JPH0134107Y2 - - Google Patents
Info
- Publication number
- JPH0134107Y2 JPH0134107Y2 JP1983093129U JP9312983U JPH0134107Y2 JP H0134107 Y2 JPH0134107 Y2 JP H0134107Y2 JP 1983093129 U JP1983093129 U JP 1983093129U JP 9312983 U JP9312983 U JP 9312983U JP H0134107 Y2 JPH0134107 Y2 JP H0134107Y2
- Authority
- JP
- Japan
- Prior art keywords
- tubular member
- anode
- magnetic field
- cathode
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 4
- 230000004907 flux Effects 0.000 claims description 2
- 238000009413 insulation Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 229910052715 tantalum Inorganic materials 0.000 description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Description
【考案の詳細な説明】 本考案は、ペニング真空計の改良に関する。[Detailed explanation of the idea] The present invention relates to improvements in Penning vacuum gauges.
質量分析装置等に使用される真空測定装置とし
てペニング真空計が広く使用されており、その構
造を第１図及び第１図をＡ−A′方向から眺めた
第２図に示す。図中１は陰極としての管状部材を
示し、該部材１の外側２ケ所には凹部２，３が設
けられており、該凹部２，３には２つの永久磁石
４，５が嵌め込まれ、該磁石４，５によつて管状
部材１の内部に上下方向の磁界Ｂを形成する。管
状部材１の一方の開放端には、Ｏリング６やビス
７によつて他の真空容器と接続するための接続管
８が取り付けられている。管状部材１の他方の開
放端には、Ｏリング９とビス１０によつて蓋体１
１が取り付けられているが、該蓋体１１には電気
絶縁素子１２を介して第３図に示す様な短かい筒
状のリングからなる陽極１３が前記磁界Ｂ内に挿
入されるように取り付けられている。陽極１３に
は直流電圧電源１４の出力が印加されており、該
電源１４を流れる電流は電流計１５によつて測定
される。 A Penning vacuum gauge is widely used as a vacuum measuring device used in mass spectrometers and the like, and its structure is shown in FIG. 1 and FIG. 2, which is a view of FIG. 1 from the direction A-A'. In the figure, reference numeral 1 indicates a tubular member as a cathode, and recesses 2 and 3 are provided at two outside locations of the member 1. Two permanent magnets 4 and 5 are fitted into the recesses 2 and 3. The magnets 4 and 5 form a vertical magnetic field B inside the tubular member 1. A connecting tube 8 for connecting to another vacuum container is attached to one open end of the tubular member 1 using an O-ring 6 and screws 7. A lid 1 is attached to the other open end of the tubular member 1 with an O-ring 9 and a screw 10.
1 is attached to the lid body 11, and an anode 13 consisting of a short cylindrical ring as shown in FIG. It is being The output of a DC voltage power source 14 is applied to the anode 13, and the current flowing through the power source 14 is measured by an ammeter 15.
以上の構成のペニング真空計は、10-3〜
10-6Torr程度の圧力を測定するために用いられ、
上記範囲の圧力のとき陽極１３と陰極としての管
状部材１の間に電源１４によつて数Kv程度の電
圧を印加すると、管状部材１の陽極１３の対向面
１ａより冷陰極放出により電子が放出される。こ
の電子は、磁石４，５によつて形成される磁界Ｂ
によつて螺旋運動しながら真空室１６内の気体分
子をイオン化し、数μA〜数mAの放電電流とな
る。この放電電流を電流計１５によつて測定し、
該電流値を真空度に換算することによつて真空度
が測定される。 The Penning vacuum gauge with the above configuration is 10 -3 ~
Used to measure pressures around 10 -6 Torr,
When a voltage of about several KV is applied between the anode 13 and the tubular member 1 as a cathode by the power supply 14 at the pressure in the above range, electrons are emitted from the opposing surface 1a of the anode 13 of the tubular member 1 by cold cathode emission. be done. These electrons are exposed to the magnetic field B formed by the magnets 4 and 5.
The gas molecules in the vacuum chamber 16 are ionized while making a spiral motion, resulting in a discharge current of several μA to several mA. This discharge current is measured by an ammeter 15,
The degree of vacuum is measured by converting the current value into the degree of vacuum.
ところで、上記ペニング真空計における陰極と
しての管状部材１は機械加工が容易で腐蝕性に強
く、又アウトガスも少ないなどの理由からステン
レス（SUS）が使用されていた。しかしながら、
陽極１３と管状部材１との放電において、対向面
１ｂの中心が強くスパツタされてステンレスを構
成する元素、鉄（Fe）、ニツケル（Ni）、クロム
（Cr）が互いに分離され、このうち磁性を示す元
素が磁界Ｂの作用によつて針状に成長し、ついに
は陽極１３と対向面１ｂが短絡する。特に、質量
分析装置の様にイオン源にアルゴンガス（Ar）、
又はキセノンガス（Xe）のような重いガスを使
用する装置では、質量分析装置の真空室とペニン
グ真空計の真空室１６が連通口８ａによつて連通
しているため、これらのガスによつて対向面１ｂ
のスパツタ量が多くなり、従つて、陽極１３と対
向面１ｂは短絡しやすくなりペニング真空計が故
障する原因となつていた。 By the way, stainless steel (SUS) has been used for the tubular member 1 as the cathode in the Penning vacuum gauge because it is easy to machine, is resistant to corrosion, and produces less outgas. however,
During the discharge between the anode 13 and the tubular member 1, the center of the opposing surface 1b is strongly sputtered, and the elements constituting stainless steel, iron (Fe), nickel (Ni), and chromium (Cr), are separated from each other. The element shown grows into a needle shape under the action of the magnetic field B, and finally the anode 13 and the opposing surface 1b are short-circuited. In particular, argon gas (Ar) is used in the ion source, such as in mass spectrometers.
Alternatively, in devices that use heavy gases such as xenon gas (Xe), the vacuum chamber of the mass spectrometer and the vacuum chamber 16 of the Penning vacuum gauge are communicated through the communication port 8a, so these gases Opposing surface 1b
The amount of spatter increases, and therefore, the anode 13 and the opposing surface 1b are likely to be short-circuited, causing the Penning vacuum gauge to malfunction.
本考案は以上の点に鑑みなされたもので、磁束
を透過させる材質からなる管状部材と、該部材の
外側に取り付けられ管状部材の管内を横切る磁界
を発生させる磁石と、管状部材の一方の開放端を
塞ぐ蓋体に絶縁を保つて取り付けられ、前記管状
部材内の磁界中に挿入されるリング状陽極とを備
え、前記管状部材の内側を非磁性元素より成る物
質で覆うようにしたことを特徴としている。 The present invention was devised in view of the above points, and includes a tubular member made of a material that transmits magnetic flux, a magnet attached to the outside of the member to generate a magnetic field that crosses the inside of the tubular member, and an opening at one end of the tubular member. A ring-shaped anode is attached to a lid body that closes the end while maintaining insulation, and is inserted into the magnetic field within the tubular member, and the inside of the tubular member is covered with a substance made of a non-magnetic element. It is a feature.
以下本考案の一実施例を添付図面に基づき説明
する。 An embodiment of the present invention will be described below with reference to the accompanying drawings.
第４図は本考案の一実施例の概略構成図であ
り、第５図は第４図の一実施例装置のＣ−C′断面
図である。尚、第１図と同一構成要素には同一番
号を付してその説明を省略する。第４図におい
て、第１図の従来装置と異なる点は陰極の内面、
すなわち、陽極に対向する面１ａ，１ｂを例えば
第６図に示す様なタンタルで形成した楕円状の円
筒１７で覆い、又陽極１３は第７図に示す様な棒
状材で形成したリングを用いた点にある。つま
り、タンタルで形成された円筒１７の内側表面は
放電現象によりスパツタされるが、その粒子は非
磁性体のため磁界Ｂによつても針状に成長せず、
従つて陽極１８と対向面１ｂは短絡することもな
い。又、リング１８は従来装置の円筒状リング１
３のように対向面１ｂの中心部周辺のみをスパツ
タせず円筒１７の内側表面を一様にスパツタしス
パツタされる量も少なくなる。 FIG. 4 is a schematic diagram of an embodiment of the present invention, and FIG. 5 is a sectional view taken along line C-C' of the embodiment of the device shown in FIG. It should be noted that the same components as in FIG. 1 are given the same numbers and their explanations will be omitted. In Fig. 4, the difference from the conventional device shown in Fig. 1 is that the inner surface of the cathode,
That is, the surfaces 1a and 1b facing the anode are covered with an elliptical cylinder 17 made of tantalum as shown in FIG. 6, and the anode 13 is a ring made of a rod-shaped material as shown in FIG. It is at the point where it was. In other words, the inner surface of the cylinder 17 made of tantalum is spattered by the discharge phenomenon, but since the particles are non-magnetic, they do not grow into acicular shapes even in the magnetic field B.
Therefore, there will be no short circuit between the anode 18 and the opposing surface 1b. Furthermore, the ring 18 is different from the cylindrical ring 1 of the conventional device.
Instead of sputtering only around the center of the opposing surface 1b as in 3, the inner surface of the cylinder 17 is sputtered uniformly, and the amount of spatter is reduced.
尚、本考案は以上の実施例に限定されず変形が
可能であり、本実施例では円筒１７をタンタルで
形成したが、他の非磁性元素からなる金属で形成
しても良い。 It should be noted that the present invention is not limited to the above-described embodiments and can be modified, and although the cylinder 17 is made of tantalum in this embodiment, it may be made of a metal made of other non-magnetic elements.
以上の様に本考案は、真空中に設けられた陰極
と陽極との間に高電圧を印加して、該陰極と陽極
との間に生ずる放電現象を利用して真空を測定す
る装置において、陰極を非磁性元素から成る金属
で覆うことにより陰極と陽極とのスパツタ粒子に
依る短絡事故を防止し、故障の少ないペニング真
空計を提供する。 As described above, the present invention provides an apparatus for measuring vacuum by applying a high voltage between a cathode and an anode provided in a vacuum and utilizing the discharge phenomenon that occurs between the cathode and anode. To provide a Penning vacuum gauge with fewer failures by preventing short circuit accidents caused by spatter particles between the cathode and anode by covering the cathode with a metal made of a non-magnetic element.
第１図、第２図及び第３図は従来装置を説明す
るための図、第４図は本考案の一実施例を示す構
成略図、第５図は第４図の一実施例のＣ−C′断面
図、第６図、第７図は第４図の一実施例装置の要
部の概略図である。
１：陰極、４，５：磁石、６，９：Ｏリング、
７，１０：ビス、８：接続管、１１：蓋体、１
２：絶縁体、１３，１８：陽極、１４：直流高圧
電源、１５：電流計、１６：真空室、１７：円筒
電極。
1, 2, and 3 are diagrams for explaining a conventional device, FIG. 4 is a schematic configuration diagram showing an embodiment of the present invention, and FIG. 5 is a C-C diagram of an embodiment of the present invention. The C' sectional view, FIGS. 6 and 7 are schematic diagrams of essential parts of the embodiment of the apparatus shown in FIG. 4. 1: cathode, 4, 5: magnet, 6, 9: O ring,
7, 10: Screw, 8: Connection pipe, 11: Lid, 1
2: Insulator, 13, 18: Anode, 14: DC high voltage power supply, 15: Ammeter, 16: Vacuum chamber, 17: Cylindrical electrode.
Claims (1)
管状部材の外側に取り付けられ管状部材の管内を
横切る磁界を発生させる磁石と、管状部材の一方
の開放端を塞ぐ蓋体に絶縁を保つて取り付けら
れ、前記管状部材内の磁界中に挿入されるリング
状陽極とを備え、前記管状部材の内側を非磁性元
素より成る物質で覆うようにしたことを特徴とす
るペニング真空計。 A tubular member made of a material that transmits magnetic flux, a magnet that is attached to the outside of the tubular member and generates a magnetic field that crosses the inside of the tubular member, and a lid that closes one open end of the tubular member while maintaining insulation. A Penning vacuum gauge, comprising: a ring-shaped anode inserted into a magnetic field within the tubular member; and the inside of the tubular member is covered with a material made of a non-magnetic element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9312983U JPS60534U (en) | 1983-06-17 | 1983-06-17 | penning vacuum gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9312983U JPS60534U (en) | 1983-06-17 | 1983-06-17 | penning vacuum gauge |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60534U JPS60534U (en) | 1985-01-05 |
| JPH0134107Y2 true JPH0134107Y2 (en) | 1989-10-17 |
Family
ID=30223766
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9312983U Granted JPS60534U (en) | 1983-06-17 | 1983-06-17 | penning vacuum gauge |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60534U (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003017433A (en) * | 2001-06-28 | 2003-01-17 | Tokyo Electron Ltd | Chamber sensor port |
| JP5000386B2 (en) * | 2007-06-08 | 2012-08-15 | 株式会社アルバック | Cold cathode ionization gauge |
| JP4568321B2 (en) * | 2007-11-27 | 2010-10-27 | 有限会社真空実験室 | Cold cathode ionization gauge |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5233901U (en) * | 1975-08-29 | 1977-03-10 |
-
1983
- 1983-06-17 JP JP9312983U patent/JPS60534U/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5233901U (en) * | 1975-08-29 | 1977-03-10 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60534U (en) | 1985-01-05 |
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