JPS6255341U - - Google Patents
Info
- Publication number
- JPS6255341U JPS6255341U JP14760785U JP14760785U JPS6255341U JP S6255341 U JPS6255341 U JP S6255341U JP 14760785 U JP14760785 U JP 14760785U JP 14760785 U JP14760785 U JP 14760785U JP S6255341 U JPS6255341 U JP S6255341U
- Authority
- JP
- Japan
- Prior art keywords
- hot plate
- photoresist
- coated
- semiconductor substrate
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 229920002120 photoresistant polymer Polymers 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 239000000498 cooling water Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002791 soaking Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14760785U JPS6255341U (de) | 1985-09-26 | 1985-09-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14760785U JPS6255341U (de) | 1985-09-26 | 1985-09-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6255341U true JPS6255341U (de) | 1987-04-06 |
Family
ID=31061121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14760785U Pending JPS6255341U (de) | 1985-09-26 | 1985-09-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6255341U (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01168026A (ja) * | 1987-12-23 | 1989-07-03 | Teru Kyushu Kk | ベーキング装置 |
| JPH07161632A (ja) * | 1993-07-16 | 1995-06-23 | Semiconductor Syst Inc | 基板コーティング／現像システム用熱処理モジュール |
-
1985
- 1985-09-26 JP JP14760785U patent/JPS6255341U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01168026A (ja) * | 1987-12-23 | 1989-07-03 | Teru Kyushu Kk | ベーキング装置 |
| JPH07161632A (ja) * | 1993-07-16 | 1995-06-23 | Semiconductor Syst Inc | 基板コーティング／現像システム用熱処理モジュール |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6255341U (de) | ||
| DE69701080T2 (de) | Speisetablett zum Erwärmen von Nahrungsmitteln | |
| JPS5630158A (en) | Heating roller fixing device | |
| TW328607B (en) | Method of manufacturing a device, a heater for carrying out the method and a display device treated in accordance with said method | |
| JPS61100323U (de) | ||
| JPH02104628U (de) | ||
| JPS63137212U (de) | ||
| JPH0187531U (de) | ||
| JPH01110429U (de) | ||
| JPS5332946A (en) | Hot air heater | |
| JPS6365072U (de) | ||
| JPS631325U (de) | ||
| JPS6155643U (de) | ||
| JPH0432407U (de) | ||
| JPS58172755U (ja) | 給湯装置 | |
| GALIN | Heat exchange in the boundary layer on a plate for a given distribution of the heat flux or of the wall temperature with allowance for an initial unheated segment(Heat exchange in laminar and turbulent boundary layers on plate for arbitrary heat flux distribution allowing for initial unheated plate segment) | |
| JPH0353832U (de) | ||
| JPH01160445U (de) | ||
| JPS62145063U (de) | ||
| JPS6170928U (de) | ||
| JPS6223445U (de) | ||
| JPS5691865A (en) | Hot-air cycling type baking oven | |
| JPS6255044U (de) | ||
| JPS6413457U (de) | ||
| JPS6243271U (de) |