JP3602917B2 - Cold cathode ionization gauge - Google Patents

Cold cathode ionization gauge Download PDF

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Publication number
JP3602917B2
JP3602917B2 JP17624396A JP17624396A JP3602917B2 JP 3602917 B2 JP3602917 B2 JP 3602917B2 JP 17624396 A JP17624396 A JP 17624396A JP 17624396 A JP17624396 A JP 17624396A JP 3602917 B2 JP3602917 B2 JP 3602917B2
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cathode
vacuum vessel
anode
vacuum
magnet
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JPH1019711A (en
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望 高木
沈　　国華
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Ulvac Inc
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Ulvac Inc
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Description

【０００１】
【発明の属する技術分野】
本発明は、冷陰極電離真空計に関するものである。
【０００２】
【従来の技術】
従来、冷陰極型電離真空計としては、図７及び図８に示すようなペニング型のもの、図９に示すようなマグネトロン型のもの、また図１０に示すような逆マグネトロン型のもの等が知られている。
【０００３】
図７に示すペニング型の冷陰極型電離真空計では、被測定真空容器のフランジＡに取り付けられるようにされたフランジＢを備えた真空容器Ｃ内に、円筒状のアノードＤ及び円筒状のアノードＤを挾んで板状のカソードＥがそれぞれ軸線と同軸に配置され、アノードＤは接続部Ｆを介して電極Ｇに接続され、この電極Ｇは絶縁体Ｈで絶縁されており、通常２乃至3.5kVの直流電圧が印加される。板状のカソードＥは、図示していないが接地されている。また真空容器Ｃの外側には円筒状のアノードＤの軸方向に磁界を形成する円筒状磁石Ｉが配置され、符号Ｊで示す磁力線を形成している。
【０００４】
図８に示すペニング型の冷陰極型電離真空計においては、真空容器Ｃ内に、円筒状のアノードＤは軸線方向に対して横向きに配置され、絶縁体Ｈで絶縁されて真空容器Ｃの壁に取り付けられた電極Ｇに接続され、この電極Ｇには通常２乃至3.5kVの直流電圧が印加される。板状のカソードＥはアノードＤを挾んで左右に配置され、そして図示していないが接地されている。また真空容器Ｃの外側には円筒状のアノードＤの軸線方向に磁界を形成する２枚の板状の磁石Ｋが配置され、符号Ｌで示す磁力線が形成される。
【０００５】
図９に示すマグネトロン型の冷陰極電離真空計においては、被測定真空容器のフランジＡに取り付けられるフランジＢを備えた真空容器Ｃ内に、円筒状のアノードＤが真空容器Ｃの軸線と同軸に配置され、このアノードＤは接続部Ｆを介して電極Ｇに接続され、電極Ｇは絶縁体Ｈで絶縁されて真空容器Ｃの壁を貫通して外部へ延び通常２乃至3.5kVの直流電圧が印加される。Ｍは真空容器Ｃの軸線に沿ってのびる細い棒の両端に円板を備えたカソードであり、図示してないが接地されている。Ｉは円筒状のアノードＤの軸方向に磁界を形成する円筒状磁石で、符号Ｊで示す磁力線が形成されている。
【０００６】
図１０に示す逆マグネトロン型の冷陰極電離真空計においては、被測定真空容器のフランジＡに取り付けられるフランジＢを備えた真空容器Ｃ内に、円筒状で両端にドーナツ状の円板を備えたカソードＮが真空容器Ｃの軸線と同軸に配置され、図示してないが接地されている。Ｏは真空容器Ｃの軸線に沿ってのびる細い棒状のアノードで、電極Ｇに接続されている。電極Ｇは絶縁体Ｈで絶縁されており、通常２乃至3.5kVの直流電圧が印加される。Ｉは細い棒状のアノードＯの軸方向に磁界を形成する円筒状磁石で、符号Ｊで示す磁力線が形成されている。
【０００７】
図７及び図８に示すペニング型の冷陰極型電離真空計の場合、円筒状のアノードＤと板状のカソードＥで挟まれた空間には電界と磁界が存在している。また図９のマグネトロン型の冷陰極電離真空計の場合、円筒状のアノードＤとカソードＭで挟まれた空間には電界と磁界が存在している。さらに図１０の場合も、円筒状で両端にドーナツ状の円板を備えたカソードＮと細い棒状のアノードＯで挟まれた空間には電界と磁界が形成されている。
これらの空間で電界放出や宇宙線などの原因で電子が発生した場合、電子は負電極から正電極に向かって加速されるが、磁界が存在するためにローレンツの力を受けて、すぐには正電極に到達せず、空間内で螺旋運動して、長い距離を飛行する。その結果、空間内の残留ガスと衝突して残留ガスをイオン化する確率が増し、負電極と正電極の間に持続放電が発生する。放電電流は空間の残留ガスの量に依存するので、放電電流を測定することによって空間内の圧力、ひいては真空計が取り付けられている被測定真空容器の圧力を知ることができる。
【０００８】
【発明が解決しようとする課題】
従来の冷陰極電離真空計においては、放電空間に磁界を発生させるために、真空計容器の外側に円筒状もしくは板状の磁石を配置ししかも一般的に１，０００乃至１，５００ガウスの磁界が必要であるので、使用される磁石は比較的大きくなり、そのため真空計自体が重く且つ大きくなるという問題点があった。
【０００９】
そこで、本発明は、このような従来装置にも伴う問題点を解決し、小型軽量化できる冷陰極電離真空計を提供することを目的としている。
【００１０】
【課題を解決するための手段】
上記の目的を達成するために、本発明の第１の発明では、被測定真空容器に取り付けるようにされたフランジ真空容器内に、外部直流電圧源に接続されるアノードと、接地されるカソードとを配置し、磁石による磁場を利用してアノードとカソードとで画定される空間に持続放電を発生させ、その放電電流から真空度を測定するようにした冷陰極型電離真空計において、円筒形磁石を真空容器内に真空容器の軸線に同軸に配置し、この円筒形磁石でアノードを構成したことを特徴としている。
【００１１】
また、本発明の第２の発明では、被測定真空容器に取り付けるようにされたフランジ真空容器内に、外部直流電圧源に接続されるアノードと、接地されるカソードとを配置し、磁石による磁場を利用してアノードとカソードとで画定される空間に持続放電を発生させ、その放電電流から真空度を測定するようにした冷陰極型電離真空計において、円筒形磁石が真空容器内で真空容器の軸線に対して横向きに配置され、この円筒形磁石でアノードを構成したことを特徴としている。
さらに、本発明の第３の発明では、被測定真空容器に取り付けるようにされたフランジ真空容器内に、外部直流電圧源に接続されるアノードと、接地されるカソードとを配置し、磁石による磁場を利用してアノードとカソードとで画定される空間に持続放電を発生させ、その放電電流から真空度を測定するようにした冷陰極型電離真空計において、真空容器内に配置した磁石が両端に円板を備えた円筒形であり、真空容器の軸線に対して同軸に配置され、カソードを構成し、またアノードが円筒形磁石を貫通して設けられていることを特徴としている。
【００１２】
【作用】
このように構成した本発明の冷陰極型電離真空計においては、磁石を真空容器内に配置すると共にペニング型及びマグネトロン型として実施する場合には、アノードを円筒状磁石で構成し、逆マグネトロン型として実施する場合には、カソードを円筒状磁石で構成しているので、使用する磁石自体小型でよくしかも真空計の構造を単純にでき、その結果真空計を小型軽量化できるようになる。
【００１３】
【実施例】
以下、本発明の実施例を添付図面図１〜図６を参照して説明する。
図１には、ペニング型の冷陰極型電離真空計の一実施例を示す。図示真空計は真空容器１を有し、この真空容器１はフランジ２を介して被測定真空容器のフランジ３に取り付けられる。４はアノードで、真空容器１の軸線に同軸に配置された円筒状の磁石で構成されており、接続部５を介して電極６に接続されている。電極６は絶縁体７を介して真空容器１の壁に取り付けられており、通常２乃至3.5kVの直流電圧が印加される。また、８はアノード４の上下に真空容器１の軸線に同軸に配置された板状のカソードであり、図示していないが接地されている。円筒状の磁石から成るアノード４は符号９で示すように磁力線を形成する。
【００１４】
図２にはペニング型の冷陰極型電離真空計の別の実施例を示し、アノード及びカソードの構造において図１の実施例と相違し、その他の構成は図１の実施例と実質的に同じある。従って図１の実施例における構成要素と対応した部分は同じ符号で示す。図２の装置において、円筒状の磁石で構成されたアノード４は真空容器１の軸線に対して横向きにすなわち真空容器１の軸線に直交して配置されており、そして電極６に直接接続されている。
この場合も電極６には通常２乃至３．５ｋＶの直流電圧が印加される。磁力線は図面に符号１０で示すように真空容器１の軸線に対して直交する方向に沿って形成される。
【００１５】
図３にはマグネトロン型として実施した別の実施例を示す。この例でも前述の実施例に対応した部分は同じ符号で示す。すなわち、真空容器１はフランジ２を介して被測定真空容器のフランジ３に取り付けられる。アノード４は、図示したように真空容器１の軸線に同軸に配置された円筒状の磁石で構成されており、接続部５を介して電極６に接続されている。電極６は絶縁体７を介して真空容器１の壁に取り付けられており、そして電極６には通常２乃至３．５ｋＶの直流電圧が印 加される。また、１１は真空容器１の軸線に同軸に配置されたカソードで、細い棒部材１１ａとその両端に取り付けられた円板１１ｂとで構成されている。またカソード１１は図示していないが接地されている。円筒状の磁石から成るアノード４は符号９で示すように磁力線を形成する。
【００１６】
図４には逆マグネトロン型として実施した別の実施例を示し、アノード及びカソードの構造において図３のマグネトロン型の実施例と相違し、その他の構成は図３の実施例と実質的に同じあり、従って図３の実施例における構成要素と対応した部分は同じ符号で示す。
図４に示すように、１２は真空容器１の軸線に同軸に配置されたカソードで、円筒状の磁石１２ａの両端にドーナツ状の円板１２ｂを備えて構成されている。カソード１２は、図示していないが接地されている。１３は細い棒部材から成るアノードで、真空容器１の軸線上に配置され、そして電極６に直接接続されている。電極６には通常２乃至３．５ｋＶの直流電圧が印加される。カソード１２によって磁力線９が形成される。
【００１７】
図５及び図６にはそれぞれ図３及び図４の実施例の装置の電気回路を示し、ＡＭは放電電流を測定するための電流計であり、図示したように電気的に接続されている。電流計ＡＭには放電電流が流れる。
【００１８】
図１〜図４に示すように構成した真空計の動作において、図１及び図２の実施例の場合、円筒状アノード４と板状のカソード８で挟まれた空間に、電界と磁石製アノード４自体の磁石により発生された磁界が存在している。また図３の実施例の場合、円筒状アノード４とカソード１１で挟まれた空間に、電界とアノード４自体の磁石により発生された磁界が存在している。さらに図４に示す実施例の場合も、カソード１２と細い棒状アノード１３で挟まれた空間には磁界とカソード１２自体の磁石により発生された磁界が存在している。
これらの空間で電界放出や宇宙線などの原因で電子が発生すると、発生した電子は負電極から正電極に向かって加速されるが、磁界が存在するためローレンツの力を受けて、すぐには正電極に到達せず、空間内で螺旋運動して、長い距離を飛行する。その結果、電子が空間内の残留ガスと衝突して、残留ガスをイオン化する確率が増し、負電極と正電極との間に持続放電が発生する。放電電流は空間の残留ガス量に依存するので、この放電電流を電流計ＡＭ（図５及び図６参照）で測定することによって空間の圧力、ひいては真空計が取り付けられている被測定容器の圧力を知ることができる。
【００２１】
【発明の効果】
以上説明してきたように、本発明による磁石による磁場を利用した冷陰極真空計においては、円筒形磁石を真空計容器内に設け、且つ、その磁石でアノードを構成しているので、部品数が少なくなり、そして真空計容器の外側に磁石を設けた従来技術のものに比べて使用する磁石を小さくでき、真空計を小型軽量化することが可能になる。また磁石が小さいために、真空計外部の機器に及ぼす磁界の影響が従来のものに比べて小さくなる。
【図面の簡単な説明】
【図１】本発明の一実施例によるペニング型の冷陰極型電離真空計の概略 断面図。
【図２】本発明の別の実施例によるペニング型の冷陰極型電離真空計の概 略断面図。
【図３】本発明のさらに別の実施例によるマグネトロン型の冷陰極型電離 真空計の概略断面図。
【図４】本発明のさらに別の実施例による逆マグネトロン型の冷陰極型電 離真空計の概略断面図。
【図５】図３の真空計の電気回路図。
【図６】図４の真空計の電気回路図。
【図７】従来技術によるペニング型の冷陰極型電離真空計の一例を示す概 略断面図。
【図８】従来技術によるペニング型の冷陰極型電離真空計の別の例を示す 概略断面図。
【図９】従来技術によるマグネトロン型の冷陰極型電離真空計の一例を示 す概略断面図。
【図１０】従来技術による逆マグネトロン型の冷陰極型電離真空計の一例を 示す概略断面図。
【符号の説明】
１： 真空計の真空容器
２： 真空計のフランジ
３： 被測定真空容器のフランジ
４： アノード
５： 接続部
６： 電極
７： 絶縁体
８： カソード
９： 磁力線
10： 磁力線
11： カソード
12： カソード
13： アノード[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a cold cathode ionization vacuum gauge.
[0002]
[Prior art]
Conventionally, as a cold cathode ionization gauge, a penning type as shown in FIGS. 7 and 8, a magnetron type as shown in FIG. 9, and an inverted magnetron type as shown in FIG. Are known.
[0003]
In the Penning type cold cathode ionization vacuum gauge shown in FIG. 7, a cylindrical anode D and a cylindrical anode are placed in a vacuum vessel C having a flange B adapted to be attached to a flange A of a vacuum vessel to be measured. A plate-shaped cathode E is disposed coaxially with the axis with respect to D, and an anode D is connected to an electrode G via a connection portion F. The electrode G is insulated by an insulator H, and is usually 2 to 3.5. A DC voltage of kV is applied. The plate-shaped cathode E is not shown but is grounded. A cylindrical magnet I that forms a magnetic field in the axial direction of the cylindrical anode D is arranged outside the vacuum vessel C, and forms a magnetic line of force indicated by reference symbol J.
[0004]
In the Penning-type cold-cathode ionization gauge shown in FIG. 8, a cylindrical anode D is disposed in a vacuum vessel C transversely to the axial direction, and is insulated by an insulator H so that the wall of the vacuum vessel C is insulated. And a DC voltage of 2 to 3.5 kV is normally applied to the electrode G. The plate-like cathode E is disposed on the left and right sides of the anode D, and is grounded (not shown). Outside the vacuum vessel C, two plate-shaped magnets K for forming a magnetic field in the axial direction of the cylindrical anode D are arranged, and lines of magnetic force L are formed.
[0005]
In the magnetron type cold cathode ionization gauge shown in FIG. 9, a cylindrical anode D is coaxial with the axis of the vacuum vessel C in a vacuum vessel C having a flange B attached to the flange A of the vacuum vessel to be measured. The anode D is connected to an electrode G via a connection portion F. The electrode G is insulated by an insulator H, extends through the wall of the vacuum vessel C to the outside, and a DC voltage of usually 2 to 3.5 kV is applied. Applied. M is a cathode provided with disks at both ends of a thin rod extending along the axis of the vacuum vessel C, and is grounded (not shown). I is a cylindrical magnet that forms a magnetic field in the axial direction of the cylindrical anode D, and has magnetic lines of force indicated by reference symbol J.
[0006]
In the inverted magnetron type cold cathode ionization gauge shown in FIG. 10, a cylindrical donut disk is provided at both ends in a vacuum vessel C having a flange B attached to a flange A of a vacuum vessel to be measured. The cathode N is arranged coaxially with the axis of the vacuum vessel C and is grounded (not shown). O is a thin rod-shaped anode extending along the axis of the vacuum vessel C and connected to the electrode G. The electrode G is insulated by an insulator H, and a DC voltage of 2 to 3.5 kV is normally applied. I is a cylindrical magnet that forms a magnetic field in the axial direction of the thin rod-shaped anode O, and has magnetic lines of force indicated by J.
[0007]
In the case of the Penning-type cold-cathode ionization gauge shown in FIGS. 7 and 8, an electric field and a magnetic field exist in a space between a cylindrical anode D and a plate-shaped cathode E. In the case of the magnetron type cold cathode ionization gauge shown in FIG. 9, an electric field and a magnetic field exist in a space between the cylindrical anode D and the cathode M. Further, also in the case of FIG. 10, an electric field and a magnetic field are formed in a space between a cathode N having a cylindrical donut-shaped disk at both ends and a thin rod-shaped anode O.
When electrons are generated in these spaces due to field emission or cosmic rays, the electrons are accelerated from the negative electrode toward the positive electrode.However, due to the presence of a magnetic field, the electrons receive Lorentz's force and immediately Instead of reaching the positive electrode, it spirals in space and flies a long distance. As a result, the probability of colliding with the residual gas in the space and ionizing the residual gas increases, and a sustained discharge occurs between the negative electrode and the positive electrode. Since the discharge current depends on the amount of residual gas in the space, by measuring the discharge current, it is possible to know the pressure in the space, and thus the pressure of the vacuum vessel to which the vacuum gauge is attached.
[0008]
[Problems to be solved by the invention]
In a conventional cold cathode ionization vacuum gauge, a cylindrical or plate-shaped magnet is arranged outside the vacuum gauge container in order to generate a magnetic field in the discharge space, and a magnetic field of 1,000 to 1,500 gauss is generally used. Is required, the magnet used is relatively large, and thus the vacuum gauge itself is heavy and large.
[0009]
Accordingly, an object of the present invention is to solve the problems associated with such a conventional device and to provide a cold cathode ionization vacuum gauge that can be reduced in size and weight.
[0010]
[Means for Solving the Problems]
In order to achieve the above object, according to a first aspect of the present invention, an anode connected to an external DC voltage source, a cathode grounded, and a flanged vacuum vessel adapted to be attached to a vacuum vessel to be measured are provided. In a cold-cathode ionization gauge, a continuous discharge is generated in a space defined by an anode and a cathode using a magnetic field generated by a magnet, and the degree of vacuum is measured from the discharge current. Are arranged coaxially with the axis of the vacuum vessel in the vacuum vessel, and the anode is constituted by this cylindrical magnet.
[0011]
According to a second aspect of the present invention, an anode connected to an external DC voltage source and a grounded cathode are arranged in a flanged vacuum vessel adapted to be attached to a vacuum vessel to be measured, and a magnetic field generated by a magnet is provided. In a cold cathode ionization gauge that generates a sustained discharge in a space defined by an anode and a cathode by using the above, and measures the degree of vacuum from the discharge current, a cylindrical magnet has a vacuum vessel inside a vacuum vessel. And the anode is constituted by this cylindrical magnet.
Further, in the third invention of the present invention, an anode connected to an external DC voltage source and a cathode grounded are arranged in a flanged vacuum vessel adapted to be attached to a vacuum vessel to be measured, and a magnetic field generated by a magnet is provided. In a cold-cathode ionization gauge that generates a sustained discharge in the space defined by the anode and the cathode by using the magnet and measures the degree of vacuum from the discharge current, magnets arranged in a vacuum vessel are at both ends. It is cylindrical with a disk, is arranged coaxially with respect to the axis of the vacuum vessel, constitutes a cathode, and is characterized in that an anode is provided through a cylindrical magnet.
[0012]
[Action]
In the cold-cathode ionization gauge of the present invention configured as described above, when the magnet is arranged in the vacuum vessel and implemented as a Penning type and a magnetron type, the anode is formed of a cylindrical magnet, and an inverted magnetron type In this case, since the cathode is formed of a cylindrical magnet, the magnet used can be small and the structure of the vacuum gauge can be simplified, and as a result, the vacuum gauge can be reduced in size and weight.
[0013]
【Example】
Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings FIGS.
FIG. 1 shows an embodiment of a Penning type cold cathode ionization gauge. The illustrated vacuum gauge has a vacuum vessel 1, which is attached via a flange 2 to a flange 3 of the vacuum vessel to be measured. Reference numeral 4 denotes an anode, which is constituted by a cylindrical magnet arranged coaxially with the axis of the vacuum vessel 1, and is connected to the electrode 6 via the connection part 5. The electrode 6 is attached to the wall of the vacuum vessel 1 via an insulator 7, and a DC voltage of usually 2 to 3.5 kV is applied. Reference numeral 8 denotes a plate-like cathode disposed above and below the anode 4 coaxially with the axis of the vacuum vessel 1, and is grounded, not shown. The anode 4 formed of a cylindrical magnet forms magnetic lines of force as indicated by reference numeral 9.
[0014]
FIG. 2 shows another embodiment of the Penning type cold cathode ionization gauge, which differs from the embodiment of FIG. 1 in the structure of the anode and the cathode, and other configurations are substantially the same as those of the embodiment of FIG. is there. Therefore, parts corresponding to the components in the embodiment of FIG. 1 are denoted by the same reference numerals. In the device of FIG. 2, the anode 4 constituted by a cylindrical magnet is arranged transversely to the axis of the vacuum vessel 1, ie perpendicular to the axis of the vacuum vessel 1, and is connected directly to the electrode 6. I have.
Also in this case, a DC voltage of 2 to 3.5 kV is normally applied to the electrode 6. The lines of magnetic force are formed along a direction orthogonal to the axis of the vacuum vessel 1 as indicated by reference numeral 10 in the drawing.
[0015]
FIG. 3 shows another embodiment implemented as a magnetron type. Also in this example, portions corresponding to the above-described embodiment are denoted by the same reference numerals. That is, the vacuum vessel 1 is attached to the flange 3 of the vacuum vessel to be measured via the flange 2. The anode 4 is composed of a cylindrical magnet arranged coaxially with the axis of the vacuum vessel 1 as shown in the figure, and is connected to the electrode 6 via the connection part 5. The electrode 6 is mounted on the wall of the vacuum vessel 1 via an insulator 7, and a DC voltage of usually 2 to 3.5 kV is applied to the electrode 6. Reference numeral 11 denotes a cathode which is arranged coaxially with the axis of the vacuum vessel 1, and comprises a thin rod member 11a and disks 11b attached to both ends thereof. Although not shown, the cathode 11 is grounded. The anode 4 formed of a cylindrical magnet forms magnetic lines of force as indicated by reference numeral 9.
[0016]
FIG. 4 shows another embodiment implemented as an inverted magnetron type. The structure of the anode and the cathode is different from that of the magnetron type shown in FIG. 3, and other configurations are substantially the same as those of the embodiment shown in FIG. Therefore, parts corresponding to the components in the embodiment of FIG. 3 are denoted by the same reference numerals.
As shown in FIG. 4, reference numeral 12 denotes a cathode which is arranged coaxially with the axis of the vacuum vessel 1, and is provided with a donut-shaped disk 12b at both ends of a cylindrical magnet 12a. The cathode 12 is grounded, not shown. Reference numeral 13 denotes an anode composed of a thin rod member, which is arranged on the axis of the vacuum vessel 1 and is directly connected to the electrode 6. Normally, a DC voltage of 2 to 3.5 kV is applied to the electrode 6. The lines of magnetic force 9 are formed by the cathode 12.
[0017]
FIGS. 5 and 6 show the electric circuits of the devices of the embodiments of FIGS. 3 and 4, respectively, where AM is an ammeter for measuring the discharge current, which is electrically connected as shown. A discharge current flows through the ammeter AM.
[0018]
In the operation of the vacuum gauge configured as shown in FIGS. 1 to 4, in the case of the embodiment of FIGS. 1 and 2, an electric field and an anode made of magnet are provided in a space between the cylindrical anode 4 and the plate-like cathode 8. 4 there is a magnetic field generated by its own magnet. In the case of the embodiment shown in FIG. 3, an electric field and a magnetic field generated by the magnet of the anode 4 exist in the space between the cylindrical anode 4 and the cathode 11. Further, also in the embodiment shown in FIG. 4, a magnetic field and a magnetic field generated by the magnet of the cathode 12 itself exist in the space between the cathode 12 and the thin rod-shaped anode 13.
When electrons are generated in these spaces due to field emission or cosmic rays, the generated electrons are accelerated from the negative electrode toward the positive electrode. Instead of reaching the positive electrode, it spirals in space and flies a long distance. As a result, the probability that the electrons collide with the residual gas in the space and ionize the residual gas increases, and a sustained discharge occurs between the negative electrode and the positive electrode. Since the discharge current depends on the amount of residual gas in the space, the discharge current is measured by an ammeter AM (see FIGS. 5 and 6) to determine the pressure in the space, and thus the pressure in the container to be measured, to which the vacuum gauge is attached. You can know.
[0021]
【The invention's effect】
As described above, in the cold cathode vacuum gauge utilizing the magnetic field generated by the magnet according to the present invention, the cylindrical magnet is provided in the vacuum gauge container, and the magnet constitutes the anode. The number of magnets to be used can be smaller than that of the prior art in which magnets are provided outside the vacuum gauge container, and the vacuum gauge can be reduced in size and weight. Further, since the magnet is small, the influence of the magnetic field on the device outside the vacuum gauge is smaller than that of the conventional one.
[Brief description of the drawings]
FIG. 1 is a schematic sectional view of a Penning-type cold cathode ionization gauge according to an embodiment of the present invention.
FIG. 2 is a schematic cross-sectional view of a Penning-type cold cathode ionization gauge according to another embodiment of the present invention.
FIG. 3 is a schematic sectional view of a magnetron-type cold cathode ionization vacuum gauge according to still another embodiment of the present invention.
FIG. 4 is a schematic sectional view of an inverted magnetron cold cathode ionization gauge according to still another embodiment of the present invention.
FIG. 5 is an electric circuit diagram of the vacuum gauge of FIG. 3;
FIG. 6 is an electric circuit diagram of the vacuum gauge of FIG. 4;
FIG. 7 is a schematic cross-sectional view showing an example of a Penning type cold cathode ionization gauge according to the related art.
FIG. 8 is a schematic sectional view showing another example of a Penning-type cold cathode ionization gauge according to the related art.
FIG. 9 is a schematic sectional view showing an example of a magnetron type cold cathode ionization gauge according to the related art.
FIG. 10 is a schematic cross-sectional view showing an example of a conventional magnetron type cold cathode ionization vacuum gauge according to the related art.
[Explanation of symbols]
1: Vacuum vessel of vacuum gauge 2: Flange of vacuum gauge 3: Flange of vacuum vessel to be measured 4: Anode 5: Connection 6: Electrode 7: Insulator 8: Cathode 9: Line of magnetic force
10: Magnetic field lines
11: Cathode
12: Cathode
13: Anode

Claims (3)

被測定真空容器に取り付けるようにされたフランジ真空容器内に、外部直流電圧源に接続されるアノードと、接地されるカソードとを配置し、磁石による磁場を利用してアノードとカソードとで画定される空間に持続放電を発生させ、その放電電流から真空度を測定するようにした冷陰極型電離真空計において、円筒形磁石を真空容器内に真空容器の軸線に同軸に配置し、この円筒形磁石でアノードを構成したことを特徴とする冷陰極電離真空計。An anode connected to an external DC voltage source and a cathode grounded are arranged in a flanged vacuum vessel adapted to be attached to the vacuum vessel to be measured, and are defined by the anode and the cathode using a magnetic field by a magnet. In a cold-cathode ionization gauge in which a sustained discharge is generated in a space and the degree of vacuum is measured from the discharge current, a cylindrical magnet is arranged in a vacuum vessel coaxially with the axis of the vacuum vessel. cold cathode ionization vacuum gauge, characterized by being configured to anodic a magnet. 被測定真空容器に取り付けるようにされたフランジ真空容器内に、外部直流電圧源に接続されるアノードと、接地されるカソードとを配置し、磁石による磁場を利用してアノードとカソードとで画定される空間に持続放電を発生させ、その放電電流から真空度を測定するようにした冷陰極型電離真空計において、円筒形磁石が真空容器内で真空容器の軸線に対して横向きに配置され、この円筒形磁石でアノードを構成したことを特徴とする冷陰極電離真空計。 An anode connected to an external DC voltage source and a cathode grounded are arranged in a flanged vacuum vessel adapted to be attached to the vacuum vessel to be measured, and are defined by the anode and the cathode using a magnetic field by a magnet. In a cold-cathode ionization gauge that generates a sustained discharge in a space and measures the degree of vacuum from the discharge current, a cylindrical magnet is disposed in the vacuum vessel in a direction transverse to the axis of the vacuum vessel. A cold-cathode ionization gauge , wherein the anode is constituted by a cylindrical magnet . 被測定真空容器に取り付けるようにされたフランジ真空容器内に、外 部直流電圧源に接続されるアノードと、接地されるカソードとを配置し、磁石による磁場を利用してアノードとカソードとで画定される空間に持続放電を発生させ、その放電電流から真空度を測定するようにした冷陰極型電離真空計において、真空容器内に配置した磁石が両端に円板を備えた円筒形であり、真空容器の軸線に対して同軸に配置され、カソードを構成し、またアノードが円筒形磁石を貫通して設けられていることを特徴とする冷陰極電離真空計。 Defined in in the flange vacuum containers to be attached to the vacuum vessel to be measured, an anode connected to an external DC voltage source, is arranged and a cathode grounded, the anode and the cathode by utilizing the magnetic field generated by magnet In a cold-cathode ionization gauge in which a sustained discharge is generated in a space to be measured and the degree of vacuum is measured from the discharge current, a magnet arranged in a vacuum vessel has a cylindrical shape having disks at both ends, A cold-cathode ionization gauge which is arranged coaxially with respect to the axis of a vacuum vessel, constitutes a cathode, and has an anode provided through a cylindrical magnet .
JP17624396A 1996-07-05 1996-07-05 Cold cathode ionization gauge Expired - Lifetime JP3602917B2 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011257377A (en) * 2010-05-14 2011-12-22 Canon Anelva Corp Cold cathode ionization vacuum gauge, vacuum processing apparatus equipped with cold cathode ionization vacuum gauge, discharge starting auxiliary electrode used for cold cathode ionization vacuum gauge, and method of measuring pressure using cold cathode ionization vacuum gauge

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JP2010151623A (en) 2008-12-25 2010-07-08 Canon Anelva Corp Cold cathode ionization gauge and discharge start assist electrode plate for use in the same
JP5632644B2 (en) 2009-05-28 2014-11-26 キヤノンアネルバ株式会社 Cold cathode ionization vacuum gauge, discharge starting auxiliary electrode and vacuum processing apparatus
CH707685A1 (en) * 2013-03-06 2014-09-15 Inficon Gmbh Ionization vacuum measuring cell with shielding.
JP6111129B2 (en) * 2013-04-18 2017-04-05 有限会社真空実験室 Reverse magnetron type cold cathode ionization vacuum device
JP6131113B2 (en) 2013-06-13 2017-05-17 キヤノンアネルバ株式会社 Cold cathode ionization vacuum gauge and inner wall protection member

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011257377A (en) * 2010-05-14 2011-12-22 Canon Anelva Corp Cold cathode ionization vacuum gauge, vacuum processing apparatus equipped with cold cathode ionization vacuum gauge, discharge starting auxiliary electrode used for cold cathode ionization vacuum gauge, and method of measuring pressure using cold cathode ionization vacuum gauge

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