JPH0153572B2 - - Google Patents
Info
- Publication number
- JPH0153572B2 JPH0153572B2 JP58192514A JP19251483A JPH0153572B2 JP H0153572 B2 JPH0153572 B2 JP H0153572B2 JP 58192514 A JP58192514 A JP 58192514A JP 19251483 A JP19251483 A JP 19251483A JP H0153572 B2 JPH0153572 B2 JP H0153572B2
- Authority
- JP
- Japan
- Prior art keywords
- liquid level
- liquid
- returnable
- chemical
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 114
- 239000000126 substance Substances 0.000 claims description 53
- 238000012544 monitoring process Methods 0.000 claims description 37
- 238000000034 method Methods 0.000 claims description 27
- 238000012806 monitoring device Methods 0.000 claims description 8
- 238000012993 chemical processing Methods 0.000 claims description 4
- 239000000243 solution Substances 0.000 description 23
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 22
- 239000007789 gas Substances 0.000 description 14
- 238000004519 manufacturing process Methods 0.000 description 12
- 229910052757 nitrogen Inorganic materials 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 10
- 229940079593 drug Drugs 0.000 description 8
- 239000003814 drug Substances 0.000 description 8
- 239000011521 glass Substances 0.000 description 5
- 238000003860 storage Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- -1 polypropylene Polymers 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 239000004743 Polypropylene Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 241000102542 Kara Species 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 230000009021 linear effect Effects 0.000 description 1
- 239000008155 medical solution Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J4/00—Feed or outlet devices; Feed or outlet control devices
- B01J4/008—Feed or outlet control devices
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Weting (AREA)
Description
【発明の詳細な説明】
本発明は、半導体等電子材料や精密機器部品等
の薬液処理工程に用いられる各種薬液の供給方法
並びに供給看視装置に関し、詳細には前記各種薬
液の充填された密閉型通い缶から、薬液処理工程
に薬液を供給するに際し、前記通い缶と接続して
前記薬液の量を検知しつつ、安定に供給する方法
及び、供給看視装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for supplying various chemical solutions and a supply monitoring device used in chemical treatment processes for electronic materials such as semiconductors, precision equipment parts, etc. The present invention relates to a method for stably supplying a chemical solution to a chemical processing process from a returnable can while detecting the amount of the drug solution connected to the returnable can, and a supply monitoring device.
集積回路、トランジスターなどの微細加工技術
の進歩はめざましいものであり、その製造に使用
される各種薬液の品質管理に対する要求は、とみ
に厳しくなつてきている。特に製品歩どまりに直
線影響する微細粒子異物の混入は禁忌であり、そ
のため該液は通常精密過され、清浄な環境（ク
リーンルーム内）下で清浄な容器に充填されて製
品となる。一般には、その容器としてガラス製の
約１〜８のびんが用いられている。ところが
各種薬液のガラスびんへの充填はクリーンルーム
内ではあるが、開放下で行なわれるため、外気に
おけるほどではないにしてもゴミ、異物等の混入
の可能性は避けがたい。しかも、流通段階におい
て、ガラスびんであるが故に破損事故を生じる欠
点があり、また容器そのものは使い捨てであるた
めその処置が問題である。さらに使用者側におい
て、ガラスびん容器を開封し、集積回路等の製造
ラインの装置の容器へ移しかえる手間を必要とし
その際、せつかく精密過して清浄にした内容物
にゴミや異物を混入させたり、甚だしい場合は、
こぼしたり、あふれさせたりするという問題も生
ずる。そこで本発明者は、使用の毎に内容物を移
しかえるための開封をすることなく前記薬液処理
工程の配管に接続して簡便に使用でき、かつ上記
欠点の解消された各種薬液用の通い缶としての収
納容器を開発し、別途特許出願した（特願昭57−
130876号（特開昭59−21021号）。 Advances in microfabrication technology for integrated circuits, transistors, etc. are remarkable, and requirements for quality control of the various chemicals used in their manufacture are becoming increasingly strict. Particularly, the contamination of fine particulate foreign matter, which has a linear effect on the product yield, is contraindicated, so the liquid is usually subjected to precision filtration and filled into a clean container in a clean environment (inside a clean room) to become a product. Generally, about 1 to 8 glass bottles are used as the container. However, since the filling of various chemical solutions into glass bottles is carried out in an open environment, although in a clean room, it is difficult to avoid the possibility of contamination with dust, foreign matter, etc., even if it is not as high as in the outside air. Moreover, at the distribution stage, the glass bottle has the drawback of being easily damaged, and since the container itself is disposable, there is a problem in how to deal with it. Furthermore, the user must take the time to open the glass bottle and transfer it to the container of the equipment on the manufacturing line for integrated circuits, etc. At that time, dust and foreign matter may get mixed in with the contents, which have been carefully cleaned through precision filtering. or in extreme cases,
Problems of spillage and overflow also occur. Therefore, the present inventor has developed a returnable can for various chemical solutions that can be easily used by connecting to the piping of the chemical treatment process without having to open the package to transfer the contents each time it is used, and that eliminates the above-mentioned drawbacks. Developed a storage container for storage and filed a separate patent application (patent application 1982
No. 130876 (Unexamined Japanese Patent Publication No. 59-21021).
この場合、前記通い缶は新たに、該用途に用い
られるようになつた為に、従来のガラスびんに比
較して薬液を多量に収容し得るが、該通い缶の材
質によつては液量の監視ができず、かつ多量であ
るが故に、その減少を常時監視し交換することが
困難であり、若し薬液が無くなつたことを知らず
薬液処理装置を稼動させれば、未処理の不良品を
製造するおそれがある。 In this case, since the returnable can is newly used for this purpose, it can contain a larger amount of drug solution than conventional glass bottles, but depending on the material of the returnable can, the amount of liquid may vary. It is difficult to constantly monitor the decrease in chemical liquid and replace it because it is in large quantities. There is a risk of manufacturing non-defective products.
本発明は、上記の欠点を解決し、前記薬液を外
気に触れることなく、清浄状態を維持したまま、
前記薬液量を検知しつつ供給し、適量の残液にな
つた時点で警報を発し、かつ空となつた前記通い
缶を交換する間も、薬液処理装置を停止させるこ
となく、連続して該薬液を供給可能とする方法及
び装置を提供するものである。 The present invention solves the above-mentioned drawbacks and allows the chemical solution to be kept in a clean state without being exposed to the outside air.
The amount of the chemical liquid is detected and supplied, an alarm is issued when the appropriate amount of liquid remains, and even while the empty returnable can is being replaced, the chemical liquid processing equipment is continuously supplied without stopping the chemical liquid processing equipment. The present invention provides a method and an apparatus that enable supply of a chemical solution.
本発明方法の要旨は、密閉型薬液通い缶から液
面加圧方式により薬液を薬液処理工程に送液する
に際し、密閉型の液面看視槽を通して前記工程に
送液し、該液面看視槽内液面が所定位置に降下し
たとき、警報を発すると共に前記通い缶と液面看
視槽間の管路を遮断し、通い缶を交換し薬液の看
視槽内への充填が開始されるまでの間、液面看視
槽に液面加圧用気体を導入し薬液の供給を維持す
る密閉型通い缶からの薬液の供給方法に在る。 The gist of the method of the present invention is that when a chemical solution is sent to the chemical processing process from a closed-type chemical liquid-containing can by a liquid level pressurization method, the liquid is sent to the process through a closed-type liquid level monitoring tank, and the liquid level is monitored. When the liquid level in the monitoring tank falls to a predetermined position, an alarm is issued, the pipe line between the returnable can and the liquid level monitoring tank is shut off, the returnable can is replaced, and the filling of the chemical solution into the monitoring tank begins. There is a method for supplying chemical liquid from a closed type returnable can, which maintains the supply of chemical liquid by introducing gas for pressurizing the liquid level into the liquid level monitoring tank until the liquid level is released.
即ち、密閉型通い缶と薬液処理工程間に液面看
視槽を介在させ、この槽を通して送液し、通い缶
が空になつて後、この槽の液面が降下し所定位置
となつたとき、通い缶を交換すべきことを警報す
ると共に、通い缶が交換できるように通い缶と看
視槽間の管路を遮断し、かつ通い缶交換中も看視
槽に液面加圧用気体を導入して液面看視槽内の液
面を加圧して工程への薬液の供給を継続すること
を可能とし、かつ交換した通い缶からの薬液が新
たに液面看視槽へ移送されている間も薬液の供給
を可能としたもので、通い缶の液面加圧用気体供
給源と組合せることにより、液面看視槽に警報用
容器及び缶交換時のクツシヨンタンクとしての機
能を保有せしめたものである。 That is, a liquid level monitoring tank is interposed between the closed returnable can and the chemical treatment process, the liquid is sent through this tank, and after the returnable can is emptied, the liquid level in this tank drops to a predetermined position. When the returnable can is replaced, a warning is issued to indicate that the returnable can should be replaced, and the pipe line between the returnable can and the monitoring tank is shut off so that the returnable can can be replaced. Introducing a tank to pressurize the liquid level in the liquid level monitoring tank, making it possible to continue supplying chemical liquid to the process, and to transfer chemical liquid from the replaced returnable can to a new liquid level monitoring tank. By combining it with a gas supply source for pressurizing the liquid level in a returnable can, the liquid level monitoring tank can function as an alarm container and a cushion tank when replacing the can. It was made to possess.
次に、本発明方法を具体化した密閉型通い缶か
らの薬液供給看視装置を、半導体製造の場合を例
にとつて説明する。 Next, a device for monitoring the supply of chemical liquid from a closed returnable can, which embodies the method of the present invention, will be described using semiconductor manufacturing as an example.
第１図は薬液２０の収納されている通い缶であ
るキヤニスター１０の斜視図で、第２図は同断面
図を示し、キヤニスター１０は、液収納容器本体
１３とフランジ１４とからなり、該フランジ１４
には液輸送管用カプラー１１及び気体流通用雄カ
プラー１２が具備され、該カプラー１１，１２
は、第３図または第４図に示す方法により、キラ
ツプ３０で保護されている。 FIG. 1 is a perspective view of a canister 10, which is a returnable can in which a chemical solution 20 is stored, and FIG. 2 is a cross-sectional view of the same. 14
is equipped with a liquid transport pipe coupler 11 and a gas flow male coupler 12, and the couplers 11, 12
is protected by a killp 30 by the method shown in FIG. 3 or 4.
第５図は、前記通い缶を半導体製造装置１に接
続して使用している従来技術を説明するものであ
る。即ち、清浄窒素をカプラー１７，１２よりキ
ヤニスター１０に供給し、その圧力で薬液２０を
カプラー１６，１１より前記装置１に供給し使用
するものである。 FIG. 5 illustrates a conventional technique in which the returnable can is connected to the semiconductor manufacturing apparatus 1. That is, clean nitrogen is supplied to the canister 10 through the couplers 17 and 12, and at that pressure the chemical solution 20 is supplied to the device 1 through the couplers 16 and 11 for use.
元来、半導体製造装置に、例えば積算流量計等
の液使用状況を検知し得る機能があれば、この状
態でも使用し得るものであるが、しかし使用中の
通い缶内の液を使い尽し、新たな通い缶に切換え
る装置が極めて複雑となる。 Originally, if semiconductor manufacturing equipment had a function that could detect the liquid usage status, such as an integrated flow meter, it could be used in this state, but if the liquid in the returnable can used up is used up. , the equipment for switching to a new returnable can becomes extremely complicated.
第６図は、本発明に係る薬液供給看視装置１０
０を示し、本装置は薬液２０の所定量を収容する
液面看視槽５０、液面位置を検出する液面計８
０、薬液の特定期間中の供給力となる加圧気体の
導入管の接続口７０、槽内加圧気体（窒素）の排
気管の接続口９０、窒素ガス及び薬液の回路の開
閉を行なう電磁弁６１，６２，６３，６４、該装
置と通い缶であるキヤニスター１０との接続用雌
カプラー１７，１６、半導体製造装置１への工程
薬液送液管の接続口７３、窒素ガスと薬液の流通
回路である配管、及び前記各電磁弁６１，６２，
６３，６４、前記液面計の作動電力の供給回路、
操作盤（図示せず）の操作スイツチ及び表示用電
力の供給回路より構成されている。 FIG. 6 shows a drug solution supply monitoring device 10 according to the present invention.
0, and this device includes a liquid level monitoring tank 50 that accommodates a predetermined amount of the chemical solution 20, and a liquid level gauge 8 that detects the liquid level position.
0. Connection port 70 for the inlet pipe for the pressurized gas that supplies the chemical solution during a specific period, connection port 90 for the exhaust pipe for the pressurized gas (nitrogen) in the tank, and the electromagnetic port that opens and closes the circuits for nitrogen gas and the chemical solution. Valves 61, 62, 63, 64, female couplers 17, 16 for connecting the device to the canister 10, which is a returnable can, connection port 73 for the process chemical liquid feed pipe to the semiconductor manufacturing equipment 1, distribution of nitrogen gas and chemical liquid. Piping that is a circuit, and each of the solenoid valves 61, 62,
63, 64, a supply circuit for operating power of the liquid level gauge;
It consists of operation switches on an operation panel (not shown) and a display power supply circuit.
本装置の使用原理は、窒素圧力によりキヤニス
ター１０中の液を該装置の液面看視槽５０に送
り、前記液面計８０にて液面を検知しつつ所定液
量を保ち、該液面看視槽５０より前記装置１に該
薬液を送液するものであり、該薬液の使用に伴い
液量が減少し前記キヤニスター１０が空になり、
前記液面看視槽５０の液面が所定薬液以下になる
と前記液面計８０にて、それを検知し、警報を発
するものであり、使用者はその警報によりキヤニ
スター１０の液量が空となつていることを知り、
薬液の充填された別のキヤニスター１０と交換す
るのである。同時に本装置の特徴として、キヤニ
スターを交換している最中においても、看視槽中
の残液分により前記半導体製造装置１を稼動し得
るものである。第６図〜第９図につき詳細にその
使用状態を説明する。図中太線で示される配置は
回路が形成されていることを示す。 The principle of use of this device is that the liquid in the canister 10 is sent to the liquid level monitoring tank 50 of the device using nitrogen pressure, and the liquid level is maintained at a predetermined level while the liquid level is detected by the liquid level gauge 80. The chemical liquid is sent from the monitoring tank 50 to the device 1, and as the chemical liquid is used, the liquid amount decreases and the canister 10 becomes empty.
When the liquid level in the liquid level monitoring tank 50 falls below a predetermined chemical solution, the liquid level gauge 80 detects this and issues an alarm. I know that I am getting used to it,
The canister 10 is replaced with another canister 10 filled with a chemical solution. At the same time, a feature of this apparatus is that even while the canister is being replaced, the semiconductor manufacturing apparatus 1 can be operated using the remaining liquid in the monitoring tank. The state of use will be explained in detail with reference to FIGS. 6 to 9. The arrangement indicated by the thick line in the figure indicates that a circuit is formed.
キヤニスター１０の雄カプラー１２，１１と前
記装置１００の雌カプラー１７，１６を接続す
る。0.5〜1.0Kg／cm2Ｇに調整された浄化窒素を接
続口７０に供給する。所定の電力を供給する。
（第６図）
操作盤中のスタートスイツチ（図示せず）を押
し、操作を開始する。第７図に示す如く液面看視
槽５０中の液量が所定量以下であることを液面計
８０が感知し、電磁弁６１が開きキヤニスター１
０を加圧する。同時に電磁弁６４が開いて、該薬
液の回路をつくり、槽内加圧気体排気管の電磁弁
６３が開いて窒素逃がし口をつくり、自動的に窒
素圧にて薬液が液面看視槽５０に送液される。
（この状態を充填中と称す。）
第８図に示すように液面看視槽５０の液面が所
定位置に達すると液面計８０が検知し、電磁弁６
３が閉じて槽内加圧気体排気管の接続口９０が閉
じ、液面は看視槽５０中で窒素押込み圧と平衡に
なるまで上昇して、液の流入が停止する。該キヤ
ニスター中に液が存在する限り、この状態が定常
状態となり前記半導体製造装置１での薬液の使用
を開始する。（使用中と称す）。 The male couplers 12 and 11 of the canister 10 and the female couplers 17 and 16 of the device 100 are connected. Purified nitrogen adjusted to 0.5 to 1.0 Kg/cm 2 G is supplied to the connection port 70. Supply a predetermined amount of power.
(Fig. 6) Press the start switch (not shown) on the operation panel to start operation. As shown in FIG. 7, when the liquid level gauge 80 senses that the liquid level in the liquid level monitoring tank 50 is below a predetermined level, the solenoid valve 61 opens and the canister 1
Pressure 0. At the same time, the solenoid valve 64 opens to create a circuit for the chemical solution, and the solenoid valve 63 of the tank pressurized gas exhaust pipe opens to create a nitrogen escape port, automatically discharging the chemical solution into the liquid level monitoring tank 50 under nitrogen pressure. The liquid is sent to
(This state is called filling.) As shown in FIG. 8, when the liquid level in the liquid level monitoring tank 50 reaches a predetermined position, the liquid level gauge 80 detects it and
3 is closed, the connection port 90 of the pressurized gas exhaust pipe inside the tank is closed, and the liquid level rises in the monitoring tank 50 until it reaches equilibrium with the nitrogen pushing pressure, and the inflow of liquid stops. As long as the liquid exists in the canister, this state becomes a steady state and the use of the chemical liquid in the semiconductor manufacturing apparatus 1 is started. (referred to as in use).
使用に伴い、キヤニスター１０の液は液面看視
槽５０へ流入を続け、やがてキヤニスター１０は
空となり、液面看視槽５０の液面は低下しはじ
め、所定のレベル以下になると液面計８０が作動
して警報を発し、操作盤上に表示する。（からと
称す）。 With use, the liquid in the canister 10 continues to flow into the liquid level monitoring tank 50, and the canister 10 eventually becomes empty, and the liquid level in the liquid level monitoring tank 50 begins to drop, and when it falls below a predetermined level, the liquid level gauge 80 is activated to issue an alarm and display it on the operation panel. (referred to as Kara).
同時に第９図に示すように電磁弁６１，６４が
閉じてキヤニスター１０との回路を切り離し、電
磁弁６２が開いて液面看視槽５０に窒素圧がかか
り、残液を使用可能状態とする。処理工程への薬
液送液管の下端は看視槽の槽底に開口しているの
で、残液のある限り、この状態でも使用できる。 At the same time, as shown in FIG. 9, the solenoid valves 61 and 64 close to disconnect the circuit from the canister 10, and the solenoid valve 62 opens to apply nitrogen pressure to the liquid level monitoring tank 50, making the remaining liquid usable. . Since the lower end of the chemical liquid feed pipe to the treatment process opens at the bottom of the monitoring tank, it can be used in this state as long as there is residual liquid.
警報に従い、残液が未だ存在する間に、作業者
は充填されているキヤニスターと交換する。 Following the alarm, the operator replaces the canister with a filled canister while residual liquid is still present.
ついで、操作盤のリセツトボタン（図示せず）
を押すと、前述の「充填中」の状態となり、キヤ
ニスター１０からの送液が開始される。この場
合、液面看視槽５０の電磁弁６３が開き、槽内加
圧気体（窒素）排気管の接続口９０が開となり、
液面看視槽５０内の圧力が低下するが、槽内加圧
気体排気管の接続口９０の流出量をオリフイス等
を用いて、キヤニスターからの押し込み量より少
なくなるようにし、液面看視槽５０の圧力が大気
圧や配管抵抗、ヘツド差に対し、陽圧になるよう
に調整しているため、この状態でも継続して、前
記半導体製造装置１での使用を可能ならしめるも
のである。 Next, press the reset button (not shown) on the control panel.
When you press , the system enters the "filling" state described above, and liquid feeding from the canister 10 is started. In this case, the solenoid valve 63 of the liquid level monitoring tank 50 is opened, and the connection port 90 of the pressurized gas (nitrogen) exhaust pipe in the tank is opened.
Although the pressure inside the liquid level monitoring tank 50 decreases, the amount of flow out from the connection port 90 of the pressurized gas exhaust pipe inside the tank is made smaller than the amount pushed in from the canister using an orifice, etc., and the liquid level monitoring is continued. Since the pressure in the tank 50 is adjusted to be a positive pressure with respect to atmospheric pressure, piping resistance, and head difference, it is possible to continue using it in the semiconductor manufacturing apparatus 1 even in this state. .
上述の如く、本発明は液面看視槽５０中の圧力
を上手に制御することにより、単に液量の警報を
発するのみならず、キヤニスター１０の交換時に
おいても連続して使用可能ならしめるという利点
を有する薬液の供給方法及び供給看視装置を提示
するものである。 As described above, by skillfully controlling the pressure in the liquid level monitoring tank 50, the present invention not only issues a liquid level alarm, but also enables continuous use even when the canister 10 is replaced. An advantageous method of supplying a drug solution and a supply monitoring device are presented.
本装置の原理に基ずけば、例えば液面計８０と
しては、静電容量型液面計やフロート式液面計、
あるいは光電管式液面計等用途に応じ使い別け得
る。また操作電力の代りに空気圧作動方式を採用
することも可能であり、そのいずれを採ろうとも
何ら本発明を制約するものではない。 Based on the principle of this device, for example, the liquid level gauge 80 can be a capacitance type liquid level gauge, a float type liquid level gauge,
Alternatively, it can be used depending on the purpose, such as a phototube type liquid level gauge. Furthermore, it is also possible to adopt a pneumatic actuation system instead of operating electric power, and the present invention is not restricted in any way no matter which one is adopted.
また本発明の原理によれば、液面看視槽５０中
の上昇液面は、看視槽内の圧力により平衡に達
し、液面計は検知信号を出すものであるから、所
定レベルを検知する液面計１基で充分その機能を
果たすものであるが、低レベル及び高レベルの２
点を検知するよう、１基または２基を使用するこ
とも可能である。 Further, according to the principle of the present invention, the rising liquid level in the liquid level monitoring tank 50 reaches equilibrium due to the pressure in the monitoring tank, and the liquid level gauge outputs a detection signal, so that it can detect a predetermined level. One liquid level gauge is enough to perform its function, but two liquid level gauges, one for low level and one for high level, are sufficient to perform the function.
It is also possible to use one or two to detect points.
その他、種々の別法が考えられ得るが、要は、
通い缶であるキヤニスターを薬液供給看視装置を
介して半導体製造装置に接続して使用し、薬液の
存在の有無、キヤニスターの交換のタイミングを
警報し、キヤニスターの交換の間も半導体製造装
置に連続的に薬液を供給することを可能とするも
のであり、液レベルの検知方法は何ら本発明を制
限するものではない。 Various other methods can be considered, but the main point is:
A canister, which is a returnable canister, is connected to semiconductor manufacturing equipment via a chemical liquid supply monitoring device, and is used to alert the presence or absence of chemical liquid and the timing of replacing the canister. The method of detecting the liquid level does not limit the present invention in any way.
なお、薬液又は気体中の異物を除去するため
に、薬液又は気体の導通する管の所望の位置にフ
イルター等を設けることも可能である。 In addition, in order to remove foreign substances in the chemical liquid or gas, it is also possible to provide a filter or the like at a desired position of the pipe through which the chemical liquid or gas flows.
尚、本発明の用途に用いられる材質としては、
腐触によるサビ等の異物を発生せず、かつ薬剤に
侵されて該薬剤中に溶出又は分散して汚染するよ
うなものであつてはならず、その選択は、目的と
する薬剤により常法に従つて試験を行なつて、使
用可能であることを確認されねばならない。一般
的に例示すれば、SUS304、SUS316、テフロン、
ポリプロピレン、ポリエチレン、ポリ塩化ビニ
ル、あるいはSUS304、SUS316にテフロンライ
ニングしたもの、繊維補強されたポリプロピレン
のプラスチツクといつたものが挙げられるが、前
述の如く、該薬剤の性状に応じて使い分ければよ
く、材質が何ら本発明を規制するものでないこと
は、自明である。 In addition, the materials used for the purpose of the present invention include:
It must not generate foreign substances such as rust due to corrosion, and it must not be contaminated by the drug by being eluted or dispersed into the drug, and the selection is based on the usual method depending on the target drug. Tests must be carried out in accordance with the following to confirm that the product is usable. Common examples include SUS304, SUS316, Teflon,
Examples include polypropylene, polyethylene, polyvinyl chloride, SUS304, SUS316 with Teflon lining, and fiber-reinforced polypropylene plastics, but as mentioned above, they can be used depending on the properties of the drug. It is obvious that the material does not limit the present invention in any way.
第１０図は、本発明の思想に基づく装置の例で
あり、キヤニスター１０を、本発明装置１００を
取付けた架台２００の下に収納できるようにした
ものであり、使用床面積の減少によるコンパクト
化と接続の容易さを与える例である。キヤニスタ
ー１０を架台下の収納部からカート５に載置され
たまま引き出し、カプラー接続後、カートにより
再び押し込むという使用上の利点を付与したもの
である。 FIG. 10 shows an example of a device based on the idea of the present invention, in which a canister 10 can be stored under a pedestal 200 to which the device 100 of the present invention is attached, and is made more compact by reducing the floor space used. This is an example that gives ease of connection. This provides an advantage in use that the canister 10 can be pulled out from the storage section under the pedestal while being placed on the cart 5, and after the coupler is connected, it can be pushed back into the cart.
第１図は密閉型通い缶の斜視図で、第２図は同
縦断面図で、第３図及び第４図は通い缶フランジ
部詳細図、第５図は通い缶の薬液処理装置への従
来の接続方法を示す説明図で、第６図は本発明に
係る薬液供給看視装置と通い缶の連結状態を示す
縦断面図で、第７図ないし第９図は薬液供給看視
装置の使用原理を示す説明図で、第１０図は本発
明装置の一実施例を示す図面である。
１……半導体製造装置、５……搬送カート、１
０……キヤニスター、１１……液輸送用雄カプラ
ー、１２……気体流通用雄カプラー、１３……液
収納通い缶本体、１４……フランジ、１６……液
ラインの雌カプラー、１７……窒素ラインの雌カ
プラー、２０……薬液、３０……キヤツプ、５０
……液面看視槽、６１〜６４……電磁弁、７０…
…加圧気体導入管の接続口、８０……液面計、９
０……槽内加圧気体排気管の接続口、１００……
薬液供給看視装置。
Figure 1 is a perspective view of a closed type returnable can, Figure 2 is a longitudinal sectional view of the same, Figures 3 and 4 are detailed views of the flange portion of the returnable can, and Figure 5 is a view of how the returnable can is attached to the chemical processing equipment. FIG. 6 is a longitudinal cross-sectional view showing the state of connection between the chemical solution supply monitoring device and the returnable can according to the present invention, and FIGS. 7 to 9 are explanatory diagrams showing the conventional connection method. This is an explanatory diagram showing the principle of use, and FIG. 10 is a drawing showing an embodiment of the device of the present invention. 1... Semiconductor manufacturing equipment, 5... Transport cart, 1
0...Canister, 11...Male coupler for liquid transport, 12...Male coupler for gas distribution, 13...Liquid storage returnable can body, 14...Flange, 16...Female coupler for liquid line, 17...Nitrogen Line female coupler, 20...Medical solution, 30...Cap, 50
...Liquid level monitoring tank, 61-64...Solenoid valve, 70...
... Connection port for pressurized gas introduction pipe, 80 ... Liquid level gauge, 9
0...Connection port for the pressurized gas exhaust pipe inside the tank, 100...
Chemical solution supply monitoring device.
Claims (1)
液を薬液処理工程に送液するに際し、密閉型の液
面看視槽を通して前記工程に送液し、該液面看視
槽内の液面が所定位置に降下したとき、警報を発
すると共に前記通い缶と液面看視槽間の管路を遮
断し、前記通い缶を交換し、薬液の液面看視槽へ
の充填が開始されるまでの間、前記液面看視槽に
液面加圧用気体を導入し薬液の供給を継続せしめ
ることを特徴とする密閉型通い缶からの薬液の供
給方法。 ２ 密閉型通い缶に接続した受液管、薬液処理工
程に接続した送液管、加圧気体導入管及び槽内加
圧気体排気管を、それぞれバルブを介して液面計
を設けた密閉型薬液液面看視槽に接続せしめ、前
記各バルブ及び前記密閉型通い缶の加圧気体流入
管のバルブと前記液面計を連絡制御するバルブ開
閉制御機構を設けたことを特徴とする密閉型通い
缶からの薬液供給看視装置。[Scope of Claims] 1. When a chemical solution is sent to a chemical processing process from a closed-type chemical liquid-containing can by a liquid level pressurization method, the liquid is sent to the process through a closed-type liquid level monitoring tank, and the liquid level is monitored. When the liquid level in the liquid level monitoring tank drops to a predetermined position, an alarm is issued, the pipe line between the returnable can and the liquid level monitoring tank is cut off, the returnable can is replaced, and the chemical solution is transferred to the liquid level monitoring tank. A method for supplying a chemical solution from a closed type returnable can, characterized in that the supply of the chemical solution is continued by introducing gas for pressurizing the liquid level into the liquid level monitoring tank until filling of the container is started. 2 Closed type liquid receiving pipe connected to a closed type returnable tank, liquid sending pipe connected to the chemical treatment process, pressurized gas introduction pipe, and pressurized gas exhaust pipe in the tank, each with a liquid level gauge installed through a valve. A closed type, characterized in that a valve opening/closing control mechanism is provided, which is connected to a chemical liquid level monitoring tank and communicates and controls each of the valves, the valve of the pressurized gas inflow pipe of the closed type returnable can, and the liquid level gauge. Monitoring device for supplying chemical solutions from returnable cans.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19251483A JPS6084136A (en) | 1983-10-17 | 1983-10-17 | Supply method and supply monitoring apparatus of chemical liquid from hermetically closed goods-delivery can |
| US06/660,412 US4676404A (en) | 1983-10-17 | 1984-10-12 | Method and apparatus for feeding drug liquid from hermetic returnable can |
| DE8484402079T DE3465970D1 (en) | 1983-10-17 | 1984-10-16 | Method and apparatus for feeding drug liquid from hermetic returnable can |
| EP19840402079 EP0138718B1 (en) | 1983-10-17 | 1984-10-16 | Method and apparatus for feeding drug liquid from hermetic returnable can |
| KR1019840006391A KR930000225B1 (en) | 1983-10-17 | 1984-10-16 | Suppling apparatus and there method of chemical liquor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19251483A JPS6084136A (en) | 1983-10-17 | 1983-10-17 | Supply method and supply monitoring apparatus of chemical liquid from hermetically closed goods-delivery can |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6084136A JPS6084136A (en) | 1985-05-13 |
| JPH0153572B2 true JPH0153572B2 (en) | 1989-11-14 |
Family
ID=16292547
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19251483A Granted JPS6084136A (en) | 1983-10-17 | 1983-10-17 | Supply method and supply monitoring apparatus of chemical liquid from hermetically closed goods-delivery can |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6084136A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5346620B2 (en) * | 1997-07-11 | 2013-11-20 | アドバンスト テクノロジー マテリアルズ，インコーポレイテッド | Bulk chemical supply system |
| JP4697882B2 (en) | 2006-05-19 | 2011-06-08 | 東京エレクトロン株式会社 | Treatment liquid supply apparatus, treatment liquid supply method, and treatment liquid supply control program |
| EP2715781B1 (en) | 2011-05-28 | 2020-07-01 | Entegris Inc. | Refillable ampoule with purge capability |
| CN107915302A (en) * | 2016-10-10 | 2018-04-17 | 天津有序环境科技发展有限公司 | Semi-automatic ammonium hydroxide topples over cage |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58101732A (en) * | 1981-12-14 | 1983-06-17 | Nippon Telegr & Teleph Corp <Ntt> | Feeder of liquid chemical |
-
1983
- 1983-10-17 JP JP19251483A patent/JPS6084136A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58101732A (en) * | 1981-12-14 | 1983-06-17 | Nippon Telegr & Teleph Corp <Ntt> | Feeder of liquid chemical |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6084136A (en) | 1985-05-13 |
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