JP7499074B2 - Conveyor - Google Patents
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- JP7499074B2 JP7499074B2 JP2020098966A JP2020098966A JP7499074B2 JP 7499074 B2 JP7499074 B2 JP 7499074B2 JP 2020098966 A JP2020098966 A JP 2020098966A JP 2020098966 A JP2020098966 A JP 2020098966A JP 7499074 B2 JP7499074 B2 JP 7499074B2
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Description
本発明は、搬送装置に関する。 The present invention relates to a conveying device.
搬送対象物の中央領域と、その外側となる外側領域とを支持して当該搬送対象物を搬送する搬送装置が知られている（例えば、特許文献１参照）。 A conveying device is known that conveys an object by supporting a central area of the object and an outer area of the central area (see, for example, Patent Document 1).
しかしながら、特許文献１に記載されたような従来のウエハ搬送装置１１０（搬送装置）では、例えば、特許文献２に記載されたようなウエハ収納キャリア１０のように、ウエハ１２（搬送対象物）の中心部（中央領域の一部）が第２の支持部１６（中央支え部材）によって支えられている場合、例えば、中央アーム部１２（第２支持部材）と中央支え部材とが干渉することによって、ウエハ搬送アーム１（支持手段）を搬送対象物の下方に侵入させることができなかったり、第２支持部材が中央支え部材の下方に入り込み、搬送対象物の取り出しの際に、ウエハ収納キャリア１０ごと移動させてしまったりするといった搬送対象物の搬送不良を発生する。 However, in a conventional wafer transport device 110 (transport device) such as that described in Patent Document 1, when the center (part of the central region) of the wafer 12 (transport object) is supported by the second support portion 16 (central support member) as in the wafer storage carrier 10 described in Patent Document 2, for example, interference between the central arm portion 12 (second support member) and the central support member can cause problems with transport of the transport object, such as the wafer transport arm 1 (support means) being unable to enter beneath the transport object, or the second support member getting under the central support member and moving the entire wafer storage carrier 10 when removing the transport object.
本発明の目的は、中央領域の一部が中央支え部材によって支えられている搬送対象物の搬送不良が発生することを防止することができる搬送装置を提供することにある。 The object of the present invention is to provide a conveying device that can prevent conveying failures of an object to be conveyed in which part of the central region is supported by a central support member.
本発明は、請求項に記載した構成を採用した。 The present invention employs the configuration described in the claims.
本発明によれば、搬送対象物の中央領域を支持する第２支持部材に、中央支え部材との干渉を防ぐ干渉防止部が設けられているので、中央領域の一部が中央支え部材によって支えられている搬送対象物の搬送不良が発生することを防止することができる。 According to the present invention, the second support member that supports the central region of the transport object is provided with an interference prevention portion that prevents interference with the central support member, so that transport problems can be prevented when a transport object has a portion of its central region supported by the central support member.
以下、本発明の一実施形態を図面に基づいて説明する。
なお、本実施形態におけるＸ軸、Ｙ軸、Ｚ軸は、それぞれが直交する関係にあり、Ｘ軸およびＹ軸は、所定平面内の軸とし、Ｚ軸は、前記所定平面に直交する軸とする。さらに、本実施形態では、図１（Ａ）に示すＹ軸と平行な矢印ＢＤ方向から観た場合を基準とし、図を指定することなく方向を示した場合、「上」がＺ軸の矢印方向で「下」がその逆方向、「左」がＸ軸の矢印方向で「右」がその逆方向、「前」がＹ軸と平行な図１中手前方向で「後」がその逆方向とする。
Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
In this embodiment, the X-axis, Y-axis, and Z-axis are mutually orthogonal, the X-axis and Y-axis are axes within a given plane, and the Z-axis is an axis orthogonal to the given plane. Furthermore, in this embodiment, the view from the direction of the arrow BD parallel to the Y-axis shown in Fig. 1(A) is used as a reference, and when directions are indicated without specifying the figure, "up" is the direction of the Z-axis arrow, "down" is the opposite direction, "left" is the direction of the X-axis arrow, "right" is the opposite direction, "front" is the forward direction in Fig. 1 parallel to the Y-axis, and "rear" is the opposite direction.
本発明の転写装置ＥＡは、搬送対象物ＷＫの中央領域ＷＫ２よりも外側となる外側領域ＷＫ１を第１支持部材１２で支持するとともに、中央領域ＷＫ２を第２支持部材１３で支持する支持手段１０と、支持手段１０で支持した搬送対象物ＷＫを搬送する搬送手段２０と、搬送対象物ＷＫの位置を検知する検知手段３０とを備え、ケース支持台ＳＴ１およびステージＳＴ２の近傍に配置されている。
なお、搬送対象物ＷＫは、収納ケースＣＡに収納され、支持手段１０で支持される前の段階で、中央領域ＷＫ２の一部としての中心部ＷＫＡが中央支え部材ＣＡ１によって支えられており、外縁部ＷＫＢが外側支え部材ＣＡ２によって支えられている。
The transfer device EA of the present invention comprises a support means 10 which supports an outer region WK1, which is outside the central region WK2 of the transport object WK, with a first support member 12 and supports the central region WK2 with a second support member 13, a transport means 20 which transports the transport object WK supported by the support means 10, and a detection means 30 which detects the position of the transport object WK, and is arranged in the vicinity of the case support table ST1 and the stage ST2.
In addition, when the object to be transported WK is stored in a storage case CA and before being supported by the support means 10, the central portion WKA as part of the central region WK2 is supported by a central support member CA1, and the outer edge portion WKB is supported by an outer support member CA2.
支持手段１０は、搬送手段２０によって支持された接続部材１１と、接続部材１１に続く第１支持部材１２と、第１支持部材１２に支持され、搬送対象物ＷＫを支持する際の中央支え部材ＣＡ１との干渉を防ぐ干渉防止部１３Ａが設けられた第２支持部材１３とを備えている。
なお、第１支持部材１２には、搬送対象物ＷＫに接触して当該搬送対象物ＷＫを保持する接触保持手段および、搬送対象物ＷＫに接触することなく当該搬送対象物ＷＫを保持する非接触保持手段の少なくとも一方が設けられ、第２支持部材１３には、接触保持手段および非接触保持手段の少なくとも一方が設けられている。本実施形態の場合、第１支持部材１２には、加圧ポンプやタービン等の図示しない加圧手段による送風によって非接触保持が可能な非接触保持手段としての所謂ベルヌーイチャック１２Ａが設けられており、第２支持部材１３には、減圧ポンプや真空エジェクタ等の図示しない減圧手段による吸引によって接触保持が可能な接触保持手段としての吸着パッド１３Ｂが設けられている。
The support means 10 comprises a connecting member 11 supported by the conveying means 20, a first support member 12 following the connecting member 11, and a second support member 13 supported by the first support member 12 and provided with an interference prevention portion 13A to prevent interference with the central support member CA1 when supporting the object to be conveyed WK.
The first support member 12 is provided with at least one of a contact holding means for contacting the transport object WK to hold the transport object WK and a non-contact holding means for holding the transport object WK without contacting the transport object WK, and the second support member 13 is provided with at least one of a contact holding means and a non-contact holding means. In this embodiment, the first support member 12 is provided with a so-called Bernoulli chuck 12A as a non-contact holding means capable of non-contact holding by blowing air from a pressurizing means (not shown) such as a pressure pump or a turbine, and the second support member 13 is provided with a suction pad 13B as a contact holding means capable of contact holding by suction from a pressure reducing means (not shown) such as a pressure reducing pump or a vacuum ejector.
搬送手段２０は、複数のアームによって構成され、その作業範囲内において、作業部である先端アーム２１Ａで支持したものを何れの位置、何れの角度にでも変位可能な駆動機器としての所謂多関節ロボット２１を備えている。
なお、本実施形態の場合、支持手段１０は、搬送対象物ＷＫを撓ませて、当該搬送対象物ＷＫの外側領域ＷＫ１または中央領域ＷＫ２を第１支持部１２または第２支持部１３に接近させ、ベルヌーイチャック１２Ａおよび吸着パッド１３Ｂの少なくとも一方に搬送対象物ＷＫを保持させる撓ませ手段として多関節ロボット２１を、搬送手段２０と共有する構成となっている。
The conveying means 20 is composed of multiple arms and is equipped with a so-called articulated robot 21 as a driving device that can displace what is supported by the tip arm 21A, which is the working part, to any position and any angle within its working range.
In this embodiment, the support means 10 is configured to share the articulated robot 21 with the transport means 20 as a deflection means for bending the transport object WK to bring the outer region WK1 or the central region WK2 of the transport object WK closer to the first support part 12 or the second support part 13, and hold the transport object WK on at least one of the Bernoulli chuck 12A and the suction pad 13B.
検知手段３０は、駆動機器としての直動モータ３１のスライダ３１Ａに支持され、カメラや投影機等の撮像手段や、光学センサや超音波センサ等の各種センサ等からなる検知機器３２を備えている。 The detection means 30 is supported by a slider 31A of a linear motor 31 as a driving device, and is equipped with a detection device 32 consisting of an imaging means such as a camera or projector, and various sensors such as optical sensors and ultrasonic sensors.
以上の搬送装置ＥＡの動作を説明する。
先ず、図１（Ａ）中実線で示す初期位置に各部材が配置された搬送装置ＥＡに対し、当該搬送装置ＥＡの使用者（以下、単に「使用者」という）が、操作パネルやパーソナルコンピュータ等の図示しない操作手段を介して自動運転開始の信号を入力する。次いで、使用者または、多関節ロボットやベルトコンベア等の図示しない搬送手段が、図１（Ａ）に示すように、搬送対象物ＷＫが収納された収納ケースＣＡをケース支持台ＳＴ１上に載置する。すると、検知手段３０が直動モータ３１および検知機器３２を駆動し、当該検知機器３２を上昇させて収納カセットＣＡ内の搬送対象物ＷＫの位置を検知した後、当該検知機器３２を初期位置に復帰させる。次いで、搬送手段２０が多関節ロボット２１を駆動し、検知手段３０の検知結果を基にして支持手段１０を移動させ、図１（Ｂ）、（Ｃ）に示すように、干渉防止部１３Ａで中央支え部材ＣＡ１をかわすようにして、収納カセットＣＡ内の搬送対象物ＷＫの下方に支持手段１０を移動させ、吸着パッド１３Ｂを当該搬送対象物の下面に当接させる。その後、支持手段１０が図示しない加圧手段および図示しない減圧手段を駆動し、ベルヌーイチャック１２Ａでの搬送対象物ＷＫの非接触保持と、吸着パッド１３Ｂでの搬送対象物ＷＫの接触保持とを開始する。
The operation of the above-mentioned conveying apparatus EA will now be described.
First, a user of the conveying device EA (hereinafter, simply referred to as "user") inputs a signal to start automatic operation to the conveying device EA, in which each member is placed at the initial position shown by the solid line in Fig. 1(A), via an operation means (not shown), such as an operation panel or a personal computer. Next, the user or a conveying means (not shown), such as an articulated robot or a belt conveyor, places a storage case CA, in which a conveying object WK is stored, on the case support stand ST1, as shown in Fig. 1(A). Then, the detection means 30 drives the linear motor 31 and the detection device 32, which raises the detection device 32 to detect the position of the conveying object WK in the storage cassette CA, and then returns the detection device 32 to its initial position. 1B and 1C, the support means 10 is moved below the object WK to be transferred in the storage cassette CA so as to avoid the central support member CA1 by the interference prevention portion 13A, and the suction pad 13B is brought into contact with the lower surface of the object to be transferred. Thereafter, the support means 10 drives the pressure means and the pressure reduction means (not shown) to start non-contact holding of the object WK by the Bernoulli chuck 12A and contact holding of the object WK by the suction pad 13B.
ここで、図１（Ｄ）に示すように、収納カセットＣＡ内で搬送対象物ＷＫの外縁部ＷＫＢが上方に反り上がっていると、ベルヌーイチャック１２Ａと搬送対象物ＷＫとの間隔が離れすぎていて、当該ベルヌーイチャック１２Ａでの搬送対象物ＷＫの非接触保持ができなくなる場合がある。このような場合、支持手段１０が図示しない加圧手段および図示しない減圧手段を駆動し、ベルヌーイチャック１２Ａでの搬送対象物ＷＫの非接触保持が開始されていない状態で、吸着パッド１３Ｂでの搬送対象物ＷＫの接触保持を開始した後、支持手段１０が多関節ロボット２１を駆動し、当該搬送対象物ＷＫの外側領域ＷＫ１が慣性で下方に撓む程度の速さで支持手段１０を上昇させる。これにより、搬送対象物ＷＫの外側領域ＷＫ１が第１支持部１２に接近し、図１（Ｅ）に示すように、ベルヌーイチャック１２Ａに搬送対象物ＷＫを保持させることができる。 Here, as shown in FIG. 1(D), if the outer edge WKB of the transport object WK is warped upward in the storage cassette CA, the distance between the Bernoulli chuck 12A and the transport object WK may be too large, making it impossible for the Bernoulli chuck 12A to hold the transport object WK in a non-contact manner. In such a case, the support means 10 drives the pressure means (not shown) and the pressure reduction means (not shown), and after the suction pad 13B starts to hold the transport object WK in contact with the transport object WK without the Bernoulli chuck 12A starting to hold the transport object WK in a non-contact manner, the support means 10 drives the articulated robot 21 and raises the support means 10 at a speed such that the outer region WK1 of the transport object WK bends downward due to inertia. As a result, the outer region WK1 of the transport object WK approaches the first support portion 12, and the transport object WK can be held by the Bernoulli chuck 12A as shown in FIG. 1(E).
ベルヌーイチャック１２Ａでの搬送対象物ＷＫの非接触保持と、吸着パッド１３Ｂでの搬送対象物ＷＫの接触保持とが開始されると、搬送手段２０が多関節ロボット２１を駆動し、支持手段１０で支持した搬送対象物ＷＫを搬送先としてのステージＳＴ２に搬送する。次に、支持手段１０が図示しない加圧手段および図示しない減圧手段の駆動を停止し、ベルヌーイチャック１２Ａでの搬送対象物ＷＫの非接触保持と、吸着パッド１３Ｂでの搬送対象物ＷＫの接触保持とを解除する。そして、搬送手段２０が多関節ロボット２１を駆動し、検知手段３０の検知結果を基にして支持手段１０を移動させ、次の搬送対象となる搬送対象物ＷＫの下方に支持手段１０を移動させ、以降上記と同様の動作が繰り返される。 When the non-contact holding of the transport object WK by the Bernoulli chuck 12A and the contact holding of the transport object WK by the suction pad 13B are started, the transport means 20 drives the articulated robot 21 to transport the transport object WK supported by the support means 10 to the stage ST2 as the destination. Next, the support means 10 stops driving the pressure means (not shown) and the pressure reduction means (not shown), and releases the non-contact holding of the transport object WK by the Bernoulli chuck 12A and the contact holding of the transport object WK by the suction pad 13B. Then, the transport means 20 drives the articulated robot 21 and moves the support means 10 based on the detection result of the detection means 30, and moves the support means 10 below the transport object WK to be transported next, and the same operations as above are repeated thereafter.
以上のような実施形態によれば、搬送対象物ＷＫの中央領域ＷＫ２を支持する第２支持部材１３に、中央支え部材ＣＡ１との干渉を防ぐ干渉防止部１３Ａが設けられているので、中央領域ＷＫ２の一部が中央支え部材ＣＡ１によって支えられている搬送対象物ＷＫの搬送不良が発生することを防止することができる。 According to the above embodiment, the second support member 13 that supports the central region WK2 of the transport object WK is provided with an interference prevention portion 13A that prevents interference with the central support member CA1, so that it is possible to prevent transport failures of the transport object WK in which a portion of the central region WK2 is supported by the central support member CA1.
本発明における手段及び工程は、それら手段及び工程について説明した動作、機能または工程を果たすことができる限りなんら限定されることはなく、まして、前記実施形態で示した単なる１実施形態の構成物や工程に全く限定されることはない。例えば、搬送手段は、支持手段で支持した搬送対象物を搬送可能なものであればどんなものでもよく、出願当初の技術常識に照らし合わせてその技術範囲内のものであればなんら限定されることはない（その他の手段および工程も同じ）。 The means and steps of the present invention are not limited in any way as long as they can perform the operations, functions or steps described for those means and steps, and are in no way limited to the components and steps of just one embodiment shown in the above embodiment. For example, the transport means may be anything that can transport an object to be transported supported by the support means, and is not limited in any way as long as it is within the technical scope in light of the common general technical knowledge at the time of filing (the same goes for the other means and steps).
支持手段１０は、接触保持手段として、例えば、メカチャックやチャックシリンダ等の把持手段、クーロン力、接着剤（接着シート、接着テープ）、粘着剤（粘着シート、粘着テープ）、磁力、吸引吸着、駆動機器等を採用してもよいし、多関節ロボット２１を搬送手段２０と共有することなく、当該多関節ロボット２１とは別の駆動機器を撓ませ手段として採用してもいし、撓ませ手段として、例えば、図１（Ｄ）の状態で、搬送対象物ＷＫの上方から気体や棒状部材等の図示しない付勢手段で外縁部ＷＫＢを押し下げ、ベルヌーイチャック１２Ａに搬送対象物ＷＫを保持させる構成物を採用してもよいし、撓ませ手段を採用しなくてもよいし、第１支持部材１２に吸着パッド１３Ｂが設けられ、第２支持部材１３にベルヌーイチャック１２Ａが設けられていてもよいし、第１支持部材１２および第２支持部材１３の両方に吸着パッド１３Ｂが設けられていてもよいし、第１支持部材１２および第２支持部材１３の両方にベルヌーイチャック１２Ａが設けられていてもよいし、第１支持部材１２および第２支持部材１３の両方に吸着パッド１３Ｂとベルヌーイチャック１２Ａとの両方が設けられていてもよいし、第１支持部材１２や第２支持部材１３に設けられるベルヌーイチャック１２Ａや吸着パッド１３Ｂは、１つでもよいし複数でもよいし、ベルヌーイチャック１２Ａで非接触保持する際に、搬送対象物ＷＫが面方向に移動することを防止する滑り止め部材を採用してもよいし、第１支持部材１２および第２支持部材１３の少なくとも一方に、吸着パッド１３Ｂもベルヌーイチャック１２Ａも設けられていなくてもよい。
支持手段１０は、収納カセットＣＡ内で中心部ＷＫＡが上方に反り上がっている搬送対象物ＷＫを支持する場合、支持手段１０が図示しない加圧手段および図示しない減圧手段を駆動し、吸着パッド１３Ｂでの搬送対象物ＷＫの接触保持が開始されていない状態で、ベルヌーイチャック１２Ａでの搬送対象物ＷＫの非接触保持を開始した後、支持手段１０が多関節ロボット２１を駆動し、当該搬送対象物ＷＫの中央領域ＷＫ２が慣性で下方に撓む程度の速さで支持手段１０を上昇させ、当該中央領域ＷＫ２を第２支持部１３に接近させたり、搬送対象物ＷＫの上方から図示しない付勢手段で中心部ＷＫＡを押し下げたりして、吸着パッド１３Ｂに搬送対象物ＷＫを保持させてもよい。
上記の実施形態では、第１支持部材１２の平面形状と第２支持部材１３の平面形状とが略Ｕ字形状で同系の形状のものを例示したが、第１支持部材１２および第２支持部材１３の平面形状は、略Ｙ字形状でもよいし、略凹形状等どのような形状でもよいし、第１支持部材１２の平面形状と第２支持部材１３の平面形状とが同系の形状でなくてもよい。
The support means 10 may employ, as a contact holding means, for example, a gripping means such as a mechanical chuck or a chuck cylinder, Coulomb force, an adhesive (adhesive sheet, adhesive tape), a pressure sensitive adhesive (adhesive sheet, adhesive tape), a magnetic force, suction, a driving device, or the like. Alternatively, the articulated robot 21 may not be shared with the transport means 20, and a driving device other than the articulated robot 21 may be employed as a deflection means. Alternatively, as a deflection means, for example, in the state of FIG. 1(D), a configuration may be employed in which an outer edge portion WKB is pressed down from above the transport object WK by a biasing means (not shown) such as a gas or a rod-shaped member, causing the Bernoulli chuck 12A to hold the transport object WK. Alternatively, a deflection means may not be employed. Alternatively, a suction pad 13B may be provided on the first support member 12, and a Bernoulli chuck 12A may be provided on the second support member 13. Alternatively, suction pads 13B may be provided on both the first support member 12 and the second support member 13, or Bernoulli chucks 12A may be provided on both the first support member 12 and the second support member 13, or both suction pads 13B and Bernoulli chucks 12A may be provided on both the first support member 12 and the second support member 13, the Bernoulli chucks 12A and suction pads 13B provided on the first support member 12 and the second support member 13 may be one or more, an anti-slip member may be used to prevent the transported object WK from moving in the planar direction when the Bernoulli chuck 12A holds the transported object WK in a non-contact manner, or at least one of the first support member 12 and the second support member 13 may not be provided with either the suction pads 13B or the Bernoulli chuck 12A.
When the support means 10 supports a transport object WK whose central part WKA is warped upward within a storage cassette CA, the support means 10 may drive a pressure means (not shown) and a pressure means (not shown) to start non-contact holding of the transport object WK with the Bernoulli chuck 12A while the suction pad 13B has not yet started contact holding of the transport object WK, and then the support means 10 may drive the articulated robot 21 to raise the support means 10 at a speed such that the central region WK2 of the transport object WK bends downward due to inertia, thereby bringing the central region WK2 closer to the second support part 13, or may push down the central part WKA from above the transport object WK with a force means (not shown) to hold the transport object WK on the suction pad 13B.
In the above embodiment, the planar shape of the first support member 12 and the planar shape of the second support member 13 are exemplified as being approximately U-shaped and similar shapes, but the planar shapes of the first support member 12 and the second support member 13 may be approximately Y-shaped, approximately concave, or any other shape, and the planar shape of the first support member 12 and the planar shape of the second support member 13 do not have to be similar shapes.
搬送手段２０は、多関節ロボット２１を支持手段１０と共有することなく別の駆動機器を採用し、支持手段１０で支持した搬送対象物ＷＫを搬送する構成としてもよい。 The conveying means 20 may be configured to convey the conveying object WK supported by the support means 10 by using a separate driving device without sharing the articulated robot 21 with the support means 10.
検知手段３０が検知機器３２を昇降させて収納カセットＣＡ内の搬送対象物ＷＫの位置を検知するタイミングは、検知機器３２の上昇中でもよいし、下降中でもよいし、上昇中と下降中の両方でもよい。
検知手段３０は、検知機器３２を移動させることなくまたは移動させつつ、収納ケースＣＡを移動させて当該収納カセットＣＡ内の搬送対象物ＷＫの位置を検知してもよいし、検知機器３２および収納カセットＣＡの両方を移動させることなくことなく、一括で収納カセットＣＡ内の搬送対象物ＷＫの位置を検知してもよいし、本発明の搬送装置ＥＡに備わっていてもよいし、備わっていなくてもよい。
The timing at which the detection means 30 raises and lowers the detection device 32 to detect the position of the transport object WK in the storage cassette CA may be while the detection device 32 is rising, while it is descending, or both while it is rising and descending.
The detection means 30 may detect the position of the object WK to be transported in the storage cassette CA by moving the storage case CA without or while moving the detection device 32, or may detect the position of the object WK to be transported in the storage cassette CA all at once without moving both the detection device 32 and the storage cassette CA, and may or may not be provided in the conveying device EA of the present invention.
搬送対象物ＷＫは、一方の面および他方の面の少なくとも一方に接着シートが貼付されていてもよいし、それら両方の面に接着シートが貼付されていなくてもよいし、支持手段１０で支持される前の段階で、収納ケースＣＡに収納されていなくてもよいし、その外縁部ＷＫＢが外側支え部材ＣＡ２やその他の部材によって支えられていなくてもよく、支持手段１０で支持される前の段階で、中央領域ＷＫ１の一部が中央支え部材によって支えられていればよい。
搬送対象物ＷＫの中央領域ＷＫ１の一部としては、当該搬送対象物ＷＫの重量的な中心または距離的な中心を含む領域でもよいし、重量的な中心または距離的な中心を含まない領域でもよい。
中央支え部材は、上記の実施形態で示した中央支え部材ＣＡ１の他、搬送対象物ＷＫの中央領域ＷＫ１の一部を支持して当該被搬送対象物ＷＫを昇降させる所謂リフターや、中央領域ＷＫ１の一部を支持する円柱状部材や角柱状部材等どのようなものでもよい。
本発明の搬送装置ＥＡで搬送する搬送対象物ＷＫの搬送先は、上記の実施形態で示したステージＳＴ２の他に、例えば、搬送対象物ＷＫに接着シートを貼付するシート貼付装置、搬送対象物ＷＫから接着シートを剥離するシート剥離装置、搬送対象物ＷＫを研削する研削装置、搬送対象物ＷＫを個片化するダイシング装置、搬送対象物ＷＫに印字や塗装を施す印刷装置等に使用される搬送対象物の支持テーブルの他、搬送対象物ＷＫを載置する単なる台等どのようなものでもよい。
The object to be transported WK may have an adhesive sheet affixed to at least one of its one and other sides, or it may not have an adhesive sheet affixed to both sides, it may not be stored in a storage case CA before being supported by the support means 10, and its outer edge portion WKB may not be supported by an outer support member CA2 or other members; it is sufficient that a portion of the central region WK1 is supported by a central support member before being supported by the support means 10.
A part of the central region WK1 of the transport object WK may be a region that includes the center of gravity or the center of distance of the transport object WK, or a region that does not include the center of gravity or the center of distance.
The central support member may be the central support member CA1 shown in the above embodiment, or it may be a so-called lifter that supports a part of the central region WK1 of the transported object WK and raises and lowers the transported object WK, or a cylindrical or rectangular columnar member that supports a part of the central region WK1.
The destination of the object WK to be transported by the transport apparatus EA of the present invention may be, in addition to the stage ST2 shown in the above embodiment, a support table for the object to be transported used in, for example, a sheet application device that applies an adhesive sheet to the object to be transported WK, a sheet peeling device that peels off an adhesive sheet from the object to be transported WK, a grinding device that grinds the object to be transported WK, a dicing device that separates the object to be transported WK, a printing device that prints or paints the object to be transported WK, or a simple table on which the object to be transported WK is placed.
本発明における搬送対象物ＷＫおよび、当該搬送対象物ＷＫに貼付されていてもよいとした接着シートの材質、種別、形状等は、特に限定されることはない。例えば、搬送対象物ＷＫおよび接着シートは、円形、楕円形、三角形や四角形等の多角形、その他の形状であってもよいし、接着シートは、感圧接着性、感熱接着性等の接着形態のものであってもよい。また、このような接着シートは、例えば、接着剤層だけの単層のもの、基材と接着剤層との間に中間層を有するもの、基材の上面にカバー層を有する等３層以上のもの、更には、基材を接着剤層から剥離することのできる所謂両面接着シートのようなものであってもよく、両面接着シートは、単層又は複層の中間層を有するものや、中間層のない単層又は複層のものであってよい。また、搬送対象物ＷＫとしては、例えば、食品、樹脂容器、シリコン半導体ウエハや化合物半導体ウエハ等の半導体ウエハ、回路基板、光ディスク等の情報記録基板、ガラス板、鋼板、陶器、木板または樹脂等の単体物であってもよいし、それら２つ以上で形成された複合物であってもよく、任意の形態の部材や物品なども対象とすることができる。なお、接着シートは、機能的、用途的な読み方に換え、例えば、情報記載用ラベル、装飾用ラベル、保護シート、ダイシングテープ、ダイアタッチフィルム、ダイボンディングテープ、記録層形成樹脂シート等の任意のシート、フィルム、テープ等でもよい。 The material, type, shape, etc. of the object to be transported WK and the adhesive sheet that may be attached to the object to be transported WK in the present invention are not particularly limited. For example, the object to be transported WK and the adhesive sheet may be circular, elliptical, polygonal such as a triangle or a rectangle, or other shape, and the adhesive sheet may be pressure-sensitive adhesive, heat-sensitive adhesive, or other adhesive form. In addition, such an adhesive sheet may be, for example, a single layer of only an adhesive layer, one having an intermediate layer between the substrate and the adhesive layer, one having three or more layers such as a cover layer on the upper surface of the substrate, or even a so-called double-sided adhesive sheet in which the substrate can be peeled off from the adhesive layer, and the double-sided adhesive sheet may be one having a single layer or multiple layers of intermediate layer, or one having no intermediate layer, or multiple layers. The transport object WK may be, for example, a single object such as food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit board, an information recording substrate such as an optical disk, a glass plate, a steel plate, a ceramic plate, a wooden board, or a resin, or may be a composite object formed of two or more of these, and may also be a component or an article of any shape. Note that the adhesive sheet may be interpreted in terms of its function or use, and may be any sheet, film, tape, etc., such as an information label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, or a recording layer-forming resin sheet.
前記実施形態における駆動機器は、回動モータ、直動モータ、リニアモータ、単軸ロボット、２軸または３軸以上の関節を備えた多関節ロボット等の電動機器、エアシリンダ、油圧シリンダ、ロッドレスシリンダおよびロータリシリンダ等のアクチュエータ等を採用することができる上、それらを直接的又は間接的に組み合せたものを採用することもできる。 The driving device in the above embodiment can be an electric device such as a rotary motor, a linear motor, a single-axis robot, or a multi-joint robot with two or more joints, or an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, or a rotary cylinder, or a direct or indirect combination of these.
ＥＡ 搬送装置
１０ 支持手段
１２ 第１支持部材
１２Ａ ベルヌーイチャック（非接触保持手段）
１３ 第２支持部材
１３Ａ 干渉防止部
１３Ｂ 吸着パッド（接触保持手段）
２０ 搬送手段
２１ 多関節ロボット（撓ませ手段）
ＣＡ１ 中央支え部材
ＷＫ 搬送対象物
ＷＫＡ 中心部（中央領域の一部）
ＷＫ１ 外側領域
ＷＫ２ 中央領域
EA: conveying device 10: supporting means 12: first supporting member 12A: Bernoulli chuck (non-contact holding means)
13 Second support member 13A Interference prevention portion 13B Suction pad (contact holding means)
20 Conveying means 21 Articulated robot (deflection means)
CA1: central support member WK: transport object WKA: central portion (part of the central region)
WK1 Outer region WK2 Central region
Claims (3)
前記支持手段で支持した前記搬送対象物を搬送する搬送手段とを備え、
前記搬送対象物は、前記支持手段で支持される前の段階で、前記中央領域の一部が中央支え部材によって支えられており、
前記第２支持部材には、前記搬送対象物を支持する際の前記中央支え部材との干渉を防ぐ干渉防止部が設けられており、
前記支持手段は、前記搬送対象物の外側領域を撓ませる撓ませ手段を備え、
前記撓ませ手段は、前記搬送対象物の内側領域を支持した前記第２支持部材を前記搬送対象物の外側領域が慣性で撓む速さで移動させることを特徴とする搬送装置。 a support means for supporting an outer region of the object to be conveyed, the outer region being outside a central region of the object, with a first support member, and supporting the central region with a second support member;
a conveying means for conveying the object supported by the supporting means,
a central support member supports a part of the central region of the transport object before the transport object is supported by the support means;
an interference prevention portion is provided on the second support member to prevent interference with the central support member when supporting the transport object ;
The supporting means includes a deflecting means for deflecting an outer region of the object to be conveyed,
The conveying device, wherein the deflection means moves the second support member supporting the inner region of the conveyed object at a speed at which the outer region of the conveyed object deflects due to inertia .
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