JPH01146528U - - Google Patents
Info
- Publication number
- JPH01146528U JPH01146528U JP4264288U JP4264288U JPH01146528U JP H01146528 U JPH01146528 U JP H01146528U JP 4264288 U JP4264288 U JP 4264288U JP 4264288 U JP4264288 U JP 4264288U JP H01146528 U JPH01146528 U JP H01146528U
- Authority
- JP
- Japan
- Prior art keywords
- heat block
- oven
- heating chamber
- nitrogen gas
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- 229910001873 dinitrogen Inorganic materials 0.000 claims 2
Landscapes
- Resistance Heating (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4264288U JPH01146528U (de) | 1988-03-30 | 1988-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4264288U JPH01146528U (de) | 1988-03-30 | 1988-03-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01146528U true JPH01146528U (de) | 1989-10-09 |
Family
ID=31269051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4264288U Pending JPH01146528U (de) | 1988-03-30 | 1988-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01146528U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009093365A1 (ja) * | 2008-01-25 | 2009-07-30 | Aisin Takaoka Co., Ltd. | 被加熱材の加熱装置及び加熱方法 |
-
1988
- 1988-03-30 JP JP4264288U patent/JPH01146528U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009093365A1 (ja) * | 2008-01-25 | 2009-07-30 | Aisin Takaoka Co., Ltd. | 被加熱材の加熱装置及び加熱方法 |
| JP2009176584A (ja) * | 2008-01-25 | 2009-08-06 | Aisin Takaoka Ltd | 被加熱材の加熱装置及び加熱方法 |
| US8455801B2 (en) | 2008-01-25 | 2013-06-04 | Asian Takaoka Co., Ltd. | Heating equipment for a plate to be heated and heating method |