JPH01124396U - - Google Patents

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Publication number
JPH01124396U
JPH01124396U JP1951488U JP1951488U JPH01124396U JP H01124396 U JPH01124396 U JP H01124396U JP 1951488 U JP1951488 U JP 1951488U JP 1951488 U JP1951488 U JP 1951488U JP H01124396 U JPH01124396 U JP H01124396U
Authority
JP
Japan
Prior art keywords
rotor
spacer
blades
spacers
circumferential surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1951488U
Other languages
English (en)
Other versions
JPH0617036Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988019514U priority Critical patent/JPH0617036Y2/ja
Publication of JPH01124396U publication Critical patent/JPH01124396U/ja
Application granted granted Critical
Publication of JPH0617036Y2 publication Critical patent/JPH0617036Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【図面の簡単な説明】
図面は、本考案の一実施例を示す縦断面図であ
る。 １……タービン翼列、２……ねじロータ、３…
…ロータシヤフト、４……ケーシング、１１……
動翼、１２……静翼、２１……ロータ、２２……
ねじ溝、２３……回転筒部、２３ａ……対向面（
回転外周面）、２３ｂ……対向面（下端面）、２
３ｃ……対向面（内周面）、３３……ベース、４
１……ステータスペーサ、４１ａ……最下段スペ
ーサ、４２ａ……対向面（外筒部内周面）、４３
ａ……対向面（外筒部上面）、４４ａ……対向面
（外筒部外周面）、４３ｂ，４４ｂ……ねじ溝。

Claims (1)

    【実用新案登録請求の範囲】
  1. リング状をなすステータスペーサをケーシング
    内周に沿つてベース上に積層し、各スペーサ間に
    静翼を挟持させて、対向するロータ外周に設けた
    動翼との間にタービン翼列を構成するとともに、
    前記ロータの動翼よりも下方に回転筒部を設け、
    この回転筒部の外周面、下端面および内周面にそ
    れぞれ近接して対向し得る各対向面を前記ステー
    タスペーサのうち最下段のスペーサに一体に形成
    して、この最下段スペーサと前記回転筒部の各一
    対の対向面のそれぞれ一方にねじ溝を形成したこ
    とを特徴とするターボ分子ポンプ。
JP1988019514U 1988-02-17 1988-02-17 ターボ分子ポンプ Expired - Lifetime JPH0617036Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988019514U JPH0617036Y2 (ja) 1988-02-17 1988-02-17 ターボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988019514U JPH0617036Y2 (ja) 1988-02-17 1988-02-17 ターボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPH01124396U true JPH01124396U (ja) 1989-08-24
JPH0617036Y2 JPH0617036Y2 (ja) 1994-05-02

Family

ID=31235090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988019514U Expired - Lifetime JPH0617036Y2 (ja) 1988-02-17 1988-02-17 ターボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPH0617036Y2 (ja)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5358810A (en) * 1976-11-08 1978-05-27 Aisin Seiki Co Ltd High vacuum pump
EP0129709A2 (en) * 1983-04-26 1985-01-02 Anelva Corporation Combinational molecular pump capable of readily being cleaned
JPS60204997A (ja) * 1984-03-28 1985-10-16 Osaka Shinku Kiki Seisakusho:Kk 複合真空ポンプ
JPS60243395A (ja) * 1985-04-30 1985-12-03 Shimadzu Corp ターボ分子ポンプ
JPS61145394A (ja) * 1984-12-18 1986-07-03 Tokuda Seisakusho Ltd 分子ポンプ
EP0260733A1 (en) * 1986-08-12 1988-03-23 Ultra-Centrifuge Nederland N.V. High-vacuum pump

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5358810A (en) * 1976-11-08 1978-05-27 Aisin Seiki Co Ltd High vacuum pump
EP0129709A2 (en) * 1983-04-26 1985-01-02 Anelva Corporation Combinational molecular pump capable of readily being cleaned
JPS60204997A (ja) * 1984-03-28 1985-10-16 Osaka Shinku Kiki Seisakusho:Kk 複合真空ポンプ
JPS61145394A (ja) * 1984-12-18 1986-07-03 Tokuda Seisakusho Ltd 分子ポンプ
JPS60243395A (ja) * 1985-04-30 1985-12-03 Shimadzu Corp ターボ分子ポンプ
EP0260733A1 (en) * 1986-08-12 1988-03-23 Ultra-Centrifuge Nederland N.V. High-vacuum pump

Also Published As

Publication number Publication date
JPH0617036Y2 (ja) 1994-05-02

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