JPH01227346A - Electron shower - Google Patents

Electron shower

Info

Publication number
JPH01227346A
JPH01227346A JP63053356A JP5335688A JPH01227346A JP H01227346 A JPH01227346 A JP H01227346A JP 63053356 A JP63053356 A JP 63053356A JP 5335688 A JP5335688 A JP 5335688A JP H01227346 A JPH01227346 A JP H01227346A
Authority
JP
Japan
Prior art keywords
electrode
mesh
apertures
electrode main
thermions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63053356A
Other languages
Japanese (ja)
Other versions
JP2776511B2 (en
Inventor
Tetsuo Taniguchi
哲郎 谷口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP63053356A priority Critical patent/JP2776511B2/en
Publication of JPH01227346A publication Critical patent/JPH01227346A/en
Application granted granted Critical
Publication of JP2776511B2 publication Critical patent/JP2776511B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To make it possible to exchange a mesh-form electrode element easily and to reduce the cost by providing replaceably a mesh-form electrode to improve the pickup efficiency of thermions to the apertures of electrode main bodies with apertures through which the thermions pass. CONSTITUTION:A mesh-form electrode 3 to improve the pickup efficiency of thermions is composed of two sheets of parallel plate-form electrode main bodies 1 and 2 with apertures 1a and 2a to pass thermions at the centers, and a mesh electrode element 3a installed dismountably between the apertures 1a and 2a. Recesses 5 are furnished at the inner surface of one side electrode main body 1 opposing to the electrode main body 2, while projections 4 to gear with the recesses 5 are furnished at the inner surface of the other side electrode main body 2. By arranging the mesh electrode element 3a in the apertures 1a and 2a of the parallel plate-form electrode main bodies 1 and 2, gearing the recesses 5 and the projections 4 each other, and by holding the mesh electrode element 3a replaceable easily at the apertures of the two plate- form electrode main bodies 1 and 2, the cost can be reduced.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は半導体製造装置、特に半導体基板イオン注入装
置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a semiconductor manufacturing apparatus, and particularly to a semiconductor substrate ion implantation apparatus.

〔従来の技術〕[Conventional technology]

従来、この種の半導体基板イオン注入装置においては、
半導体基板の帯電（チャージアップ）を解消するなめ、
エレクトロンシャワーが用いられている。第４図に示す
ように、エレクトロンシャワー（エレクトロンフラッド
）はフィラメント７の加熱により熱電子を発生させ、そ
の熱電子を網状電極３により引き出してリフレクタ８に
衝突させ、２次電子を生成させている。従来、網状電極
３は第３図に示すように、目電極素子３ａと電極本体６
とが一体構造になっていた。Conventionally, in this type of semiconductor substrate ion implantation equipment,
To eliminate electrostatic charge (charge-up) on semiconductor substrates,
Electron shower is used. As shown in Fig. 4, in the electron shower (electron flood), hot electrons are generated by heating the filament 7, and the hot electrons are extracted by the mesh electrode 3 and collide with the reflector 8, thereby generating secondary electrons. . Conventionally, the mesh electrode 3 has an eye electrode element 3a and an electrode body 6, as shown in FIG.
It had an integrated structure.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

上述した従来のエレクトロンシャワーの網状型［！３は
一体構造になっているため、網状電極３が損傷を受ける
と、網状電極３毎交換しなければならず、コスト高とな
り、不経済であった。The conventional electron shower mesh type described above [! Since the mesh electrode 3 has an integral structure, if the mesh electrode 3 is damaged, each mesh electrode 3 must be replaced, which increases the cost and is uneconomical.

本発明の目的は前記課題を解消したエレクトロンシャワ
ーを提供することにある。An object of the present invention is to provide an electron shower that solves the above problems.

〔発明の従来技術に対する相違点〕[Differences between the invention and the prior art]

上述した従来のエレクトロンシャワーの網状電極３が一
体構造であるのに対し、本発明は網状電極が分割構造で
あるという相違点を有する。While the mesh electrode 3 of the conventional electron shower described above has an integral structure, the present invention has a difference in that the mesh electrode has a divided structure.

〔課題を解決するための手段〕[Means to solve the problem]

上記目的を達成するため、本発明のエレクトロンシャワ
ーにおいては、熱電子の引出効率を向上させる網状電極
を、熱電子が通過する開口部を有する電極本体と、該電
極本体の開口部に脱着可能に設置する綱目電極素子とか
らなる分割構造としたものである。In order to achieve the above object, in the electron shower of the present invention, a mesh electrode that improves the extraction efficiency of thermionic electrons is detachably attached to the electrode body having an opening through which the thermionic electrons pass, and the opening of the electrode body. It has a divided structure consisting of a grid electrode element to be installed.

〔実施例〕〔Example〕

以下、本発明の一実施例を図により説明する。 Hereinafter, one embodiment of the present invention will be described with reference to the drawings.

第１図は本発明の一実施例を示す分割斜視図である。FIG. 1 is a divided perspective view showing one embodiment of the present invention.

図において、本発明に係る熱電子の引出効率を向上させ
る網状電’［！３は、中央部に熱電子が通過する開口部
１ａ、２ａをそれぞれ有する２枚の平行な板状電極本体
１，２と、該電極本体１．２の開口部１ａ、２ａに脱着
可能に設置する綱目電極素子３ａとからなる分割構造と
したものである。In the figure, the reticulated electricity '[! 3 has two parallel plate-shaped electrode bodies 1 and 2 each having an opening 1 a and 2 a through which thermoelectrons pass in the center, and is removably installed in the openings 1 a and 2 a of the electrode body 1.2. It has a divided structure consisting of a wire electrode element 3a.

向き合う一方の電極本体１の内面には凹部５を、他方の
電極本体２の内面には凹部５に嵌合する凸部４をそれぞ
れ設けである。A recess 5 is provided on the inner surface of one electrode body 1 facing each other, and a protrusion 4 that fits into the recess 5 is provided on the inner surface of the other electrode main body 2.

本発明は、綱目電極素子３ａを平行な板状電極本体１．
２の開口１ａ、２ａ内に配置し、凹部５と凸部４とを嵌
合し２枚の板状電極本体１．２を密着させ、電極本体１
，２の開口部口縁にて綱目電極素子３ａの周縁を挾持し
、取付はネジ７にてこれを第２図に示すようにエレクト
ロガン８に装着する。In the present invention, a grid electrode element 3a is connected to a parallel plate-shaped electrode body 1.
2, and the concave portion 5 and the convex portion 4 are fitted to bring the two plate-shaped electrode bodies 1.2 into close contact with each other, and the electrode body 1.
, 2, and attach the wire electrode element 3a to the electrogun 8 using screws 7 as shown in FIG.

綱目電極素子３ａを交換するにはネジ７を外して２枚の
電極本体１．２を開き、新たな綱目電極素子３ａを２枚
の電極本体１．２間に差し込み、これをエレクトロガン
８に装着する。To replace the wire electrode element 3a, remove the screw 7, open the two electrode bodies 1.2, insert the new wire electrode element 3a between the two electrode bodies 1.2, and insert it into the electrogun 8. Installing.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明は網状電極を綱目電極素子と
これを支持する電極本体とに分割することにより、綱目
電極素子が破損しても網状電極を一体ごと交換する必要
がなく、綱目電極素子のみを交換すれば何度でも再使用
でき、コスト低減の効果がある。As explained above, the present invention divides the mesh electrode into the mesh electrode element and the electrode body that supports it, thereby eliminating the need to replace the mesh electrode as a whole even if the mesh electrode element is damaged. It can be reused as many times as you like by replacing only the parts, which has the effect of reducing costs.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本発明の一実施例を示す分割斜視図、第２図は
エレクトロガンを示す図、第３図は従来例を示す図、第
４図はエレクトロンシャワーを示す構成図である。 １．２・・・電極本体 ｌａ、２ａ・・・電極本体の開口部 ３・・・網状電極　　　　　３ａ・・・綱目電極素子特
許出願人　　九州日本電気株式会社 第２図FIG. 1 is a divided perspective view showing an embodiment of the present invention, FIG. 2 is a view showing an electrogun, FIG. 3 is a view showing a conventional example, and FIG. 4 is a configuration diagram showing an electron shower. 1.2... Electrode body la, 2a... Opening of electrode body 3... Reticular electrode 3a... Line electrode element patent applicant Kyushu NEC Co., Ltd. Figure 2

Claims (1)

【特許請求の範囲】[Claims] １、イオン注入時に半導体基板の帯電を解消するエレク
トロンシャワーにおいて、熱電子の引出効率を向上させ
る網状電極を、熱電子が通過する開口部を有する電極本
体と、該電極本体の開口部に脱着可能に設置する綱目電
極素子とからなる分割構造としたことを特徴とするエレ
クトロンシャワー。1. In an electron shower that eliminates the charge on a semiconductor substrate during ion implantation, a mesh electrode that improves the extraction efficiency of thermionic electrons can be attached and detached to the electrode body that has an opening through which thermionic electrons pass, and to the opening of the electrode body. An electron shower characterized by having a divided structure consisting of a grid electrode element installed in the.
JP63053356A 1988-03-07 1988-03-07 Electron shower Expired - Lifetime JP2776511B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63053356A JP2776511B2 (en) 1988-03-07 1988-03-07 Electron shower

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63053356A JP2776511B2 (en) 1988-03-07 1988-03-07 Electron shower

Publications (2)

Publication Number Publication Date
JPH01227346A true JPH01227346A (en) 1989-09-11
JP2776511B2 JP2776511B2 (en) 1998-07-16

Family

ID=12940518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63053356A Expired - Lifetime JP2776511B2 (en) 1988-03-07 1988-03-07 Electron shower

Country Status (1)

Country Link
JP (1) JP2776511B2 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5291543A (en) * 1976-01-26 1977-08-02 Yutaka Takahashi Method of coupling stockadeelike fence
JPS5434239U (en) * 1977-08-12 1979-03-06

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5291543A (en) * 1976-01-26 1977-08-02 Yutaka Takahashi Method of coupling stockadeelike fence
JPS5434239U (en) * 1977-08-12 1979-03-06

Also Published As

Publication number Publication date
JP2776511B2 (en) 1998-07-16

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