JPS58101732A - Feeder of liquid chemical - Google Patents
Feeder of liquid chemicalInfo
- Publication number
- JPS58101732A JPS58101732A JP20012481A JP20012481A JPS58101732A JP S58101732 A JPS58101732 A JP S58101732A JP 20012481 A JP20012481 A JP 20012481A JP 20012481 A JP20012481 A JP 20012481A JP S58101732 A JPS58101732 A JP S58101732A
- Authority
- JP
- Japan
- Prior art keywords
- tank
- liquid chemical
- valve
- chemical
- empty
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J4/00—Feed or outlet devices; Feed or outlet control devices
- B01J4/001—Feed or outlet devices as such, e.g. feeding tubes
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は液状の薬品を必要量、安全・確実に取り出せる
薬液供給装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a chemical liquid supply device that can safely and reliably take out a necessary amount of liquid medicine.
従来より、液状の薬品を２台のタンクに貯蔵し薬液と反
応しないガスで加圧し、タンクより薬液を取り出す薬液
供給装置は公知である。この装置の使用により薬品ビン
が不用となり、薬品ビンの転倒、破損等による人身事故
が防止でき、また、薬液の必要な箇所に直接パイプ配管
により供給で−き、また、１台目のタンクが空になって
も、２台目を使用し、それか空になる迄に、先に空にな
ったタンクを充填したタンクと取り替える等により円滑
な薬液供給が実現されるようになった。BACKGROUND ART Conventionally, a chemical solution supply device is known that stores liquid chemicals in two tanks, pressurizes them with a gas that does not react with the chemical solution, and takes out the chemical solution from the tanks. The use of this device eliminates the need for chemical bottles, which prevents accidents resulting in injury or death due to overturning or damage of chemical bottles.In addition, chemical solutions can be supplied directly to the required locations via pipes, and the first tank is empty. However, by using a second tank and replacing the previously emptied tank with a filled tank, a smooth supply of chemicals has become possible.
しかし、従来の装置ではタンクが空になった事を検知す
る空検知機によりタンクか空になった事を検知するため
、検知機か作動するまではどの程度薬液が残っているか
不明である。この為、２台のタンクを識別し、片方のタ
ンクを使い切ってから、もう一方のタンクを使用し、そ
の間に、空になったタンクを充填したタンクに取り替え
ると云ったルールに従って使用する必要があり、現在ど
ちらのタンクから液を取り出すかを作業者に周知徹底さ
せる必要が褐った。更に、空検知機は成る量まで薬液か
使用されると作動するように設定されているが、その設
定値近くでは作動が不確実となりミ空表示ランプがつ°
いたり消えたりする。このような場合、空タンクより薬
液取り出しを行うと、薬液が出ないで、加圧ガスか薬液
取り出し口より噴出し、薬液の飛沫による事故の原因に
もなった。このため、安全・確実で操作の簡便な薬液供
給装置の出現が強く要望される所であった。特に半導体
装置の製造においては、クリーン・ルーム内作業であり
、危険な薬液を多量に使用するため、また、高純度薬品
の安定供給の面から、特に強く要望されていた。However, with conventional equipment, an empty detector detects when the tank is empty, so it is unclear how much chemical remains until the detector is activated. For this reason, it is necessary to identify the two tanks and use them according to the rules such as using one tank completely before using the other tank, and replacing the empty tank with a filled tank in the meantime. As a result, there is now a need to make sure that all workers are aware of which tank to draw liquid from. In addition, the empty detector is set to operate when a certain amount of chemical solution has been used, but near the set value, the operation becomes uncertain and the empty indicator lamp turns on.
It appears and disappears. In such a case, when the chemical solution was taken out from the empty tank, the chemical solution did not come out, but pressurized gas spouted out from the chemical solution outlet, causing an accident due to the chemical solution being splashed. Therefore, there has been a strong demand for a chemical solution supply device that is safe, reliable, and easy to operate. Particularly in the manufacturing of semiconductor devices, work is done in clean rooms and involves the use of large amounts of dangerous chemicals, and there has been a strong demand for this method from the standpoint of ensuring a stable supply of high-purity chemicals.
本発明は上記の欠点を除去するため、使用中のタンクを
記憶する記憶装置により、使用中のタンクの切り替え操
作を含め、薬液取り出し操作を全自動化し、安全・確実
で操作の簡便な薬液供給装置を提供せんとするものであ
り、以下図面について詳細に説明する。In order to eliminate the above-mentioned drawbacks, the present invention uses a storage device that stores the tanks in use to fully automate the chemical solution extraction operation, including the switching operation of the tanks in use, and provides a safe, reliable and easy-to-operate chemical solution supply. The apparatus will be described in detail below with reference to the drawings.
第１図は本発明の実施例に於ける薬液取り出し動作原理
の説明図である。図において、１，１′は薬液貯蔵タン
ク、２．２’は薬液パイプ、３，３′は空検知器、４は
薬液取り出し配管（取り出し口）、５．５′は薬液弁、
６−１ｍ６’−１は加圧弁、６−２ｙ ６／−２は放出
弁、７はガス放出口、７′は加圧ガス配管（導入口）で
ある。FIG. 1 is an explanatory diagram of the principle of operation for taking out a chemical solution in an embodiment of the present invention. In the figure, 1 and 1' are chemical liquid storage tanks, 2.2' are chemical liquid pipes, 3 and 3' are empty detectors, 4 is chemical liquid extraction piping (takeout port), 5.5' is a chemical liquid valve,
6-1m6'-1 is a pressurizing valve, 6-2y 6/-2 is a discharge valve, 7 is a gas discharge port, and 7' is a pressurized gas pipe (inlet).
薬液貯蔵タンク１から薬液を取り出すには、放−出弁６
−２を閉じ、加圧弁６−１を開けると、加圧ガス導入ロ
ア′より入ってきたガスによりタンク１が加圧され、薬
液弁５を開けると、薬液が薬液パイプ２を通って薬液取
り出し口４より出て来る。薬液貯蔵タンク１か空になる
と、空検知器３が作動する。薬液貯蔵タンク１′につい
ても同様にして薬液取り出しを行なう。To take out the chemical liquid from the chemical liquid storage tank 1, the release valve 6 is used.
-2 is closed and the pressurizing valve 6-1 is opened, the tank 1 is pressurized by the gas entering from the pressurized gas introduction lower'. When the chemical liquid valve 5 is opened, the chemical liquid passes through the chemical liquid pipe 2 and is taken out. It comes out from mouth 4. When the chemical solution storage tank 1 becomes empty, the empty detector 3 is activated. The chemical liquid is taken out from the chemical liquid storage tank 1' in the same manner.
第２図は本発明の実施例に於ける使用中（薬液取り出し
を行なっている）タンクの記憶を行なう記憶装置の回路
図であり、８は保持リレー、８−１゜５−２ｔ ｓ−ａ
はその端子、８−４はセットコイル、８−５はリセット
コイル、９，９／は手動加圧スイッチ、１０゜１０′は
手動リセット及びセットスイッチ、１１．１１’はそれ
ぞれ空検知器３及び３′からの検知信号で動作する制御
スイッチ、１１−１〜１１−９及び１１’Ｌ、〜ｌ １
’ −９は端子、１２はドアスイッチ、１２−１〜１２
−３は端子、１３は電源、１４．１４’は空表示ランプ
、１５は取り出しスイッチ、１６．１６’は加圧弁６−
１ｓ ６’ １及び放出弁６−２６／−２の制御線、１
７．１７’は薬液弁５，５′の制御線である。手動加圧
スイッチ９，９′は薬液貯蔵タンク１又は１′を交替し
た時、接合部にリーク等がないか確認のため、タンク１
，１′を加圧するスイッチであり、通常の操作では使用
しない。同様に、手動リセット及びセットスイッチ１０
．１０’も装置保守・点検用である。ドアスイッチ１２
はタンクエ又は１′を交換する時に開けるドアに取り付
けられたスイッチであり、ドアか閉められ使用状態では
端子１２−３と１２−１が接続され、ドアが開くとその
接続が断になる。制御スイッチ１１．１１’は独立した
３回路が連動して動作するスイッチであり、タンク１が
空でない時は端子１１−２とＩＬ３．１１−５と１１−
６及び１１−８と１１−９が接続（図の実線）し、空に
なると、端子１１−１と１ｔ−２，１１４と１１−５及
び１１−７と１１−８が接続（図の点線）する。タンク
１′につかでも１１を１１′に置き換えれば同様である
。保持リレー８は磁石又はラッチ機構によりセット状態
とリセット状態の２状態を有するリレーであり、本発明
実施例ではタンク１をセット状態に、タンク１′をリセ
ット状態に対応させて、それぞれのタンクの使用状態を
記憶させる。FIG. 2 is a circuit diagram of a storage device that stores a tank in use (during a chemical solution extraction) in an embodiment of the present invention, 8 is a holding relay, 8-1°5-2t s-a
is its terminal, 8-4 is a set coil, 8-5 is a reset coil, 9, 9/ is a manual pressurization switch, 10°10' is a manual reset and set switch, 11.11' is an empty detector 3 and Control switches operated by detection signals from 3', 11-1 to 11-9 and 11'L, to l1
'-9 is a terminal, 12 is a door switch, 12-1 to 12
-3 is a terminal, 13 is a power supply, 14.14' is an empty indicator lamp, 15 is a take-out switch, 16.16' is a pressurizing valve 6-
1s 6' 1 and control line of discharge valve 6-26/-2, 1
7.17' is a control line for the chemical liquid valves 5, 5'. When replacing the chemical storage tank 1 or 1', the manual pressurization switch 9, 9' is used to check whether there is any leakage at the joint.
, 1', and is not used in normal operation. Similarly, manual reset and set switch 10
．． 10' is also for equipment maintenance and inspection. door switch 12
is a switch attached to the door that is opened when replacing the tank 1 or 1'; when the door is closed and in use, terminals 12-3 and 12-1 are connected, and when the door is opened, the connection is disconnected. The control switch 11.11' is a switch that operates in conjunction with three independent circuits, and when the tank 1 is not empty, the terminals 11-2, IL3, 11-5 and 11-
6, 11-8 and 11-9 are connected (solid line in the figure), and when they are empty, terminals 11-1 and 1t-2, 114 and 11-5, and 11-7 and 11-8 are connected (dotted line in the figure). )do. The same effect can be obtained by replacing 11 with 11' even if it is in tank 1'. The holding relay 8 is a relay that has two states, a set state and a reset state, by a magnet or a latch mechanism. In the embodiment of the present invention, the tank 1 is set to the set state and the tank 1' is set to the reset state, so that each tank is Memorize usage status.
まず、タンク１，１′の両方が充の状態にあり、保持リ
レー８がセット状態にあり、ドアスイッチ１２゛がドア
が閉められた状態になっている時について動作を説明す
る。この場合は電源１３は端子１２−３と１２−１．
ＩＬ２と１１−３及び８−１と８−２が各々接続されて
いるため、制御線１６に接続される。従って、加圧弁６
−１ｅ６’−１か常時閉電磁弁、放出弁６−２＊６’−
２か常時開の電磁弁で構成され、制御線１６及び１６′
に各々か並列接続されていると、加圧弁り、が開き、放
出弁６−２か閉じタンク１が加圧される。一方、タンク
１′については電源１３が端子Ｌｌと８−３間で断とな
っているため制御線１６′に接続されないため、加圧弁
６′−１が閉、放出弁６−２が開となり加圧されない。First, the operation will be described when both the tanks 1 and 1' are in a full state, the holding relay 8 is in a set state, and the door switch 12' is in a state where the door is closed. In this case, the power supply 13 is connected to terminals 12-3 and 12-1.
Since IL2 and 11-3 and 8-1 and 8-2 are connected to each other, they are connected to the control line 16. Therefore, the pressurizing valve 6
-1e6'-1 or normally closed solenoid valve, release valve 6-2*6'-
Consists of two normally open solenoid valves, with control lines 16 and 16'
When both are connected in parallel, the pressurizing valve 6-2 opens and the discharge valve 6-2 closes, pressurizing the tank 1. On the other hand, for tank 1', the power supply 13 is disconnected between terminal Ll and 8-3, so it is not connected to the control line 16', so the pressurizing valve 6'-1 is closed and the discharge valve 6-2 is open. Not pressurized.
ここで、取出しスイッチ１５を押すと、制御線１７にも
電源１３か接続し、常時閉電磁弁である薬液弁５が開け
られ、タンク１の薬液か薬液取り出し口４より取り出せ
る。次に、タンク１の薬液を使い切ると、空検知器３か
作動し、制御スイッチ１１の端子は端子１１−１とＩＬ
２．１１−４とｎ−５，１１−７と１１−８が各々接続
される。このため、タンク１′か充であると、電源１３
は端子１２−ａｔ １２−１．１１−７１１ｌ−ｓｔｉ
ｒ−ａｔ・ｒ Ｐ−５を通ってリセットコイル８−５に
接続され、保持リレー８はリセット状態になり、制御線
１６と電源１３間の回路は断となり、制御線１６′に電
源１３が接続される。この為、加圧弁６−１が閉じ、放
出弁６−２か開くためタンク１″”Ｉｔ常圧になり、一
方、加圧弁６′−１か開き、放出弁６′−２が閉じるた
めタンク１′が加圧される。従って、取出しスイッチ１
５を揮すと、電源１３か制御線１７′に接続するため薬
液弁５′が開き、タンク１′より薬液が薬液取出し口４
に取出される。以上の切替え動作に於て、タンク１の薬
液か車検知器３の空検知設定値近くまで減少して、不確
実な検知動作を行っても、一度保持リレー８がセット状
態からリセット状態になると、タンク１１が空になって
、制御スイッチ１１′が空状態になるまではリセット状
態が保持される。従って、車検知器３，３′の設定値近
傍での不確実動作。Here, when the take-out switch 15 is pressed, the power supply 13 is also connected to the control line 17, the chemical liquid valve 5, which is a normally closed electromagnetic valve, is opened, and the chemical liquid in the tank 1 can be taken out from the chemical liquid take-out port 4. Next, when the chemical solution in the tank 1 is used up, the empty detector 3 is activated, and the terminal of the control switch 11 is connected to the terminal 11-1 and IL.
2. 11-4 and n-5, 11-7 and 11-8 are connected respectively. Therefore, if the tank 1' is full, the power supply 13
is terminal 12-at 12-1.11-711l-sti
r-at・r is connected to the reset coil 8-5 through P-5, the holding relay 8 is reset, the circuit between the control line 16 and the power supply 13 is disconnected, and the power supply 13 is connected to the control line 16'. Connected. For this reason, the pressure valve 6-1 is closed and the discharge valve 6-2 is opened, so the tank 1"" becomes normal pressure. On the other hand, the pressure valve 6'-1 is opened and the discharge valve 6'-2 is closed, so the tank becomes normal pressure. 1' is pressurized. Therefore, the eject switch 1
5, the chemical liquid valve 5' opens to connect to the power supply 13 or control line 17', and the chemical liquid flows from the tank 1' to the chemical liquid outlet 4.
It is taken out. In the above switching operation, even if the chemical solution in the tank 1 decreases to near the empty detection setting value of the vehicle detector 3 and an uncertain detection operation is performed, once the holding relay 8 changes from the set state to the reset state. The reset state is maintained until the tank 11 becomes empty and the control switch 11' becomes empty. Therefore, the vehicle detectors 3, 3' operate unreliably near the set values.
によるタンク切替えの誤動作゛は本発明により防止。This invention prevents tank switching malfunctions due to
できる。can.
以上の説明から判るように、本発明では、２台９−の薬
液貯蔵タンク１，１／が両方とも空になるまでに、先に
空になった方のタンクを充填したタンクに取り替えるよ
うにする事により、薬液取り出しスイッチ１５を押すだ
けで、安全・確実に薬液を取・り出せる。また、どちら
のタンクが空になったかは、表示ランプ１４又は１４′
の点灯により表示される。タンクの両方が空になった場
合は、両方のタンクを充填したタンクと取り替えると、
その直前まで使用していたタンクの方から使用され、片
方のタンクのみ充填したタンクと取り替えると、そのタ
ンクが１か１′かにより保持リレー８は自動的にセット
状態かりセット状態になり、取り替えたタンクから薬液
取り出しが行える。以上の説明では簡単のため、加圧弁
６−１＋ ６’−１、放出弁６−２゜６′−２及び薬液
弁５，５′か全て電磁弁で構成されているものとして説
明したか、薬液弁５，５′及び加圧弁６−１ｓ ６’−
１を各々常時閉エアー弁とし、放出弁。As can be seen from the above explanation, in the present invention, by the time both of the two chemical liquid storage tanks 1, 1/ are empty, the empty tank is replaced with a filled tank. By doing so, the chemical solution can be taken out safely and reliably by simply pressing the chemical solution take-out switch 15. Also, the indicator lamp 14 or 14' indicates which tank is empty.
Indicated by lighting. If both tanks are empty, replace both tanks with filled tanks.
If the tank that had been in use until just before is replaced with a tank that is filled with only one tank, the holding relay 8 will automatically change to the set state or set state depending on whether that tank is 1 or 1', and the tank will be replaced. The chemical solution can be taken out from the tank. In the above explanation, for the sake of simplicity, the pressurizing valve 6-1+6'-1, the discharge valve 6-2, 6'-2, and the chemical liquid valves 5, 5' are all composed of electromagnetic valves. Chemical liquid valves 5, 5' and pressurizing valves 6-1s 6'-
1 is a normally closed air valve, and a release valve.
６−２ ＊ ６’−２を常時開エアー弁とし、これら答
弁を各。6-2 * 6'-2 is a normally open air valve, and these answers are each.
各制御線１６．１６’、 １７．１７’で制御される常
時閉型エアー弁駆動用電磁弁で駆動する方式も可能であ
る１第３図は本発明実施例における車検知器の一構成例
の説明図であり、１８は底板、１９は押えリング、・２
０ 、２０’ 、 ２０’ 、 ２０′はネジ、２１は
ゴム板、２２は押え板、２３は可動板、２４．２４’は
ネジ、２５は本体、２６゜２６’はスイッチ、２７はバ
ネ、２８は座金、２９は調節ネジである。タンク１に薬
液が充填されている時は、その重さにより、可動板２３
は本体２５に押しつけられ、スイッチ２６．２６’はＯ
Ｎ状態となる。しか。It is also possible to use a normally closed solenoid valve for driving an air valve, which is controlled by each control line 16, 16', 17, 17'. 18 is a bottom plate, 19 is a presser ring, and 2.
0, 20', 20', 20' are screws, 21 is a rubber plate, 22 is a presser plate, 23 is a movable plate, 24, 24' is a screw, 25 is a main body, 26°26' is a switch, 27 is a spring, 28 is a washer, and 29 is an adjustment screw. When the tank 1 is filled with chemical liquid, the movable plate 23
is pressed against the main body 25, and the switch 26.26' is set to O.
It becomes N state. deer.
し、タンク１が空になると、バネ２７の作用により可動
板２３が押し上げられる。この時、スイ・ソチ２６゜２
６′を可動板の周囲に複数個設置し、それらを直列。However, when the tank 1 becomes empty, the movable plate 23 is pushed up by the action of the spring 27. At this time, Sui Sochi 26°2
Install multiple 6' around the movable plate and connect them in series.
に接続すれば、タンク１か傾いて上っても、どれか一つ
のスイッチがＯＦＦ状態になればタンク１の空を検知で
きる。If connected to , even if Tank 1 is tilted up, it will be possible to detect if Tank 1 is empty as long as one of the switches is turned off.
なお、車検知器３としては、静電容量の変化により検知
する方式のものもあるが、この方式では。Although some car detectors 3 use a detection method based on changes in capacitance, this method does not.
センサをタンクの横に設置する必要があり、タンクの交
換に不便となると共に、薬液の種類によって静電容量が
異なるため、検知が不安定となる等の不都合があり、好
ましいものではなかった。The sensor must be installed next to the tank, making it inconvenient to replace the tank, and since capacitance varies depending on the type of chemical, detection becomes unstable, which is not desirable.
以上説明したように、本発明の薬液供給装置では、作業
者は薬液取り出しスイッチを押すだけで薬液が取り出せ
、貯蔵タンクが空になると別なタンクに自動的に切り替
えられるので、複数の作業者が共用して装置の使用が可
能であり、操作が簡・便で、作業性に優れている。また
、車検知器の設定値近（での不確実動作により、空タン
クを加圧する如き誤操作が未然に防止でき、薬液取り出
し口から、加圧ガスと共に薬液の飛沫の噴出にともなう
事故を回避でき、安全で確実な薬液取り出しか可能にな
る等率（の利点を有している。As explained above, with the chemical supply device of the present invention, a worker can take out the chemical by simply pressing the chemical take-out switch, and when the storage tank is empty, it is automatically switched to another tank, so multiple workers can The device can be shared, is simple and convenient to operate, and has excellent workability. Additionally, due to the unreliable operation of the vehicle detector near the set value, erroneous operations such as pressurizing an empty tank can be prevented, and accidents caused by splashes of chemical liquid and pressurized gas being ejected from the chemical liquid outlet can be avoided. , it has the advantage of being able to take out the chemical solution safely and reliably.
第１図は本発明の実施例における薬液取出し動作の原理
を説明する図、第２１ｉｆｔ本発明実施例における記憶
装置の回路図、第３図は本発明実施例における車検知器
の一構成例の説明図である。
１．１′・・・薬液貯蔵タンク
２．２′・・・薬液パイプ ３．３′・・・車検知器
４・・・薬液取り出し配管（取り出し口）５．５′・・
・薬液弁 ６−１ｓ ６’−１・・・加圧弁６−
２ ＋ ６’−２・・・放出弁 ７・・・ガス放出ロ
ア′・・・加圧ガス配管（導入口）
８・・・保持リレー ８−１＋ ８−２ｓ ８−
３・・・端子８−４・・・セットコイル ８−５・・
・リセットコイル９．９′・・・手動加圧スイッチ
１０．１０’・・・手動リセット及びセットスイッチ１
１．１１’・・・制御スイッチ
１１−１〜１１−９及びｎ’−ｉ〜１１’−９・・・端
子１２・・・ドアスイッチ １３・・・電源１４．
１４’・・・空表示ランプ１５・・・取り出しスイッチ
１６．１６’・・・加圧弁及び放出弁の制御線１７．１
７’・・・薬液弁の制御線
２３・・・可動板 ２６．２６’・・・スイ
ッチ特許出願人 日本電信電話公社
代理人弁理士 中村純之助
才２図Fig. 1 is a diagram explaining the principle of the chemical liquid extraction operation in the embodiment of the present invention, Fig. 21 is a circuit diagram of the storage device in the embodiment of the present invention, and Fig. 3 is an example of the configuration of the vehicle detector in the embodiment of the present invention. It is an explanatory diagram. 1.1'...Medical solution storage tank 2.2'...Medical solution pipe 3.3'...Vehicle detector 4...Medical solution extraction pipe (outlet) 5.5'...
・Medical liquid valve 6-1s 6'-1...pressure valve 6-
2 + 6'-2... Release valve 7... Gas release lower'... Pressurized gas piping (inlet) 8... Holding relay 8-1+ 8-2s 8-
3...Terminal 8-4...Set coil 8-5...
・Reset coil 9.9'...Manual pressure switch 10.10'...Manual reset and set switch 1
1.11'... Control switches 11-1 to 11-9 and n'-i to 11'-9... Terminal 12... Door switch 13... Power supply 14.
14'...Empty indicator lamp 15...Take-out switch 16.16'...Control line for pressurizing valve and release valve 17.1
7'... Control line of chemical liquid valve 23... Movable plate 26.26'... Switch patent applicant Nippon Telegraph and Telephone Public Corporation's representative patent attorney Junnosuke Nakamura Figure 2
Claims (1)
ス配管と、該タンクより薬液を取り出す薬液取り出し配
管と、該タンクか空になった事を検知する空検知器と、
該複数のタンクのうち薬液取り出しを行っているタンク
を記憶する記憶装置とを有して構成したことを特徴とす
る薬液供給装置。A plurality of tanks for storing chemical liquids, gas piping for pressurizing the tanks, chemical liquid extraction piping for taking out the chemical liquid from the tanks, and an empty detector for detecting when the tanks are empty;
A chemical liquid supply device comprising: a storage device that stores a tank from which a chemical liquid is being taken out from among the plurality of tanks.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20012481A JPS58101732A (en) | 1981-12-14 | 1981-12-14 | Feeder of liquid chemical |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20012481A JPS58101732A (en) | 1981-12-14 | 1981-12-14 | Feeder of liquid chemical |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58101732A true JPS58101732A (en) | 1983-06-17 |
Family
ID=16419216
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20012481A Pending JPS58101732A (en) | 1981-12-14 | 1981-12-14 | Feeder of liquid chemical |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58101732A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6084136A (en) * | 1983-10-17 | 1985-05-13 | Nippon Zeon Co Ltd | Supply method and supply monitoring apparatus of chemical liquid from hermetically closed goods-delivery can |
| JPS6084137A (en) * | 1983-10-17 | 1985-05-13 | Nippon Zeon Co Ltd | Chemical liquid supply monitoring apparatus from hermetically closed goods-delivery can |
| JPS6393342A (en) * | 1986-10-09 | 1988-04-23 | Toyobo Co Ltd | Apparatus for continuous supply of liquid |
| JPS6397222A (en) * | 1986-10-15 | 1988-04-27 | Canon Inc | Automatic feed system of chemical |
-
1981
- 1981-12-14 JP JP20012481A patent/JPS58101732A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6084136A (en) * | 1983-10-17 | 1985-05-13 | Nippon Zeon Co Ltd | Supply method and supply monitoring apparatus of chemical liquid from hermetically closed goods-delivery can |
| JPS6084137A (en) * | 1983-10-17 | 1985-05-13 | Nippon Zeon Co Ltd | Chemical liquid supply monitoring apparatus from hermetically closed goods-delivery can |
| JPH0153573B2 (en) * | 1983-10-17 | 1989-11-14 | Nippon Zeon Kk | |
| JPH0153572B2 (en) * | 1983-10-17 | 1989-11-14 | Nippon Zeon Kk | |
| JPS6393342A (en) * | 1986-10-09 | 1988-04-23 | Toyobo Co Ltd | Apparatus for continuous supply of liquid |
| JPS6397222A (en) * | 1986-10-15 | 1988-04-27 | Canon Inc | Automatic feed system of chemical |
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