JPH01264579A - Control method of progressive-wave type ultrasonic motor - Google Patents
Control method of progressive-wave type ultrasonic motorInfo
- Publication number
- JPH01264579A JPH01264579A JP63090902A JP9090288A JPH01264579A JP H01264579 A JPH01264579 A JP H01264579A JP 63090902 A JP63090902 A JP 63090902A JP 9090288 A JP9090288 A JP 9090288A JP H01264579 A JPH01264579 A JP H01264579A
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- frequency
- elastic body
- piezoelectric body
- annular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 10
- 230000020169 heat generation Effects 0.000 abstract description 6
- 238000006073 displacement reaction Methods 0.000 abstract description 2
- 230000003028 elevating effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 101000941450 Lasioglossum laticeps Lasioglossin-1 Proteins 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/14—Drive circuits; Control arrangements or methods
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
- H02N2/163—Motors with ring stator
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、多数の電極に分割された圧電体を未分極処理
電極を介して２領域に分割し、それぞれに圧電体の共振
周波数に等しい周波数で位相差のある交流電圧を入力し
、前記圧電体に接着により一体化された弾性体に生ずる
進行波によって回転体を駆ｆｆｉ！＋ ｉ−る進行波形
超音波モー夕の制御方法に関する。Detailed Description of the Invention (Industrial Application Field) The present invention divides a piezoelectric material divided into a large number of electrodes into two regions via unpolarized electrodes, and each region has a frequency equal to the resonant frequency of the piezoelectric material. An alternating current voltage with a phase difference in frequency is input, and the rotating body is driven by a traveling wave generated in an elastic body that is integrated with the piezoelectric body by adhesive. The present invention relates to a method of controlling a traveling waveform ultrasonic wave motor.
（従来の技術）
従来、磁石と、コイルに電流を流づことによって生ずる
電磁石との相互作用によって、電気エネルギーを回転運
動どしての機械エネルギーに変換するモータは広く用い
られている。この電磁力を応用したモータに代る装置と
して超音波エネルギーを利用するモータが提案されてい
る。第４図はこの種のモータの＝例の進行波形超音波モ
ータ（以下進行波モータという）の動作原理の説明図で
ある。図において、１は弾性体で、その表面１′上に進
行波が形成された状態を示している。(Prior Art) Conventionally, motors have been widely used that convert electrical energy into mechanical energy such as rotational motion through interaction between a magnet and an electromagnet generated by passing a current through a coil. A motor that uses ultrasonic energy has been proposed as an alternative to a motor that uses electromagnetic force. FIG. 4 is an explanatory diagram of the operating principle of a traveling wave ultrasonic motor (hereinafter referred to as a traveling wave motor) as an example of this type of motor. In the figure, 1 is an elastic body, and a traveling wave is formed on the surface 1' of the elastic body.
弾性体１の表面１′上には楕円振動が形成される。今、
表面１′の質点△に着目すると、横振幅ａ （上下方向
）と縦振幅ｂ （左右方向）の楕円軌跡Ｑ上を矢印Ｍの
方向に運動しており、この状態の下で運動が自由な動体
２の表面を弾性体１の表面上に加圧接触さぼると動体２
は弾性体１の進行波の頂点へ及びＡ′の部分でのみ接触
しており、且つ、頂点Ａ、Ａ’ は矢印Ｍの方向に運動
しているので、動体２は弾性体１との摩擦ににって矢印
Ｎの方向に駆動される。Elliptical vibrations are formed on the surface 1' of the elastic body 1. now,
Focusing on the mass point △ on the surface 1', it is moving in the direction of the arrow M on an elliptical locus Q with a horizontal amplitude a (vertical direction) and a longitudinal amplitude b (horizontal direction), and in this state, it can move freely. When the surface of the moving body 2 is brought into pressure contact with the surface of the elastic body 1, the moving body 2
is in contact with the apex of the traveling wave of the elastic body 1 only at the part A', and since the apexes A and A' are moving in the direction of the arrow M, the moving body 2 has no friction with the elastic body 1. is driven in the direction of arrow N.
上記の動作原理に基づく進行波モータの一例の断面図を
第２図に示す。図において、円環状弾性体１１は導電体
で作られ、その表面に円環状圧電体１２を接着し、円環
状圧電体１２が円環状弾性体１１を励振して一体として
振動するようになっている。１３は円環状弾性体１１に
圧接されて円環状弾性体１１に生ずる駆動力により回転
Ｊ−る回転子である。回転子１３はばね１４により適度
な加圧力で円環状弾性体１１に圧接されていて、出力軸
１５から回転エネルギーを出力している。FIG. 2 shows a sectional view of an example of a traveling wave motor based on the above operating principle. In the figure, an annular elastic body 11 is made of a conductive material, and an annular piezoelectric body 12 is bonded to the surface of the annular elastic body 11, and the annular piezoelectric body 12 excites the annular elastic body 11 so that the annular elastic body 11 vibrates as a unit. There is. A rotor 13 is pressed against the annular elastic body 11 and rotated by a driving force generated in the annular elastic body 11. The rotor 13 is pressed against the annular elastic body 11 by a spring 14 with an appropriate pressure, and outputs rotational energy from an output shaft 15.
円環状圧電体１２の構成の一例を第３図に示す。An example of the configuration of the annular piezoelectric body 12 is shown in FIG.
図において、（イ）図は円環状圧電体１２の表面の図で
、（ロ）図は裏面の図である。（イ）図に示すように円
環状圧電体１２は例えば２０°毎に分割された１６個の
互いに隣接する部分が交互に厚み方向に分極処理された
電極２１〜２８及び３１〜３８と未分極処理電極４０及
び４１で構成される。電極２１〜２８の８個の電極より
成る領域をＡとし、電極３１〜３８の８個の電極から成
る領域をＢとする。領域Ａと領域Ｂの各構成電極部は成
る瞬間の入力に対して奇数番号の素子が伸長Ｊ−ると偶
数番号の素子は収縮するものである。図においては≠の
瞬間において伸長する素子を＋°″、′収縮する素子を
ＬＬ Ｉ＋で表示している。（ロ）図は裏面の図で、
電極２１〜２８から成る領域△の裏面の電極は一体化さ
れて電極Δ５１を構成し、電極３１〜３８から成る領域
Ｂの裏面の電極は一体化されて電極Ｂ５２を構成してい
る。In the figures, (a) is a view of the front surface of the annular piezoelectric body 12, and (b) is a view of the back side. (B) As shown in the figure, the annular piezoelectric body 12 is divided into, for example, 16 mutually adjacent parts divided into 20 degrees, and electrodes 21 to 28 and 31 to 38, which are polarized in the thickness direction, alternately and unpolarized. It is composed of processing electrodes 40 and 41. A region made up of eight electrodes 21 to 28 is designated as A, and a region made up of eight electrodes 31 to 38 is designated B. In response to the instantaneous input of the constituent electrode portions of the regions A and B, the odd-numbered elements expand and the even-numbered elements contract. In the figure, the element that expands at the moment of ≠ is indicated by +°'', and the element that contracts ' is indicated by LL I+. (B) The figure is the back view,
The electrodes on the back surface of region Δ consisting of electrodes 21-28 are integrated to form electrode Δ51, and the electrodes on the back surface of region B consisting of electrodes 31-38 are integrated to form electrode B52.
上記のように構成された円環状圧電体１２において、導
電体０作られた円環状弾性体１１により電気的に一体化
された表面をコモン端子とし、電極Ａ５１にＶｏｓｉｎ
ωｔ、電極Ｂ ５’ ２にｙｏｃｏｓωｔの交流電圧を
印加して９０’位相差の成る交流電圧を領域△と領域［
３に与えている。In the annular piezoelectric body 12 configured as described above, the surface electrically integrated with the annular elastic body 11 made of zero conductor is used as a common terminal, and the electrode A51 is connected to Vosin.
ωt, an AC voltage of yocosωt is applied to the electrode B 5' 2, and the AC voltage with a 90' phase difference is divided into the area Δ and the area [
It is given to 3.
この交流電圧の周波数が一体になった円環状圧電体１２
と円環状弾性体１１とで決まる共振周波数と略等しくな
ったとぎ、固定子は共振し、円周方向に屈曲振動を起す
。ここで、例えば第３図の未分極処理電極４１を（３／
４）人に選ぶと、この領域Ａと領域Ｂとに発生した波が
相互に干渉を起し、合成されて進行波となり、回転子１
４を回転させる。この回転の安定を計るため、円環状圧
電体１２の未分極処理電極４０から信号を引き出してそ
の信号振幅を最大にさせるにうに印加する交流電圧の周
波数を変化させている。印加した交流電圧の周波数が円
環状圧電体１２の共振周波数に合致しＩＣとき回転効率
が最高どなり、最大トルクが得られる。An annular piezoelectric body 12 in which the frequency of this AC voltage is integrated
When the resonance frequency becomes approximately equal to the resonance frequency determined by the annular elastic body 11, the stator resonates and causes bending vibration in the circumferential direction. Here, for example, the unpolarized electrode 41 in FIG.
4) When selected by a person, the waves generated in region A and region B interfere with each other and are combined to form a traveling wave, which causes rotor 1
Rotate 4. In order to stabilize this rotation, a signal is extracted from the unpolarized electrode 40 of the annular piezoelectric body 12, and the frequency of the applied alternating current voltage is varied to maximize the signal amplitude. The frequency of the applied alternating current voltage matches the resonance frequency of the annular piezoelectric body 12, and when it is an IC, the rotational efficiency is the highest and the maximum torque is obtained.
（発明が解決しようとする課題）
ところで、上記のように発生した進行波は円環状弾性体
に圧接された回転子１３を回転させている。このように
円環状弾性体１１はばね１４により圧接された回転子１
３を□摩擦力によって摺動して回転させているため相互
に摩耗すると共に摩擦熱を生ずる。この発熱により一体
化された円環状圧電体１２と円環状弾性体１１の共振周
波数が低くなり、入力交流電圧の周波数とのずれを生ず
るため回転力が低下し、回転数か落ちてくる。(Problems to be Solved by the Invention) Incidentally, the traveling waves generated as described above rotate the rotor 13 that is pressed against the annular elastic body. In this way, the annular elastic body 11 is pressed against the rotor 1 by the spring 14.
Since the parts 3 are slid and rotated by frictional force, they wear against each other and generate frictional heat. This heat generation lowers the resonant frequency of the integrated annular piezoelectric body 12 and annular elastic body 11, causing a deviation from the frequency of the input AC voltage, resulting in a decrease in rotational force and a drop in rotational speed.
本発明は上記の問題点に鑑みてなされたもので、その目
的は、発熱による共振周波数のずれを補正することので
きる進行波形超音波モータの制御方法を提供することに
ある。The present invention has been made in view of the above problems, and an object of the present invention is to provide a control method for a traveling wave ultrasonic motor that can correct a shift in resonance frequency due to heat generation.
（課題を解決するための手段）
前記の課題を解決する本発明は、多数の電極に分割され
た圧電体を未分極処理電極を介して企領域に分割゛し、
それぞれに圧電体の共振周波数に等しい周波数で位相差
のある交流電圧を入力し、前記圧電体に接着により一体
化された弾性体に生ずる進行波によって回転体を駆動す
る進行波形超音波モータの制御方法において、前配圧電
体と弾性体とが一体化された振動体に温度センサーを取
り付け温度センナの出力によって前記圧電体に印加する
交流電圧の周波数を変化さ櫨ることを特徴とするもので
ある。(Means for Solving the Problems) The present invention solves the above problems by dividing a piezoelectric body divided into a large number of electrodes into target regions via unpolarized electrodes,
Control of a traveling wave ultrasonic motor that drives a rotating body by a traveling wave generated in an elastic body that is integrated with the piezoelectric body by adhesive, by inputting an AC voltage with a phase difference at a frequency equal to the resonant frequency of the piezoelectric body to each of them. The method is characterized in that a temperature sensor is attached to a vibrating body in which a front pressure distribution electric body and an elastic body are integrated, and the frequency of an alternating current voltage applied to the piezoelectric body is changed by the output of the temperature sensor. be.
（作用）
圧電体と弾性体が一体化された振動体に取り付けられた
温度センサは前記振動体の温度に比例した電圧を発生し
、圧電体に印加する交流電圧の周波数をｍ度に応じて変
化させる。(Function) A temperature sensor attached to a vibrating body in which a piezoelectric body and an elastic body are integrated generates a voltage proportional to the temperature of the vibrating body, and changes the frequency of the AC voltage applied to the piezoelectric body according to m degrees. change.
（実施例）
以下、図面を参照して本発明の実施例を詳細に説明する
。(Example) Hereinafter, an example of the present invention will be described in detail with reference to the drawings.
第１図は本発明の一実施例の方法を実施する回路である
。図において、６１は第２図に示す円環状圧電体１２と
円環状弾性体１１の発生する進行波によって回転子１３
が回転する超音波モータ、６２は金属製の円環状弾性体
１１に取り付（ブて円環状圧電体１２を含めた振動体の
温度を測定して温度に比例した電圧を発生づ−る温度セ
ンサで、出力電圧は電圧−周波数変換器（以下ＶＦＣと
いう）６３に入力される。FIG. 1 is a circuit implementing the method of one embodiment of the present invention. In the figure, reference numeral 61 indicates a rotor 13 caused by traveling waves generated by the annular piezoelectric body 12 and the annular elastic body 11 shown in FIG.
An ultrasonic motor 62 is attached to a metal annular elastic body 11 (it measures the temperature of the vibrating body including the annular piezoelectric body 12 and generates a voltage proportional to the temperature). The output voltage of the sensor is input to a voltage-frequency converter (hereinafter referred to as VFC) 63.
発生した交流電圧、） ｓｉｎωｔと、移相器６４によ
り９０’位相を変換された交流電圧ＶＯＣＯ３ωｔとが
超音波モータ６１に印加される。The generated AC voltage ) sinωt and the AC voltage VOCO3ωt whose 90' phase has been converted by the phase shifter 64 are applied to the ultrasonic motor 61.
次に、上記の回路の動作と温度補償方法を説明する。温
度センサ６２は超音波モータ６１の回転ににる発熱のた
め上昇した温度に比例する電圧を発生し、ＶＦＣ６３に
電圧信号を与える。ＶＦＣ６３は入力電圧が高いと低下
する周波数の交流電圧ｖｏＳ１ｎ（１）ｔを発生し、移
相器６４によって９０°位相をシフトされた信号Ｖｏ
ｓｉｎ （１）ｔと共に超音波モータ６１に供給される
。この印加された交流電圧の周波数は温度変化に応じて
変化するため、円環状弾性体１７と円環状圧電体１２の
発熱による温度上昇により変化する共振周波数に常に合
致した周波数で前記円環状圧電体１２を発振させる。Next, the operation of the above circuit and the temperature compensation method will be explained. The temperature sensor 62 generates a voltage proportional to the temperature increased due to the heat generated by the rotation of the ultrasonic motor 61, and provides a voltage signal to the VFC 63. The VFC 63 generates an AC voltage voS1n(1)t whose frequency decreases when the input voltage is high, and a signal Vo whose phase is shifted by 90 degrees by the phase shifter 64.
It is supplied to the ultrasonic motor 61 together with sin (1)t. Since the frequency of this applied alternating current voltage changes in accordance with temperature changes, the annular piezoelectric body 12 always maintains a frequency that matches the resonance frequency that changes due to temperature rise due to heat generation in the annular elastic body 17 and the annular piezoelectric body 12. 12 to oscillate.
以上説明したように本発明の方法では、円環状弾性体又
は円環状圧電体に温度に比例した電圧を発生リ−る温度
センサを取り付（プて、この出力電圧の上昇に反して低
下する周波数の交流電圧によって回転することにより、
発熱による共振周波数の変化を補償することができるよ
うになる。さらに、ロータリーエンコーダからの回転数
信号等と温度センサからの信号とを併用することも可能
である。As explained above, in the method of the present invention, a temperature sensor that generates a voltage proportional to temperature is attached to an annular elastic body or an annular piezoelectric body, so that the output voltage decreases while the output voltage increases. By rotating by alternating voltage of frequency,
It becomes possible to compensate for changes in resonance frequency due to heat generation. Furthermore, it is also possible to use the rotational speed signal etc. from the rotary encoder together with the signal from the temperature sensor.
＝７＝
（発明の効果）
以上詳細に説明したように本発明によれば、圧電体の発
熱による共振点のずれを自動的に補正することができる
Ｊ：うになって、実用上の効果は大きい。=7= (Effects of the Invention) As explained in detail above, according to the present invention, the displacement of the resonance point due to heat generation of the piezoelectric body can be automatically corrected. big.
第１図は本発明の方法を実施Ｊ−る回路のブロック図、
第２図は進行波モータの断面図、第３図は進行波モータ
に用いる円環状圧電体の椙造図、第４図は進行波モータ
の原理説明図である。
１１・・・円環状弾性体 １２・・・円環状圧電体１
３・・・回転子 １４・・・ばね２１〜２８．
３１〜３８・・・電極
４０．４１，４２．４３・・・未分極処理電極６１・・
・超音波モータ ６２・・・温度センサ６３・・・Ｖ
ＦＣ６４・・・移相器
特許出願人 フォスター電機株式会社代 埋
人 弁理士 井 島 藤 治外１名FIG. 1 is a block diagram of a circuit for implementing the method of the invention;
FIG. 2 is a sectional view of a traveling wave motor, FIG. 3 is a schematic diagram of an annular piezoelectric body used in the traveling wave motor, and FIG. 4 is a diagram explaining the principle of the traveling wave motor. 11... Annular elastic body 12... Annular piezoelectric body 1
3...Rotor 14...Springs 21-28.
31 to 38... Electrodes 40.41, 42.43... Unpolarized electrodes 61...
・Ultrasonic motor 62...Temperature sensor 63...V
FC64...Phase shifter patent applicant Foster Electric Co., Ltd.
Person Patent attorney Fuji Ijima 1 person
Claims (1)
して２領域に分割し、それぞれに圧電体の共振周波数に
等しい周波数で位相差のある交流電圧を入力し、前記圧
電体に接着により一体化された弾性体に生ずる進行波に
よって回転体を駆動する進行波形超音波モータの制御方
法において、前記圧電体と弾性体とが一体化された振動
体に温度センサを取り付け温度センサの出力によって前
記圧電体に印加する交流電圧の周波数を変化させること
を特徴とする進行波形超音波モータの制御方法。A piezoelectric body divided into a large number of electrodes is divided into two regions via unpolarized electrodes, and an AC voltage with a phase difference at a frequency equal to the resonant frequency of the piezoelectric body is input to each region, and the piezoelectric body is bonded to the piezoelectric body. In a method for controlling a traveling wave ultrasonic motor that drives a rotating body by a traveling wave generated in an integrated elastic body, a temperature sensor is attached to the vibrating body in which the piezoelectric body and the elastic body are integrated, and the output of the temperature sensor is used to drive the rotating body. A method for controlling a traveling wave ultrasonic motor, comprising changing the frequency of an alternating current voltage applied to the piezoelectric body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63090902A JPH01264579A (en) | 1988-04-12 | 1988-04-12 | Control method of progressive-wave type ultrasonic motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63090902A JPH01264579A (en) | 1988-04-12 | 1988-04-12 | Control method of progressive-wave type ultrasonic motor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01264579A true JPH01264579A (en) | 1989-10-20 |
Family
ID=14011333
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63090902A Pending JPH01264579A (en) | 1988-04-12 | 1988-04-12 | Control method of progressive-wave type ultrasonic motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01264579A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04190683A (en) * | 1990-11-22 | 1992-07-09 | Nissan Motor Co Ltd | Driving device for ultrasonic motor |
| EP0562817A2 (en) * | 1992-03-24 | 1993-09-29 | Seiko Instruments Inc. | Electronic apparatus with ultrasonic motor |
| JP2003033056A (en) * | 2001-07-10 | 2003-01-31 | Nidec Copal Corp | Ultrasonic motor control circuit |
| US8487510B2 (en) | 2008-06-11 | 2013-07-16 | Konica Minolta Opto, Inc. | Driving device |
-
1988
- 1988-04-12 JP JP63090902A patent/JPH01264579A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04190683A (en) * | 1990-11-22 | 1992-07-09 | Nissan Motor Co Ltd | Driving device for ultrasonic motor |
| EP0562817A2 (en) * | 1992-03-24 | 1993-09-29 | Seiko Instruments Inc. | Electronic apparatus with ultrasonic motor |
| EP0562817A3 (en) * | 1992-03-24 | 1993-11-03 | Seiko Instruments Inc. | Electronic apparatus with ultrasonic motor |
| JP2003033056A (en) * | 2001-07-10 | 2003-01-31 | Nidec Copal Corp | Ultrasonic motor control circuit |
| US8487510B2 (en) | 2008-06-11 | 2013-07-16 | Konica Minolta Opto, Inc. | Driving device |
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