JPH01104773A - Coated cutting tool - Google Patents
Coated cutting toolInfo
- Publication number
- JPH01104773A JPH01104773A JP25869087A JP25869087A JPH01104773A JP H01104773 A JPH01104773 A JP H01104773A JP 25869087 A JP25869087 A JP 25869087A JP 25869087 A JP25869087 A JP 25869087A JP H01104773 A JPH01104773 A JP H01104773A
- Authority
- JP
- Japan
- Prior art keywords
- coating layer
- cutting tool
- coated cutting
- heat treatment
- vacuum heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011247 coating layer Substances 0.000 claims abstract description 38
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims abstract description 19
- 239000000460 chlorine Substances 0.000 claims abstract description 19
- 229910052801 chlorine Inorganic materials 0.000 claims abstract description 19
- 238000010438 heat treatment Methods 0.000 claims abstract description 15
- 238000005229 chemical vapour deposition Methods 0.000 claims abstract description 13
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000002184 metal Substances 0.000 claims abstract description 8
- 229910052751 metal Inorganic materials 0.000 claims abstract description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 5
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims abstract description 4
- 239000012159 carrier gas Substances 0.000 claims abstract description 3
- 229910001510 metal chloride Inorganic materials 0.000 claims abstract description 3
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 claims description 8
- 239000011195 cermet Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 150000001247 metal acetylides Chemical class 0.000 claims description 2
- 150000004767 nitrides Chemical class 0.000 claims description 2
- 150000002897 organic nitrogen compounds Chemical class 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 7
- 230000007423 decrease Effects 0.000 abstract description 4
- 150000002739 metals Chemical class 0.000 abstract description 2
- 230000015556 catabolic process Effects 0.000 abstract 2
- 238000006731 degradation reaction Methods 0.000 abstract 2
- 238000006243 chemical reaction Methods 0.000 abstract 1
- 238000005261 decarburization Methods 0.000 abstract 1
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 description 12
- 238000000576 coating method Methods 0.000 description 12
- 230000000694 effects Effects 0.000 description 7
- 238000003801 milling Methods 0.000 description 3
- 239000010730 cutting oil Substances 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910017464 nitrogen compound Inorganic materials 0.000 description 1
- 150000002830 nitrogen compounds Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
Landscapes
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、耐摩耗性・耐欠損性に優れた被覆切削工具に
関するものであり、主として耐欠損性が必要とされるフ
ライス切削に適する被覆切削工具に関するものである。Detailed Description of the Invention [Industrial Field of Application] The present invention relates to a coated cutting tool with excellent wear resistance and fracture resistance, and mainly relates to a coated cutting tool that is suitable for milling cutting where fracture resistance is required. This relates to cutting tools.
［従来の技術］
従来、たとえば、フライス用被覆切削工具として、ＣＶ
Ｄ （化学蒸着）被覆工具やＰＶＤ （物理蒸着）被覆
工具などが用いられている。しかし、両者とも、十分な
性能を発揮するに至っていないのが現状である。これは
、主として次の理由によるとされている。すなわち、前
者では被覆直下に脆弱な脱炭相（η相）が生成され、後
者では被覆と基材との密着強度不足のため被覆が剥離し
やすいのである。[Prior Art] Conventionally, for example, CV has been used as a coated cutting tool for milling.
D (chemical vapor deposition) coated tools and PVD (physical vapor deposition) coated tools are used. However, the current situation is that neither of them has achieved sufficient performance. This is said to be mainly due to the following reasons. That is, in the former case, a brittle decarburized phase (η phase) is generated directly under the coating, and in the latter case, the coating is likely to peel off due to insufficient adhesion strength between the coating and the base material.
上記問題を解決するため、最近、高温で行なう従来のＨ
Ｔ−ＣＶＤ法に比べて被覆温度を低下させたＭＴ−ＣＶ
Ｄ法が用いられるようになった。In order to solve the above problem, recently, conventional H
MT-CV with lower coating temperature compared to T-CVD method
D method is now used.
これにより、脆弱な脱炭相が存在せず強固な密着強度を
有する被覆切削工具が得られるようになった。This has made it possible to obtain a coated cutting tool that has no brittle decarburized phase and has strong adhesion strength.
［発明が解決しようとする問題点］
しかしながら、ＭＴ−ＣＶＤ法によって作製された被覆
切削工具であっても、フライス切削において相変わらず
工具刃先の欠損が目立ち、ＨＴ−ＣＶＤ法と比較した場
合に耐欠損性はほとんど向上していない。[Problems to be Solved by the Invention] However, even with coated cutting tools manufactured by the MT-CVD method, chipping of the cutting edge of the tool is still noticeable during milling, and chipping resistance is poor when compared with the HT-CVD method. There has been little improvement in gender.
発明者等は、この原因が、皮膜中に残存する塩素（ＣＯ
−”）量に起因すると推察した。すなわち、被覆温度と
残留塩素量とは密接に関連しており、被覆温度の低下と
ともに残留塩素量は著しく増大する。このため被覆強度
が著しく低下し、断続切削時において被覆にクラックが
発生しやすくなる。The inventors believe that the cause of this is chlorine (CO) remaining in the film.
In other words, the coating temperature and the amount of residual chlorine are closely related, and as the coating temperature decreases, the amount of residual chlorine increases significantly.As a result, the coating strength decreases significantly, causing intermittent Cracks are more likely to occur in the coating during cutting.
これが基材に伝播して欠損に至ることになり、上記ＭＴ
−ＣＶＤ法の利点を相殺するのではないかという結論を
、発明者等は得たのである。This will propagate to the base material and lead to defects, and the above MT
-The inventors have concluded that the advantages of the CVD method may be offset.
そこで、本発明は、残留塩素量の少ない被覆層を得て、
強靭で優れた耐欠損性を有する被覆切削工具を提供する
ことを目的とする。Therefore, the present invention provides a coating layer with a small amount of residual chlorine,
The purpose of the present invention is to provide a coated cutting tool that is tough and has excellent fracture resistance.
［問題点を解決するための手段］
本発明に係る被覆切削工具は、超硬合金またはサーメッ
トからなる基体に、ＩＶａ族金属の炭化物、窒化物およ
び炭窒化物の一群から選ばれた少なくとも１種の被覆層
を被覆した被覆切削工具である。[Means for Solving the Problems] The coated cutting tool according to the present invention has a substrate made of cemented carbide or cermet, and at least one member selected from the group consisting of carbides, nitrides, and carbonitrides of group IVa metals. This is a coated cutting tool coated with a coating layer.
さらに、本発明に係る被覆切削工具は、前記被覆層が、
■ａ族金属の金属源としてのＩＶａ族金属塩化物と、炭
素、窒素源としてのＣＨ，およびＮ２または何機窒素化
合物とを、Ｎ２をキャリアガスとし化学蒸着法で７００
〜９００℃で反応させて、基体表面に未処理被覆層を形
成し、さらに５００〜ｂ
熱処理を１０分〜１０時間行なうことによって得られた
、塩素含有量の少ない被覆層であることを特徴としてい
る。Furthermore, in the coated cutting tool according to the present invention, the coating layer is
■ A group IVa metal chloride as a metal source of a group a metal, CH as a carbon and nitrogen source, and N2 or a nitrogen compound are mixed by chemical vapor deposition using N2 as a carrier gas.
The coating layer is characterized by a low chlorine content obtained by reacting at ~900°C to form an untreated coating layer on the substrate surface, and further heat-treating at ~500°C for 10 minutes to 10 hours. There is.
なお、好ましくは、炭素、窒素源としてアセトニトリル
（ＣＨ３ＣＮ）を用いる。Note that acetonitrile (CH3CN) is preferably used as the carbon and nitrogen source.
［作用］
本発明に係る被覆切削工具では、被覆層は７００〜９０
０℃という比較的低い温度で化学蒸着法によって形成さ
れるので、被覆層の下には脆弱な脱炭相が存在せず、し
かも被覆層は強固に基材に密着している。[Function] In the coated cutting tool according to the present invention, the coating layer has a thickness of 700 to 90
Since it is formed by chemical vapor deposition at a relatively low temperature of 0° C., there is no fragile decarburized phase under the coating layer, and the coating layer is firmly adhered to the base material.
また、上述の条件で真空熱処理を被覆層に施すことによ
って、被覆層の塩素含有量は従来に比べて少なくなって
いる。このため、被覆層中に含有される残留塩素に起因
する被覆層の強度低下が、低減あるいは防止できる。そ
の結果、断続切削時に被覆層に生じるクラックの数が減
少して、被覆切削工具の耐欠損性が向上する。Further, by subjecting the coating layer to vacuum heat treatment under the above-mentioned conditions, the chlorine content of the coating layer is reduced compared to the conventional method. Therefore, reduction in strength of the coating layer due to residual chlorine contained in the coating layer can be reduced or prevented. As a result, the number of cracks that occur in the coating layer during interrupted cutting is reduced, and the fracture resistance of the coated cutting tool is improved.
さらに、本発明に係る被覆切削工具の耐欠損性の向上は
、次のような作用によってももたらされると発明者等は
考えている。すなわち、真空熱処理において被覆層中よ
り塩素が外部に除去されるときに、−被覆層中に微小な
ピ′ンホールが生じる。Furthermore, the inventors believe that the improvement in fracture resistance of the coated cutting tool according to the present invention is also brought about by the following effects. That is, when chlorine is removed from the coating layer to the outside during vacuum heat treatment, minute pinholes are generated in the coating layer.
これにより、熱処理後に室温まで冷却する際に被覆層中
に生じる引張り応力が緩和される。故に、被覆層中のク
ラ゛・シフ数が減少して、工具の耐欠損性がさらに向上
するものと考えられる。This alleviates the tensile stress that occurs in the coating layer when it is cooled to room temperature after heat treatment. Therefore, it is considered that the number of cracks in the coating layer is reduced and the fracture resistance of the tool is further improved.
［実施例］
実施例１
超硬合金製の基体に、ＴｉＣＱ、４．Ｎ２．ＣＨ、ＣＮ
を原料とし、８５０℃でＴｉ （ＣＮ）を３μｍ被覆し
て被覆切削工具を得た。次に、８５０℃、０．１ｔｏｒ
ｒ、２時間の条件で真空熱処理を施した。[Example] Example 1 TiCQ, 4. N2. C.H., C.N.
was used as a raw material and coated with Ti (CN) to a thickness of 3 μm at 850° C. to obtain a coated cutting tool. Next, 850℃, 0.1torr
Vacuum heat treatment was performed under the conditions of 2 hours.
得られた試料および真空熱処理を行なわなかった同膜厚
の試料について、Ｅ、 Ｐ、 Ｍ、 Ａ、 （Ｘ線
マイクロアナライザー）により、被覆層中のＣ髪濃度を
測定した。その結果、真空熱処理した試料のＣ銃濃度は
非熱処理試料の約１／２に減少していた。The concentration of C hair in the coating layer was measured using an E, P, M, A, (X-ray microanalyzer) for the obtained sample and a sample having the same film thickness that was not subjected to vacuum heat treatment. As a result, the C gun concentration of the vacuum heat-treated sample was reduced to about 1/2 of that of the non-heat-treated sample.
なお、熱処理温度が５００℃以下では被覆層中の塩素含
有量を減少させるに十分な効果がなく、９００℃以上で
は皮膜粒子の粒成長が生じて工具の切削性能に悪影響を
与えた。また、熱処理時の気圧が５０ｔｏｒｒ以上とな
れば、被覆層中の塩素含有量を減少させるに十分な効果
が生じなかった。真空度は、現実の真空装置の性能によ
って左右されるのではあるが、高い方がより望ましい。Note that when the heat treatment temperature was 500°C or lower, there was no sufficient effect to reduce the chlorine content in the coating layer, and when the heat treatment temperature was 900°C or higher, grain growth of the coating particles occurred, which adversely affected the cutting performance of the tool. Moreover, if the atmospheric pressure during the heat treatment was 50 torr or more, a sufficient effect to reduce the chlorine content in the coating layer was not produced. Although the degree of vacuum depends on the performance of the actual vacuum device, a higher degree is more desirable.
真空熱処理時間は、１０分間以下では十分な効果が認め
られず、１０時間以上では効果が飽和した。When the vacuum heat treatment time was 10 minutes or less, no sufficient effect was observed, and when the vacuum heat treatment time was 10 hours or more, the effect was saturated.
上記真空熱処理によって被覆層中の残留塩素量が減少す
る現象は、被覆時に被覆層中に大量の塩素が含有されて
しまうＭＴ−ＣＶＤ法において特に顕著である。但し、
従来のＨＴ−ＣＶＤ法においても、比較的低温域で処理
した試料については十分効果があった。したがって、特
に効果が顕著な被覆温度は、９００℃以下である。また
、被覆温度が７００℃以下では、切削工具として実用に
耐える被覆層の接着強度が得られなかった。The phenomenon in which the amount of residual chlorine in the coating layer is reduced by the vacuum heat treatment is particularly remarkable in the MT-CVD method in which a large amount of chlorine is contained in the coating layer during coating. however,
The conventional HT-CVD method was also sufficiently effective for samples treated at relatively low temperatures. Therefore, the coating temperature at which the effect is particularly remarkable is 900°C or lower. Moreover, when the coating temperature was 700° C. or lower, the adhesive strength of the coating layer that could be used practically as a cutting tool could not be obtained.
実施例２
出発原料としてＴｉＣ止、、Ｈ２，ＣＨ３ＣＮを用い、
超硬合金（材質Ａ３０Ｎ；型番ＳＰＭＮ４２２）上にＴ
ｉ（ＣＮ）を８５０℃で２μｍ被覆した試料と、同条件
で被覆後、第１表に示すような温度および圧力で２時間
真空熱処理した試料とを、次の条件で断続切削したとこ
ろ、第１表に示す結果が得られた。Example 2 Using TiC, H2, CH3CN as starting materials,
T on cemented carbide (material A30N; model number SPMN422)
When a sample coated with 2 μm of i(CN) at 850°C and a sample coated under the same conditions and vacuum heat-treated for 2 hours at the temperature and pressure shown in Table 1 were cut intermittently under the following conditions, the following results were obtained: The results shown in Table 1 were obtained.
カッタ：ＤＰＧ４１６０Ｒ
速度：２２０ｍ／ｍｉｎ
送り：０．１４ｍｍ／刃
切削油：なし
被削材：５０Ｍ４３５
（以下余白）
第１表から明らかなように、本発明に係る切削工具では
、欠損に至るまでの切削時間および逃げ面摩耗幅に関し
、従来の被覆切削工具よりも優れた性能を発揮すること
がわかる。Cutter: DPG4160R Speed: 220m/min Feed: 0.14mm/Blade Cutting oil: None Work material: 50M435 (Left below is the margin) As is clear from Table 1, the cutting tool according to the present invention has a It can be seen that this tool exhibits better performance than conventional coated cutting tools in terms of cutting time and flank wear width.
実施例３
出発原料としてＴｉＣ麩、、ＨｆＣ之、、Ｈ２゜ＣＨｓ
ＣＮ、ＣＨｓ （ＮＨ） ２ ＣＨｓを用い、サー
メット（型番５ＮＧ４３２）上にＴｉ（ＣＮ）。Example 3 TiC, HfC, H2°CHs as starting materials
Ti(CN) on cermet (model number 5NG432) using CN, CHs (NH) 2 CHs.
Ｈｆ （ＣＮ）を７５０℃で２ｐｍ被覆した試料と、同
条件で被覆した後、第２表に示す温度および圧力の条件
で４時間真空熱処理を施した試料とを、次の条件で断続
切削し、耐欠損性を明らかにするための４溝靭性テスト
を行なった。その結果を第２表に示す。A sample coated with 2 pm of Hf (CN) at 750°C and a sample coated under the same conditions and then subjected to vacuum heat treatment for 4 hours at the temperature and pressure conditions shown in Table 2 were cut intermittently under the following conditions. A four-groove toughness test was conducted to clarify the fracture resistance. The results are shown in Table 2.
速度：１５０ｍ／ｍｉｎ
送り：０．１８〜０．２５ｍｍ／刃
被削材：５０Ｍ４３５
切削時間：３０ｓｅｃ
繰返し数二８回
切削油：なし
この第２表から明らかなように、比較品に比べて本発明
に係る被覆切削工具は、優れた耐欠損特性を有している
ことがわかる。Speed: 150m/min Feed: 0.18-0.25mm/Blade Work material: 50M435 Cutting time: 30sec Number of repetitions: 28 Cutting oil: None As is clear from Table 2, this product is more effective than the comparative product. It can be seen that the coated cutting tool according to the invention has excellent fracture resistance.
［発明の効果］
以上説明したように、本発明によれば、被覆層中の残留
塩素量を減少させることにより、比較的低温で化学蒸着
法を採用した場合の利点である被覆切削工具の耐欠損性
および耐摩耗性を最大限に発揮することができ、強靭で
優れた耐欠損性を有する被覆切削工具が得られる。[Effects of the Invention] As explained above, according to the present invention, by reducing the amount of residual chlorine in the coating layer, the durability of the coated cutting tool, which is an advantage when using chemical vapor deposition at a relatively low temperature, is improved. A coated cutting tool that can maximize fracture resistance and wear resistance and has strong and excellent fracture resistance can be obtained.
Claims (2)
族金属の炭化物、窒化物および炭窒化物の一群から選ば
れた少なくとも１種の被覆層を被覆した被覆切削工具に
おいて、 前記被覆層は、 前記IVａ族金属の金属源としてのIVａ族金属塩化物と、
炭素、窒素源としてのＣＨ＿４、Ｎ＿２または有機窒素
化合物とを、Ｈ＿２をキャリアガスとし化学蒸着法で７
００〜９００℃で反応させて、前記基体表面に未処理被
覆層を形成し、 さらに５００〜９００℃、５０ｔｏｒｒ以下の条件で、
真空熱処理を１０分〜１０時間行なうことによって得ら
れた、 塩素含有量の少ない被覆層であることを特徴とする被覆
切削工具。(1) IVa on a base made of cemented carbide or cermet
A coated cutting tool coated with at least one coating layer selected from the group of group metal carbides, nitrides, and carbonitrides, wherein the coating layer includes a group IVa metal chloride as a metal source of the group IVa metal. and,
Carbon, CH_4 as a nitrogen source, N_2 or an organic nitrogen compound, and H_2 as a carrier gas, by chemical vapor deposition method.
React at 00 to 900°C to form an untreated coating layer on the surface of the substrate, further under conditions of 500 to 900°C and 50 torr or less,
A coated cutting tool characterized by having a coating layer with a low chlorine content obtained by performing vacuum heat treatment for 10 minutes to 10 hours.
してアセトニトリル（ＣＨ＿３ＣＮ）を用いた被覆切削
工具。(2) A coated cutting tool according to claim 1, using acetonitrile (CH_3CN) as a carbon and nitrogen source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25869087A JP2590139B2 (en) | 1987-10-14 | 1987-10-14 | Coated cutting tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25869087A JP2590139B2 (en) | 1987-10-14 | 1987-10-14 | Coated cutting tool |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01104773A true JPH01104773A (en) | 1989-04-21 |
| JP2590139B2 JP2590139B2 (en) | 1997-03-12 |
Family
ID=17323742
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25869087A Expired - Lifetime JP2590139B2 (en) | 1987-10-14 | 1987-10-14 | Coated cutting tool |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2590139B2 (en) |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0386403A (en) * | 1989-08-29 | 1991-04-11 | Hitachi Tool Eng Ltd | Surface coated throw away tip |
| JPH0418658U (en) * | 1990-06-06 | 1992-02-17 | ||
| WO1992005296A1 (en) * | 1990-09-17 | 1992-04-02 | Kennametal Inc. | Cvd and pvd coated cutting tools |
| US5223337A (en) * | 1988-12-10 | 1993-06-29 | Fried. Krupp Gmbh | Tool produced by a plasma-activated CVD process |
| US5232318A (en) * | 1990-09-17 | 1993-08-03 | Kennametal Inc. | Coated cutting tools |
| US5250367A (en) * | 1990-09-17 | 1993-10-05 | Kennametal Inc. | Binder enriched CVD and PVD coated cutting tool |
| US5266388A (en) * | 1990-09-17 | 1993-11-30 | Kennametal Inc. | Binder enriched coated cutting tool |
| US5325747A (en) * | 1990-09-17 | 1994-07-05 | Kennametal Inc. | Method of machining using coated cutting tools |
| US5589223A (en) * | 1990-01-31 | 1996-12-31 | Mitsubishi Material Corp. | Process for producing cermet cutting tools having both longitudinal and granular crystal structures |
| WO1998015671A1 (en) * | 1996-10-09 | 1998-04-16 | Widia Gmbh | Composite body, production process and use |
| JP2004197154A (en) * | 2002-12-18 | 2004-07-15 | Jfe Steel Kk | Grain-oriented silicon steel sheet and its producing method, and device for coating ceramic film |
| JP2012187659A (en) * | 2011-03-10 | 2012-10-04 | Mitsubishi Materials Corp | Surface coated cutting tool with hard coating layer having superior chipping resistance and fracture resistance |
| JP2016153518A (en) * | 2015-02-20 | 2016-08-25 | 東京エレクトロン株式会社 | Film deposition method and film deposition apparatus of carbon film |
| EP3620552A1 (en) | 2018-09-04 | 2020-03-11 | Tungaloy Corporation | Coated cutting tool |
-
1987
- 1987-10-14 JP JP25869087A patent/JP2590139B2/en not_active Expired - Lifetime
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5223337A (en) * | 1988-12-10 | 1993-06-29 | Fried. Krupp Gmbh | Tool produced by a plasma-activated CVD process |
| JPH0386403A (en) * | 1989-08-29 | 1991-04-11 | Hitachi Tool Eng Ltd | Surface coated throw away tip |
| US5589223A (en) * | 1990-01-31 | 1996-12-31 | Mitsubishi Material Corp. | Process for producing cermet cutting tools having both longitudinal and granular crystal structures |
| JPH0418658U (en) * | 1990-06-06 | 1992-02-17 | ||
| US5364209A (en) * | 1990-09-17 | 1994-11-15 | Kennametal Inc. | CVD and PVD coated cutting tools |
| US5250367A (en) * | 1990-09-17 | 1993-10-05 | Kennametal Inc. | Binder enriched CVD and PVD coated cutting tool |
| US5266388A (en) * | 1990-09-17 | 1993-11-30 | Kennametal Inc. | Binder enriched coated cutting tool |
| US5325747A (en) * | 1990-09-17 | 1994-07-05 | Kennametal Inc. | Method of machining using coated cutting tools |
| US5232318A (en) * | 1990-09-17 | 1993-08-03 | Kennametal Inc. | Coated cutting tools |
| US5395680A (en) * | 1990-09-17 | 1995-03-07 | Kennametal Inc. | Coated cutting tools |
| WO1992005296A1 (en) * | 1990-09-17 | 1992-04-02 | Kennametal Inc. | Cvd and pvd coated cutting tools |
| WO1998015671A1 (en) * | 1996-10-09 | 1998-04-16 | Widia Gmbh | Composite body, production process and use |
| US6224968B1 (en) | 1996-10-09 | 2001-05-01 | Widia Gmbh | Composite body, production process and use |
| JP2004197154A (en) * | 2002-12-18 | 2004-07-15 | Jfe Steel Kk | Grain-oriented silicon steel sheet and its producing method, and device for coating ceramic film |
| JP4595280B2 (en) * | 2002-12-18 | 2010-12-08 | Ｊｆｅスチール株式会社 | Method for producing unidirectional silicon steel sheet and ceramic coating apparatus |
| JP2012187659A (en) * | 2011-03-10 | 2012-10-04 | Mitsubishi Materials Corp | Surface coated cutting tool with hard coating layer having superior chipping resistance and fracture resistance |
| JP2016153518A (en) * | 2015-02-20 | 2016-08-25 | 東京エレクトロン株式会社 | Film deposition method and film deposition apparatus of carbon film |
| EP3620552A1 (en) | 2018-09-04 | 2020-03-11 | Tungaloy Corporation | Coated cutting tool |
| US11007579B2 (en) | 2018-09-04 | 2021-05-18 | Tungaloy Corporation | Coated cutting tool |
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| Publication number | Publication date |
|---|---|
| JP2590139B2 (en) | 1997-03-12 |
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