JPH01287131A - Epoxy resin composition for semiconductor sealing and curing accelerator - Google Patents

Epoxy resin composition for semiconductor sealing and curing accelerator

Info

Publication number
JPH01287131A
JPH01287131A JP6724488A JP6724488A JPH01287131A JP H01287131 A JPH01287131 A JP H01287131A JP 6724488 A JP6724488 A JP 6724488A JP 6724488 A JP6724488 A JP 6724488A JP H01287131 A JPH01287131 A JP H01287131A
Authority
JP
Japan
Prior art keywords
curing accelerator
epoxy resin
curing
resin composition
encapsulated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6724488A
Other languages
Japanese (ja)
Inventor
Koji Mori
森 恒治
Koichi Tanaka
孝一 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Bakelite Co Ltd
Original Assignee
Sumitomo Bakelite Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Bakelite Co Ltd filed Critical Sumitomo Bakelite Co Ltd
Priority to JP6724488A priority Critical patent/JPH01287131A/en
Publication of JPH01287131A publication Critical patent/JPH01287131A/en
Pending legal-status Critical Current

Links

Landscapes

  • Sealing Material Composition (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Epoxy Resins (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)

Abstract

PURPOSE:To obtain the title composition consisting essentially of an epoxy resin, novolak type phenol resin curing agent, encapsulated curing accelerator and inorganic filler and having excellent shelf stability at ordinary temperature. CONSTITUTION:The aimed composition consisting essentially of (A) an epoxy resin having at least >=2 epoxy resin groups in one molecule, (B) novolak type phenol resin curing agent, (C) encapsulated curing accelerator (encapsulated by a micro-capsule preferably consisting of a material having 100-150 deg.C eluation temperature so that the wall thickness of the micro-capsule is 0.1-1mum and the particle size thereof is <=20mum) and (D) inorganic filler. Furthermore, the curing accelerator includes diazabicycloundecene, triphenyl phosphine or 2- methylimidazole.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は硬化性と常温での貯蔵安定性に優れる半導体封
止用エポキシ樹脂組成物に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an epoxy resin composition for semiconductor encapsulation that has excellent curability and storage stability at room temperature.

〔従来技術〕[Prior art]

一般に半導体封止用エポキシ樹脂組成物においては硬化
性を向上させるのに硬化促進剤を使用している。この為
常温で放置すると硬化が徐々にすすみ流動性が劣る等の
欠点があり、通常低温での輸送あるいは低温保管等によ
り硬化性と貯蔵安定性の両立を図ってきた。
Generally, in epoxy resin compositions for semiconductor encapsulation, a curing accelerator is used to improve curing properties. For this reason, if left at room temperature, curing progresses gradually and fluidity deteriorates, which is a disadvantage. Therefore, attempts have been made to achieve both curability and storage stability by transporting or storing at low temperatures.

しかしながら、このような低温での輸送あるいは保管は
大幅なコストアンプになる。この為硬化研究が盛んに行
なわれてた。その結果テトラ置換ホスホニウム・テトラ
置換ボレート類(特公昭60−561”j2号公報)、
4級テンモニウムトリアゾレート化合物(特公昭60−
235828、235830号公報)等が提案された。
However, transportation or storage at such low temperatures results in significant cost amplifiers. For this reason, hardening research was actively conducted. As a result, tetra-substituted phosphonium/tetra-substituted borates (Japanese Patent Publication No. 60-561"j2),
Quaternary tenmonium triazole compound (Special Publication 1986-
235828, 235830), etc. were proposed.

しかしながらこれらはいずれも硬化性と常温での貯蔵安
定性の両立が不可能であった。
However, it was impossible for any of these to achieve both curability and storage stability at room temperature.

〔発明の目的] 本発明は従来技術では不可能であった硬化性と常温での
貯蔵安定性の両立を目的として研究した結果硬化促進剤
をマイクロカプセル化することにより貯蔵安定性が向上
するとの知見を得、更にこの知見に基づき種々の研究を
進めて本発明を完成するに至ったものである。
[Purpose of the Invention] The present invention was made with the aim of achieving both curability and storage stability at room temperature, which was impossible with conventional techniques.As a result of research, it was found that storage stability can be improved by microencapsulating a curing accelerator. After obtaining this knowledge, we proceeded with various studies based on this knowledge and completed the present invention.

〔発明の構成〕[Structure of the invention]

本発明は、 (A)1分子中にエポキシU基を少なくとも2個以上存
するエポキシ樹脂 (B)ノボラック型フェノール樹脂硬化剤(C)マイク
ロカプセル化した硬化促進剤(D)無機充填剤 を必須成分とすることを特徴とする半導体封止用エポキ
シ樹脂組成物と 硬化促進剤が溶出温度100〜150℃の材質からなる
マイクロカプセルであり、該マイクロカプセルの壁厚が
0,1〜1μmであり、且つマイクロカプセルの粒径が
20μm以下となるようにマイクロカプセル化された請
求項1記載の硬化促進剤に関するものである。
The present invention comprises (A) an epoxy resin containing at least two epoxy U groups in one molecule, (B) a novolak type phenolic resin curing agent, (C) a microencapsulated curing accelerator, and (D) an inorganic filler as an essential component. The epoxy resin composition for semiconductor encapsulation and the curing accelerator are microcapsules made of a material having an elution temperature of 100 to 150°C, and the wall thickness of the microcapsules is 0.1 to 1 μm, The curing accelerator according to claim 1, wherein the curing accelerator is microencapsulated so that the particle size of the microcapsules is 20 μm or less.

本発明でいうところのエポキシ樹脂組成物は、エポキシ
樹脂、硬化剤、本発明のマイクロカプセル化した硬化促
進剤及び無機充填剤を必須とし、更に必要に応じて難燃
剤、処理剤、顔料、離型剤その他添加剤を配合したもの
である。
The epoxy resin composition referred to in the present invention essentially contains an epoxy resin, a curing agent, the microencapsulated curing accelerator of the present invention, and an inorganic filler, and further includes a flame retardant, a processing agent, a pigment, and a release agent as necessary. It contains a molding agent and other additives.

エポキシ樹脂とはエポキシ基を有するもの全般のことを
いい、例えばビスフェノール型エポキシ樹脂、ノボラン
ク型エポキシ樹脂、複素環型エポキシ樹脂といった一般
名を挙げることができる。
Epoxy resin refers to all compounds having an epoxy group, and includes common names such as bisphenol type epoxy resin, novolank type epoxy resin, and heterocyclic type epoxy resin.

本発明の硬化促進剤とは次のようなものをいいマイクロ
カプセル化されていることが必須である。
The curing accelerator of the present invention refers to the following, and it is essential that it is microencapsulated.

硬化促進剤とマイクロカプセル壁材の種類及びマイクロ
カプセルの粒径、厚みが技術的にポイントになる。
Technical points are the type of curing accelerator and microcapsule wall material, and the particle size and thickness of the microcapsules.

硬化促進剤としては、ジアザビシクロウンデセン、トリ
フェニルホスフィン、2メチルイミダゾール、ジメチル
ベンジルアミン等が挙げられる。
Examples of the curing accelerator include diazabicycloundecene, triphenylphosphine, 2methylimidazole, and dimethylbenzylamine.

尚マイクロカプセル壁材としては?吉川温度が100〜
150℃が好ましい。ここでいう溶出温度とは、マイク
ロカプセル化された硬化促進剤が壁材を通して外部に溶
出あるいは壁材が破壊されることにより外部に溶出する
温度のことを言う。即ち組成物の混合・混練時には硬化
促進剤が溶出せず成形時に溶出することにより硬化促進
剤の触媒作用を引き出すものが好ましい。例えばメラミ
ン樹脂、フェノール樹脂といった熱硬化性樹脂を用いる
ことができる。
What about microcapsule wall materials? Yoshikawa temperature is 100~
150°C is preferred. The elution temperature here refers to the temperature at which the microencapsulated curing accelerator elutes to the outside through the wall material or elutes to the outside when the wall material is destroyed. That is, it is preferable that the curing accelerator is not eluted during mixing and kneading of the composition, but is eluted during molding to bring out the catalytic action of the curing accelerator. For example, thermosetting resins such as melamine resin and phenol resin can be used.

さらに壁材の厚みとしては01〜1μmが好ましい。0
1μmより薄いと混合・混練時に硬化促進剤が溶出して
しまう。又1μmより厚いと成形時に硬化促進剤が溶出
しないからである。又マイクロカプセルの粒径としては
20μm以下が好ましい。20μmより大きいと分散性
が悪くなり、硬化にむらが生してしまう。又更に粒径が
大きくなれば、必然的にカプセル強度が弱くなってしま
が好ましい。0.1重量%以下あるいは0.5重量%以
上に添加すると所望の硬化性が得られないからである。
Furthermore, the thickness of the wall material is preferably 01 to 1 μm. 0
If it is thinner than 1 μm, the curing accelerator will be eluted during mixing and kneading. Moreover, if the thickness is more than 1 μm, the curing accelerator will not be eluted during molding. Further, the particle size of the microcapsules is preferably 20 μm or less. If it is larger than 20 μm, dispersibility will be poor and curing will be uneven. Furthermore, it is preferable that if the particle size becomes larger, the capsule strength will inevitably become weaker. This is because if it is added in an amount less than 0.1% by weight or more than 0.5% by weight, the desired curability cannot be obtained.

マイクロカプセル化法としては界面沈澱法、界面重合法
や液中硬化被膜法等を挙げることができる。
Examples of the microencapsulation method include an interfacial precipitation method, an interfacial polymerization method, and an in-liquid curing film method.

を たとえば界面沈澱法によりマイクロカプセル金の 製造する方法は以下噂通りである。of For example, microcapsule gold can be prepared by interfacial precipitation method. The manufacturing method is as rumored below.

硬化促進剤としてはトリフェニルホスフィン及び/又は
2−メチルイミダゾールをメラミン樹脂の塩化メチレン
溶液に分散する(この場合硬化促進剤の分散径は20/
1m以下となるように分散し又メラミン樹脂量はカプセ
ルの被覆厚みが0.1〜1.0μmとなるように調整す
る。)これを硬化剤を希釈剤に溶解した溶液に乳化分散
させ、撹拌を行ないながら50℃に加温し、塩化エチレ
ンを系外に揮発除去し濾過乾燥によりマイクロカプセル
化粉末を得る方法である。
As a curing accelerator, triphenylphosphine and/or 2-methylimidazole is dispersed in a methylene chloride solution of melamine resin (in this case, the dispersion diameter of the curing accelerator is 20/2
The amount of melamine resin is adjusted so that the capsule thickness is 0.1 to 1.0 μm. ) This is a method in which this is emulsified and dispersed in a solution of a curing agent dissolved in a diluent, heated to 50° C. while stirring, ethylene chloride is volatilized out of the system, and microencapsulated powder is obtained by filtration and drying.

〔発明の効果〕〔Effect of the invention〕

本発明に従うと、従来技術をそのまま利用し且つ従来技
術では両立できなかった硬化性と常温での貯蔵安定性に
優れるエポキシ樹脂組成物を得ることができる。特に半
導体封止用途では今後まずますプラスチックパッケージ
化が予想され又そのために硬化性と常温での貯蔵安定性
の両立が望まれている今日においては本発明の産業的意
味役割は非常に大きい。
According to the present invention, it is possible to obtain an epoxy resin composition that is excellent in curability and storage stability at room temperature, which were not compatible with the conventional techniques, while utilizing the conventional techniques as they are. Particularly in semiconductor encapsulation applications, it is expected that plastic packaging will become more common in the future, and for this reason, it is desired that both curability and storage stability at room temperature be achieved.The industrial significance of the present invention is therefore very large.

〔実施例〕〔Example〕

(マイクロカプセルの製造) 硬化促進剤としてトリフェニルホスフィンおよび/また
は2−メチルイミダゾールの粒径が20μm以下である
顆粒状のものをメラミン樹脂の塩化メチレン溶1(樹脂
濃度2′0%)に分散させる。
(Production of microcapsules) Granules of triphenylphosphine and/or 2-methylimidazole with a particle size of 20 μm or less as a curing accelerator are dispersed in a methylene chloride solution of melamine resin 1 (resin concentration 2'0%). let

尚メラミン樹脂量は、硬化促進剤の被覆厚みが0゜1〜
1.0μmとなるように適宜調整を行った。
The amount of melamine resin is determined when the coating thickness of the curing accelerator is 0°1~
Appropriate adjustments were made so that the thickness was 1.0 μm.

この分散液を、メラミン樹脂の硬化剤を希釈剤に溶解し
た溶液に乳化分散さ上撹拌をしながら5゜℃に加温し、
塩化メチレンを系外に揮発除去し、濾過乾燥しマイクロ
カプセル化したものを得る方法により第1表に示す構成
の硬化促進剤のマイクロカプセルを製造した。
This dispersion was emulsified and dispersed in a solution of a melamine resin curing agent dissolved in a diluent, and heated to 5°C while stirring.
Microcapsules of a curing accelerator having the structure shown in Table 1 were produced by removing methylene chloride by evaporation from the system and filtering and drying to obtain microcapsules.

第1表 (実施例1〜5、比較例1〜3) オルトクレゾールノボラノクエボキシ樹脂20重量部 フェノールノボラック樹脂   10重量部溶融シリカ
          70重量部脂環式エボキンシラン
     0.5重1部カーボンブランク      
 0.5重量部モンクン酸          0.5
重量部に対して第1表に示すマイクロカプセル■〜0を
硬化促進剤が、0.2重量部となる様に添加して、ブレ
ンダーを用い均一混合し、その後100 ’Cの熱ロー
ルで3分間混練し、第2表に示す組み合せせで8種類の
半導体封止用エポキシ樹脂組成物からなる成形+A料を
得た。これらの成形材料の保存性及び硬化性を測定した
結果を第2表に示す。
Table 1 (Examples 1 to 5, Comparative Examples 1 to 3) 20 parts by weight of ortho-cresol novolak resin 10 parts by weight Phenol novolac resin 10 parts by weight Fused silica 70 parts by weight Alicyclic evoquine silane 0.5 parts by weight 1 part Carbon blank
0.5 parts by weight Mongcunic acid 0.5
Microcapsules ■~0 shown in Table 1 were added to the curing accelerator in an amount of 0.2 parts by weight, and mixed uniformly using a blender, and then heated with a roll at 100'C for 3 The mixture was kneaded for a minute to obtain molding+A materials consisting of eight types of epoxy resin compositions for semiconductor encapsulation in the combinations shown in Table 2. Table 2 shows the results of measuring the storage stability and curing properties of these molding materials.

(比較例4〜6) 実施例1の組成において、マイクロカプセル化した硬化
促進剤を用いず、第2表に示す硬化促進剤を直接添加し
、混合し100℃の熱ロールで3分間混練し半導体封止
用エポキシ樹脂組成物からなる成形材料を得た。
(Comparative Examples 4 to 6) In the composition of Example 1, the curing accelerator shown in Table 2 was directly added without using the microencapsulated curing accelerator, mixed, and kneaded for 3 minutes with a hot roll at 100 ° C. A molding material made of an epoxy resin composition for semiconductor encapsulation was obtained.

これらの成形材料の保存性及び硬化性を測定した結果を
第2表に示す。
Table 2 shows the results of measuring the storage stability and curing properties of these molding materials.

以上実施例及び比較例より明らかのように、マイクロカ
プセル化した硬化促進剤を用いることにより、保存性が
大1]に向上することがわかった。
As is clear from the Examples and Comparative Examples above, it was found that by using a microencapsulated curing accelerator, the storage stability was greatly improved.

特に好ましい範囲で用いた場合は抜群の効果があり、保
存性と硬化性が両立していることがわかる。
It can be seen that when used within a particularly preferable range, outstanding effects are achieved, and both preservability and curing properties are achieved.

Claims (2)

【特許請求の範囲】[Claims] (1)(A)1分子中にエポキシ基を少なくとも2個以
上有するエポキシ樹脂 (B)ノボラック型フェノール樹脂硬化剤 (C)マイクロカプセル化した硬化促進剤 (D)無機充填剤 を必須成分とすることを特徴とする半導体封止用エポキ
シ樹脂組成物。
(1) (A) Epoxy resin having at least two epoxy groups in one molecule (B) Novolac type phenolic resin curing agent (C) Microencapsulated curing accelerator (D) Inorganic filler as an essential component An epoxy resin composition for semiconductor encapsulation, characterized by:
(2)硬化促進剤が溶出温度が100〜150℃の材質
からなるマイクロカプセルであり、該マイクロカプセル
の壁厚が0.1〜1μmであり、且つマイクロカプセル
の粒径が20μm以下となるようにマイクロカプセル化
された請求項1記載の硬化促進剤。
(2) The curing accelerator is a microcapsule made of a material with an elution temperature of 100 to 150°C, the wall thickness of the microcapsule is 0.1 to 1 μm, and the particle size of the microcapsule is 20 μm or less. The curing accelerator according to claim 1, which is microencapsulated in.
JP6724488A 1988-03-23 1988-03-23 Epoxy resin composition for semiconductor sealing and curing accelerator Pending JPH01287131A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6724488A JPH01287131A (en) 1988-03-23 1988-03-23 Epoxy resin composition for semiconductor sealing and curing accelerator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6724488A JPH01287131A (en) 1988-03-23 1988-03-23 Epoxy resin composition for semiconductor sealing and curing accelerator

Publications (1)

Publication Number Publication Date
JPH01287131A true JPH01287131A (en) 1989-11-17

Family

ID=13339312

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6724488A Pending JPH01287131A (en) 1988-03-23 1988-03-23 Epoxy resin composition for semiconductor sealing and curing accelerator

Country Status (1)

Country Link
JP (1) JPH01287131A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01242616A (en) * 1988-03-23 1989-09-27 Sumitomo Bakelite Co Ltd Epoxy resin composition for sealing semiconductor
JPH08301978A (en) * 1995-05-02 1996-11-19 Nitto Denko Corp Epoxy resin composition for sealing semiconductor element, and resin-sealed semiconductor device
US6342309B1 (en) * 1999-08-19 2002-01-29 Shin-Etsu Chemical Co., Ltd. Epoxy resin composition and semiconductor device
EP1184419A3 (en) * 2000-08-24 2003-04-02 Nitto Denko Corporation Resin composition for selaing semiconductor, semiconductor device using the same semiconductor wafer and mounted structure of semiconductor device
JP2012052051A (en) * 2010-09-02 2012-03-15 Asahi Kasei E-Materials Corp Curing agent composition for epoxy resin and one-pack epoxy resin composition

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5723625A (en) * 1980-07-17 1982-02-06 Toshiba Corp Epoxy resin composition and resin-sealed semiconductor device
JPS58198525A (en) * 1982-05-14 1983-11-18 Sanyurejin Kk Epoxy resin composition
JPS58225121A (en) * 1982-06-23 1983-12-27 Sanyurejin Kk Epoxy resin composition and sealing of electronic parts using the same
JPS60223805A (en) * 1984-03-23 1985-11-08 ミネソタ マイニング アンド マニユフアクチユアリングコンパニー Latent lewis acid catalyst concentrate
JPS6112724A (en) * 1984-06-27 1986-01-21 Toshiba Corp Epoxy resin composition
JPS6189221A (en) * 1984-10-08 1986-05-07 Sumitomo Bakelite Co Ltd Epoxy resin composition for encapsulation of semiconductor
JPH01242616A (en) * 1988-03-23 1989-09-27 Sumitomo Bakelite Co Ltd Epoxy resin composition for sealing semiconductor

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5723625A (en) * 1980-07-17 1982-02-06 Toshiba Corp Epoxy resin composition and resin-sealed semiconductor device
JPS58198525A (en) * 1982-05-14 1983-11-18 Sanyurejin Kk Epoxy resin composition
JPS58225121A (en) * 1982-06-23 1983-12-27 Sanyurejin Kk Epoxy resin composition and sealing of electronic parts using the same
JPS60223805A (en) * 1984-03-23 1985-11-08 ミネソタ マイニング アンド マニユフアクチユアリングコンパニー Latent lewis acid catalyst concentrate
JPS6112724A (en) * 1984-06-27 1986-01-21 Toshiba Corp Epoxy resin composition
JPS6189221A (en) * 1984-10-08 1986-05-07 Sumitomo Bakelite Co Ltd Epoxy resin composition for encapsulation of semiconductor
JPH01242616A (en) * 1988-03-23 1989-09-27 Sumitomo Bakelite Co Ltd Epoxy resin composition for sealing semiconductor

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01242616A (en) * 1988-03-23 1989-09-27 Sumitomo Bakelite Co Ltd Epoxy resin composition for sealing semiconductor
JPH08301978A (en) * 1995-05-02 1996-11-19 Nitto Denko Corp Epoxy resin composition for sealing semiconductor element, and resin-sealed semiconductor device
US6342309B1 (en) * 1999-08-19 2002-01-29 Shin-Etsu Chemical Co., Ltd. Epoxy resin composition and semiconductor device
EP1184419A3 (en) * 2000-08-24 2003-04-02 Nitto Denko Corporation Resin composition for selaing semiconductor, semiconductor device using the same semiconductor wafer and mounted structure of semiconductor device
SG128412A1 (en) * 2000-08-24 2007-01-30 Nitto Denko Corp Resin composition for sealing semiconductor, semiconductor device using the same semiconductor waferand mounted structure of semiconductor device
KR100776959B1 (en) * 2000-08-24 2007-11-27 닛토덴코 가부시키가이샤 Resin composition for sealing semiconductor, semiconductor device using the same, semiconductor wafer and mounted structure of semiconductor device
JP2012052051A (en) * 2010-09-02 2012-03-15 Asahi Kasei E-Materials Corp Curing agent composition for epoxy resin and one-pack epoxy resin composition

Similar Documents

Publication Publication Date Title
US4698215A (en) Stabilized red phosphorus for use as flame-retardant, in particular for compositions on the basis of polymers
US5609660A (en) Method of reducing water sensitivity of phosphate glass particles
US5656250A (en) Three-dimensional network structure comprising spherical silica particles and method of producing same
JPH01287131A (en) Epoxy resin composition for semiconductor sealing and curing accelerator
EP1088036B1 (en) Solid, meltable, thermohardeninig mass, its production and its use
JPH01242616A (en) Epoxy resin composition for sealing semiconductor
JP3102521B2 (en) Microcapsule curing accelerator and resin composition containing the same
JPH0619064B2 (en) Pioneer solid epoxy resin
JPH03292378A (en) Microcapsule, adhesive composition using same, and curing method therefor
JPS5959720A (en) New one-component curing agent for epoxy resin
JP4037228B2 (en) One-part epoxy resin composition
JPH02292325A (en) Epoxy resin composition prepared by using microencapsulated amine curing agent
JPH05287082A (en) Production of resin composition containing ultrafine particles dispersed therein
JP2716636B2 (en) Resin composition for semiconductor encapsulation
JPH03220246A (en) Microcapsuled amine curative
JPS6243452B2 (en)
JPH0615603B2 (en) Epoxy resin composition for semiconductor encapsulation
JPH0625388A (en) Thermosetting epoxy resin composition
JPH0873566A (en) Microencapsulated cure accelerator, epoxy resin composition containing same and cured product thereof
JPS60147141A (en) Resin sealed type semiconductor device
JPH02292324A (en) Microencapsulated cure accelerator and epoxy resin composition containing the same
CN1057402C (en) Method for packing semiconductor
CN1468902A (en) Active organic-inorganic nano calcium carbonate mixture and its prepn process
JPS6080259A (en) Semiconductor device
JPS6210126A (en) Microspherical cured melamine resin particle and its production