JPH0364929B2 - - Google Patents
Info
- Publication number
- JPH0364929B2 JPH0364929B2 JP58144113A JP14411383A JPH0364929B2 JP H0364929 B2 JPH0364929 B2 JP H0364929B2 JP 58144113 A JP58144113 A JP 58144113A JP 14411383 A JP14411383 A JP 14411383A JP H0364929 B2 JPH0364929 B2 JP H0364929B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- magnetic layer
- tape
- corrosion resistance
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000203 mixture Substances 0.000 claims description 9
- 229910052719 titanium Inorganic materials 0.000 claims description 8
- 229910052726 zirconium Inorganic materials 0.000 claims description 8
- 229910052735 hafnium Inorganic materials 0.000 claims description 6
- 238000007736 thin film deposition technique Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 1
- 238000005260 corrosion Methods 0.000 description 13
- 230000007797 corrosion Effects 0.000 description 13
- 239000010408 film Substances 0.000 description 13
- 229910020630 Co Ni Inorganic materials 0.000 description 9
- 229910002440 Co–Ni Inorganic materials 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- 229910045601 alloy Inorganic materials 0.000 description 8
- 239000000956 alloy Substances 0.000 description 8
- 238000007740 vapor deposition Methods 0.000 description 7
- 238000001816 cooling Methods 0.000 description 5
- 238000010894 electron beam technology Methods 0.000 description 4
- 230000004907 flux Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- -1 Total Hf is 3-6wt% Inorganic materials 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- 238000000151 deposition Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
- G11B5/656—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing Co
Landscapes
- Magnetic Record Carriers (AREA)
Description
【発明の詳細な説明】
〔技術分野〕
本発明は薄膜堆積法によつて磁性層が形成され
る磁気記録媒体、特に耐蝕性の優れた磁気記録媒
体に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to a magnetic recording medium in which a magnetic layer is formed by a thin film deposition method, and particularly to a magnetic recording medium with excellent corrosion resistance.
近年、真空蒸着法、スパツタリング法、メツキ
法等の薄膜堆積法により磁気記録媒体を製造する
研究開発が活性化している。これらの製法によつ
て作られた磁気記録媒体は残留磁束密度が高
い、保磁力を大きくできる、磁性層を薄くで
きる等の、高密度記録化のための条件を非常によ
く満足している。従来、この記録媒体の磁性材料
としては、CoとNiを主成分とする合金が主に用
いられており、なかでもCo−20wt％Ni合金が多
く検討されている。その理由はこの合金が比較的
耐蝕性が良いこと、70wt％以上のCoを含む合金
はh.c.p.構造をもち磁気異方性をコントロールし
やすく面内異方性を卓越させることが容易である
ためといわれる。
In recent years, research and development into manufacturing magnetic recording media using thin film deposition methods such as vacuum evaporation, sputtering, plating, etc. has become active. Magnetic recording media made by these manufacturing methods very well satisfy the conditions for high-density recording, such as high residual magnetic flux density, large coercive force, and thin magnetic layer. Conventionally, alloys containing Co and Ni as main components have been mainly used as magnetic materials for recording media, and among them, a Co-20wt%Ni alloy has been widely studied. The reason for this is that this alloy has relatively good corrosion resistance, and alloys containing 70 wt% or more of Co have an hcp structure, making it easy to control magnetic anisotropy and achieve excellent in-plane anisotropy. be exposed.
しかしながら、この合金はCoを70％以上、通
常は80％前後も含んでいるために極めて高価であ
り、しかもCoは国際情勢の変化により価格が大
きく変動するという問題がある。また耐蝕性も厳
しい環境条件に対しては不十分である。 However, this alloy contains 70% or more Co, usually around 80% Co, and is therefore extremely expensive, and there is a problem in that the price of Co fluctuates greatly due to changes in the international situation. Corrosion resistance is also insufficient for severe environmental conditions.
而して本発明は上記欠点を改善すべくCoの含
有量を少なくし、安価で安定供給が可能な磁気記
録媒体を提供すると朋い、その磁気特性及び耐蝕
性においても優れた性能を有する磁気記録媒体を
提供することを主たる目的とする。
Therefore, in order to improve the above-mentioned drawbacks, the present invention reduces the Co content and provides a magnetic recording medium that is inexpensive and can be stably supplied. The main purpose is to provide recording media.
本発明は堆積法により磁性層が形成される磁気
記録媒体において、磁性層の組成が（Fe1-xCox）
1-(a+b)NiaMb（ＭはTi、ZrおよびHfより選ばれる
少なくとも一種以上の元素）で、組成比が０＜ｘ
0.5、0.005ａ0.25および0.01ｂ0.12であ
ることを特徴とするものであり、電子ビーム蒸着
法、誘導加熱蒸着法、抵抗加熱蒸着法、スパツタ
リング法、イオンプレーテイング法、メツキ法等
を利用して形成できるものである。
The present invention provides a magnetic recording medium in which a magnetic layer is formed by a deposition method, in which the composition of the magnetic layer is (Fe 1-x Co x ).
1-(a+b) Ni a M b (M is at least one element selected from Ti, Zr, and Hf) with a composition ratio of 0<x
It is characterized by being 0.5, 0.005a0.25 and 0.01b0.12, and can be applied using electron beam evaporation method, induction heating evaporation method, resistance heating evaporation method, sputtering method, ion plating method, plating method, etc. It can be formed by
磁性層材料としてCo元素とFe元素の和が60wt
％以上でFeが主成分となるように、Co元素をFe
元素に置換することにより磁気的特性は、従来の
Co−Ni合金と同等以上のものが得られることが
認められた。しかしながらCo元素で置換するこ
とにより耐蝕性が劣化するが、Ti、Zr、Hfより
選ばれる少くとも一種類以上の元素を添加するこ
とにより、磁気特性を損うことなく耐蝕性おいて
も、従来のCo−Ni合金と同等以上の改善を図る
ことができた。 The sum of Co element and Fe element as magnetic layer material is 60wt.
% or more, Fe is the main component.
By substituting elements, the magnetic properties can be improved from the conventional
It was confirmed that a product equivalent to or better than Co-Ni alloy could be obtained. However, the substitution with Co element deteriorates the corrosion resistance, but by adding at least one element selected from Ti, Zr, and Hf, the corrosion resistance can be improved without impairing the magnetic properties. We were able to achieve an improvement equal to or greater than that of the Co-Ni alloy.
本発明の磁気記録媒体について、さらに詳細に
説明する。本発明に用いる磁性層の材料におい
て、Fe元素は原子一個あたりの磁気モーメント
を高め、残留磁束密度Brを増加させると同時に
展延性を増し、磁性層のワレ、ヒビの発生を防止
する。 The magnetic recording medium of the present invention will be explained in more detail. In the material of the magnetic layer used in the present invention, the Fe element increases the magnetic moment per atom, increases the residual magnetic flux density Br, and at the same time increases malleability, thereby preventing the occurrence of cracks and cracks in the magnetic layer.
一方、前記したようにFe元素が増すと耐蝕性
が急激に悪くなると同時に、残留磁束密度Brを
増加させる効果はむしろ低下する。またNiは耐
蝕性の効果および展延性を向上させ、磁性層のワ
レ、ヒビの発生を防止する。またTi、Zr、Hfは、
単独又は二種類又は三種類全部を同時に添加する
ことにより、耐蝕性を向上させると共に磁性層の
耐摩耗性に有効であり、さらに磁性層と、磁性層
の基材であるベースフイルム等との付着強度の増
大にも寄与する。ただし添加量が多すぎると、
Brが減少する等、磁性層の磁気特性を低下させ
る。 On the other hand, as described above, as the Fe element increases, the corrosion resistance deteriorates rapidly, and at the same time, the effect of increasing the residual magnetic flux density Br actually decreases. Ni also improves corrosion resistance and spreadability, and prevents cracks and cracks in the magnetic layer. Also, Ti, Zr, Hf are
By adding alone, two types, or all three types at the same time, it is effective to improve the corrosion resistance and wear resistance of the magnetic layer, and also to improve the adhesion between the magnetic layer and the base film, etc., which is the base material of the magnetic layer. It also contributes to increased strength. However, if the amount added is too large,
This reduces the magnetic properties of the magnetic layer, such as a decrease in Br.
以上の結果として良好な磁性層の組成は、
（Fe1-xCox）1-(a+b)NiaMb（ＭはTi、Zr、HFより選
ばれる少くとも一種類以上の元素）で組成比が０
＜ｘ0.5、0.05ａ0.25、および0.01ｂ
0.12の範囲のものであり、特にTi、Zr、Hfが単
独又は二種又は三種全部の合計で２〜8wt％、Ni
が８〜20wt％、Coが15〜40wt％、残りがFeのも
のが好適である。さらに最適な組成は、Ti、Zr、
Hfの合計で３〜6wt％、Niが10〜16wt％、Coが
20〜30wt％、残りがFeの範囲にある。 As a result of the above, a good magnetic layer composition is
(Fe 1-x Co x ) 1-(a+b) Ni a M b (M is at least one element selected from Ti, Zr, and HF) with a composition ratio of 0
<x0.5, 0.05a0.25, and 0.01b
0.12, especially Ti, Zr, Hf alone or two or all three in total of 2 to 8 wt%, Ni
It is preferable that Co is 8 to 20 wt%, Co is 15 to 40 wt%, and the balance is Fe. Furthermore, the optimal composition is Ti, Zr,
Total Hf is 3-6wt%, Ni is 10-16wt%, Co is
It is in the range of 20-30wt%, with the rest being Fe.
以下実施例により本発明を説明する。第１図は
磁気記録媒体の一つである蒸着テープと製造装置
を示す。真空槽１内にフイルム巻出し軸２、巻取
軸３、中間フリーローラ４、冷却キヤン５、蒸着
材料収納容器７、電子ビーム発生源８が配置され
ている。幅100mm、厚さ15μｍのポリエチレンテ
レフタレートのフイルム９は、フイルム巻出軸２
から中間フリーローラ４および冷却キヤン５を経
て、フイルム巻取り軸３に送られる。蒸着材料６
は蒸着材料収納容器７内に入れられ、冷却キヤン
５と対向して配置され、電子ビーム発生源８から
の電子ビームによつ加熱される。加熱された蒸着
材料は、蒸気流６′となり冷却キヤン５上のフイ
ルム９に付着して磁性層を形成するが、防着板１
１によりフイルム９上に蒸着される蒸気流の入射
角が60°〜90°に制限される。真空槽１内は排気装
置１０により、成膜中の真空度を１×10-4〜５×
10-6Torrに保持した。フイルム送り速度は毎分
10ｍで、形成された磁性層の厚さはほぼ1000Åで
ある。
The present invention will be explained below with reference to Examples. FIG. 1 shows a vapor-deposited tape, which is one of the magnetic recording media, and a manufacturing apparatus. A film unwinding shaft 2, a winding shaft 3, an intermediate free roller 4, a cooling can 5, a vapor deposition material storage container 7, and an electron beam generation source 8 are arranged in a vacuum chamber 1. A polyethylene terephthalate film 9 with a width of 100 mm and a thickness of 15 μm is attached to the film unwinding shaft 2.
The film is then sent to the film winding shaft 3 via an intermediate free roller 4 and a cooling can 5. Vapor deposition material 6
is placed in a vapor deposition material storage container 7, placed opposite the cooling can 5, and heated by an electron beam from an electron beam generation source 8. The heated vapor deposition material forms a vapor flow 6' and adheres to the film 9 on the cooling can 5 to form a magnetic layer.
1 limits the angle of incidence of the vapor flow deposited onto the film 9 to between 60° and 90°. Inside the vacuum chamber 1, an exhaust device 10 is used to maintain the degree of vacuum during film formation from 1×10 -4 to 5×.
It was held at 10 -6 Torr. Film feed speed is per minute
10 m, the thickness of the formed magnetic layer is approximately 1000 Å.
第２図に上記の方法で作製した蒸着テープの磁
性層の組成と耐蝕性試験の結果を示す。耐蝕性試
験は、上記実施例に従つて作製されたテープを、
60℃湿度90％の恒温恒湿槽の中に1000時間放置し
た後、テープの残留磁束密度Brの変化を測定し
た。第２図において、◎はBrの低下が３％未満、
○は３〜５％、△は５〜10％、×は10％以上を示
す。 FIG. 2 shows the composition of the magnetic layer of the vapor-deposited tape produced by the above method and the results of the corrosion resistance test. Corrosion resistance test was carried out using the tape prepared according to the above example.
After leaving the tape in a constant temperature and humidity chamber at 60°C and 90% humidity for 1000 hours, changes in the residual magnetic flux density Br of the tape were measured. In Figure 2, ◎ means the decrease in Br is less than 3%.
○ indicates 3 to 5%, △ indicates 5 to 10%, and × indicates 10% or more.
第３図に、家庭用VTRデツキを用い記録再生
した時の再生出力を示す。本発明のテープNo.４の
再生出力は曲線２０で、比較のため同一条件で作
製したCo−Niテープの再生出力が曲線２１で示
されている。本発明のテープの再生出力は従来の
Co−Niテープに比べ同等ないし2dB高い。他の
テープについてもCo−Niテープ以上の再生出力
が得られた。 Figure 3 shows the playback output when recording and playing back using a home VTR deck. Curve 20 shows the playback output of tape No. 4 of the present invention, and curve 21 shows the playback output of a Co-Ni tape produced under the same conditions for comparison. The playback output of the tape of the present invention is different from that of the conventional tape.
The same or 2 dB higher than Co-Ni tape. For the other tapes as well, playback outputs greater than those for the Co-Ni tape were obtained.
以上述べたように、本発明の磁気記録媒体は
Feを主成分とするために、従来のCoが主成分と
Co−Ni合金系記録媒体な比べ、非常に安価にな
るばかりでなく、Ti、Zr、Hf元素を添加すうる
ことにより、Feが主成分の媒体の欠点である耐
蝕性の悪さを大幅に改善し、Co−Ni系合金と同
等あるいはそれ以上の再生出力、耐蝕性を有する
ものである。 As described above, the magnetic recording medium of the present invention
Since Fe is the main component, conventional Co is the main component.
Not only is it much cheaper than Co-Ni alloy recording media, but by adding Ti, Zr, and Hf elements, the poor corrosion resistance, which is a drawback of Fe-based media, is greatly improved. However, it has reproduction output and corrosion resistance equivalent to or higher than Co-Ni alloys.
第１図は本実施例で用いた蒸着テープの製造装
置の説明図である。第２図は、磁性層の組成と耐
蝕性試験の結果を示す表である。第３図は、第２
図のNo.４のテープと、Co−Niテープの名周波数
における再生出力の比較を示すグラフである。
１：真空槽、２：フイルム巻出し軸、３：フイ
ルム巻取り軸、４：中間フリーローラ、５：冷却
キヤン、６：蒸着材料、７：蒸着材料収納容器、
８：電子ビーム発生源、９：ポリエチレンテレフ
タレートフイルム、１０：排気装置、１１：防着
板、２０：本発明実施例の再生出力曲線、２１：
Co−Niテープの再生出力曲線。
FIG. 1 is an explanatory diagram of a vapor deposition tape manufacturing apparatus used in this example. FIG. 2 is a table showing the composition of the magnetic layer and the results of the corrosion resistance test. Figure 3 shows the second
It is a graph showing a comparison of the playback outputs of the No. 4 tape in the figure and the Co-Ni tape at a given frequency. 1: Vacuum chamber, 2: Film unwinding shaft, 3: Film winding shaft, 4: Intermediate free roller, 5: Cooling can, 6: Vapor deposition material, 7: Vapor deposition material storage container,
8: Electron beam source, 9: Polyethylene terephthalate film, 10: Exhaust device, 11: Deposition prevention plate, 20: Reproduction output curve of the embodiment of the present invention, 21:
Co−Ni tape playback output curve.
Claims (1)
た磁性層を有する磁気記録媒体において、前記磁
性層の組成が （Fe1-xCox）1-(a+b)NiaMb （ＭはTi、ZrおよびHfより選ばれる少なくとも
一種以上の元素）で、組成比が０＜ｘ0.5、
0.05ａ0.25および0.01ｂ0.12であること
を特徴とする磁気記録媒体。[Claims] 1. A magnetic recording medium having a magnetic layer formed by a thin film deposition method on a non-magnetic substrate, wherein the magnetic layer has a composition of (Fe 1-x C x ) 1-(a+b) Ni a M b (M is at least one element selected from Ti, Zr and Hf) with a composition ratio of 0<x0.5,
1. A magnetic recording medium characterized in that they are 0.05a0.25 and 0.01b0.12.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58144113A JPS6035326A (en) | 1983-08-06 | 1983-08-06 | Magnetic recording medium |
| US06/635,234 US4567116A (en) | 1983-08-06 | 1984-07-27 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58144113A JPS6035326A (en) | 1983-08-06 | 1983-08-06 | Magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6035326A JPS6035326A (en) | 1985-02-23 |
| JPH0364929B2 true JPH0364929B2 (en) | 1991-10-09 |
Family
ID=15354484
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58144113A Granted JPS6035326A (en) | 1983-08-06 | 1983-08-06 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6035326A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0816975B2 (en) * | 1987-03-23 | 1996-02-21 | 株式会社日立製作所 | Magnetic recording media |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5629A (en) * | 1979-06-15 | 1981-01-06 | Ulvac Corp | Vacuum-evaporated film type magnetic recording substance and its manufacture |
| JPS567231A (en) * | 1979-06-27 | 1981-01-24 | Ulvac Corp | Vapor deposition film type magnetic recording material and its production |
-
1983
- 1983-08-06 JP JP58144113A patent/JPS6035326A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5629A (en) * | 1979-06-15 | 1981-01-06 | Ulvac Corp | Vacuum-evaporated film type magnetic recording substance and its manufacture |
| JPS567231A (en) * | 1979-06-27 | 1981-01-24 | Ulvac Corp | Vapor deposition film type magnetic recording material and its production |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6035326A (en) | 1985-02-23 |
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