JP7482193B2 - 広帯域レーザ産生プラズマイルミネータを有するx線計量システム及び方法 - Google Patents
広帯域レーザ産生プラズマイルミネータを有するx線計量システム及び方法 Download PDFInfo
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Description
Claims (15)
- レーザ産生プラズマ光源であって、
少なくとも1個の壁を有するプラズマチャンバであり、その壁により自プラズマチャンバ内にバッファガス流を囲い込むプラズマチャンバと、
固体又は液体状態の非金属フィード素材のドロップレット列を前記プラズマチャンバ内に吐出するドロップレット発生器と、
前記プラズマチャンバ内のフィード素材のドロップレットに向かう励起光パルスであり1nsec未満の持続時間を有するものを生成するパルスレーザと、を備え、その励起光パルスとそのフィード素材のドロップレットとの相互作用によりそのドロップレットをイオン化させることで、照明光を放射するプラズマを形成させ、
前記プラズマにより放射された一群の照明光を集め、前記プラズマチャンバの窓を介しその一群の照明光を差し向ける集光器と、
を備え、前記窓は、X線フィルタとして1nm~20nmのX線輻射を透過させ、それ以外の輻射を吸収し、更に、
前記バッファガスから一群のフィード素材を分離させ当該一群のフィード素材を前記ドロップレット発生器に供給するよう構成されたガス再循環システムを備え、
前記ガス再循環システムが、
前記バッファガスを冷却し、前記非金属フィード素材を固化して気体状態を保つバッファガスから分離し、前記気体状態のバッファガスを排出した後に、固化した前記非金属フィード素材を加熱して気相状態とする少なくとも1個のクライオジェニックチャンバと、
前記気相状態の非金属フィード素材を冷却して液体状態とし、前記ドロップレット発生器に輸送する蒸留カラムと、
を備え、
前記クライオジェニックチャンバから排出された前記バッファガス、及び前記蒸留カラムからの残留バッファガスが前記プラズマチャンバに供給される、
レーザ産生プラズマ光源。 - 請求項1に記載のレーザ産生プラズマ光源であって、前記バッファガスがヘリウム又は水素であるレーザ産生プラズマ光源。
- 請求項1に記載のレーザ産生プラズマ光源であって、前記プラズマチャンバの窓から前記プラズマまでの距離が少なくとも10cmあるレーザ産生プラズマ光源。
- 請求項1に記載のレーザ産生プラズマ光源であって、前記フィード素材の各ドロップレット列が200μm未満の直径であるレーザ産生プラズマ光源。
- 請求項1に記載のレーザ産生プラズマ光源であって、前記フィード素材がキセノン、クリプトン、アルゴン、ネオン及び窒素のうち何れかであるレーザ産生プラズマ光源。
- 請求項1に記載のレーザ産生プラズマ光源であって、前記プラズマの輝度が1014光子/(sec・mm2・mrad2)超であるレーザ産生プラズマ光源。
- 請求項1に記載のレーザ産生プラズマ光源であって、前記プラズマのスポットサイズが10μm未満であるレーザ産生プラズマ光源。
- 計量システムであって、
レーザ産生プラズマ光源であり、
少なくとも1個の壁を有するプラズマチャンバでありその壁により自プラズマチャンバ内にバッファガス流を囲い込むプラズマチャンバ、
固体又は液体状態の非金属フィード素材のドロップレット列を前記プラズマチャンバ内に吐出するドロップレット発生器、
前記プラズマチャンバ内のフィード素材のドロップレットに向かう励起光パルスであり1nsec未満の持続時間を有するものを生成するパルスレーザであり、その励起光パルスとそのフィード素材のドロップレットとの相互作用によりそのドロップレットをイオン化させることで、照明光を放射するプラズマを形成させるパルスレーザ、
前記プラズマにより放射された照明光を集めその照明光を前記プラズマチャンバの窓を介し計測下の試料に差し向ける集光器、
を備え、前記窓は、X線フィルタとして1nm~20nmのX線輻射を透過させ、それ以外の輻射を吸収するレーザ産生プラズマ光源と、
前記照明光が前記試料上に入射するのに応じその試料から一群の光を検出するX線検出器と、
検出された一群の光に基づき前記試料のモデルに係る注目パラメータの値を決めるよう構成された情報処理システムと、
を備え、更に、
前記バッファガスから一群のフィード素材を分離させ当該一群のフィード素材を前記ドロップレット発生器に供給するよう構成されたガス再循環システムを備え、
前記ガス再循環システムが、
前記バッファガスを冷却し、前記非金属フィード素材を固化して気体状態を保つバッファガスから分離し、前記気体状態のバッファガスを排出した後に、固化した前記非金属フィード素材を加熱して気相状態とする少なくとも1個のクライオジェニックチャンバと、
前記気相状態の非金属フィード素材を冷却して液体状態とし、前記ドロップレット発生器に輸送する蒸留カラムと、
を備え、前記クライオジェニックチャンバから排出された前記バッファガス、及び前記蒸留カラムからの残留バッファガスが前記プラズマチャンバに供給される計量システム。 - 請求項8に記載の計量システムであって、反射型小角X線スキャタロメトリシステム、コヒーレント回折撮像システム及び撮像システムのうち何れかとして構成された計量システム。
- 請求項8に記載の計量システムであって、更に、
前記照明光が前記試料に入射されるのに応じその試料から放射された収集光を集めて拡大しその収集光を前記X線検出器に差し向ける対物系を、備える計量システム。 - 請求項10に記載の計量システムであって、前記対物系が前記照明光を前記試料に差し向ける計量システムであり、その対物系の瞳面内にあり空間的に分離されている領域をその照明光及び前記収集光が占める計量システム。
- 請求項10に記載の計量システムであって、前記対物系が前記照明光を前記試料に差し向ける計量システムであり、その対物系の瞳面内にあり空間的に重複している領域をその照明光及び前記収集光が占める計量システム。
- 請求項10に記載の計量システムであって、更に、
前記照明光を前記集光器から前記試料に差し向ける少なくとも1個の照明光学素子を備え、前記対物系の瞳面内に前記収集光しかない計量システム。 - 請求項8に記載の計量システムであって、前記プラズマのスポットサイズが10μm未満である計量システム。
- 固体又は液体状態の非金属フィード素材のドロップレット列をプラズマチャンバ内に吐出し、そのプラズマチャンバに備わる少なくとも1個の壁によりそのプラズマチャンバ内にバッファガス流を囲い込むステップと、
前記プラズマチャンバ内のフィード素材のドロップレットに向かう励起光パルスであり1nsec未満の持続時間を有するものを生成し、その励起光パルスとそのフィード素材のドロップレットとの相互作用によりそのドロップレットをイオン化させることで、照明光を放射するプラズマを形成させるステップと、
前記プラズマにより放射された照明光を集めその照明光を前記プラズマチャンバの窓を介し計測下の試料に差し向けるステップであり、前記窓は、X線フィルタとして1nm~20nmのX線輻射を透過させ、それ以外の輻射を吸収する、ステップと、
前記照明光に応じ前記試料から一群の光を検出するステップと、
検出された一群の光に基づき計測下の前記試料の少なくとも1個の注目パラメータの値を決めるステップと、
を有し、更に、
前記バッファガスから一群のフィード素材を分離させ当該一群のフィード素材をドロップレット発生器に供給するガス再循環ステップを備え、
前記ガス再循環ステップが、
前記バッファガスを冷却し、前記非金属フィード素材を固化して気体状態を保つバッファガスから分離し、前記気体状態のバッファガスを排出した後に、固化した前記非金属フィード素材を加熱して気相状態とするステップと、
蒸留カラムにより前記気相状態の非金属フィード素材を冷却して液体状態とし、前記ドロップレット発生器に輸送するステップと、
を有し、排出された前記バッファガス、及び前記蒸留カラムからの残留バッファガスが前記プラズマチャンバに供給される、方法。
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KR102589632B1 (ko) | 2023-10-13 |
US10959318B2 (en) | 2021-03-23 |
EP3738181A4 (en) | 2022-03-02 |
WO2019139837A1 (en) | 2019-07-18 |
TW201940013A (zh) | 2019-10-01 |
CN111566880A (zh) | 2020-08-21 |
US20190215940A1 (en) | 2019-07-11 |
JP2021510449A (ja) | 2021-04-22 |
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