JP2776511B2 - Electron shower - Google Patents
Electron showerInfo
- Publication number
- JP2776511B2 JP2776511B2 JP63053356A JP5335688A JP2776511B2 JP 2776511 B2 JP2776511 B2 JP 2776511B2 JP 63053356 A JP63053356 A JP 63053356A JP 5335688 A JP5335688 A JP 5335688A JP 2776511 B2 JP2776511 B2 JP 2776511B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- electron shower
- mesh electrode
- thermoelectrons
- mesh
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 4
- 238000000605 extraction Methods 0.000 claims description 3
- 238000005468 ion implantation Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は半導体製造装置、特に半導体基板イオン注入
装置に関する。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor manufacturing apparatus, particularly to a semiconductor substrate ion implantation apparatus.
従来、この種の半導体基板イオン注入装置において
は、半導体基板の帯電（チャージアップ）を解消するた
め、エレクトロンシャワーが用いられている。第４図に
示すように、エレクトロンシャワー（エレクトロンフラ
ッド）はフィラメント７の加熱により熱電子を発生さ
せ、その熱電子を網状電極３により引き出してリフレク
タ８に衝突させ、２次電子を生成させている。従来、網
状電極３は第３図に示すように、目電極素子3aと電極本
体６とが一体構造になっていた。Conventionally, in this type of semiconductor substrate ion implantation apparatus, an electron shower has been used to eliminate charging (charge up) of the semiconductor substrate. As shown in FIG. 4, the electron shower (electron flood) generates thermoelectrons by heating the filament 7, and the thermoelectrons are extracted by the mesh electrode 3 and collide with the reflector 8 to generate secondary electrons. . Conventionally, as shown in FIG. 3, the reticulated electrode 3 has an eye electrode element 3a and an electrode main body 6 in an integrated structure.
上述した従来のエレクトロンシャワーの網状電極３は
一体構造になっているため、網状電極３が損傷を受ける
と、網状電極３毎交換しなければならず、コスト高とな
り、不経済であった。Since the reticulated electrode 3 of the conventional electron shower described above has an integral structure, if the reticulated electrode 3 is damaged, it must be replaced every reticulated electrode 3, which is costly and uneconomical.
本発明の目的は前記課題を解消したエレクトロンシャ
ワーを提供することにある。An object of the present invention is to provide an electron shower that solves the above problem.
上述した従来のエレクトロンシャワーの網状電極３が
一体構造であるのに対し、本発明は網状電極が分割構造
であるという相違点を有する。In contrast to the above-described conventional electron shower mesh electrode 3 having an integral structure, the present invention has a difference that the mesh electrode has a divided structure.
上記目的を達成するため、本発明のエレクトロンシャ
ワーにおいては、熱電子の引出効率を向上させる網状電
極を、熱電子が通過する開口部を有する電極本体と、該
電極本体の開口部に着脱可能に設置する網目電極素子と
からなる分割構造としたものである。In order to achieve the above object, in the electron shower of the present invention, a mesh electrode for improving the extraction efficiency of thermoelectrons can be detachably attached to an electrode body having an opening through which thermoelectrons pass and an opening of the electrode body. This is a divided structure including a mesh electrode element to be installed.
以下、本発明の一実施例を図により説明する。 Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
第１図は本発明の一実施例を示す分割斜視図である。 FIG. 1 is a divided perspective view showing one embodiment of the present invention.
図において、本発明に係る熱電子の引出効率を向上さ
せる網状電極３は、中央部に熱電子が通過する開口部1
a,2aをそれぞれ有する２枚の平行な板状電極本体1,2
と、該電極本体1,2の開口部1a,2aに着脱可能に設置する
網目電極素子3aとからなる分割構造としたものである。
向き合う一方の電極本体１の内面には凹部５を、他方の
電極本体２の内面には凹部５に嵌合する凸部４をそれぞ
れ設けてある。In the figure, the mesh electrode 3 for improving the extraction efficiency of thermoelectrons according to the present invention has an opening 1 through which thermoelectrons pass in the center.
a, 2a, two parallel plate-shaped electrode bodies 1, 2 each having
And a meshed electrode element 3a detachably installed in the openings 1a and 2a of the electrode bodies 1 and 2.
A concave portion 5 is provided on the inner surface of one facing electrode body 1, and a convex portion 4 fitted to the concave portion 5 is provided on the inner surface of the other electrode body 2.
本発明は、網目電極素子3aを平行な板状電極本体1,2
の開口1a,2a内に配置し、凹部５と凸部４とを嵌合し２
枚の板状電極本体1,2を密着させ、電極本体1,2の開口部
口縁にて網目電極素子3aの周縁を挾持し、取付けネジ７
にてこれを第２図に示すようにエレクトロガン８に装着
する。In the present invention, the mesh electrode element 3a is
Are arranged in the openings 1a and 2a, and the concave portion 5 and the convex portion 4 are fitted to each other.
The plate-shaped electrode bodies 1 and 2 are brought into close contact with each other, and the periphery of the mesh electrode element 3a is clamped between the opening edges of the electrode bodies 1 and 2, and the mounting screws 7
This is mounted on the electron gun 8 as shown in FIG.
網目電極素子3aを交換するにはネジ７を外して２枚の
電極本体1,2を開き、新たな網目電極素子3aを２枚の電
極本体1,2間に差し込み、これをエレクトロガン８に装
着する。To replace the mesh electrode element 3a, remove the screw 7 and open the two electrode bodies 1 and 2; insert a new mesh electrode element 3a between the two electrode bodies 1 and 2; Mounting.
以上説明したように本発明は網状電極を網目電極素子
とこれを支持する電極本体とに分割することにより、網
目電極素子が破損しても網状電極を一体ごと交換する必
要がなく、網目電極素子のみを交換すれば何度でも再使
用でき、コスト低減の効果がある。As described above, the present invention divides the mesh electrode into the mesh electrode element and the electrode body supporting the mesh electrode element, so that even if the mesh electrode element is damaged, it is not necessary to replace the mesh electrode together with the mesh electrode element. If only the components are replaced, they can be reused any number of times, which has the effect of reducing costs.
第１図は本発明の一実施例を示す分割斜視図、第２図は
エレクトロガンを示す図、第３図は従来例を示す図、第
４図はエレクトロンシャワーを示す構成図である。 1,2……電極本体 1a,2a……電極本体の開口部 ３……網状電極、3a……網目電極素子FIG. 1 is a divided perspective view showing one embodiment of the present invention, FIG. 2 is a view showing an electron gun, FIG. 3 is a view showing a conventional example, and FIG. 4 is a structural view showing an electron shower. 1, 2 ... electrode body 1a, 2a ... opening of electrode body 3 ... mesh electrode, 3a ... mesh electrode element
Claims (1)
るエレクトロンシャワーにおいて、熱電子の引出効率を
向上させる網状電極を、熱電子が通過する開口部を有す
る電極本体と、該電極本体の開口部に脱着可能に設置す
る網目電極素子とからなる分割構造としたことを特徴と
するエレクトロンシャワー。An electron shower for removing charge of a semiconductor substrate during ion implantation, a reticulated electrode for improving the extraction efficiency of thermoelectrons, an electrode body having an opening through which thermoelectrons pass, and an opening of the electrode body. An electron shower having a divided structure including a mesh electrode element that is detachably installed on the electrode showerhead.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63053356A JP2776511B2 (en) | 1988-03-07 | 1988-03-07 | Electron shower |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63053356A JP2776511B2 (en) | 1988-03-07 | 1988-03-07 | Electron shower |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01227346A JPH01227346A (en) | 1989-09-11 |
| JP2776511B2 true JP2776511B2 (en) | 1998-07-16 |
Family
ID=12940518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63053356A Expired - Lifetime JP2776511B2 (en) | 1988-03-07 | 1988-03-07 | Electron shower |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2776511B2 (en) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5291543A (en) * | 1976-01-26 | 1977-08-02 | Yutaka Takahashi | Method of coupling stockadeelike fence |
| JPS5434239U (en) * | 1977-08-12 | 1979-03-06 |
-
1988
- 1988-03-07 JP JP63053356A patent/JP2776511B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01227346A (en) | 1989-09-11 |
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