JPH012852A - Grinding work table equipment - Google Patents
Grinding work table equipmentInfo
- Publication number
- JPH012852A JPH012852A JP62-155340A JP15534087A JPH012852A JP H012852 A JPH012852 A JP H012852A JP 15534087 A JP15534087 A JP 15534087A JP H012852 A JPH012852 A JP H012852A
- Authority
- JP
- Japan
- Prior art keywords
- grinding
- vibration
- workpiece
- voltage
- piezoelectric elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 description 11
- 230000000694 effects Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000003754 machining Methods 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 238000005868 electrolysis reaction Methods 0.000 description 3
- 230000036316 preload Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000003672 processing method Methods 0.000 description 3
- 229910001018 Cast iron Inorganic materials 0.000 description 2
- 206010017076 Fracture Diseases 0.000 description 2
- 239000006061 abrasive grain Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 208000010392 Bone Fractures Diseases 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 208000013201 Stress fracture Diseases 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は研削用被削物加振装置に関するものである。[Detailed description of the invention] [Industrial application field] The present invention relates to a grinding workpiece vibration device.
ファインセラミックスなどの硬脆材料の加工法として、
超音波で代表される振動研削法が知られている。この方
法は通常の研削法のように工具を被削物に一定荷重で押
し付けるだけでなく、工具（砥石）を振動子のホーン先
端に取付けるなどして工具そのものに超音波振動を付加
し、砥粒を被削物に衝撃的に叩き込みなから脆性破壊を
集積するものである。As a processing method for hard and brittle materials such as fine ceramics,
Vibration grinding methods represented by ultrasonic waves are known. This method not only presses the tool against the workpiece with a constant load as in the normal grinding method, but also attaches the tool (grinding stone) to the tip of the horn of a vibrator to add ultrasonic vibration to the tool itself. Because the grains are impactfully driven into the workpiece, brittle fractures accumulate.
しかしながら、この方法は、工具それ自体を加振するた
め、砥石の形状、寸法に制約が生じると共に、研削加工
法の自由度も少ない点、ある決められた周波数で砥石を
共振させなければならないため機構が複雑となり、振動
形態も限られ、設備も高価となるなどの問題があった。However, since this method vibrates the tool itself, there are restrictions on the shape and dimensions of the grinding wheel, and there is also less freedom in the grinding method, and the grinding wheel must resonate at a certain frequency. There were problems such as the mechanism was complicated, the vibration form was limited, and the equipment was expensive.
本発明は前記のような問題点を解消するために研究して
創案されたもので、その目的は、ファインセラミックス
などのワークを砥石の制限や加工法の制限なく、簡単に
しかも高能率で研削加工することができる研削用被削物
加振装置を提供することにある。The present invention was developed through research to solve the above-mentioned problems, and its purpose is to easily and efficiently grind workpieces such as fine ceramics without restrictions on grindstones or processing methods. An object of the present invention is to provide a vibration device for a grinding workpiece that can be processed.
この目的を達成するため本発明は、工具側を加振して研
削を行うのではなく、ワーク側を加振して研削を行うよ
うにし、しかもそのワーク側の加振を多自由度で行える
ようにしたもので、その特徴とするところは、研削機械
テーブルに取付けられる枠体と、枠体内に配された被削
物取付は用のテーブルと、前記テーブルのＸ方向、Ｘ方
向およびＺ方向をそれぞれ支持する複数組の圧電素子と
、それら圧電素子の作動を制御する装置を備えたことに
ある。In order to achieve this objective, the present invention does not perform grinding by exciting the tool side, but rather performs grinding by vibrating the workpiece side, and can excite the workpiece side in multiple degrees of freedom. Its features include a frame that is attached to the grinding machine table, a table for attaching the workpiece placed inside the frame, and an X-direction, an X-direction, and a Z-direction of the table. The invention is comprised of a plurality of sets of piezoelectric elements that respectively support the piezoelectric elements, and a device that controls the operation of these piezoelectric elements.
また、圧電素子の作動を制御する装置が、少なくともバ
イポーラ電源と、この電源からの電圧を所望の圧電素子
に割り当てると共に、圧電素子への電圧レベルを制御す
る手段とを有し、さらに要すれば、バイポーラ電源がフ
ァンクションジェネレータで周波数制御するようになっ
ているものを含む。また、枠体と研削機械テーブル間に
抵抗検出装置が介在され、フィードバック制御が行われ
るようになっているものを含むものである。Further, the device for controlling the operation of the piezoelectric element includes at least a bipolar power source, a means for allocating voltage from the power source to a desired piezoelectric element, and controlling a voltage level to the piezoelectric element, and further, if necessary, , including bipolar power supplies whose frequency is controlled by a function generator. It also includes one in which a resistance detection device is interposed between the frame and the grinding machine table to perform feedback control.
第１図ないし第５図は本発明による研削用被削物加振装
置の実施例を示している。第１図と第２図は装置本体を
例示しており、１は平面短形状の枠体であり、ＮＧ子テ
ーブルどで代表される所望の研削機械テーブル２に据付
けられる。この枠体１は剛体で作られ、底壁１０とその
まわりから立上る囲壁１１を備えている。1 to 5 show an embodiment of a grinding workpiece vibration device according to the present invention. 1 and 2 illustrate the main body of the apparatus, and numeral 1 is a frame having a rectangular shape in plan, which is installed on a desired grinding machine table 2 such as an NG child table. This frame body 1 is made of a rigid body and includes a bottom wall 10 and a surrounding wall 11 rising from the bottom wall 10.
３は前記枠体１の中央に配された振動用テーブルであり
、固定手段３０たとえばバイス、マグネットチャック、
真空チャックなどにより被削物Ｗを着脱可能に固定する
ようになっている。3 is a vibration table arranged in the center of the frame 1, and a fixing means 30 such as a vise, a magnetic chuck,
The workpiece W is removably fixed by a vacuum chuck or the like.
４ゆ研削砥石であり、たとえば鋳鉄粉や鋳鉄ファイバな
どをボンドとするものからなっている。It is a 4-grinding wheel, and is made of, for example, cast iron powder or cast iron fiber as a bond.
■〜０は前記振動用テーブル３のＸ方向、Ｘ方向および
Ｚ方向の各面にそれぞれ一端が接触するように枠体１に
配された複数組の圧電素子である。(2) to 0 are a plurality of sets of piezoelectric elements arranged on the frame 1 so that one end is in contact with each surface of the vibration table 3 in the X direction, the X direction, and the Z direction.
前記圧電素子■〜■は、加振力が強く、かつ非共振点で
振動が可能なものが好適である。厚み方向に分担された
ウェハ状の圧電体セラミックスをその分担方向が互いに
対向するように積層した積層型のものは、小さい電圧よ
り大きな変位が得られ、早い応答性１反復再現性、温度
安定性などの面から有利である。It is preferable that the piezoelectric elements (1) to (4) have a strong excitation force and can vibrate at a non-resonant point. The laminated type, in which wafer-shaped piezoelectric ceramics are layered in the thickness direction so that the distribution directions face each other, can obtain a larger displacement than a small voltage, has fast response, repeatability, and temperature stability. It is advantageous from such aspects.
実施例においては、圧電素子■〜■は１２個用いられ、
Ｘ方向用の圧電素子■〜０はそれぞれ２個ずつ互いに一
定の間隔をおいて囲壁１１と振動用テーブル３間に配さ
れ、Ｘ方向用の圧電素子■〜■も同様な関係で配され、
Ｚ方向角の圧電素子■〜０は底壁１０と振動用テーブル
３の下面間に互いに等間隔で配されている。In the example, 12 piezoelectric elements ■ to ■ are used,
Two piezoelectric elements 1 to 0 for the X direction are arranged between the surrounding wall 11 and the vibration table 3 at a constant interval, and piezoelectric elements 2 to 3 for the X direction are arranged in a similar relationship.
The piezoelectric elements 1 to 0 in the Z direction are arranged at equal intervals between the bottom wall 10 and the lower surface of the vibration table 3.
前記各圧電素子■〜■は片側が囲壁１１または底壁１０
に接看剤などにより強固に固定され、各圧電素子■〜■
とでそれぞれペアをなす水平および垂直の各スプリング
５，５′により枠体１と振動用テーブル３が連結され、
テーブルの安定した動きを得るようになっている。また
、各圧電素子■〜０の他側と振動用テーブル３は、常に
接触し合い、一定予圧で圧電素子が固定されるよう、枠
体１と振動用テーブル３の寸法を規定するか、各スプリ
ング５，５′の引張力が調整されている。Each of the piezoelectric elements ■ to ■ has an enclosure wall 11 or a bottom wall 10 on one side.
Each piezoelectric element ■～■
The frame body 1 and the vibration table 3 are connected by horizontal and vertical springs 5 and 5', respectively, which form a pair.
It is designed to obtain stable movement of the table. In addition, the dimensions of the frame 1 and the vibration table 3 may be determined so that the other side of each piezoelectric element 1 to 0 and the vibration table 3 are always in contact with each other, and the piezoelectric element is fixed with a constant preload. The tension of the springs 5, 5' is adjusted.
なお、第１図と第２図は圧電素子単体を利用した場合で
あり、圧電素子■〜■がたとえばランジュバン型ピアシ
スタックタイプ、すなわちウェハ状にスライスした圧電
素子をある枚数重ね、中心に設けた穴にボルトを通して
上下端を一定予圧で固定したタイプを利用するような場
合には、必ずしもスプリング類を用いる必要はない、す
なわち、この場合には、スタック状の圧電素子の両端を
枠体１と振動用テーブル３の双一方に固定することがで
き、振動用テーブル３の変位は、圧電素子の伸びと中心
を通るボルトの弾性変形の釣合いにより生ずることにな
るのである。Note that Figures 1 and 2 show the case where a single piezoelectric element is used, and the piezoelectric elements 1 to 2 are, for example, of the Langevin type piercing stack type, that is, a certain number of piezoelectric elements sliced into wafers are stacked and placed in the center. When using a type in which the upper and lower ends are fixed with a constant preload through bolts inserted into holes, it is not necessarily necessary to use springs. and the vibration table 3, and the displacement of the vibration table 3 is caused by the balance between the elongation of the piezoelectric element and the elastic deformation of the bolt passing through the center.
１６は研削液の浸入、村上を防止するための防水手段で
あり、最も簡便には振動用テーブル３の周縁と枠体１間
に防水シート類を張設することで実現される。Reference numeral 16 denotes a waterproof means for preventing the infiltration of the grinding fluid and water leakage, and this is most simply realized by stretching a waterproof sheet between the periphery of the vibration table 3 and the frame 1.
第３図ないし第５図は、本発明における振動用テーブル
の駆動・制御システムを例示している。3 to 5 illustrate a drive/control system for a vibration table according to the present invention.
第３図はフィードバックなしの基本的な構成を示してお
り、加工目的に応じて所望の圧電素子■〜■にそれぞれ
同じかまたは異なる電圧レベルで、かつ時間的に同時か
または時間差をおいて印加する機能を有している。具体
的には、バイポーラ電源（パワーアンプ）６と、これか
らの供給電圧を圧電素子■〜■に印加するための電気回
路を備えた制御ボッフスマと、該制御ボックス７内の電
気回路のベース側にＤ／Ａコンバータ回路を介して接続
され、所望のプログラム信号により供給電圧を所望の圧
電素子に割り当て、また電圧レベルを調整するマイク自
コンピュータ（またはパーソナルコンピュータ）８を備
えており、さらに好ましくはバイポーラ電源６の入力側
にファンクションジェネレータ、９が接続されている。Figure 3 shows a basic configuration without feedback, in which voltage is applied to the desired piezoelectric elements ■ to ■ at the same or different voltage levels, and either simultaneously or with a time difference, depending on the processing purpose. It has the function of Specifically, a bipolar power supply (power amplifier) 6, a control Bochsma equipped with an electric circuit for applying future supply voltage to the piezoelectric elements ■ to ■, and a base side of the electric circuit in the control box 7. The microphone computer (or personal computer) 8 is connected via a D/A converter circuit and allocates a supply voltage to a desired piezoelectric element according to a desired program signal and adjusts the voltage level, and is preferably a bipolar computer. A function generator 9 is connected to the input side of the power supply 6.
ファンクションジェネレータ９を併用した場合、これに
よる周波数制御とマイクロコンピュータ８による電圧レ
ベルおよび大まかな周波数制御の組合せが可能になるた
め、振動用テーブルに対する制御信号のフレキシビリテ
ィを増大することができる。When the function generator 9 is used in combination, it becomes possible to combine the frequency control by the function generator 9 with the voltage level and rough frequency control by the microcomputer 8, thereby increasing the flexibility of control signals for the vibration table.
第４図はフィードバック制御系を組込んだ構成を示すも
ので、枠体１の下部と研削機械テーブル２の間に、ロー
ドセルやキスラーなどの抵抗検出器１２を介在させ、こ
の抵抗検出器１０からの研削抵抗信号出力部をアンプ１
３を介してマイクロコンピュータ８の入力ボートに接続
したものである。FIG. 4 shows a configuration incorporating a feedback control system, in which a resistance detector 12 such as a load cell or Kistler is interposed between the lower part of the frame 1 and the grinding machine table 2. The grinding resistance signal output section of Amplifier 1
3 to the input port of the microcomputer 8.
第５図は本発明を複合研削方式、たとえば放電研削や電
解研削に適用した実施例を示しており、研削砥石４とワ
ーク（Ｗ）に対する給電ブラシ１４．１４’のリード線
をバイポーラ電源６に接続し、リード線間に研削砥石と
ワーク間に印加する電圧の極性切換えスイッチ１５を設
けている。図面中、１７はクーラントノズルである。FIG. 5 shows an embodiment in which the present invention is applied to a composite grinding method, such as electric discharge grinding or electrolytic grinding, in which the lead wires of the power supply brushes 14 and 14' for the grinding wheel 4 and the workpiece (W) are connected to the bipolar power source 6. A polarity changeover switch 15 for voltage applied between the grinding wheel and the workpiece is provided between the lead wires. In the drawing, 17 is a coolant nozzle.
本発明は前記のような構成からなるので、電圧を印加し
ない状態では、振動用テーブル３は各圧電素子■〜■あ
るいはスプリング５，５′を介して枠体１内で３軸方向
を支持され、通常のワークテーブルとして機能する。従
って、振動用テーブル３にワーク物Ｗを取り付け、研削
砥石４を駆動し、これをワークＷに所要の荷重で押し付
けつつ。Since the present invention has the above-described configuration, when no voltage is applied, the vibration table 3 is supported in three axial directions within the frame 1 via the piezoelectric elements 1 to 2 or the springs 5 and 5'. , functions as a normal work table. Therefore, the workpiece W is attached to the vibration table 3, the grinding wheel 4 is driven, and the workpiece W is pressed against the workpiece W with a required load.
研削機械テーブル２により枠体１ごと移りさせることに
より通常の研削加工が行われる。A normal grinding process is performed by moving the entire frame 1 using the grinding machine table 2.
そして、バイポーラ電源６の電圧をマイクロコンピュー
タ８からの信号により圧電素子■〜０に選択的に印加す
れば、圧電素子■〜０はひずみ、このひずみが振動用テ
ーブル３に機械的に伝播されるため振動用テーブル３が
振動し、この結果ワークＷも振動する。この振動方向は
、圧電素子■〜■のどれに電圧を印加するかにより自由
に設定できる。すなわち、Ｚ軸方向用の圧電素子■〜■
に印加すれば背分力方向の振動が得られ、Ｙ軸方向用の
圧電素子■〜■に印加すれば主分力方向の振動が得られ
、Ｘ軸方向用の圧電素子■〜■に印加すれば左右方向の
振動が得られる。また、異種方向の圧電素子に同時に印
加すれば、２方向以上が複合した複雑な振動が得られる
。Then, when the voltage of the bipolar power supply 6 is selectively applied to the piezoelectric elements ■ to 0 according to a signal from the microcomputer 8, the piezoelectric elements ■ to 0 are strained, and this strain is mechanically propagated to the vibration table 3. Therefore, the vibration table 3 vibrates, and as a result, the workpiece W also vibrates. The direction of this vibration can be freely set depending on which of the piezoelectric elements (1) to (2) a voltage is applied. In other words, piezoelectric elements for the Z-axis direction ■～■
If applied to piezoelectric elements for the Y-axis direction, vibrations will be obtained in the direction of the back force, if applied to piezoelectric elements for the Y-axis direction, vibrations will be obtained for the direction of the principal component force, and if applied to piezoelectric elements for the X-axis direction, vibrations will be obtained in the direction of the principal force This will give you vibrations in the left and right directions. Furthermore, if the vibration is applied to piezoelectric elements in different directions at the same time, complex vibrations in two or more directions can be obtained.
さらに、本発明では各軸方向用の圧電素子がそれぞれ複
数個で１組となっているため、各組を構成する圧電素子
を同時に印加すれば並進振動が得られ、また、各組を構
成する圧電素子を時間差をおいて順次印加すれば、回転
振動を含む振動パターンを自在に形成できる。Furthermore, in the present invention, since a plurality of piezoelectric elements for each axis direction constitute one set, translational vibration can be obtained by simultaneously applying the piezoelectric elements constituting each set. If the piezoelectric elements are applied sequentially with time differences, a vibration pattern including rotational vibration can be freely formed.
また、上記の振動方向、振動パターンにおいて。Also, in the above vibration direction and vibration pattern.
圧電素子の周波数を選定することで振動モードをたとえ
ば厚み縦振動から面積振動まで可変にすることができ、
振動振幅も印加電圧を調整することで自由に制御できる
。By selecting the frequency of the piezoelectric element, the vibration mode can be varied from, for example, thickness longitudinal vibration to area vibration.
The vibration amplitude can also be freely controlled by adjusting the applied voltage.
詳述すると、第１図と第２図で示す座標系において、各
圧電素子■〜０に印加する電圧極性と変位方向、回転方
向の関係は下記のようになる。To be more specific, in the coordinate system shown in FIGS. 1 and 2, the relationship between the polarity of the voltage applied to each piezoelectric element 1 to 0, the direction of displacement, and the direction of rotation is as follows.
＋Ｘ方向並進 ：の＋、Φ÷、■−２Φ−＋Ｙ方向並進
二〇＋、■＋、■−９［相］−＋２方向並進 二
〇÷ｔｏ＋ＩＱ＋ｌｏ＋Ｘ軸周り
正回転＝ ｅ＋劃−１Ｏ＋、
■−Ｙ軸周り正回転： ｓ＋
、ｏ＋、ｏ−、ｏ−Ｚ軸周り正回転：Φ−、＠＋、＠÷
、Ｉ−，ロー、■＋、■＋、トこれより、振動用テーブ
ルを（ＸｓｙｙＺ）なる座標に移動するには、各圧電素
子に対し、■Ｘ、■Ｘ、■−Ｘ、■−Ｘ、■ｙ、■ｙ、
■−ｙ。+X direction translation: +, Φ÷, ■-2Φ-+Y direction translation 20+, ■+, ■-9 [phase] -+2 direction translation 2
〇÷to+IQ+lo+forward rotation around the X axis = e+劃−1O+,
■-Forward rotation around the Y axis: s+
, o+, o-, o-forward rotation around Z axis: Φ-, @+, @÷
, I-, Low, ■+, ■+, To From now on, in order to move the vibration table to the coordinates (XsyyZ), for each piezoelectric element, ■X, ■X, ■-X, ■-X , ■y, ■y,
■-y.
■−ｙ、■２．［相］２．■Ｚ９＠Ｚ に比例した電圧を印加すればよい。■-y, ■2. [Phase] 2. ■Z9@Z It is sufficient to apply a voltage proportional to .
また、振動用テーブルに（θＸ、θｙ、θＺ）なる回転
をさせるには。Also, to make the vibration table rotate by (θX, θy, θZ).
■−θ２．■θ２．■θ２．■−０２，■−０２．■θ
Ｚ。■-θ2. ■θ2. ■θ2. ■-02, ■-02. ■θ
Z.
■θ２．■−θ２．■θＸ＋θｙ−［相］−θＸ十θｙ
。■θ2. ■-θ2. ■θX + θy - [phase] - θX + θy
.
■Ｘ−θｙ、■−Ｘ−θｙ に比例した電圧を印加すればよい。■X-θy, ■-X-θy It is sufficient to apply a voltage proportional to .
そして、これらの並進と回転運動を複合させるには、
■Ｘ−０２．■Ｘ＋０２．■−Ｘ＋０２．■−Ｘ−０２
゜■ｙ−０２．■ｙ＋０２．■−ｙ＋θ２．■−ｙ−θ
２゜■２＋θＸ＋θ）’ ｔ ＠’ ｚ−θＸ＋θＶ
ｙ ４］） ｚ＋θＸ−θ２゜■２−θＸ−θｙ
に比例した電圧を印加すればよい。In order to combine these translational and rotational movements, ■X-02. ■X+02. ■-X+02. ■-X-02
゜■y-02. ■y+02. ■-y+θ2. ■-y-θ
2゜■2+θX+θ)' t @' z−θX+θV
y4]) A voltage proportional to z+θX-θ2°■2-θX-θy may be applied.
ただ、各圧電素子に印加する電圧は十〜−で振らせるよ
りも＋側にシフトさせて、シフト電圧を中心に振らせる
方が制御しやすく、また、圧電素子に予圧を与え易い点
からも好ましいといえる。However, it is easier to control the voltage applied to each piezoelectric element by shifting it to the + side and making the shift voltage swing around the center rather than swinging it from 10 to -, and it is also easier to apply preload to the piezoelectric element. It can be said that it is preferable.
その場合、シフト電圧Ｖｓとすれば、印加電圧は下記の
ようになる。In that case, if the shift voltage is Vs, the applied voltage will be as follows.
■ｖＳ＋ｘ−０２．■Ｖｓ＋ｘ十０２．■Ｖｓ−ｘ＋ｆ
Ｊｚ。■vS+x-02. ■Vs+x102. ■Vs-x+f
Jz.
■Ｖ ｓ −ｘ−０２，■ｖｓ＋ｙ−ｏｚ、■Ｖｓ＋ｙ
＋０２゜■Ｖ Ｓ −ｙ ＋ Ｏｚ 、■Ｖｓ−ｙ−０
２゜■Ｖｓ＋ｚ＋（ｊｘ＋θｙ＊＠ｌＶｓ＋ｚ−θｘ＋
（ｌｙ。■V s -x-02, ■vs+y-oz, ■Vs+y
+02゜■V S -y + Oz, ■Vs-y-0
2゜■Vs+z+(jx+θy*@lVs+z−θx+
(ly.
■Ｖｓ＋ｚ＋θＸ−θｙ ｙ ＠ Ｖ ｓ ＋ ｚ
Ｏｘ−θｙそこで、たとえば振動用テーブルをＸＹ平面
内の楕円（長径Ａ、短径Ｂ）軌道に沿って並進運動させ
る場合には、時間の関数として、
ｘ＝Ａｃｏｓｗｔ、ｙ＝Ｂｓｉｎｗｔ （ｗ＝＝２ π
／Ｔ、Ｔは一周する周期）なる電圧を印加すればよいこ
とがわかる。従って、その他（Ｘ、ｙ、Ｚ、θＸ、θｙ
、θ２）を様々な時間の関数として与えることにより圧
電素子の変位の限界内であらゆる振動パターンを創生ず
ることが可能となる。上記時間数たる制御信号はマイク
ロコンピュータ８にソフトウェアとして構築することに
より容易に創成することが可能である。■Vs+z+θX-θy y @Vs+z
Ox-θy Therefore, for example, when the vibration table is translated along an elliptical (major axis A, minor axis B) trajectory in the XY plane, as a function of time, x=Acoswt, y=Bsinwt (w== 2 π
It can be seen that it is sufficient to apply a voltage of /T, T is the period of one round. Therefore, other (X, y, Z, θX, θy
, θ2) as various functions of time, it is possible to create any vibration pattern within the limits of the displacement of the piezoelectric element. The control signal representing the above-mentioned time can be easily created by building it in the microcomputer 8 as software.
さらに、ファンクションジェネレータ９を併用した場合
、これの出力信号をＤＣ一定レベルに固定し、マイクロ
コンピュータ８の信号を第６図のようにすれば、振動用
テーブル３は前述したＸＹ平面内の楕円軌道を描くが、
ここでさらにファンクションジェネレータ９の信号周波
数や波形を変化させることにより、第７図（ａ）（ｂ）
（ｃ）に示すような複雑な波形を容易に得ることが可能
である。Furthermore, when the function generator 9 is used together, if the output signal of this is fixed at a constant DC level and the signal of the microcomputer 8 is made as shown in FIG. However,
By further changing the signal frequency and waveform of the function generator 9, the results shown in FIGS. 7(a) and (b)
It is possible to easily obtain a complex waveform as shown in (c).
そのため、これらの複雑な波形により第８図のように振
動用テーブルを楕円軌道を描かせつつ、その近傍で微少
振動を行わせることが可能である。Therefore, with these complex waveforms, it is possible to cause the vibration table to draw an elliptical orbit as shown in FIG. 8, and to cause minute vibrations in the vicinity thereof.
さらに、第４図のように抵抗検出器１２を介在させるこ
とで、フィードバック加ニジステムを容易に実現でき、
研削中の抵抗に応じて前記したフレキシブルな振動によ
る対応が可能となる。Furthermore, by interposing a resistance detector 12 as shown in FIG. 4, a feedback addition system can be easily realized.
The above-mentioned flexible vibration can be used depending on the resistance during grinding.
すなわち、たとえば研削抵抗が大きくなると振動振幅が
増加するようにマイクロコンピュータ８にプログラミン
グすれば、抵抗による砥石やワークの逃げから生ずる削
り残し量を減少させることができる。また、切込み開始
時、あるいは終了時の抵抗変化を検出することにより、
積極的にワークのエツジの面取り加工を行うことも可能
であり、通常では起し易い硬脆材料のチッピングも防ぐ
ことができる。加工中の研削抵抗の変化はストレート型
砥石よりもカップ型砥石のような研削面積の変化する場
合に著しいため、本発明は特にカップ型砥石による面仕
上研削加工において効果的である。That is, for example, by programming the microcomputer 8 so that the vibration amplitude increases as the grinding resistance increases, it is possible to reduce the amount of uncut material caused by the escape of the grindstone or workpiece due to the resistance. In addition, by detecting the resistance change at the beginning or end of the cut,
It is also possible to actively chamfer the edges of the workpiece, and it is also possible to prevent chipping of hard and brittle materials, which normally tends to occur. Since the change in grinding resistance during processing is more pronounced when the grinding area changes with a cup-shaped grindstone than with a straight-type grindstone, the present invention is particularly effective in surface finish grinding using a cup-shaped grindstone.
また、第５図のように放電・電解研削加工と複合させた
場合には、振動用テーブル３の駆動用電源出力を砥石〜
ツー９間に印加する放電・電解用の電源として兼用する
ことが可能となる。そのため、何ら特別な電源ユニット
を付加する必要がなく、設備コスト、加工コストが節減
される。そのうえ、振動用テーブル３の変位を砥石〜ツ
ー９間の放電・電解発生の効果を周期させることも可能
となり１通常では実現できない相乗効果を期待すること
かできる。In addition, when combined with electric discharge/electrolytic grinding as shown in Fig. 5, the power output for driving the vibration table 3 is
It can also be used as a power source for discharging and electrolysis to be applied between the terminals 9 and 9. Therefore, there is no need to add any special power supply unit, and equipment costs and processing costs are reduced. In addition, it is also possible to cycle the displacement of the vibration table 3 to generate electric discharge and electrolysis between the grinding wheel and the tool 9, and a synergistic effect that cannot normally be achieved can be expected.
なお、この加工において砥石〜ツー９間に印加する電圧
の極性も図示のような極性切換スイッチ１５により容易
に切換えでき、マイクロコンピュータ８からの指令によ
る自動切換えも可能である。Incidentally, in this processing, the polarity of the voltage applied between the grinding wheel and the tool 9 can be easily changed by a polarity changeover switch 15 as shown in the figure, and automatic changeover by a command from the microcomputer 8 is also possible.
このため、ワーク側（＋）、砥石側（−）により、ワー
クの高能率除去を、またワーク側（−）、砥石側（＋）
により砥石の高能率ドレッシングを行える。For this reason, the workpiece can be removed with high efficiency by using the workpiece side (+) and the grinding wheel side (-).
This enables highly efficient dressing of the grindstone.
また、振動用テーブル３の複雑な制御にも拘らず、研削
抵抗の低減が見られない場合に砥石〜ツー９間の印加電
圧極性を自動切換えするよう予めプログラミングするこ
とで、加工を中断せずにインプロセスで自動ドレッシン
グを行うシーケンスを構成できる。In addition, despite the complicated control of the vibration table 3, if there is no reduction in the grinding resistance, the polarity of the applied voltage between the grinding wheel and the tool 9 can be programmed to be automatically switched, so that machining is not interrupted. You can configure a sequence that performs automatic dressing in-process.
以上のことから、本発明を利用することにより次に例示
するような特徴ある研削を実現できる。From the above, by utilizing the present invention, characteristic grinding as exemplified below can be realized.
■振動テーブルがパライティーに富んだ振動を行えるた
め、工具を振動させるよりも被削物の微少破砕が促進さ
れ、研削抵抗が減少するため、除去量が増加し、研削が
高能率化する。■The vibrating table can vibrate with high parity, which promotes micro-fracture of the workpiece rather than vibrating the tool, reduces grinding resistance, increases removal amount, and improves grinding efficiency.
■振動により砥石のドレッシングが常時行われるため、
砥石の目詰りを解除あるいは緩和することができる。■Since the grindstone is constantly dressed by vibration,
It is possible to remove or alleviate clogging of the grindstone.
■被削物の振動方向やパターンの自由度が高く、コント
ロールが容易であること、砥石の形状や寸法に制約がな
いことにより、高能率で複雑な形状の加工を行える。■High degree of freedom in the vibration direction and pattern of the workpiece, easy control, and no restrictions on the shape or dimensions of the grindstone, making it possible to process complex shapes with high efficiency.
■振動の自由度が高いため、砥石の切込み量を被削物の
材質に特有な塑性破壊領域に設定することが容易となり
、研磨面に近い良好な研削面粗さを得ることができる。■Due to the high degree of freedom of vibration, it is easy to set the cutting depth of the grinding wheel to the plastic fracture region specific to the material of the workpiece, and it is possible to obtain a good ground surface roughness close to that of a polished surface.
■砥石側の制約がないため、遊離砥粒を付加した研削加
工に適用すれば、被削物の振動により遊離砥粒の微少振
動が得られるため、研削面の良好な研磨効果と砥石の適
度なドレッシング効果が期待できる。■Since there are no restrictions on the grinding wheel side, if applied to grinding with free abrasive grains added, minute vibrations of the free abrasive grains can be obtained due to the vibration of the workpiece, resulting in a good polishing effect on the grinding surface and a suitable grinding wheel. You can expect a dressing effect.
■放電加工を複合した研削加工に適用すれば、被削物と
砥石間の放電を効果的に促進できると共に、放電が均一
化するため、研削面の放電による除去効果と砥石の適度
なドレッシング効果が期待できる。■If electric discharge machining is applied to grinding combined with electric discharge machining, it is possible to effectively promote electric discharge between the workpiece and the grinding wheel, and the electric discharge is made uniform, so the removal effect of the electric discharge on the grinding surface and the appropriate dressing effect of the grinding wheel can be achieved. can be expected.
■電解を複合させた研削加工に適用すれば、振動により
電解液の浸透および流動を促進するため、研削面の研磨
効果ならびに砥石の適度なドレッシング効果が期待でき
る。■If applied to a grinding process that combines electrolysis, the vibration will promote the penetration and flow of the electrolyte, so it can be expected to have a polishing effect on the grinding surface and an appropriate dressing effect on the grindstone.
なお１本発明は工具側の加振を不可とするものではなく
、この方法との併用セ可能であることはいうまでもない
。また、研削加工用の他、切削加工等のためのワークテ
ーブルとしても用いることが可能である。Note that the present invention does not prohibit excitation of the tool side, and it goes without saying that it can be used in combination with this method. In addition to grinding, it can also be used as a work table for cutting, etc.
以上説明した本発明によるときには、通常の研削盤、マ
シニングセンタなど各種研削加工機の機側テーブルに搭
載するだけで、多自由度振動テーブル特性により硬脆材
料などを砥石の制限や加工法の制限なく、［単にしかも
高能率、高精度で研削加工することができるという優れ
た効果が得られる。According to the present invention described above, by simply mounting it on the machine side table of various grinding machines such as ordinary grinders and machining centers, it is possible to handle hard and brittle materials without restrictions on grinding wheels or processing methods due to the multi-degree-of-freedom vibrating table characteristics. , [The excellent effect of simply grinding with high efficiency and high precision can be obtained.
第１図は本発明による研削用被削物加振装置の一実施例
を示す平面図、第２図は同じくその断面図、第３図は本
発明におけるテーブル駆動・制御系の一例を示す説明図
、第４図は他の駆動・制御系を示す説明図、第５図は本
発明を放電・電解研削と複合した実施例を示す説明図、
第６図は本発明におけるテーブル制御信号の一例を示す
線図、第７図（ａ）（ｂ）（ｃ）はファンクションジェ
ネレータを用いた場合の信号波形を示す線図、第８図は
第７図（ａ）により得られたテーブル軌道を示す線図で
ある。
１・・・枠体、２・・・研削機械テーブル、３・・・駆
動用テーブル、■〜０・・・圧電素子、６・・・バイポ
ーラ電源、７・・・制御ボックス、８・・・マイクロコ
ンピュータ、９・・・ファンクションジェネレータ、１
２・・・抵抗検出器。FIG. 1 is a plan view showing an embodiment of the grinding workpiece vibration device according to the present invention, FIG. 2 is a sectional view thereof, and FIG. 3 is an explanation showing an example of the table drive/control system according to the present invention. 4 is an explanatory diagram showing another drive/control system, and FIG. 5 is an explanatory diagram showing an embodiment in which the present invention is combined with electric discharge/electrolytic grinding.
FIG. 6 is a diagram showing an example of the table control signal in the present invention, FIGS. 7(a), (b), and (c) are diagrams showing signal waveforms when a function generator is used, and FIG. FIG. 3 is a diagram showing the table trajectory obtained in FIG. DESCRIPTION OF SYMBOLS 1... Frame body, 2... Grinding machine table, 3... Drive table, ■~0... Piezoelectric element, 6... Bipolar power supply, 7... Control box, 8... Microcomputer, 9...Function generator, 1
2...Resistance detector.
Claims (3)
に配された被削物取付け用のテーブルと、前記テーブル
のＸ方向、Ｙ方向およびＺ方向をそれぞれ支持する複数
組の圧電索子と、それら圧電素子の作動を制御する装置
を備えたことを特徴とする研削用被削物加振装置。(1) A frame body to be attached to a grinding machine table, a table for attaching a workpiece disposed within the frame body, and multiple sets of piezoelectric cords each supporting the table in the X direction, Y direction, and Z direction. A grinding workpiece vibration device characterized by comprising a device for controlling the operation of these piezoelectric elements.
イポーラ電源と、この電源からの電圧を所望の圧電素子
に割り当てると共に、圧電素子への電圧レベルを制御す
る手段とを有し、さらに要すれば、バイポーラ電源がフ
ァンクションジェネレータで周波数制御するようになっ
ているものを含む特許請求の範囲第１項記載の研削用被
削加振装置。(2) A device for controlling the operation of a piezoelectric element includes at least a bipolar power source, a means for allocating voltage from this power source to a desired piezoelectric element, and a means for controlling the voltage level to the piezoelectric element, and further includes: For example, the workpiece vibration device for grinding according to claim 1, including one in which the frequency of the bipolar power source is controlled by a function generator.
され、フィードバック制御が行われるようになっている
ものを含む特許請求の範囲第１項記載の研削用被削加振
装置。(3) The workpiece vibration device for grinding according to claim 1, which includes a resistance detection device interposed between the frame and the grinding machine table to perform feedback control.
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62155340A JPH0722876B2 (en) | 1987-06-24 | 1987-06-24 | Work table device for grinding |
| US07/269,145 US5165205A (en) | 1987-06-24 | 1988-06-23 | Device for vibrating materials to be ground |
| PCT/JP1988/000620 WO1988010174A1 (en) | 1987-06-24 | 1988-06-23 | Device for vibrating work to be ground |
| KR1019880701316A KR930002184B1 (en) | 1987-06-24 | 1988-06-23 | Device for vibrating materials to be ground |
| EP88906026A EP0323518B1 (en) | 1987-06-24 | 1988-06-23 | Device for vibrating work to be ground |
| DE8888906026T DE3879448T2 (en) | 1987-06-24 | 1988-06-23 | DEVICE FOR SWINGING A WORKPIECE TO BE GRINDED. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62155340A JPH0722876B2 (en) | 1987-06-24 | 1987-06-24 | Work table device for grinding |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH012852A true JPH012852A (en) | 1989-01-06 |
| JPS642852A JPS642852A (en) | 1989-01-06 |
| JPH0722876B2 JPH0722876B2 (en) | 1995-03-15 |
Family
ID=15603750
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62155340A Expired - Lifetime JPH0722876B2 (en) | 1987-06-24 | 1987-06-24 | Work table device for grinding |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US5165205A (en) |
| EP (1) | EP0323518B1 (en) |
| JP (1) | JPH0722876B2 (en) |
| KR (1) | KR930002184B1 (en) |
| DE (1) | DE3879448T2 (en) |
| WO (1) | WO1988010174A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2439219A (en) * | 1944-06-09 | 1948-04-06 | John C O'connor | Apparatus for transmitting intense vibrations for performing work |
| US2939250A (en) * | 1957-01-31 | 1960-06-07 | Micromatic Hone Corp | Resonant honing |
| FR1492788A (en) * | 1965-07-20 | 1967-08-25 | Soudure Elec Languepin | Mechanical erosion machining method and device |
| SU740483A1 (en) * | 1977-12-27 | 1980-06-15 | Предприятие П/Я Р-6930 | Vibrated machine for vibration-working of parts |
| SU797750A1 (en) * | 1978-04-06 | 1981-01-23 | Государственный Союзный Заводпо Механической И Химическойочистке Котлоагрегатов | Method and apparatus for ajitating substances |
| JPS6176261A (en) * | 1984-09-25 | 1986-04-18 | Hitachi Ltd | Ultrasonic machine |
| JPS61219549A (en) * | 1985-03-25 | 1986-09-29 | Agency Of Ind Science & Technol | Fine adjustment |
| JPH06171950A (en) * | 1992-12-02 | 1994-06-21 | Shin Etsu Chem Co Ltd | Production of lanthanum manganite powder |
-
1987
- 1987-06-24 JP JP62155340A patent/JPH0722876B2/en not_active Expired - Lifetime
-
1988
- 1988-06-23 US US07/269,145 patent/US5165205A/en not_active Expired - Fee Related
- 1988-06-23 KR KR1019880701316A patent/KR930002184B1/en not_active IP Right Cessation
- 1988-06-23 EP EP88906026A patent/EP0323518B1/en not_active Expired - Lifetime
- 1988-06-23 DE DE8888906026T patent/DE3879448T2/en not_active Expired - Fee Related
- 1988-06-23 WO PCT/JP1988/000620 patent/WO1988010174A1/en active IP Right Grant
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