JPH01251409A - Coil thin film magnetic head and its substrate - Google Patents
Coil thin film magnetic head and its substrateInfo
- Publication number
- JPH01251409A JPH01251409A JP7650488A JP7650488A JPH01251409A JP H01251409 A JPH01251409 A JP H01251409A JP 7650488 A JP7650488 A JP 7650488A JP 7650488 A JP7650488 A JP 7650488A JP H01251409 A JPH01251409 A JP H01251409A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- substrate
- thin film
- magnetic core
- coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 50
- 239000010409 thin film Substances 0.000 title claims abstract description 45
- 239000000696 magnetic material Substances 0.000 claims abstract description 31
- 239000002131 composite material Substances 0.000 claims description 9
- 238000005304 joining Methods 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims 3
- 239000011162 core material Substances 0.000 abstract description 57
- 239000000463 material Substances 0.000 abstract description 16
- 239000010408 film Substances 0.000 abstract description 10
- 150000001875 compounds Chemical class 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 description 16
- 238000010586 diagram Methods 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 229910000859 α-Fe Inorganic materials 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910000702 sendust Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
- G11B5/3106—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、ＶＴＲ等の磁気記録再生装置に使用される磁
気ヘッドに係り、特に、コイル、コア等を薄膜形成技術
によって形成したコイル薄膜磁気ヘッド及びその基板に
関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a magnetic head used in a magnetic recording/reproducing device such as a VTR, and particularly relates to a coil thin film magnetic head in which the coil, core, etc. are formed by thin film forming technology. This invention relates to a head and its substrate.
ＶＴＲの高画質化、コンパクト化に共ない、磁気記録技
術の点でも、記録密度の高密度化、磁気ヘッドの高効率
化が図られている。As VTRs become more compact and have higher image quality, efforts are also being made to increase the recording density and the efficiency of magnetic heads in terms of magnetic recording technology.
そこで、記録密度向上に欠かせない磁気ヘッドの狭トラ
ツク化が容易で、かつ高効率化が容易に達成される磁気
ヘッドとして、ＩＣ５ＬＳ１等の製造プロセス等に利用
されているスパッタリング、蒸着、あるいはフォトリソ
技術等を駆使し、磁気ヘッドのコア、及びコイルを薄膜
化し、狭トラツクで、磁路長短縮化による高効率化を図
ったコイル薄膜磁気ヘッドが開発されている。この種の
薄膜磁気ヘッドに関する文献としては、例えば特開昭５
５−８４０１９号公報を挙げることができる。Therefore, sputtering, vapor deposition, or photolithography, which is used in the manufacturing process of IC5LS1, etc., has been proposed as a magnetic head that can easily narrow the track of the magnetic head, which is essential for improving recording density, and can easily achieve high efficiency. By making full use of technology, the core and coil of the magnetic head are made thinner, and a coil thin-film magnetic head is being developed that has a narrow track and high efficiency due to a shortened magnetic path length. Documents related to this type of thin film magnetic head include, for example, Japanese Patent Application Laid-open No. 5
5-84019 can be mentioned.
第６図は従来技術による磁気ヘッドの説明図であって、
（ａ）（ｂ）はボンディングギヤツブ型磁気ヘッド、（
Ｃ）はコイル薄膜磁気ヘッド、のそれぞれ磁気テープ摺
動面からみた構成図である。FIG. 6 is an explanatory diagram of a magnetic head according to the prior art,
(a) and (b) are bonding gear type magnetic heads, (
C) is a configuration diagram of the coil thin film magnetic head as viewed from the magnetic tape sliding surface.
同図（ａ） （ｂ）の従来のボンディングギャップタ
イプの磁気ヘッドでは、ギャップの上下あるいは左右は
同−ｆ’！ＩＩの材質で構成されている為、その摺動性
（磁気テープとの当ｊ３）は長時間一定となるが、（Ｃ
）で示すコイル薄膜磁気ヘッドでは、プロセス上、保護
膜を膜堆積で形成するため、ギャップの１−下の材質が
異なり、テープと長時間摺動させた場合、上下あるいは
、左右の材質の摩耗量に差が生じてしまい、いわゆる偏
摩耗により、良好なテープタッチは得られない。In the conventional bonding gap type magnetic head shown in Figures (a) and (b), the top and bottom or left and right sides of the gap are the same -f'! Since it is composed of material II, its sliding property (contact with magnetic tape) remains constant for a long time, but (C
) In the coil thin-film magnetic head shown in the figure, the protective film is formed by film deposition during the process, so the material at the bottom of the gap is different, and if it is slid against the tape for a long time, the material on the top and bottom or on the left and right sides may wear out. This results in a difference in the amount, and due to so-called uneven wear, a good tape touch cannot be obtained.
また、コ・イル薄膜磁気ヘッドでは、製造プロセスにお
いて、スパッタリング、エツチング、フォトリソプロセ
ス等、長時間を要する製造プロセスが前提となるため、
超量産しない躍り、従来のコアをフエライ１−等を使い
、コイルが手巻線のＶＴＲｍ６ｆｔ気ヘッド、あるいは
、メタル対応化のために、コアのみをスパッタリング等
の金属磁性膜で形成し、他の工程は従来のボンディング
ギャップタイプのバルクヘッドと同様にした磁気ヘッド
に比べ、ヘッド１個当りのコストは、相当高価になる。In addition, coil-il thin film magnetic heads require long manufacturing processes such as sputtering, etching, and photolithography processes.
In order to prevent mass production, the conventional core is made of Ferrai 1, etc., and the coil is hand-wound. Compared to a magnetic head whose manufacturing process is similar to that of a conventional bonding gap type bulk head, the cost per head is considerably higher.
上記従来技術によるコイル薄膜磁気ヘッドでは、スパッ
タリング、エツチング、フォトリソ工程等、多くの工程
が必要になり、製造に時間がかかり、超量産しない限り
、コストは従来のコイルが手巻綿でバルク材を使ったボ
ンディングギャップタイプの磁気ヘッドに比べ、高くな
ると言う欠点があった。さらに、上記薄膜磁気ヘッドで
は、第６図（Ｃ）に示す様に、テープ摺動面側の構成が
、非磁性基板、コア材、保護膜という３つの異種材料か
ら成っている為、テープ摺動時、偏摩耗の原因となり、
テープタッチがうまく行かないと言う欠点があった。The coil thin-film magnetic head according to the above-mentioned conventional technology requires many processes such as sputtering, etching, and photolithography, and takes time to manufacture. The drawback was that it was more expensive than the bonding gap type magnetic head used. Furthermore, in the thin film magnetic head described above, as shown in FIG. 6(C), the structure on the tape sliding surface side is made of three different materials: a nonmagnetic substrate, a core material, and a protective film. When moving, it may cause uneven wear.
The drawback was that the tape touch did not work properly.
本発明の目的は、コイル薄膜磁気ヘッドにおいて、その
特徴を十分生かしつつかつ、従来の手巻線のボンディン
グギャップ磁気ヘッドに比ベコストがほぼ同等でありか
つ、テープタッチも良好なコイル薄膜磁気ヘッドを提供
することにある。An object of the present invention is to provide a coil thin film magnetic head that takes full advantage of its characteristics, has approximately the same cost as a conventional hand-wound bonding gap magnetic head, and has good tape touch. It is about providing.
上記目的は、積層形成した高精度の磁気ギャップを含む
フロント磁気コアを有する基板と、リア磁気コアと、薄
膜コイルを形成した基板とを、磁気コアの接合部が一致
するように貼り合わせ、テープ摺動面側から見て上記２
つの基板が摺動部に露出させる構成としたことで達成さ
れる。The above purpose is to attach a substrate having a front magnetic core including a laminated high-precision magnetic gap, a rear magnetic core, and a substrate on which a thin film coil is formed so that the joints of the magnetic cores coincide, and then Above 2 when viewed from the sliding surface side
This is achieved by configuring one substrate to be exposed to the sliding part.
上記基板については、フロント磁気コア用基板には、貼
り合わせ時点にリア（■スコア用基板上に形成される薄
膜コイル引き出し用ボンディング式９１部が貼り合わせ
接合されない様に溝を設ける。Regarding the above substrate, a groove is provided in the front magnetic core substrate so that the bonding type 91 for drawing out the thin film coil formed on the rear (2) score substrate is not bonded together at the time of bonding.
またリア磁気コア用基板は、リア磁気コア用に磁性材を
挟んだ複合基板とする。Further, the rear magnetic core substrate is a composite substrate sandwiching a magnetic material for the rear magnetic core.
以上により、コストが低くかつ摺動性の良いコイル薄膜
磁気ヘッドが提供出来る。As described above, it is possible to provide a coil thin film magnetic head that is low in cost and has good sliding properties.
コイル薄膜磁気ヘッドにおいて、第１に、テープ摺動面
側に露出するフロント磁気コア材の軟磁性膜の両脇に、
同種の非磁性基礎板を配置した構造とすることで、磁気
ヘッドの摺動性は向上する。In a coil thin film magnetic head, firstly, on both sides of the soft magnetic film of the front magnetic core material exposed on the tape sliding surface side,
By arranging the same type of non-magnetic base plate, the sliding properties of the magnetic head are improved.
第２に、コイル薄膜化に共なう工程の長期化を、ギャッ
プを含むフロント磁気コアと、薄膜コイルを含むリア磁
気コアとを別々の基板上に作成し、最後に両者を接合す
ることで防ぎ、大幅な工程短縮が図られる。Second, to reduce the length of the process associated with thinning the coil film, we created the front magnetic core including the gap and the rear magnetic core including the thin film coil on separate substrates, and then bonded them together at the end. This will significantly shorten the process.
第３に、上記リア磁気コア用基板に磁性材を含む複合基
板を用いることで、尚−層の工程短縮が図られる。Thirdly, by using a composite substrate containing a magnetic material as the rear magnetic core substrate, it is possible to shorten the manufacturing process of the second layer.
第４に、上記フロント磁気コア基板と、リア磁気コア基
板の接合に際し、リア磁気コア基板上の薄膜コイル用ポ
ンディングパッド部と対向するフロント磁気コア基板の
部位に溝を設けることで、コア接合後のポンディングパ
ッドの露出が容易になる。Fourthly, when joining the front magnetic core board and the rear magnetic core board, a groove is provided in the part of the front magnetic core board that faces the thin film coil bonding pad part on the rear magnetic core board, so that the core can be joined. This makes it easier to expose the later bonding pad.
以下、本発明の実施例を図面を参照して説明する。 Embodiments of the present invention will be described below with reference to the drawings.
第１図は本発明によるコイル薄膜磁気ヘッドの一実施例
の斜視図であって、１は非磁性材、２は磁性材、６．６
′は軟磁性膜、７はギャップ材、１２はポンディングパ
ッド、１３は接着材である。FIG. 1 is a perspective view of an embodiment of a coiled thin film magnetic head according to the present invention, in which 1 is a non-magnetic material, 2 is a magnetic material, 6.6
' is a soft magnetic film, 7 is a gap material, 12 is a bonding pad, and 13 is an adhesive material.
同図において磁路は、ギャップ材７を挟んで左右に配置
した軟磁性膜６，６′から成るフロント磁気コアと、下
部基板の一部を形成している磁性基板２から成るリア磁
気コアにより形成される。In the figure, the magnetic path consists of a front magnetic core consisting of soft magnetic films 6 and 6' arranged on the left and right sides with a gap material 7 in between, and a rear magnetic core consisting of a magnetic substrate 2 forming a part of the lower substrate. It is formed.
また、薄膜コイル（図示せず）は、上記リア磁気コア上
に形成されている。下部磁気コアが形成されている基板
は、磁性基板２と非磁性基板１から成る複合基板である
。従って、テープ摺動面から見た場合、ギャップ材７の
上下の基板材質（非磁性材１，１）は同一材となってい
る為、偏摩耗が生じず、長時間に渡って良好なテープタ
ッチが得られる。Further, a thin film coil (not shown) is formed on the rear magnetic core. The substrate on which the lower magnetic core is formed is a composite substrate consisting of a magnetic substrate 2 and a nonmagnetic substrate 1. Therefore, when viewed from the tape sliding surface, the upper and lower substrate materials (non-magnetic materials 1, 1) of the gap material 7 are the same material, so uneven wear does not occur and the tape remains in good condition for a long time. You can get the touch.
第２図は本発明によるコイル薄膜磁気ヘッドの他の実施
例の斜視図であって、下部１の基板の一部にのみ磁性基
板２が配置された構造のものである。FIG. 2 is a perspective view of another embodiment of the coil thin film magnetic head according to the present invention, which has a structure in which the magnetic substrate 2 is disposed only on a part of the lower substrate 1.
第３図は本発明によるコイル薄膜用磁気ヘッドのリア磁
気コア用基板（ａ）とフロント磁気コア用基板（ｂ）の
斜視図である。FIG. 3 is a perspective view of a rear magnetic core substrate (a) and a front magnetic core substrate (b) of the coil thin film magnetic head according to the present invention.
同図（ａ）のリア磁気コア用基ｖｉ４は、ガラス等の非
磁性材１と、フェライト等の磁性材２とから成る複合基
板である。また、同図（ｂ）のフロント磁気コア用基板
５は、ガラス等の非磁性材１から成り、第１図、第２図
に示したリア磁気コア基板上の薄膜コイル用ポンディン
グパッド部と対向する部位に溝３が形成されている。The rear magnetic core base vi4 shown in FIG. 3A is a composite substrate made of a non-magnetic material 1 such as glass and a magnetic material 2 such as ferrite. The front magnetic core substrate 5 shown in FIG. 1B is made of a non-magnetic material 1 such as glass, and is similar to the thin film coil bonding pad portion on the rear magnetic core substrate shown in FIGS. 1 and 2. Grooves 3 are formed in opposing parts.
第４図は本発明によるコイルＦＩ Ｕ９＝ Ｍ気ヘッド
の製造工程図であって、（ａ）、 （ｂ）はフロント
磁気コア、（ａ）′、（ｂ）′はリア磁気コア、（ｃ）
（ｄ） はフロント磁気コア】とリア磁気コア↓と
を接合して、カットする工程を示す。FIG. 4 is a manufacturing process diagram of the coil FI U9=M head according to the present invention, in which (a) and (b) are the front magnetic core, (a)' and (b)' are the rear magnetic core, and (c )
(d) shows the process of joining and cutting the front magnetic core] and the rear magnetic core↓.
同図において、（ａ）におけるフロント磁気コア用基板
立上に、アモルファス、センダスト等の軟磁性ｆｆ６．
６’、５ｔｏｚ等のギャップ材７を順次積層した後、所
望のトラック幅まで研削除去することで、フロント磁気
コア５を形成する。In the same figure, a soft magnetic material such as amorphous or sendust ff6.
After sequentially laminating gap materials 7 such as 6' and 5toz, the front magnetic core 5 is formed by polishing and removing the gap materials 7 to a desired track width.
（ｂ）。(b).
同図（ｂ）におけるリア磁気コア用基板工上に、Ｃｕ等
により薄膜コイル８を形成する（ｂ′）。A thin film coil 8 made of Cu or the like is formed on the substrate for the rear magnetic core shown in FIG. 4(b) (b').
次に同図（Ｃ）において、上記フロント磁気コア４とリ
ア磁気コア上とを突き合わせ接合する。Next, in FIG. 4C, the front magnetic core 4 and the rear magnetic core are butt-joined.
その後、（ｄ）において、上記突き合わせ接合された磁
気コア材を、図示点線に沿ってチップカットし、円研す
ることでコイル薄膜磁気ヘッド主が形成される。Thereafter, in (d), the butt-jointed magnetic core material is chip-cut along the dotted line in the figure and circularly ground to form a coil thin-film magnetic head main body.
第５図は、本発明によるリア磁気コア用基板の１２種類
の製造方法の説明図であり、（ａ）は第１の製造方法、
（ｂ）は第２の製造方法の工程を示す。FIG. 5 is an explanatory diagram of 12 types of manufacturing methods of the rear magnetic core substrate according to the present invention, (a) is a first manufacturing method;
(b) shows the steps of the second manufacturing method.
第１の製造方法（ａ）は、図中（ａ−１）において、所
定の厚さの非磁性材１、磁性材２を交互に配置し、ガラ
ス等の接着材により接合し、複合ブロックを形成する（
ｂ−１）。In the first manufacturing method (a), as shown in (a-1) in the figure, non-magnetic materials 1 and magnetic materials 2 of a predetermined thickness are alternately arranged and bonded with an adhesive such as glass to form a composite block. Form(
b-1).
上記複合ブロックを所定の厚さに切断し、研摩を施すこ
とによりリア磁気コア用基板４が出来る（ｃ−１）。By cutting the composite block to a predetermined thickness and polishing it, a rear magnetic core substrate 4 is obtained (c-1).
第２の製造方法（ｂ）は、図中（ａ’−１）において、
板状の非磁性材１上に溝３を設ける（ｂ’＜−１）０次
に、前記溝３内に磁性材２を挿入し、ガラス等により溶
着する（ｃ’−１）。その後、前記磁性材２の部を非磁
性材１に達するまで研削除去することでリア磁気コア用
基板上が得られる（ｄ’−１）。In the second manufacturing method (b), in (a'-1) in the figure,
A groove 3 is provided on the plate-shaped non-magnetic material 1 (b'<-1) Next, the magnetic material 2 is inserted into the groove 3 and welded with glass or the like (c'-1). Thereafter, the magnetic material 2 is removed by polishing until it reaches the non-magnetic material 1, thereby obtaining a rear magnetic core substrate (d'-1).
尚、上記製造方法（ｂ）では、板状の非磁性材１に磁性
材２を挿入しているが、これに限ることなく逆に、板状
の磁性材に非磁性材を挿入しても良い。In addition, in the above manufacturing method (b), the magnetic material 2 is inserted into the plate-shaped non-magnetic material 1, but the invention is not limited to this, and conversely, the non-magnetic material can also be inserted into the plate-shaped magnetic material. good.
以上説明したように、本発明によれば、リア磁気コア用
基板とフロント磁気コア用基板との接合によりコイル薄
膜磁気ヘッドを形成しているので、テープ摺動面の構成
が左右、上下対称なので摺動性が良く、またフロント磁
気コア、リア磁気コアを別々に製造するので、低コスト
化が容易に出来る等の効果があり、前記従来技術の欠点
を除いて優れたコイル薄膜磁気ヘッドを提供することが
できる。As explained above, according to the present invention, since the coil thin film magnetic head is formed by bonding the rear magnetic core substrate and the front magnetic core substrate, the structure of the tape sliding surface is symmetrical both horizontally and vertically. It has good sliding properties, and since the front magnetic core and rear magnetic core are manufactured separately, it is easy to reduce costs, and provides an excellent coil thin film magnetic head that eliminates the drawbacks of the conventional technology. can do.
第１図は本発明によるコイル薄膜磁気ヘッドの一実施例
の斜視図、第２図は本発明によるコイル薄膜磁気ヘッド
の他の実施例の斜視図、第３図は本発明のコイル薄膜磁
気ヘッド用基板の斜視図、第４図は、本発明によるコイ
ル薄膜磁気ヘッドの製造工程図、第５図は、本発明によ
るコイル薄膜磁気ヘッド用基板の製造工程図、第６図は
従来型ヘッドのテープ摺動面図から見た斜視図である。
１・・・・・・・・・非磁性材、２・・・・・・・・・
磁性材、３・・・・・・・・・溝、４・・・・・・・・
・リアコア用基板、５・・・・・・・・・フロントコア
用基板、６．６′・・・・・・・・・軟磁性膜、７・・
・・・・・・・ギャップ材、８・・・・・・・・・薄膜
コイル、９・・・・・・・・・コイル薄膜磁気ヘッド、
１０・旧・・・・・フェライトヘッド、１１・・・・・
・・・・ボンディングギャップ型薄膜ヘッド、１２・・
・・・・・・・ポンディングパッド、１３・旧・・・・
・接着材、１４・・・・・・・・・フェライト基板、１
５・旧・・・・・ガラス材、１６・・・・・・・・・保
護膜。
第１図
１：目１犯情材
ｌり
第２図
第３図
（ａ）
第４図
（ｄ）
第５図
（ａ）
（ｂ−ｒ ）
（ｃ’−／ ）（ｃ−１）
（ｄ′−１）第６図
７５ソ （ａ）
６ （Ｃ）
：：◇
チー７°乏イ丁方向FIG. 1 is a perspective view of one embodiment of the coil thin film magnetic head according to the present invention, FIG. 2 is a perspective view of another embodiment of the coil thin film magnetic head according to the present invention, and FIG. 3 is a perspective view of a coil thin film magnetic head according to the present invention. 4 is a manufacturing process diagram of a coil thin film magnetic head according to the present invention, FIG. 5 is a manufacturing process diagram of a coil thin film magnetic head substrate according to the present invention, and FIG. 6 is a diagram showing a manufacturing process of a coil thin film magnetic head according to the present invention. It is a perspective view seen from a tape sliding surface view. １・・・・・・・・・Non-magnetic material, ２・・・・・・・・・
Magnetic material, 3... Groove, 4...
・Rear core substrate, 5...Front core substrate, 6.6'...Soft magnetic film, 7...
...... Gap material, 8... Thin film coil, 9... Coil thin film magnetic head,
10. Old... Ferrite head, 11...
...Bonding gap type thin film head, 12...
・・・・・・Ponding pad, 13・old・・・・
・Adhesive material, 14... Ferrite substrate, 1
5. Old...Glass material, 16...Protective film. Figure 1 1: Item 1 Crime information Figure 2 Figure 3 (a) Figure 4 (d) Figure 5 (a) (br)
(c'-/ ) (c-1)
(d'-1) Fig. 6 75 (a) 6 (C) ::◇ Chi 7° direction
Claims (1)
形成してなるコイル薄膜磁気ヘッドにおいて、前記非磁
性基板上に磁性材を薄膜形成してなる第１の磁気コア半
体と、一部が磁性材で残りが非磁性材で形成された複合
基板上に導電材料を薄膜形成してなる導体コイル、およ
び上記複合基板上の一部に配置した磁性材からなる第２
の磁気コア半体とを有し、上記第１の磁気コア半体と第
２の磁気コア半体の磁性材の一部を突き合わせ面として
接合してなる磁路を形成したことを特徴とするコイル薄
膜磁気ヘッド。 ２、非磁性材と磁性材とを所定の寸法で順次配置してな
ることを特徴とする請求項１記載のコイル薄膜磁気ヘッ
ド用の複合基板。[Claims] 1. In a coil thin-film magnetic head in which a magnetic core and a conductor coil are formed in thin films on a non-magnetic substrate, a first magnetic core is formed in a thin film of a magnetic material on the non-magnetic substrate. a conductor coil formed by forming a thin film of a conductive material on a composite substrate with a half made of a magnetic material and the rest made of a non-magnetic material, and a third half made of a magnetic material disposed on a part of the composite substrate. 2
, and a magnetic path is formed by joining a part of the magnetic material of the first magnetic core half and the second magnetic core half as abutting surfaces. Coil thin film magnetic head. 2. A composite substrate for a coil thin film magnetic head according to claim 1, characterized in that a non-magnetic material and a magnetic material are sequentially arranged with predetermined dimensions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7650488A JPH01251409A (en) | 1988-03-31 | 1988-03-31 | Coil thin film magnetic head and its substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7650488A JPH01251409A (en) | 1988-03-31 | 1988-03-31 | Coil thin film magnetic head and its substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01251409A true JPH01251409A (en) | 1989-10-06 |
Family
ID=13607068
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7650488A Pending JPH01251409A (en) | 1988-03-31 | 1988-03-31 | Coil thin film magnetic head and its substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01251409A (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS626419A (en) * | 1985-06-29 | 1987-01-13 | Toshiba Corp | Magnetic head |
-
1988
- 1988-03-31 JP JP7650488A patent/JPH01251409A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS626419A (en) * | 1985-06-29 | 1987-01-13 | Toshiba Corp | Magnetic head |
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