JPH0125279B2 - - Google Patents
Info
- Publication number
- JPH0125279B2 JPH0125279B2 JP59014928A JP1492884A JPH0125279B2 JP H0125279 B2 JPH0125279 B2 JP H0125279B2 JP 59014928 A JP59014928 A JP 59014928A JP 1492884 A JP1492884 A JP 1492884A JP H0125279 B2 JPH0125279 B2 JP H0125279B2
- Authority
- JP
- Japan
- Prior art keywords
- lead
- piezoelectric vibrator
- vibrator
- electrode
- ultrasonic probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000523 sample Substances 0.000 claims description 24
- 239000002184 metal Substances 0.000 claims description 23
- 239000011888 foil Substances 0.000 claims description 13
- 239000010409 thin film Substances 0.000 claims description 13
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 11
- 238000005520 cutting process Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 6
- 238000003491 array Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Transducers For Ultrasonic Waves (AREA)
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、複数の分離された圧電振動子エレメ
ントを並設されるアレー型超音波探触子の製造方
法に関し、特に音場の偏向を減少しかつリードの
引出しの容易なアレー型超音波探触子を容易に製
造できるアレー型超音波探触子の製造方法に関す
る。Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a method for manufacturing an array-type ultrasonic probe in which a plurality of separated piezoelectric transducer elements are arranged in parallel, and in particular to The present invention relates to a method for manufacturing an array-type ultrasonic probe that can easily manufacture an array-type ultrasonic probe with a reduced number of leads and easy lead extraction.
（従来技術）
圧電振動子を用いた超音波探触子は、PZT等
の圧電振動子の両面に電極を貼着して構成する。
そしてこれら電極間に電圧を印加して超音波を発
生させ、この超音波を被測定物に放射し、又放射
した超音波に対する被測定物からの反射波を受け
てこれを電気信号に変換するものである。ところ
で、前述の如き超音波探触子は、一方の電極面を
ダンパー材からなる振動子保持体上に貼着する関
係から、第１図ａに示す構成を採つている。即
ち、PZT等の圧電振動子１の第１の面に第１の
電極２を設け、支持体に貼着する第２の面に第２
の電極３を設け、第２の電極（裏面電極）３の一
部を導電部３２を介して表面に導出し、第１の面
の一部に折返し電極３１を設ける、いわゆる「折
返し電極構造」を採つている。(Prior Art) An ultrasonic probe using a piezoelectric vibrator is constructed by pasting electrodes on both sides of a piezoelectric vibrator such as PZT.
Then, a voltage is applied between these electrodes to generate ultrasonic waves, which are emitted to the object to be measured, and the reflected waves of the emitted ultrasonic waves from the object to be measured are received and converted into electrical signals. It is something. By the way, the above-mentioned ultrasonic probe adopts the configuration shown in FIG. 1a because one electrode surface is attached onto a vibrator holder made of a damper material. That is, a first electrode 2 is provided on a first surface of a piezoelectric vibrator 1 such as PZT, and a second electrode 2 is provided on a second surface that is attached to a support.
A so-called "folded electrode structure" in which an electrode 3 is provided, a part of the second electrode (back electrode) 3 is led out to the front surface via the conductive part 32, and a folded electrode 31 is provided on a part of the first surface. are being taken.
（従来技術の問題点）
このため、第１図ｂに示すように超音波探触子
の音場中心ａ２が機械的中心線ａ１から偏り、こ
のため本来あるべき音場特性曲線ｂ１がｂ２のご
とく移動して音場の対称性を失い、偏向が避けら
れない。しかも折返し電極を設けたことにより表
面電極の振動実効面積が減り、それだけ超音波音
場が歪められることになる。(Problems with the prior art) For this reason, as shown in FIG. 1b, the sound field center a2 of the ultrasound probe deviates from the mechanical center line a1, and as a result, the sound field characteristic curve b1 that should be The sound field loses its symmetry, and deflection is unavoidable. Moreover, by providing the folded electrode, the effective vibration area of the surface electrode is reduced, and the ultrasonic sound field is distorted accordingly.
また、第１図ａに示す如き構造の探触子を細か
く輪切りにした圧電振動子エレメントを振動子保
持台上に多数個並列に設けたアレー型超音波探触
子にあつては、各探触子アレーの間隔が非常に小
さく、リード線の各電極への取付けが非常に困難
であるなどの不都合が生じる。 In addition, in the case of an array-type ultrasonic probe in which a large number of piezoelectric transducer elements, each of which is a probe having the structure shown in Fig. Disadvantages arise in that the spacing between the probe arrays is very small and it is very difficult to attach the lead wires to each electrode.
（発明の目的）
本発明の目的は、音場の対称性を保ち且つ音場
の歪を防止しうるアレー型超音波探触子を容易に
製造できるアレー型超音波探触子の製造方法を提
供することにある。(Object of the Invention) The object of the present invention is to provide a method for manufacturing an array-type ultrasonic probe that can easily manufacture an array-type ultrasonic probe that can maintain sound field symmetry and prevent sound field distortion. It is about providing.
（発明の概要）
本発明は、平面上に形成された圧電振動子板の
表面と裏面に第１と第２の金属薄膜を貼着せしめ
る第１工程と、振動子保持台と前記圧電振動子板
との間で振動子保持台の両側方に張り出した２枚
のリード部用金属箔を挟持せしめて、振動子保持
台と圧電振動子板とを一体的に接合せしめる第２
工程と、リード部用金属箔が張り出している方向
に第１の金属薄膜と圧電振動子板と第２の金属薄
膜とを一体に切断し複数のエレメントに分割し、
リード部用金属箔も振動子保持台の両側方におい
て切断し交互に除去する第３工程とを含むアレー
型超音波探触子の製造方法を提供するものであ
る。(Summary of the Invention) The present invention includes a first step of attaching first and second metal thin films to the front and back surfaces of a piezoelectric vibrator plate formed on a plane, a vibrator holding stand, and the piezoelectric vibrator plate. A second plate which integrally joins the vibrator holder and the piezoelectric vibrator plate by sandwiching the two metal foils for lead portions protruding on both sides of the vibrator holder between the plate and the plate.
The first metal thin film, the piezoelectric vibrator plate, and the second metal thin film are integrally cut in the direction in which the lead metal foil protrudes and are divided into a plurality of elements.
The present invention provides a method for manufacturing an array type ultrasonic probe, which includes a third step of cutting and alternately removing the metal foil for the lead portion on both sides of the vibrator holding table.
（実施例） 以下、本発明について詳細に説明する。(Example) The present invention will be explained in detail below.
第２図ａは、本発明に係るアレー型超音波探触
子を保持台上で分割して形成する前の段階の構造
を示す斜視図である。 FIG. 2a is a perspective view showing the structure of the array-type ultrasonic probe according to the present invention at a stage before it is divided and formed on a holding table.
第２図ａにおいて、１′は板状に形成された
PZT等の圧電振動子板であり、圧電振動子板
１′の第１の面全面には、第１の電極となるAg等
の金属薄膜４′が設けられ、第２の面全面には第
２の電極となるAg等の金属薄膜５′が設けられ
る。金属薄膜５′の下面には、２枚のリード部用
金属箔６，７がそれぞれ振動子保持台の両側方に
張り出すようにして挟持され、振動子板１′と一
体に積層接着されている。８はダンパー材による
振動子保持台である。 In Figure 2a, 1' is formed into a plate shape.
It is a piezoelectric vibrator plate made of PZT, etc., and a metal thin film 4' such as Ag, which becomes a first electrode, is provided on the entire first surface of the piezoelectric vibrator plate 1', and a metal thin film 4', such as Ag, is provided on the entire second surface. A metal thin film 5' made of Ag or the like is provided to serve as the second electrode. Two lead metal foils 6 and 7 are held on the lower surface of the metal thin film 5' so as to protrude from both sides of the vibrator holder, and are laminated and bonded integrally with the vibrator plate 1'. There is. 8 is a vibrator holding stand made of damper material.
アレー型の超音波探触子を製造する場合、まず
第２図ａに示す圧電振動子板１′を、切断器を用
いて金属薄膜４′及び５′ごとリード部用金属箔
６，７が張り出している方向に金属薄膜４′，
５′と一体に切断し、第３図ａに示す如く横巾数
mm程度の圧電振動子エレメント１１，１２，１３
…１ｎを形成する。これら圧電振動子エレメント
は、金属薄膜４′及び５′が上面で第１の電極４を
なし、下面で第２の電極をなす。そして電極５は
金属箔６及び７と電気的・機械的に接続されてい
る。 When manufacturing an array-type ultrasonic probe, first cut the piezoelectric transducer plate 1' shown in FIG. Metal thin film 4' in the projecting direction,
5' and cut it integrally with the number of widths as shown in Figure 3 a.
Piezoelectric vibrator elements 11, 12, 13 of about mm
...1n is formed. In these piezoelectric vibrator elements, metal thin films 4' and 5' form the first electrode 4 on the upper surface and the second electrode on the lower surface. The electrode 5 is electrically and mechanically connected to the metal foils 6 and 7.
次に、第３図ｂに示す如く、各圧電振動子エレ
メント各１個に対して１個のリード部を有する如
く金属箔７を切断してリード部７１乃至７ｎを形
成し、第３図ｂには明示していないが、金属箔６
も同様に切断してリード部６１乃至６ｎを形成す
る。この切断によりたとえば圧電振動子エレメン
ト１１の両端には、電極５と接続したリード部６
１と７１が設けられたことになる。 Next, as shown in FIG. 3b, the metal foil 7 is cut to form lead parts 71 to 7n so as to have one lead part for each piezoelectric vibrator element. Although it is not specified in , metal foil 6
are similarly cut to form lead portions 61 to 6n. By this cutting, for example, both ends of the piezoelectric vibrator element 11 have lead portions 6 connected to the electrodes 5.
1 and 71 have been established.
次に、リード部６１乃至６ｎのうち、奇数番目
のリード部を根部から切断する。また、リード部
７１乃至７ｎのうち、偶数番目のリード部を根部
から切断する。こうしてリード部用の金属箔６，
７も振動子保持台８の両側方において切断し、１
本おきに交互に除去されることにより、奇数番目
の圧電振動子エレメント１１，１３，１５…に対
してそれぞれリード部７１，７３，７５…が残
り、偶数番目の圧電振動子エレメント１２，１
４，１６…に対してそれぞれリード部６２，６
４，６６…が残ることになる。 Next, the odd numbered lead parts among the lead parts 61 to 6n are cut from the root part. Further, among the lead parts 71 to 7n, even numbered lead parts are cut from the root part. In this way, the metal foil 6 for the lead part,
7 is also cut on both sides of the vibrator holding table 8, and 1
By alternately removing every other book, lead portions 71, 73, 75, etc. remain for the odd-numbered piezoelectric vibrator elements 11, 13, 15, and so on, and lead portions 71, 73, 75, and so on remain for the even-numbered piezoelectric vibrator elements 12, 1, and so on.
Lead portions 62, 6 for 4, 16, respectively.
4,66... will remain.
その後、左右に導出された各リード部を端子部
としてこれらに引出し用の導線を接続する。 Thereafter, the lead portions led out on the left and right sides are used as terminal portions, and a lead wire is connected to these lead portions.
一方、圧電振動子エレメント１１，１２…１ｎ
の第１の電極４上の端部には、第３図ｂに示すよ
うにAg等の細い金属線材からなるリード線９が
半田付けにより取り付けられ、第１の電極４は共
通接続される。 On the other hand, piezoelectric vibrator elements 11, 12...1n
As shown in FIG. 3B, a lead wire 9 made of a thin metal wire such as Ag is attached to the end of the first electrode 4 by soldering, and the first electrodes 4 are commonly connected.
そして、このリード線９にアース電位を与え、
各リード部から導出された導線を順次切換えて各
圧電振動子エレメントを端部から順次走査する如
く動作せしめる。 Then, apply a ground potential to this lead wire 9,
The conductive wires led out from each lead portion are sequentially switched to operate so as to sequentially scan each piezoelectric vibrator element from the end.
なお、上述の如き構成を有するアレー型超音波
探触子の第１の電極４が被測定体と接面する超音
波放射側であり、通常電極４上に使用超音波の４
分の１波長の厚みを有する音響マツチング層が設
けられる。 It should be noted that the first electrode 4 of the array type ultrasonic probe having the above-mentioned configuration is on the ultrasonic emission side that comes into contact with the object to be measured, and the ultrasonic wave used is normally placed on the electrode 4.
An acoustic matching layer having a thickness of a fraction of a wavelength is provided.
この実施例のように、被測定体と接面する側に
折返し電極を設けていない構造とすれば、第２図
ｂに示すように、超音波探触子の機械的中心線と
超音波音場の中心線Ａ１とを一致させることがで
きるとともに、左右対称な超音波分布Ｂ１をうる
ことができる。しかも圧電振動子エレメントの全
面を振動実効面積とすることができる。また、側
方に導出したリード部に引出し用の導線を接続出
来るので、引出し用導線の形成がきわめて容易に
なる。 If the structure is such that the folded electrode is not provided on the side that contacts the object to be measured as in this example, the mechanical center line of the ultrasonic probe and the ultrasonic The center line A1 of the field can be made to coincide with the center line A1, and a symmetrical ultrasonic wave distribution B1 can be obtained. Moreover, the entire surface of the piezoelectric vibrator element can be used as the effective vibration area. Furthermore, since the lead wire can be connected to the lead portion led out to the side, the lead wire can be formed very easily.
第３図ｃは、上記金属箔６，７を分割する際
に、圧電振動子エレメント３つ毎に１単位のリー
ド部として形成した実施例を示す斜視図である。 FIG. 3c is a perspective view showing an embodiment in which, when the metal foils 6 and 7 are divided, one unit of lead portion is formed for every three piezoelectric vibrator elements.
即ち、第３図ｂに示す実施例におけるリード部
７１と７２と７３を１つのリード部７１′とした
ものである。このようにアレー型超音波探触子を
製造すれば各圧電振動子の電極には、探触子アレ
ーの間隔が非常に狭い場合であつても、隣接する
電極の間で短絡を起すことなしに、容易に引出し
用の導線を設けることが出来る。 That is, the lead parts 71, 72, and 73 in the embodiment shown in FIG. 3b are combined into one lead part 71'. If an array type ultrasonic probe is manufactured in this way, the electrodes of each piezoelectric transducer will not cause short circuits between adjacent electrodes even if the spacing between the probe arrays is very narrow. It is possible to easily provide a lead wire.
なお、群を構成する圧電振動子エレメントは３
つに限らず、２個、４個あるいは他の所定数とす
ることもできる。 Note that there are 3 piezoelectric vibrator elements constituting the group.
The number is not limited to 2, 4, or any other predetermined number.
（発明の効果）
以上詳細に説明したように、本発明によれば、
超音波音場強度を弱めることなく対称性をもたせ
ることができるアレー型超音波探触子を製造する
に際し、リード部の間隔を広く取ることにより、
各エレメント間での電極の短絡を防止できる。(Effects of the Invention) As explained in detail above, according to the present invention,
When manufacturing an array-type ultrasonic probe that can provide symmetry without weakening the ultrasonic sound field strength, by widening the spacing between the lead parts,
Short circuits of electrodes between each element can be prevented.
第１図ａ及びｂは従来の超音波探触子の説明
図、第２図ａは、本発明に係るアレー型超音波探
触子の製造方法の一部を示す図であり、アレー型
超音波探触子を振動子保持台上に形成する前段階
を示す斜視図、第２図ｂは、本発明によつて製造
されるアレー型超音波探触子の音場特性図、第３
図ａ乃至ｃは、アレー型超音波探触子の製造方法
の一部を示す図であり、アレー型超音波探触子を
振動子保持台上に形成する方法を示す斜視図であ
る。
図中、１′は圧電振動子板、１は圧電振動子、
２及び３は電極、３１は折返し電極、３２は導電
部、４′及び５′は金属薄膜、４及び５は電極、６
及び７は金属箔、８は振動子保持台、９はリード
線、１１，１２，…１ｎは圧電振動子エレメン
ト、６１，６２，…６ｎ及び７１，７２，…７ｎ
はリード部である。
FIGS. 1a and 1b are explanatory diagrams of a conventional ultrasonic probe, and FIG. FIG. 2b is a perspective view showing the preliminary stage of forming a sonic probe on a transducer holder; FIG.
Figures a to c are diagrams showing a part of the method for manufacturing an array type ultrasonic probe, and are perspective views showing a method for forming the array type ultrasonic probe on a transducer holding table. In the figure, 1' is a piezoelectric vibrator plate, 1 is a piezoelectric vibrator,
2 and 3 are electrodes, 31 is a folded electrode, 32 is a conductive part, 4' and 5' are metal thin films, 4 and 5 are electrodes, 6
and 7 are metal foils, 8 is a vibrator holding stand, 9 is a lead wire, 11, 12, ... 1n are piezoelectric vibrator elements, 61, 62, ... 6n and 71, 72, ... 7n
is the lead part.
Claims (1)
面に第１と第２の金属薄膜を貼着せしめる第１工
程と、振動子保持台と前記圧電振動子板との間で
振動子保持台の両側方に張り出した２枚のリード
部用金属箔を挟持せしめて、振動子保持台と圧電
振動子板とを一体的に接合せしめる第２工程と、
リード部用金属箔が張り出している方向に第１の
金属薄膜と圧電振動子板と第２の金属薄膜とを一
体に切断し複数のエレメントに分割し、リード部
用金属箔も振動子保持台の両側方において切断し
交互に除去する第３工程とを含むことを特徴とす
るアレー型超音波探触子の製造方法。1. A first step of attaching first and second metal thin films to the front and back surfaces of a piezoelectric vibrator plate formed on a plane, and holding the vibrator between a vibrator holding table and the piezoelectric vibrator plate. a second step of integrally joining the vibrator holding table and the piezoelectric vibrator plate by sandwiching two pieces of metal foil for lead portions extending on both sides of the table;
The first metal thin film, piezoelectric vibrator plate, and second metal thin film are cut integrally into a plurality of elements in the direction in which the lead metal foil protrudes, and the lead metal foil is also placed on a vibrator holding stand. and a third step of cutting and alternately removing both sides of the probe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59014928A JPS60160300A (en) | 1984-01-30 | 1984-01-30 | Manufacture of array-type ultrasonic wave probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59014928A JPS60160300A (en) | 1984-01-30 | 1984-01-30 | Manufacture of array-type ultrasonic wave probe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60160300A JPS60160300A (en) | 1985-08-21 |
| JPH0125279B2 true JPH0125279B2 (en) | 1989-05-17 |
Family
ID=11874624
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59014928A Granted JPS60160300A (en) | 1984-01-30 | 1984-01-30 | Manufacture of array-type ultrasonic wave probe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60160300A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2716989B2 (en) * | 1989-01-25 | 1998-02-18 | アロカ株式会社 | Ultrasonic transducer manufacturing method |
| KR920702178A (en) * | 1989-05-15 | 1992-08-12 | 미다 가쓰시게 | Ultrasonic Probe and Manufacturing Method Thereof |
| JP3507696B2 (en) * | 1998-04-28 | 2004-03-15 | 日本電波工業株式会社 | Ultrasonic probe manufacturing method and ultrasonic probe |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5512467A (en) * | 1978-07-12 | 1980-01-29 | Matsushita Electric Ind Co Ltd | Production of ultrasonic locator |
-
1984
- 1984-01-30 JP JP59014928A patent/JPS60160300A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5512467A (en) * | 1978-07-12 | 1980-01-29 | Matsushita Electric Ind Co Ltd | Production of ultrasonic locator |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60160300A (en) | 1985-08-21 |
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