JPH01116092A - Jig for electrocasting - Google Patents
Jig for electrocastingInfo
- Publication number
- JPH01116092A JPH01116092A JP27227287A JP27227287A JPH01116092A JP H01116092 A JPH01116092 A JP H01116092A JP 27227287 A JP27227287 A JP 27227287A JP 27227287 A JP27227287 A JP 27227287A JP H01116092 A JPH01116092 A JP H01116092A
- Authority
- JP
- Japan
- Prior art keywords
- jig
- cathode
- electrode plate
- mounting
- mounting jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005323 electroforming Methods 0.000 claims description 21
- 239000007788 liquid Substances 0.000 abstract description 5
- 239000012212 insulator Substances 0.000 abstract description 4
- 239000000463 material Substances 0.000 abstract description 2
- 238000004544 sputter deposition Methods 0.000 abstract description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 28
- 229910052759 nickel Inorganic materials 0.000 description 14
- 239000002245 particle Substances 0.000 description 6
- 238000005299 abrasion Methods 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 238000005266 casting Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- KERTUBUCQCSNJU-UHFFFAOYSA-L nickel(2+);disulfamate Chemical compound [Ni+2].NS([O-])(=O)=O.NS([O-])(=O)=O KERTUBUCQCSNJU-UHFFFAOYSA-L 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、電鋳用治具、特に、欠陥のないスタンパを製
造するための電鋳用治具に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an electroforming jig, and particularly to an electroforming jig for producing a defect-free stamper.
従来の電鋳用治具は、第３図の断面図に示すように電鋳
液と接触する部分を絶縁キャップ３で覆った取付治具２
′の先端にネジ部１３を設け、ネジ締結により陰極に固
定していた。A conventional electroforming jig includes a mounting jig 2 whose part that comes into contact with the electroforming liquid is covered with an insulating cap 3, as shown in the cross-sectional view of FIG.
A threaded portion 13 was provided at the tip of 1, and was fixed to the cathode by screw fastening.
この第３図に示す従来の電鋳用治具を用いてスタンパの
製造を行なう場合、第４図の断面図に示すように、電鋳
液と接触する部分を絶縁キャップ３で覆った取付治具２
′によって、原盤７と電極板８とを電鋳液と接触する部
分を絶縁物６で覆った陰極５ヘネジ締結により固定して
いたため、固定する際、電極板８とニッケル導電膜９と
が接触する接触部分１２において互いの面がこすれ合い
、金属の磨耗粒の発生源となり、この異物によってスタ
ンパ１１にピット、ピンホールが発生することが極めて
多く、さらに、・取付治具２′の締付加減が強すぎると
、ニッケル導電膜９を電極板８によって破ってしまい、
ニッケル電鋳膜１０をニッケル導電膜９の上に電着でき
なくなり、歩留が低下する。When manufacturing a stamper using the conventional electroforming jig shown in FIG. 3, as shown in the cross-sectional view of FIG. Ingredients 2
', the master 7 and the electrode plate 8 were fixed by screwing to the cathode 5 whose part that comes into contact with the electroforming liquid was covered with the insulator 6, so when they were fixed, the electrode plate 8 and the nickel conductive film 9 came into contact. The surfaces of the contact portions 12 rub against each other, becoming a source of metal abrasion particles, and these foreign particles very often cause pits and pinholes in the stamper 11.Furthermore, the tightening of the mounting jig 2' If the adjustment is too strong, the nickel conductive film 9 will be damaged by the electrode plate 8,
The nickel electroformed film 10 cannot be electrodeposited on the nickel conductive film 9, and the yield decreases.
このように、従来の電鋳用治具は、ビット、ピンホール
が発生しやすいとともに、歩留が悪いという欠点があっ
た。As described above, conventional electroforming jigs have the disadvantages that bits and pinholes are likely to occur and the yield is low.
本発明の電鋳用治具は、電鋳装置槽内の陰極に原盤と電
極板を取付ける取付治具に斜めに切込んだ傾斜面を含ん
で構成される。The electroforming jig of the present invention includes an inclined surface cut diagonally into a mounting jig for attaching a master plate and an electrode plate to a cathode in an electroforming device tank.
次に、本発明の実施例について、図面を参照して詳細に
説明する。Next, embodiments of the present invention will be described in detail with reference to the drawings.
第１図は本発明の一実施例を示す断面図である。FIG. 1 is a sectional view showing one embodiment of the present invention.
第１図に示す電鋳用治具は、電鋳液と接触する部分を絶
縁キャップ３により覆った取付治具２の先端から内側に
向かい斜めに切込だ傾斜面１に直角に固定用ネジ４を陰
極５のネジ穴からネジ込むことにより、取付治具２を陰
極５に強固に固定できる。The electroforming jig shown in Fig. 1 consists of fixing screws cut at right angles to an inclined surface 1 cut diagonally inward from the tip of a mounting jig 2 whose part that comes into contact with the electroforming liquid is covered with an insulating cap 3. 4 through the screw hole of the cathode 5, the mounting jig 2 can be firmly fixed to the cathode 5.
第２図は第１図に示す実施例を用いた一電鋳例の断面図
である。FIG. 2 is a sectional view of a single electroforming example using the embodiment shown in FIG.
第２図に示す電鋳例において、原盤７の上にニッケル導
電膜９をスパッタリングにより、約８００人波着した後
、ニッケル導電膜９と陰極５を電気的に接触させるため
に、電極板８をニッケル導電膜９の上に接触させた上、
取付治具２により原盤７と電極板８の中心穴を貫通し、
陰極５へ差し込む。次に、電鋳液と接触する部分を絶縁
物６で覆われた陰極５の側面より絶縁性と強度を有する
ピーク材の固定用ネジ４を取付治具２の傾斜面１に直角
に接触するようにネジ込むことにより、原盤７．電極板
８及び取付治具２を長時間電鋳しても全く緩まない程、
強固に陰極５へ固定できた。In the electroforming example shown in FIG. 2, after depositing approximately 800 nickel conductive films 9 on the master 7 by sputtering, an electrode plate 8 was brought into contact with the top of the nickel conductive film 9, and
Penetrate the center hole of the master 7 and electrode plate 8 with the mounting jig 2,
Insert into cathode 5. Next, a fixing screw 4 made of a peak material having insulating properties and strength is brought into contact with the inclined surface 1 of the mounting jig 2 at right angles from the side surface of the cathode 5 whose part that contacts the electroforming liquid is covered with an insulator 6. By screwing it in as shown, the master disc 7. Even if the electrode plate 8 and mounting jig 2 are electroformed for a long time, they will not loosen at all.
It was able to be firmly fixed to the cathode 5.
次に、よく知られているスルファミン酸ニッケル電鋳浴
にて電鋳を行なうことにより、ニッケル電鋳膜１０の厚
さが約０．２７ｍｍのスタンパ１１が製造できた。Next, by performing electroforming in a well-known nickel sulfamate electroforming bath, a stamper 11 with a nickel electroformed film 10 having a thickness of about 0.27 mm was manufactured.
第１図に示す電鋳用治具は、取付治具２を回転させずに
陰極５に固定できるため、従来の取付治具２′を用いて
取付けた場合に生じていた電極板８とニッケル導電膜９
のこすれ合いによる金属の磨耗粒の発生、およびニッケ
ル導電膜９の破断が一切なくなり、スタンパ１１は金属
の磨耗粒によるピット、ピンホールの発生が防止でき、
歩留も向上できた。The electroforming jig shown in Fig. 1 can be fixed to the cathode 5 without rotating the mounting jig 2, so the electrode plate 8 and nickel can Conductive film 9
The generation of metal abrasion particles due to rubbing together and the breakage of the nickel conductive film 9 are completely eliminated, and the stamper 11 can be prevented from generating pits and pinholes due to metal abrasion particles.
Yield was also improved.
本発明の電鋳用治具は、取付治具の傾斜面に直角に固定
ネジを陰極の側面よりネジ込むことにより、原盤、電極
板、および取付治具な陰極に強固に固定できるため、電
鋳時に取付治具が抜けることは全くなく、ネジ締結した
場合と全く変わらずニッケル電鋳膜を電着できることは
もとより、従来の取付治具を用いてネジ締結している時
に発生していた電極板とニッケル導電膜のこすれ合いに
よる金属磨耗粒の発生がなくなったため、金属磨耗粒が
原因となっていたピット、ピンホールの発生が防止でき
、さらに、電極板によるニッケル導電膜の破断も全く生
じないため、歩留りが向上できるという効果がある。The electroforming jig of the present invention can be firmly fixed to the master, the electrode plate, and the cathode of the mounting jig by screwing in the fixing screw from the side of the cathode at right angles to the inclined surface of the mounting jig. The mounting jig will not come off during casting, and the nickel electroformed film can be electrodeposited in the same way as when screwed together. Since metal abrasion particles are no longer generated due to the rubbing of the plate and nickel conductive film, pits and pinholes caused by metal abrasion particles can be prevented, and furthermore, the nickel conductive film does not break due to the electrode plate. This has the effect of improving yield.
第１図は本発明の一実施例を示す断面図、第２図は第１
図に示す実施例を用いた一電鋳例の断面図、第３図は従
来の一例を示す断面図、第４図は第３図に示す従来例を
用いた一電鋳例の断面図である。
１・・・・・・傾斜面、２・・・：Ｈ：：、苓発併碓取
付治具、（。
３・・・・・・絶縁キャップ、４・・・・・・固定用ネ
ジ、５・・・・・・陰極、６・・・・・・絶縁物、７・
・・・・・原盤、８・・・・・・電極板、９・・・・・
・ニッケル導電膜、１０・・・・・・ニッケル電鋳膜、
１１・・・・・・スタンパ、１２・・・・・・接触部分
、１３・・・・・・ネジ部。
代理人 弁理士 内 原 晋
￥Ｊ１回
ｙｆ５３回
Ｍ４＠FIG. 1 is a sectional view showing one embodiment of the present invention, and FIG.
FIG. 3 is a cross-sectional view of a conventional example, and FIG. 4 is a cross-sectional view of a single electroforming example using the conventional example shown in FIG. be. 1... Inclined surface, 2...: H::, Reihatsu Jikusa mounting jig, (. 3... Insulating cap, 4... Fixing screw, 5...Cathode, 6...Insulator, 7.
... Master disc, 8 ... Electrode plate, 9 ...
・Nickel conductive film, 10...Nickel electroformed film,
11...Stamper, 12...Contact portion, 13...Threaded portion. Agent Patent attorney Susumu Uchihara￥J1 time yf53 time M4＠
Claims (1)
めの取付治具に斜めに切込んだ傾斜面を有することを特
徴とする電鋳用治具。An electroforming jig characterized in that the mounting jig for attaching a master plate and an electrode plate to a cathode in an electroforming equipment tank has an inclined surface cut diagonally.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27227287A JPH01116092A (en) | 1987-10-27 | 1987-10-27 | Jig for electrocasting |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27227287A JPH01116092A (en) | 1987-10-27 | 1987-10-27 | Jig for electrocasting |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01116092A true JPH01116092A (en) | 1989-05-09 |
Family
ID=17511537
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27227287A Pending JPH01116092A (en) | 1987-10-27 | 1987-10-27 | Jig for electrocasting |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01116092A (en) |
-
1987
- 1987-10-27 JP JP27227287A patent/JPH01116092A/en active Pending
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