JPH0130224B2 - - Google Patents
Info
- Publication number
- JPH0130224B2 JPH0130224B2 JP8270679A JP8270679A JPH0130224B2 JP H0130224 B2 JPH0130224 B2 JP H0130224B2 JP 8270679 A JP8270679 A JP 8270679A JP 8270679 A JP8270679 A JP 8270679A JP H0130224 B2 JPH0130224 B2 JP H0130224B2
- Authority
- JP
- Japan
- Prior art keywords
- acid
- magnetic
- thin film
- deposited
- ferromagnetic thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005291 magnetic effect Effects 0.000 claims description 19
- 230000005294 ferromagnetic effect Effects 0.000 claims description 18
- 239000010409 thin film Substances 0.000 claims description 16
- 239000000314 lubricant Substances 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 238000007740 vapor deposition Methods 0.000 claims description 5
- 238000000151 deposition Methods 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 3
- 239000012298 atmosphere Substances 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims description 2
- UKMSUNONTOPOIO-UHFFFAOYSA-N docosanoic acid Chemical compound CCCCCCCCCCCCCCCCCCCCCC(O)=O UKMSUNONTOPOIO-UHFFFAOYSA-N 0.000 description 14
- 239000010408 film Substances 0.000 description 13
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 235000021357 Behenic acid Nutrition 0.000 description 7
- 229940116226 behenic acid Drugs 0.000 description 7
- 235000014113 dietary fatty acids Nutrition 0.000 description 7
- 239000000194 fatty acid Substances 0.000 description 7
- 229930195729 fatty acid Natural products 0.000 description 7
- -1 fatty acid esters Chemical class 0.000 description 7
- 239000000696 magnetic material Substances 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 150000004665 fatty acids Chemical class 0.000 description 5
- LYRFLYHAGKPMFH-UHFFFAOYSA-N octadecanamide Chemical compound CCCCCCCCCCCCCCCCCC(N)=O LYRFLYHAGKPMFH-UHFFFAOYSA-N 0.000 description 5
- 238000007738 vacuum evaporation Methods 0.000 description 5
- YZXBAPSDXZZRGB-DOFZRALJSA-N arachidonic acid Chemical compound CCCCC\C=C/C\C=C/C\C=C/C\C=C/CCCC(O)=O YZXBAPSDXZZRGB-DOFZRALJSA-N 0.000 description 4
- POULHZVOKOAJMA-UHFFFAOYSA-N dodecanoic acid Chemical compound CCCCCCCCCCCC(O)=O POULHZVOKOAJMA-UHFFFAOYSA-N 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- IPCSVZSSVZVIGE-UHFFFAOYSA-N hexadecanoic acid Chemical compound CCCCCCCCCCCCCCCC(O)=O IPCSVZSSVZVIGE-UHFFFAOYSA-N 0.000 description 4
- 229910052742 iron Inorganic materials 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 239000002253 acid Substances 0.000 description 3
- 229910001566 austenite Inorganic materials 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000007733 ion plating Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- OYHQOLUKZRVURQ-NTGFUMLPSA-N (9Z,12Z)-9,10,12,13-tetratritiooctadeca-9,12-dienoic acid Chemical compound C(CCCCCCC\C(=C(/C\C(=C(/CCCCC)\[3H])\[3H])\[3H])\[3H])(=O)O OYHQOLUKZRVURQ-NTGFUMLPSA-N 0.000 description 2
- WRIDQFICGBMAFQ-UHFFFAOYSA-N (E)-8-Octadecenoic acid Natural products CCCCCCCCCC=CCCCCCCC(O)=O WRIDQFICGBMAFQ-UHFFFAOYSA-N 0.000 description 2
- LQJBNNIYVWPHFW-UHFFFAOYSA-N 20:1omega9c fatty acid Natural products CCCCCCCCCCC=CCCCCCCCC(O)=O LQJBNNIYVWPHFW-UHFFFAOYSA-N 0.000 description 2
- QSBYPNXLFMSGKH-UHFFFAOYSA-N 9-Heptadecensaeure Natural products CCCCCCCC=CCCCCCCCC(O)=O QSBYPNXLFMSGKH-UHFFFAOYSA-N 0.000 description 2
- 229910020630 Co Ni Inorganic materials 0.000 description 2
- 229910002440 Co–Ni Inorganic materials 0.000 description 2
- 239000005639 Lauric acid Substances 0.000 description 2
- HPEUJPJOZXNMSJ-UHFFFAOYSA-N Methyl stearate Chemical compound CCCCCCCCCCCCCCCCCC(=O)OC HPEUJPJOZXNMSJ-UHFFFAOYSA-N 0.000 description 2
- 239000005642 Oleic acid Substances 0.000 description 2
- ZQPPMHVWECSIRJ-UHFFFAOYSA-N Oleic acid Natural products CCCCCCCCC=CCCCCCCCC(O)=O ZQPPMHVWECSIRJ-UHFFFAOYSA-N 0.000 description 2
- 235000021314 Palmitic acid Nutrition 0.000 description 2
- 235000021355 Stearic acid Nutrition 0.000 description 2
- 150000007513 acids Chemical class 0.000 description 2
- DTOSIQBPPRVQHS-PDBXOOCHSA-N alpha-linolenic acid Chemical compound CC\C=C/C\C=C/C\C=C/CCCCCCCC(O)=O DTOSIQBPPRVQHS-PDBXOOCHSA-N 0.000 description 2
- 235000020661 alpha-linolenic acid Nutrition 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 235000021342 arachidonic acid Nutrition 0.000 description 2
- 229940114079 arachidonic acid Drugs 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 150000002191 fatty alcohols Chemical class 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- BXWNKGSJHAJOGX-UHFFFAOYSA-N hexadecan-1-ol Chemical compound CCCCCCCCCCCCCCCCO BXWNKGSJHAJOGX-UHFFFAOYSA-N 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- QXJSBBXBKPUZAA-UHFFFAOYSA-N isooleic acid Natural products CCCCCCCC=CCCCCCCCCC(O)=O QXJSBBXBKPUZAA-UHFFFAOYSA-N 0.000 description 2
- 229960004488 linolenic acid Drugs 0.000 description 2
- KQQKGWQCNNTQJW-UHFFFAOYSA-N linolenic acid Natural products CC=CCCC=CCC=CCCCCCCCC(O)=O KQQKGWQCNNTQJW-UHFFFAOYSA-N 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000012778 molding material Substances 0.000 description 2
- 238000010137 moulding (plastic) Methods 0.000 description 2
- WQEPLUUGTLDZJY-UHFFFAOYSA-N n-Pentadecanoic acid Natural products CCCCCCCCCCCCCCC(O)=O WQEPLUUGTLDZJY-UHFFFAOYSA-N 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- GLDOVTGHNKAZLK-UHFFFAOYSA-N octadecan-1-ol Chemical compound CCCCCCCCCCCCCCCCCCO GLDOVTGHNKAZLK-UHFFFAOYSA-N 0.000 description 2
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 2
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 2
- ZQPPMHVWECSIRJ-KTKRTIGZSA-N oleic acid Chemical compound CCCCCCCC\C=C/CCCCCCCC(O)=O ZQPPMHVWECSIRJ-KTKRTIGZSA-N 0.000 description 2
- 235000021313 oleic acid Nutrition 0.000 description 2
- 239000012188 paraffin wax Substances 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 239000000344 soap Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 239000008117 stearic acid Substances 0.000 description 2
- 229910052712 strontium Inorganic materials 0.000 description 2
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical class [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 2
- 239000004094 surface-active agent Substances 0.000 description 2
- TUNFSRHWOTWDNC-HKGQFRNVSA-N tetradecanoic acid Chemical compound CCCCCCCCCCCCC[14C](O)=O TUNFSRHWOTWDNC-HKGQFRNVSA-N 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- FLPJVCMIKUWSDR-UHFFFAOYSA-N 2-(4-formylphenoxy)acetamide Chemical compound NC(=O)COC1=CC=C(C=O)C=C1 FLPJVCMIKUWSDR-UHFFFAOYSA-N 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical class [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229920002284 Cellulose triacetate Polymers 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical class [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910020637 Co-Cu Inorganic materials 0.000 description 1
- 229910020646 Co-Sn Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910020707 Co—Pt Inorganic materials 0.000 description 1
- 229910020709 Co—Sn Inorganic materials 0.000 description 1
- 229910020514 Co—Y Inorganic materials 0.000 description 1
- ORAWFNKFUWGRJG-UHFFFAOYSA-N Docosanamide Chemical compound CCCCCCCCCCCCCCCCCCCCCC(N)=O ORAWFNKFUWGRJG-UHFFFAOYSA-N 0.000 description 1
- 229910017082 Fe-Si Inorganic materials 0.000 description 1
- 229910002549 Fe–Cu Inorganic materials 0.000 description 1
- 229910017133 Fe—Si Inorganic materials 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical class C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229910018657 Mn—Al Inorganic materials 0.000 description 1
- 229910018054 Ni-Cu Inorganic materials 0.000 description 1
- 229910018481 Ni—Cu Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical class [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
- 229920002433 Vinyl chloride-vinyl acetate copolymer Polymers 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- VBICKXHEKHSIBG-UHFFFAOYSA-N beta-monoglyceryl stearate Natural products CCCCCCCCCCCCCCCCCC(=O)OCC(O)CO VBICKXHEKHSIBG-UHFFFAOYSA-N 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Chemical class 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229960000541 cetyl alcohol Drugs 0.000 description 1
- 229940074979 cetyl palmitate Drugs 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- ILRSCQWREDREME-UHFFFAOYSA-N dodecanamide Chemical compound CCCCCCCCCCCC(N)=O ILRSCQWREDREME-UHFFFAOYSA-N 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- CAMHHLOGFDZBBG-UHFFFAOYSA-N epoxidized methyl oleate Natural products CCCCCCCCC1OC1CCCCCCCC(=O)OC CAMHHLOGFDZBBG-UHFFFAOYSA-N 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- HSEMFIZWXHQJAE-UHFFFAOYSA-N hexadecanamide Chemical compound CCCCCCCCCCCCCCCC(N)=O HSEMFIZWXHQJAE-UHFFFAOYSA-N 0.000 description 1
- PXDJXZJSCPSGGI-UHFFFAOYSA-N hexadecanoic acid hexadecyl ester Natural products CCCCCCCCCCCCCCCCOC(=O)CCCCCCCCCCCCCCC PXDJXZJSCPSGGI-UHFFFAOYSA-N 0.000 description 1
- VLHZUYUOEGBBJB-UHFFFAOYSA-N hydroxy stearic acid Natural products OCCCCCCCCCCCCCCCCCC(O)=O VLHZUYUOEGBBJB-UHFFFAOYSA-N 0.000 description 1
- SFIHQZFZMWZOJV-HZJYTTRNSA-N linoleamide Chemical compound CCCCC\C=C/C\C=C/CCCCCCCC(N)=O SFIHQZFZMWZOJV-HZJYTTRNSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 229910001004 magnetic alloy Inorganic materials 0.000 description 1
- 239000004200 microcrystalline wax Substances 0.000 description 1
- QEALYLRSRQDCRA-UHFFFAOYSA-N myristamide Chemical compound CCCCCCCCCCCCCC(N)=O QEALYLRSRQDCRA-UHFFFAOYSA-N 0.000 description 1
- FTQWRYSLUYAIRQ-UHFFFAOYSA-N n-[(octadecanoylamino)methyl]octadecanamide Chemical compound CCCCCCCCCCCCCCCCCC(=O)NCNC(=O)CCCCCCCCCCCCCCCCC FTQWRYSLUYAIRQ-UHFFFAOYSA-N 0.000 description 1
- RKISUIUJZGSLEV-UHFFFAOYSA-N n-[2-(octadecanoylamino)ethyl]octadecanamide Chemical compound CCCCCCCCCCCCCCCCCC(=O)NCCNC(=O)CCCCCCCCCCCCCCCCC RKISUIUJZGSLEV-UHFFFAOYSA-N 0.000 description 1
- GOQYKNQRPGWPLP-UHFFFAOYSA-N n-heptadecyl alcohol Natural products CCCCCCCCCCCCCCCCCO GOQYKNQRPGWPLP-UHFFFAOYSA-N 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- FATBGEAMYMYZAF-KTKRTIGZSA-N oleamide Chemical compound CCCCCCCC\C=C/CCCCCCCC(N)=O FATBGEAMYMYZAF-KTKRTIGZSA-N 0.000 description 1
- 229960002969 oleic acid Drugs 0.000 description 1
- 150000002894 organic compounds Chemical group 0.000 description 1
- 150000002902 organometallic compounds Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- AJCDFVKYMIUXCR-UHFFFAOYSA-N oxobarium;oxo(oxoferriooxy)iron Chemical compound [Ba]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O AJCDFVKYMIUXCR-UHFFFAOYSA-N 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920005749 polyurethane resin Polymers 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Chemical class 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Chemical class 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 229940037312 stearamide Drugs 0.000 description 1
- 229960004274 stearic acid Drugs 0.000 description 1
- 229920003048 styrene butadiene rubber Polymers 0.000 description 1
- 239000003760 tallow Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 235000016804 zinc Nutrition 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Description
【発明の詳細な説明】
本発明は磁気記録媒体の製造方法に関するもの
で、特に強磁性体蒸着薄膜型磁気記録媒体の膜面
強度、滑り性の改良に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a magnetic recording medium, and more particularly to improving the film surface strength and slipperiness of a ferromagnetic vapor-deposited thin film magnetic recording medium.
従来より磁気記録媒体としてはγ―Fe2O3、Co
をドープしたγ―Fe2O3、Fe3O4、CrO2あるいは
強磁性体合金等の微小粉末磁性材料を塩化ビニル
―酢酸ビニル共重合体、スチレン―ブタジエン共
重合体、エポキシ樹脂、ポリウレタン樹脂等の有
機バインダ中に分散させ、非磁性体基板上に塗
布、乾燥させる塗布型のものが広く使用されてい
る。近年、高密度記録への要求の高まりと共にス
パツタリング、真空蒸着、イオンプレーテイング
等の方法により形成される強磁性体金属薄膜はバ
インダを使用しないいわゆる非バインダ型の磁気
記録媒体として注目を浴びており実用化への努力
が種々行なわれている。しかしながら、これらは
単に非磁性体基板上に強磁性体薄膜を形成したの
みであり、従来の塗布型のものに比較して走行中
にヘツドと接触により磁性体層が剥離したり傷つ
いたりする欠点を有している。 Conventionally, γ-Fe 2 O 3 , Co
Fine powder magnetic materials such as γ-Fe 2 O 3 , Fe 3 O 4 , CrO 2 or ferromagnetic alloy doped with vinyl chloride-vinyl acetate copolymer, styrene-butadiene copolymer, epoxy resin, polyurethane resin A coating type is widely used, in which it is dispersed in an organic binder such as, coated on a non-magnetic substrate, and dried. In recent years, with the increasing demand for high-density recording, ferromagnetic metal thin films formed by methods such as sputtering, vacuum evaporation, and ion plating have been attracting attention as so-called binder-free magnetic recording media that do not use binders. Various efforts are being made to put it into practical use. However, these simply form a ferromagnetic thin film on a non-magnetic substrate, and have the disadvantage that the magnetic layer may peel off or be damaged due to contact with the head during running compared to conventional coated type. have.
上記の欠点を改良するために、特開昭52―
153707に非バインダ型磁気記録媒体表面に高分子
材料を塗布することにより被覆する方法が開示さ
れている。また特開昭53―88704にはHLB値が５
〜30の界面活性剤を湿布により設ける方法が述べ
られている。これらの方法は湿式法であるため溶
媒を使用し、公害発生の恐れがあり、また防爆等
のため附帯設備を必要とする。さらに強磁性体薄
膜を蒸着した後真空装置から取り出したり高分子
材料や界面活性剤を塗布するために取り扱う際
に、強磁性体薄膜が空気に触れ、表面が酸化等に
より変質したり、摩擦によりピンホールが増加し
たりして、ドロツプアウトの原因となる等の問題
がある。 In order to improve the above drawbacks,
No. 153,707 discloses a method of coating the surface of a non-binder type magnetic recording medium by applying a polymeric material thereto. In addition, JP-A-53-88704 has an HLB value of 5.
A method of applying ~30 surfactants by poultice is described. Since these methods are wet methods, they use solvents, may cause pollution, and require incidental equipment for explosion protection. Furthermore, after the ferromagnetic thin film has been deposited, when it is taken out of the vacuum equipment or handled for coating with polymeric materials or surfactants, the ferromagnetic thin film comes into contact with air, and the surface may change due to oxidation, etc., or due to friction. There are problems such as an increase in pinholes, which may cause dropouts.
本発明の目的は上記の欠点を改良した新規な磁
気記録媒体の製造方法を提供することである。 An object of the present invention is to provide a novel method for manufacturing a magnetic recording medium that improves the above-mentioned drawbacks.
本発明は非磁性基板上に強磁性体薄膜を蒸着に
より設けた後、前記強磁性体薄膜を大気に曝する
ことなく、その表面に室温における蒸気圧が５×
10-5トール以下の固体状の有機物滑剤を蒸着する
ことを特徴とする磁気記録媒体の製造方法を提供
するものである。 In the present invention, after providing a ferromagnetic thin film on a non-magnetic substrate by vapor deposition, the surface of the ferromagnetic thin film is not exposed to the atmosphere, and the vapor pressure at room temperature is 5×
The present invention provides a method for manufacturing a magnetic recording medium, which comprises depositing a solid organic lubricant having a pressure of 10 -5 Torr or less.
本発明において蒸着とは、通常の抵抗加熱式真
空蒸着はもちろんであるが、電子ビーム加熱式真
空蒸着、スパツタリング法、イオンプレーテイン
グ法等を含むものである。 In the present invention, evaporation includes not only ordinary resistance heating vacuum evaporation, but also electron beam heating vacuum evaporation, sputtering, ion plating, and the like.
また本発明において滑剤とは、JISK6900に規
定されている如くプラスチツク成形材料を加熱成
形する際、その流動性をよくする作用又は成形品
の型離れをよくする作用を持つ化合物のことであ
る。上記滑剤のうち蒸着可能な有機物滑剤とは、
有機物、有機金属化合物滑剤で室温における蒸気
圧が５×10-5トール以下の固体状のものである。
蒸着前の化合物の組成と蒸着膜被膜の組成とが異
つていても差し支えはない。上記の蒸着可能な有
機物滑剤のうち好ましいものは、パラフイン系炭
化水素、高級脂肪酸、オキシ脂肪酸、脂肪酸アミ
ド、脂肪酸エステル、脂肪アルコール、金属石け
ん等である。以下にこれらのうち代表的なものを
例示する。パラフイン系炭化水素としては、天然
パラフイン、マイクロワツクス等がある。高級脂
肪酸としては、ラウリン酸、ミリスチン酸、パル
ミチン酸、ステアリン酸、ベヘン酸、オレイン
酸、リノール酸、リノレン酸、アラキドン酸等で
ある。オキシ脂肪酸としては、オキシステアリン
酸、ラノパルミチン酸等がある。脂肪酸アミドと
しては、ラウリン酸アミド、ミリスチン酸アミ
ド、パルミチン酸アミド、ステアリン酸アミド、
ベヘン酸アミド、オレイン酸アミド、リノール酸
アミド、エシル酸アミド、メチレンビスステアロ
アミド、エチレンビスステアロアミド、硬化牛脂
アミド等がある。脂肪酸エステルとしては、ステ
アリン酸メチル、パルミチン酸セチル、ステアリ
ン酸モノグリセリド等がある。脂肪アルコールと
しては、セチルアルコール、ステアリルアルコー
ル等がある。金属石けんとしては、炭素数12〜30
の脂肪酸と種々の金属とから得られる化合物であ
り、ラウリン酸、ミリスチン酸、パルミチン酸、
ステアリン酸、ベヘン酸、オレイン酸、リノール
酸、リノレン酸、アラキドン酸等の亜鉛、銅、マ
グネシウム、ニツケル、鉄、アルミニウム、鉛、
クロム、カルシウム、ナトリウム、カリウム、ス
トロンチウム等の塩である。 Furthermore, in the present invention, a lubricant refers to a compound that has the effect of improving the fluidity of a plastic molding material or the ability to improve mold release of a molded product when a plastic molding material is heat-molded as defined in JISK6900. Among the above lubricants, organic lubricants that can be vapor deposited are:
It is an organic or organometallic compound lubricant in solid form with a vapor pressure of 5×10 -5 Torr or less at room temperature.
There is no problem even if the composition of the compound before vapor deposition and the composition of the vapor-deposited film are different. Preferred among the organic lubricants that can be vapor deposited are paraffinic hydrocarbons, higher fatty acids, oxyfatty acids, fatty acid amides, fatty acid esters, fatty alcohols, metal soaps, and the like. Typical examples of these are listed below. Paraffin hydrocarbons include natural paraffin, microwax, and the like. Examples of higher fatty acids include lauric acid, myristic acid, palmitic acid, stearic acid, behenic acid, oleic acid, linoleic acid, linolenic acid, and arachidonic acid. Examples of oxyfatty acids include oxystearic acid and lanopalmitic acid. Fatty acid amides include lauric acid amide, myristic acid amide, palmitic acid amide, stearic acid amide,
Examples include behenic acid amide, oleic acid amide, linoleic acid amide, ethyl acid amide, methylene bis stearamide, ethylene bis stearamide, and hardened tallow amide. Examples of fatty acid esters include methyl stearate, cetyl palmitate, and stearic acid monoglyceride. Examples of fatty alcohols include cetyl alcohol and stearyl alcohol. For metal soap, the carbon number is 12 to 30.
It is a compound obtained from fatty acids and various metals, including lauric acid, myristic acid, palmitic acid,
Zinc, copper, magnesium, nickel, iron, aluminum, lead, stearic acid, behenic acid, oleic acid, linoleic acid, linolenic acid, arachidonic acid, etc.
Salts of chromium, calcium, sodium, potassium, strontium, etc.
上記の滑剤は一種だけ蒸着してもよいし、二種
以上蒸着して積層したり、あるいは同時蒸着して
混合層にしてもよい。 Only one kind of the above lubricant may be deposited, or two or more kinds of lubricants may be deposited and laminated, or they may be deposited simultaneously to form a mixed layer.
滑剤の蒸着量は膜面強度、滑り性が良好であれ
ば特に限定されるものではないが、少量であれば
少量であるほど好ましい。通常は0.5ｇ／m2以下
であるが、0.2ｇ／m2以下が特に好ましい。また
蒸着された滑剤層はいわゆる層状構造ではなくて
島状構造であつても効果は同じであり、必ずしも
均一な層状である必要はない。 The amount of the lubricant deposited is not particularly limited as long as the film surface strength and slipperiness are good, but the smaller the amount, the better. It is usually 0.5 g/m 2 or less, and 0.2 g/m 2 or less is particularly preferred. Further, the effect is the same even if the deposited lubricant layer has an island structure rather than a so-called layered structure, and it is not necessarily necessary to have a uniform layered structure.
本発明に用いられる強磁性体薄膜としては、
Fe、Co、Niその他の強磁性金属、あるいはFe―
Co、Fe―Ni、Co―Ni、Fe―Rh、Fe―Cu、Fe
―Au、Co―Cu、Co―Au、Co―Ｙ、Co―La、
Co―Pr、Co―Gd、Co−Ga、Co―Sn、Co―Pt、
Ni―Cu、Fe―Si、Fe―Co―Ni、Mn―Bi、Mn
―Sb、Mn―Alのような磁性合金、γ―Fe2O3、
Fe3O4、CrO2などの酸化物磁性体、Fe3Nのよう
な窒化物磁性体、さらにバリウムフエライト、ス
トロンチウムフエライトのようなフエライト系磁
性体が用いられる。 The ferromagnetic thin film used in the present invention includes:
Fe, Co, Ni and other ferromagnetic metals, or Fe-
Co, Fe―Ni, Co―Ni, Fe―Rh, Fe―Cu, Fe
-Au, Co-Cu, Co-Au, Co-Y, Co-La,
Co-Pr, Co-Gd, Co-Ga, Co-Sn, Co-Pt,
Ni-Cu, Fe-Si, Fe-Co-Ni, Mn-Bi, Mn
-Magnetic alloys such as Sb, Mn-Al, γ-Fe 2 O 3 ,
Oxide magnetic materials such as Fe 3 O 4 and CrO 2 , nitride magnetic materials such as Fe 3 N, and ferrite magnetic materials such as barium ferrite and strontium ferrite are used.
上記の強磁性体薄膜の製造方法としては、真空
蒸着法、イオンプレーテイング法、スパツタリン
グ法、反応性蒸着法などがある。 Methods for producing the above-mentioned ferromagnetic thin film include vacuum evaporation, ion plating, sputtering, and reactive evaporation.
また上記強磁性体薄膜が非磁性体との混合層で
あつたり、強磁性体薄膜上に非磁性体層を設けた
ような多層膜であつたり、また非磁性体基板と強
磁性体との間に他の非磁性体を設けたような構造
であつたりしても本発明の強磁性体薄膜として用
いることができるのは言うまでもない。 Furthermore, the ferromagnetic thin film may be a mixed layer with a non-magnetic material, a multilayer film such as a non-magnetic layer provided on a ferromagnetic thin film, or a combination of a non-magnetic substrate and a ferromagnetic material. It goes without saying that even a structure in which another nonmagnetic material is provided between the two can be used as the ferromagnetic thin film of the present invention.
さらに本発明に使用される非磁性体基板として
はポリエチレンテレフタレート、ポリイミド、ポ
リ塩化ビニル、三酢酸セルロース、ポリカーボネ
ート、ポリエチレンナフタレートあるいはガラ
ス、セラミツクスのような非磁性体基板、アルミ
ニウム、ステンレススチール、黄銅のような金属
基板のいずれでもよい。さらに上記の基板上に蒸
着、メツキ等の方法により金属膜を形成せしめた
もの、接着剤等を塗布したものも本発明の強磁性
体薄膜の基板としてよい。基板の形状についても
テープ、シート、カード、デイスク、ドラム等い
ずれの形状でも使用され得る。 Further, non-magnetic substrates used in the present invention include polyethylene terephthalate, polyimide, polyvinyl chloride, cellulose triacetate, polycarbonate, polyethylene naphthalate, non-magnetic substrates such as glass and ceramics, aluminum, stainless steel, and brass. Any metal substrate may be used. Furthermore, the substrates for the ferromagnetic thin film of the present invention may also be those on which a metal film is formed by vapor deposition, plating, etc., or those coated with an adhesive or the like. Regarding the shape of the substrate, any shape such as a tape, sheet, card, disk, or drum can be used.
本発明によれば、高密度記録に適した磁気記録
媒体を製造することができ磁性体製造、塗布液製
造、塗布といつた複雑な製造工程を必要とせず溶
剤を一切使用しないため溶剤回収、公害対策等の
問題がなく、かつ防爆設備を必要としない。また
強磁性体薄膜を蒸着した蒸着装置中で連続工程で
有機物滑剤を蒸着することにより、真空を破る必
要はなく、空気による強磁性体薄膜の変質や、擦
り傷によるピンホールの発生、磁性体膜の剥離、
ゴミその他の異物の付着を防止することが可能で
あり、ドロツプアウトを格段に減少させることが
でき記録・再生特性を改良することができるため
工業的価値は大なるものである。 According to the present invention, a magnetic recording medium suitable for high-density recording can be manufactured, and complicated manufacturing processes such as magnetic material manufacturing, coating liquid manufacturing, and coating are not required, and no solvent is used. There are no problems with pollution control, etc., and no explosion-proof equipment is required. In addition, by depositing the organic lubricant in a continuous process in the evaporation equipment that deposits the ferromagnetic thin film, there is no need to break the vacuum, and there is no need to break the vacuum. peeling off,
It is of great industrial value because it is possible to prevent the adhesion of dust and other foreign substances, and it is possible to significantly reduce dropouts and improve recording and reproducing characteristics.
以下、実施例により本発明を説明するが本発明
がこれらに限定されるものでないことは言うまで
もない。 The present invention will be explained below with reference to Examples, but it goes without saying that the present invention is not limited thereto.
実施例 １
25μ厚のポリエチレンテレフタレートフイルム
基板を蒸発源に対して60゜の傾きになるように真
空蒸着装置内に配置した。１×10-5トールの真空
度で99.99％のコバルト金属を電子ビーム加熱法
により２Å／secの速度で200Å蒸着した。次に５
×10-5トールの真空度でベヘン酸を抵抗加熱法に
より５Å／secの速度で300Å蒸着した。尚、膜厚
は米国スローン社製DTM200水晶振動子型膜厚
モニターに付着した量で換算した値である。この
試料の膜面強度を新東科学(株)製“HEIDON―18”
膜面強度計によりＲ球針（Ｒ＝0.1mm）を用いて
測定し、表面に傷がつく最小荷重をもつて膜面強
度の指標とした。ベヘン酸を蒸着した試料は130
ｇ、ベヘン酸を蒸着しない試料（比較試料）では
30ｇで傷つきベヘン酸蒸着により４倍以上の膜面
強度が得られた。磁気特性はベヘン酸の有無で変
化はなく出力損失も認められなかつた。Example 1 A 25 μm thick polyethylene terephthalate film substrate was placed in a vacuum evaporation apparatus at an angle of 60° to the evaporation source. 99.99% cobalt metal was deposited to a thickness of 200 Å at a rate of 2 Å/sec by electron beam heating in a vacuum of 1×10 −5 Torr. Next 5
Behenic acid was deposited to a thickness of 300 Å at a rate of 5 Å/sec by resistance heating at a vacuum level of ×10 −5 Torr. The film thickness is a value calculated based on the amount adhered to a DTM200 crystal oscillator type film thickness monitor manufactured by Sloan, USA. The film surface strength of this sample was measured using “HEIDON-18” manufactured by Shinto Kagaku Co., Ltd.
The film surface strength was measured using an R ball needle (R = 0.1 mm) using a film surface strength meter, and the minimum load that caused scratches on the surface was taken as an index of film surface strength. The sample on which behenic acid was vapor-deposited was 130
g, in the sample without behenic acid vapor-deposited (comparative sample)
It was scratched at 30g, and the film surface strength was more than four times as strong by behenic acid vapor deposition. The magnetic properties did not change with or without behenic acid, and no output loss was observed.
実施例 ２
実施例１と同様にして鉄を200Å蒸着した。次
にステアリン酸アミドを５Å／secの速度で200Å
蒸着した。実施例１と同様にして膜面強度を測定
したところ、100ｇで傷がつきステアリン酸アミ
ドがない場合の３倍以上の膜面強度であつた。磁
気特性はステアリン酸アミドの有無で変化はなく
出力損失も認められなかつた。Example 2 Iron was deposited to a thickness of 200 Å in the same manner as in Example 1. Next, add stearic acid amide to 200 Å at a rate of 5 Å/sec.
Deposited. When the membrane surface strength was measured in the same manner as in Example 1, it was scratched at 100 g and the membrane surface strength was more than three times that of the case without stearic acid amide. The magnetic properties did not change with or without stearamide, and no output loss was observed.
Claims (1)
けた後、前記強磁性体薄膜を大気に曝することな
く、その表面に室温における蒸気圧が５×10-5ト
ール以下の固体状の有機物滑剤を蒸着することを
特徴とする磁気記録媒体の製造方法。1. After providing a ferromagnetic thin film on a non-magnetic substrate by vapor deposition, a solid organic substance having a vapor pressure of 5×10 -5 Torr or less at room temperature is coated on the surface of the ferromagnetic thin film without exposing it to the atmosphere. A method for manufacturing a magnetic recording medium, which comprises depositing a lubricant.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8270679A JPS567235A (en) | 1979-07-02 | 1979-07-02 | Magnetic recording medium and its production |
| DE19803024918 DE3024918A1 (en) | 1979-07-02 | 1980-07-01 | MAGNETIC RECORDING MATERIAL AND METHOD FOR THE PRODUCTION THEREOF |
| GB8021754A GB2059998B (en) | 1979-07-02 | 1980-07-02 | Magnetic recording medium formed by vapour deposition |
| US06/165,439 US4390601A (en) | 1979-07-02 | 1980-07-02 | Magnetic recording medium and process for the production thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8270679A JPS567235A (en) | 1979-07-02 | 1979-07-02 | Magnetic recording medium and its production |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS567235A JPS567235A (en) | 1981-01-24 |
| JPH0130224B2 true JPH0130224B2 (en) | 1989-06-16 |
Family
ID=13781839
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8270679A Granted JPS567235A (en) | 1979-07-02 | 1979-07-02 | Magnetic recording medium and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS567235A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ATE28059T1 (en) * | 1983-01-21 | 1987-07-15 | Ibm | PROCESS FOR CREATING A METAL SOAP LAYER AS A SLIDING LAYER ON A METALLIZED RECORDING MEDIA. |
| JPS6199934A (en) * | 1984-10-19 | 1986-05-19 | Matsushita Electric Ind Co Ltd | Production of magnetic recording medium |
| JPS61208622A (en) * | 1985-03-13 | 1986-09-17 | Sony Corp | Magnetic disk |
| JPH0685211B2 (en) * | 1985-05-13 | 1994-10-26 | 富士写真フイルム株式会社 | Method of manufacturing magnetic recording medium |
| JPS63282921A (en) * | 1987-05-15 | 1988-11-18 | Fuji Photo Film Co Ltd | Production of magnetic recording medium |
-
1979
- 1979-07-02 JP JP8270679A patent/JPS567235A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS567235A (en) | 1981-01-24 |
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