JPH01286144A - Method and device for manufacturing optical master disk - Google Patents
Method and device for manufacturing optical master diskInfo
- Publication number
- JPH01286144A JPH01286144A JP63116135A JP11613588A JPH01286144A JP H01286144 A JPH01286144 A JP H01286144A JP 63116135 A JP63116135 A JP 63116135A JP 11613588 A JP11613588 A JP 11613588A JP H01286144 A JPH01286144 A JP H01286144A
- Authority
- JP
- Japan
- Prior art keywords
- signal
- sector mark
- pulse
- circuit
- bit part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 15
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 238000000034 method Methods 0.000 title claims description 6
- 230000015572 biosynthetic process Effects 0.000 abstract description 5
- 238000003786 synthesis reaction Methods 0.000 abstract description 5
- 238000000926 separation method Methods 0.000 abstract description 4
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 15
- 230000000694 effects Effects 0.000 description 2
- 239000000284 extract Substances 0.000 description 2
- 206010011732 Cyst Diseases 0.000 description 1
- 208000031513 cyst Diseases 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
Landscapes
- Manufacturing Optical Record Carriers (AREA)
- Optical Head (AREA)
- Optical Recording Or Reproduction (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、光ディスク原盤製造方法および装置に関する
。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method and apparatus for manufacturing an optical disc master.
光ディスク原盤の中に入れられるプリフォーマット部は
一定のパワーを持つ露光レーザビームを変調することに
より行われている。The preformatting section inserted into the master optical disc is performed by modulating an exposure laser beam with a constant power.
第６図は従来のプリフォーマット部露光レーザビームの
変調パターンの一例を示した状態図である。変調パター
ンは長いピットからなるセクターマークピット部４′を
露光するレーザパワー光１３と短いピットからなるプリ
ピット部６を露光するレーザパワー光１４から作られて
いる。これらのパターンで露光レーザビームをｏｎ−ｏ
ｆｆすることによってガラス原盤上に塗布されたレジス
トを露光することによりプリフォーマット部５′を形成
していた。FIG. 6 is a state diagram showing an example of a modulation pattern of a conventional preformat portion exposure laser beam. The modulation pattern is made of laser power light 13 that exposes the sector mark pit portion 4' consisting of long pits and laser power light 14 that exposes the pre-pit portion 6 consisting of short pits. Turn on the exposure laser beam with these patterns
The preformat portion 5' was formed by exposing the resist coated on the glass master disk by ff.
このような従来の露光レーザビームの変調法ではレーザ
パワーを一定にして露光しているためしシスト上に形成
されたプリフォーマットパターンの形がセクターマーク
部とプリピット部で変わってしまう。特に第７図に示す
ようにセクターマーク部４′のパターン幅はプリピット
部６のパターン幅に比べて広くなってしまう。In such a conventional exposure laser beam modulation method, the laser power is kept constant during exposure, so the shape of the preformat pattern formed on the cyst changes between the sector mark portion and the prepit portion. In particular, as shown in FIG. 7, the pattern width of the sector mark portion 4' is wider than the pattern width of the pre-pit portion 6.
しかしながら、このような上述した従来の光ディスク原
盤製造方法および装置はプリピット部のパターン幅に比
しセクターマークピット部のパターン幅が広くなるため
プリフォーマツ）信号（７）品質が劣化されるという欠
点があった。However, the above-mentioned conventional optical disc master manufacturing method and apparatus have the disadvantage that the pattern width of the sector mark pit area is wider than the pattern width of the pre-pit area, resulting in deterioration of the quality of the preformat signal (7). Ta.
本発明の光ディスク原盤製造方法および装置は、プリフ
ォーマットを露光するレーザビームのセクターマークピ
ット部を露光する時間に比べ充分短いパルス列によって
露光し等価的に露光パワーを低下させてレジスト上にパ
ターンを形成する方法とセクターマークピット部の露光
に必要なパルス列を発生する制御回路を有して構成され
る。The method and apparatus for manufacturing an optical disk master of the present invention exposes the sector mark pit portion of the laser beam for exposing the preformat with a pulse train that is sufficiently shorter than the exposure time, and equivalently lowers the exposure power to form a pattern on the resist. The method includes a control circuit that generates a pulse train necessary for exposing the sector mark pit portion.
次に、本発明の実施例について、図面を参照して説明す
る。Next, embodiments of the present invention will be described with reference to the drawings.
第１図は本発明の一実施例を示す状態図、第２図は第１
図に示す実施例で形成されるビットの形状を示す形状図
である。FIG. 1 is a state diagram showing one embodiment of the present invention, and FIG. 2 is a state diagram showing one embodiment of the present invention.
FIG. 3 is a shape diagram showing the shape of a bit formed in the example shown in the figure.
第１図に示す光ディスク原盤製造方法は、セクターマー
クピット部４を露光するためのレーザパワー光１と、プ
リピット部６を露光するためのレーザパワー光２とを含
んだプリフォーマット露光レーザパワー光で構成されて
いる。The optical disk master manufacturing method shown in FIG. It is configured.
レーザパワー光１によりレーザビームが変調され露光ビ
ーム状態３で示すようにビームスポットが重なった状態
で露光され等価的に露光パワーが減少したことになる。The laser beam is modulated by laser power light 1, and as shown in exposure beam state 3, exposure is performed with overlapping beam spots, and the exposure power is equivalently reduced.
この状態のレジストを現像することによってセクターマ
ークピット部４が形成される。レーザパワー光１のパル
ス幅とパルス間隔を選択することによりセクターマーク
ピット部４とプリピット部６のパターン幅がほぼ等しい
プリフォーマット部５を形成することができる。By developing the resist in this state, sector mark pit portions 4 are formed. By selecting the pulse width and pulse interval of the laser power beam 1, it is possible to form a preformat section 5 in which the pattern widths of the sector mark pit section 4 and the pre-pit section 6 are approximately equal.
次に、前述したパルス発生回路を有する光ディスク原盤
製造装置の実施例について説明する。Next, an embodiment of an optical disk master manufacturing apparatus having the above-described pulse generation circuit will be described.
第４図は本発明の他の実施例を示すブロック図であり、
光ディスク原盤製造装置の露光ビーム変調用制御回路の
ブロックダイアダラムである。第５図は第４図に示す各
部でのパルス波形を模式的に示した波形図である。FIG. 4 is a block diagram showing another embodiment of the present invention,
This is a block diagram of a control circuit for exposure beam modulation of an optical disk master manufacturing apparatus. FIG. 5 is a waveform diagram schematically showing pulse waveforms at each part shown in FIG. 4.
第４図に示す光ディスク、原盤製造装置は、プリフォー
マット信号ａを発生するプリフォーマット信号発生回路
７と、プリフォーマット信号ａの中からセクターマーク
信号すを取り出すセクターマーク信号分離回路８と、セ
クターマーク信号すのパルス幅に比べて充分狭いパルス
信号Ｃを発生するパルス発生回路９と、パルス信号Ｃを
セクターマーク信号すのみのパルス信号ｄにするための
パルス合成回路１０と、プリフォーマット信号ａとパル
ス信号ｄを合成しレーザーをｏｎ−ｏｆｆするためのパ
ルス信号ｅを発生するパルス合成回路１１と、パルス信
号ｅによってレーザーをｏｎ−ｏｆｆする光変調素子１
２とを含んで構成される。The optical disc and master disc manufacturing apparatus shown in FIG. 4 includes a preformat signal generation circuit 7 that generates a preformat signal a, a sector mark signal separation circuit 8 that extracts a sector mark signal from the preformat signal a, and a sector mark signal separation circuit 8 that extracts a sector mark signal from the preformat signal a. A pulse generation circuit 9 that generates a pulse signal C that is sufficiently narrow compared to the pulse width of the signal S, a pulse synthesis circuit 10 that converts the pulse signal C into a pulse signal d that is only the sector mark signal, and a preformat signal a. A pulse synthesis circuit 11 that synthesizes pulse signals d and generates a pulse signal e for turning the laser on and off, and a light modulation element 1 that turns the laser on and off according to the pulse signal e.
2.
このような回路を持つ光ディスク原盤製造装置を使用す
ることによって前述した光ディスク原盤製造方法を達成
することができる。By using an optical disc master manufacturing apparatus having such a circuit, the above-described optical disc master manufacturing method can be achieved.
本発明の光ディスク原盤製造方法および装置は、セクタ
ーマークピット部のピット形状を望ましいものにするこ
とができるため、プリフォーマット信号の品質を向上で
きるという効果がある。The optical disk master manufacturing method and apparatus of the present invention can make the pit shape of the sector mark pit portion desirable, and therefore has the effect of improving the quality of the preformat signal.
第１図は本発明の一実施例を示す状態図、第２図は第１
図に示す実施例を用いて形成される露光スポットの状態
と現像後のビットの形状を示す形状図、第３図は第１図
に示す実施例で形成されるピットの形状を示す形状図、
第４図は本発明の他の実施例を示すブロック図、第５図
は第４図に示す各部の波形を示す波形図、第６図は従来
の一例を示す状態図、第７図は第６図に示す従来例で形
成されるピットの形状を示す形状図である。
１．２，１３，１４・・・・・・レーザパワー光、３・
・・・・・露光ビーム状態、４．４’・・・・・・セク
ターマークピット部、５．５’・・・・・・プリフォー
マット部、６・・・・・・プリピット部、７・・・・・
・プリフォーマット信号発生回路、８・・・・・・セク
ターマーク信号分離回路、９・・・・・・パルス発生回
路、１０．１１・・・・・・パルス合成回路、１２・・
・・・・光変調素子、ａ・・・・・・プリフォーマット
信号、ｂ・・・・・・セクターマーク信号、ｃ ｒ ｄ
、 ｅ・・・・・・パルス信号。
代理人 弁理士 内 原 音
第１図
第３図
第５ 図
哨乙 図FIG. 1 is a state diagram showing one embodiment of the present invention, and FIG. 2 is a state diagram showing an embodiment of the present invention.
FIG. 3 is a shape diagram showing the state of the exposure spot formed using the embodiment shown in the figure and the shape of the bit after development; FIG. 3 is a shape diagram showing the shape of the pit formed in the embodiment shown in FIG. 1;
FIG. 4 is a block diagram showing another embodiment of the present invention, FIG. 5 is a waveform diagram showing waveforms of each part shown in FIG. 4, FIG. 6 is a state diagram showing a conventional example, and FIG. FIG. 7 is a shape diagram showing the shape of pits formed in the conventional example shown in FIG. 6; 1.2,13,14... Laser power light, 3.
...Exposure beam condition, 4.4'...Sector mark pit section, 5.5'...Preformat section, 6...Prepit section, 7.・・・・・・
・Preformat signal generation circuit, 8...Sector mark signal separation circuit, 9...Pulse generation circuit, 10.11...Pulse synthesis circuit, 12...
...Light modulation element, a...Preformat signal, b...Sector mark signal, cr d
, e...Pulse signal. Agent Patent Attorney Oto Hara Figure 1 Figure 3 Figure 5 Figure 5
Claims (1)
いプリピット部からなるプリフォーマット部を形成する
に際し、セクターマークピット部を短いパルス列で変調
されたレーザビームで露光することを特徴とする光ディ
スク原盤製造方法。 ２、ピットの長いセクターマークピット部とピットの短
いプリピット部からなるプリフォーマット部とを形成す
るために前記セクターマークピット部を露光するレーザ
ビームを短いパルス列で変調するためのパルス列発生回
路を含むことを特徴とする光ディスク原盤製造装置。[Claims] 1. When forming a preformat section consisting of a sector mark pit section with long pits and a pre-pit section with short pits, the sector mark pit section is exposed with a laser beam modulated with a short pulse train. A method for manufacturing an optical disc master. 2. Including a pulse train generation circuit for modulating a laser beam for exposing the sector mark pit part with a short pulse train in order to form a preformat part consisting of a sector mark pit part with long pits and a pre-pit part with short pits. An optical disc master manufacturing device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63116135A JP2615833B2 (en) | 1988-05-12 | 1988-05-12 | Optical disc master manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63116135A JP2615833B2 (en) | 1988-05-12 | 1988-05-12 | Optical disc master manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01286144A true JPH01286144A (en) | 1989-11-17 |
| JP2615833B2 JP2615833B2 (en) | 1997-06-04 |
Family
ID=14679593
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63116135A Expired - Lifetime JP2615833B2 (en) | 1988-05-12 | 1988-05-12 | Optical disc master manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2615833B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01312751A (en) * | 1988-06-10 | 1989-12-18 | Seiko Epson Corp | Optical disk substrate and its production |
| US7297472B2 (en) * | 2002-03-11 | 2007-11-20 | Tdk Corporation | Processing method for photoresist master, production method for recording medium-use mater, production method for recording medium, photoresist master, recording medium-use master and recording medium |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61137225A (en) * | 1984-12-07 | 1986-06-24 | Matsushita Electric Ind Co Ltd | Signal recorder |
| JPS6342035A (en) * | 1986-08-08 | 1988-02-23 | Dainippon Printing Co Ltd | Recording method for information to optical information recording medium |
-
1988
- 1988-05-12 JP JP63116135A patent/JP2615833B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61137225A (en) * | 1984-12-07 | 1986-06-24 | Matsushita Electric Ind Co Ltd | Signal recorder |
| JPS6342035A (en) * | 1986-08-08 | 1988-02-23 | Dainippon Printing Co Ltd | Recording method for information to optical information recording medium |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01312751A (en) * | 1988-06-10 | 1989-12-18 | Seiko Epson Corp | Optical disk substrate and its production |
| US7297472B2 (en) * | 2002-03-11 | 2007-11-20 | Tdk Corporation | Processing method for photoresist master, production method for recording medium-use mater, production method for recording medium, photoresist master, recording medium-use master and recording medium |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2615833B2 (en) | 1997-06-04 |
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