of 50 degrees, and at the same time, oxygen gas is introduced from the oxygen gas inlets 16 and 17. By changing the composition of the Ni-Fe alloy to be heated and evaporated and the amount of oxygen gas introduced, inorganic protective films 4 having various compositions of Ni-Fe-0 shown in Examples 1 to 11 in Table 1 were prepared. A film was formed to a thickness of 150 people,
A magnetic tape was made.
（比較例１）
Ｎｉ−Ｆｅ合金の蒸着時に酸素ガスの導入を省略した以
外は、実施例１〜１１と同様にして磁気テープを作製し
た。(Comparative Example 1) Magnetic tapes were produced in the same manner as Examples 1 to 11, except that the introduction of oxygen gas was omitted during the vapor deposition of the Ni-Fe alloy.
（比較例２）
Ｃｏ−Ｎｉ合金よりなる強磁性金属薄膜の表面にＣｏの
高次含水酸化物層の形成を省略した以外は。(Comparative Example 2) Except that the formation of a higher-order hydrated oxide layer of Co on the surface of a ferromagnetic metal thin film made of a Co-Ni alloy was omitted.
実施例１〜１１と同様にして磁気テープを作製した。Magnetic tapes were produced in the same manner as Examples 1 to 11.
以上の実施例および比較例において作製した磁気テープ
について、Ｎｉ−Ｆｅ−０保護膜中のＮｉ。Regarding the magnetic tapes produced in the above Examples and Comparative Examples, Ni in the Ni-Fe-0 protective film.
Ｆｅ、Ｏの含有量および上記保護膜の磁性層との界面近
傍５０人深さ部分の酸素含有量を求め、耐食性はＳ ０
．１ ｐｐｍ、 Ｎ Ｏ，１ｐｐｍ、 Ｈ，Ｓ Ｏ，５
ｐｐｍ含有する３５℃７５％ＲＨ−の雰囲気中に、それ
ぞれ所定時間暴露し、腐食生成物の有無（０印腐食なし
、×印腐食あり）およびＶＨ８型ＶＴＲを用い磁気テー
プの再生出力が初期の値の１７２まで低下するスチル時
間を調べ、耐食性を評価した。The contents of Fe and O and the oxygen content at a depth of 50 mm near the interface with the magnetic layer of the protective film were determined, and the corrosion resistance was determined as S 0
．． 1 ppm, N O, 1 ppm, H, S O, 5
ppm contained in an atmosphere at 35°C and 75% RH for a predetermined time. Corrosion resistance was evaluated by examining the still time at which the value decreased to 172.
その結果を第１表に示す。The results are shown in Table 1.
第１表から明らかなごとく、本発明の実施例１〜１１に
示す磁気テープは、いずれも優れた耐食性を有すること
が分かる。As is clear from Table 1, the magnetic tapes shown in Examples 1 to 11 of the present invention all have excellent corrosion resistance.
Ｃ発明の効果〕
以上詳細に説明したごとく、ＣＯもしくはＣＯを主成分
とする磁性層の表面にＣＯの高次酸化物または含水酸化
物層を形成させ、さらに上記酸化物層の界面近傍におけ
る酸素含有量が２０原子％以上含むＮｉと酸素を主成分
とする無機質保護膜を、上記酸化物層の上に設けた本発
明の磁気記録媒体は、特に酸化硫黄、酸化窒素、硫化水
素などを含む腐食性の雰囲気下において優れた耐食性を
示し、また無機質保護膜中に酸素を１５〜５０原子％含
有させることによって耐摩耗性も向上し、耐久性ならび
に信頼性の高い磁気記録媒体を得ることができる。C Effects of the Invention] As explained in detail above, a higher order oxide or hydrous oxide layer of CO is formed on the surface of CO or a magnetic layer containing CO as a main component, and furthermore, oxygen near the interface of the oxide layer is formed. The magnetic recording medium of the present invention, in which an inorganic protective film mainly composed of Ni and oxygen containing 20 atomic % or more, is provided on the oxide layer, especially containing sulfur oxide, nitrogen oxide, hydrogen sulfide, etc. It exhibits excellent corrosion resistance in corrosive atmospheres, and by containing 15 to 50 atomic percent of oxygen in the inorganic protective film, wear resistance is also improved, making it possible to obtain magnetic recording media with high durability and reliability. can.
第１図は本発明の実施例において作製した磁気テープの
断面構造を示す模式図、第２図は本発明の実施例におい
て用いた真空蒸着装置の構造を示す模式図である。
１・・・基体 ２・・・磁性層３・・・Ｃｏ
の高次含水酸化物層
４・・・無機質保護膜 ５・・・界面近傍６・・・真
空４ｑ！７・・・真空排気系８・・・円筒状キャン
９・・・原反ロール１０、１１・・・ガイドロール
１２・・・巻取ロール １３・・・蒸発源１４・・・
Ｇ ｏ −Ｎ ｉ合金 １５・・・防着板１６、１７
・・・酸素ガス導入口
Ａ・・・最低入射角部 Ｂ・・・最高入射角部代理人
弁理士 中 村 純之助
第２図FIG. 1 is a schematic diagram showing a cross-sectional structure of a magnetic tape produced in an example of the present invention, and FIG. 2 is a schematic diagram showing the structure of a vacuum evaporation apparatus used in an example of the present invention. 1... Base body 2... Magnetic layer 3... Co
High-order hydrated oxide layer 4... Inorganic protective film 5... Near interface 6... Vacuum 4q! 7... Vacuum exhaust system 8... Cylindrical can
9... Original fabric rolls 10, 11... Guide roll 12... Take-up roll 13... Evaporation source 14...
G o -N i alloy 15... adhesion prevention plates 16, 17
... Oxygen gas inlet A ... Lowest incident angle section B ... Highest incident angle section Patent attorney Junnosuke Nakamura Figure 2
Claims (1)
属薄膜からなる磁性層を有する磁気記録媒体において、
上記磁性層の表面にコバルトの高次酸化物層もしくは含
水酸化物層を形成させ、上記コバルトの高次酸化物層上
に、ニッケルおよび酸素を主成分とする無機質保護膜を
設け、上記コバルトの高次酸化物層と無機質保護膜との
界面近傍における無機質保護膜中に含まれる酸素の含有
量を、原子％で２０％以上とすることを特徴とする磁気
記録媒体。 ２、無機質保護膜が、ニッケルを主成分とし、酸素を１
５〜５０原子％含有することを特徴とする特許請求の範
囲第１項に記載の磁気記録媒体。 ３、無機質保護膜が、ニッケルと酸素と鉄を含有し、鉄
の含有量が、ニッケルと鉄の合計量に対して、原子比で
０．０５〜０．４の範囲にあることを特徴とする特許請
求の範囲第１項または第２項に記載の磁気記録媒体。[Claims] 1. A magnetic recording medium having a magnetic layer made of cobalt or a ferromagnetic metal thin film containing cobalt as a main component,
A cobalt higher oxide layer or a hydrous oxide layer is formed on the surface of the magnetic layer, and an inorganic protective film containing nickel and oxygen as main components is provided on the cobalt higher oxide layer. A magnetic recording medium characterized in that the content of oxygen contained in the inorganic protective film near the interface between the higher-order oxide layer and the inorganic protective film is 20% or more in atomic percent. 2. The inorganic protective film contains nickel as the main component and oxygen as the main component.
The magnetic recording medium according to claim 1, characterized in that the magnetic recording medium contains 5 to 50 atom %. 3. The inorganic protective film contains nickel, oxygen, and iron, and the iron content is in the range of 0.05 to 0.4 in atomic ratio to the total amount of nickel and iron. A magnetic recording medium according to claim 1 or 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25254287A JPH0196819A (en) | 1987-10-08 | 1987-10-08 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25254287A JPH0196819A (en) | 1987-10-08 | 1987-10-08 | Magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0196819A true JPH0196819A (en) | 1989-04-14 |
Family
ID=17238823
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25254287A Pending JPH0196819A (en) | 1987-10-08 | 1987-10-08 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0196819A (en) |
-
1987
- 1987-10-08 JP JP25254287A patent/JPH0196819A/en active Pending
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