JP7476062B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP7476062B2 JP7476062B2 JP2020155011A JP2020155011A JP7476062B2 JP 7476062 B2 JP7476062 B2 JP 7476062B2 JP 2020155011 A JP2020155011 A JP 2020155011A JP 2020155011 A JP2020155011 A JP 2020155011A JP 7476062 B2 JP7476062 B2 JP 7476062B2
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- 239000004065 semiconductor Substances 0.000 title claims description 186
- 150000004767 nitrides Chemical class 0.000 claims description 120
- 239000000758 substrate Substances 0.000 claims description 55
- 238000002955 isolation Methods 0.000 claims description 40
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 239000010410 layer Substances 0.000 description 112
- 229910002601 GaN Inorganic materials 0.000 description 10
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 9
- 230000005533 two-dimensional electron gas Effects 0.000 description 9
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 8
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 7
- 239000010931 gold Substances 0.000 description 6
- 239000010936 titanium Substances 0.000 description 6
- 230000007423 decrease Effects 0.000 description 4
- 229920001721 polyimide Polymers 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- H—ELECTRICITY
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7786—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7786—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT
- H01L29/7787—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT with wide bandgap charge-carrier supplying layer, e.g. direct single heterostructure MODFET
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- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/482—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
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- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/528—Geometry or layout of the interconnection structure
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- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
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- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
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- H01L29/0642—Isolation within the component, i.e. internal isolation
- H01L29/0649—Dielectric regions, e.g. SiO2 regions, air gaps
- H01L29/0653—Dielectric regions, e.g. SiO2 regions, air gaps adjoining the input or output region of a field-effect device, e.g. the source or drain region
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- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
- H01L29/41775—Source or drain electrodes for field effect devices characterised by the proximity or the relative position of the source or drain electrode and the gate electrode, e.g. the source or drain electrode separated from the gate electrode by side-walls or spreading around or above the gate electrode
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- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
- H01L29/41758—Source or drain electrodes for field effect devices for lateral devices with structured layout for source or drain region, i.e. the source or drain region having cellular, interdigitated or ring structure or being curved or angular
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Geometry (AREA)
- Junction Field-Effect Transistors (AREA)
- Element Separation (AREA)
Description
本実施形態の半導体装置は、基板と、基板上に設けられた第1窒化物半導体層と、第1窒化物半導体層の上に設けられ、第1窒化物半導体層よりバンドギャップの大きな第2窒化物半導体層と、第2窒化物半導体層の上に設けられた第1ソース電極と、第2窒化物半導体層の上に設けられた第2ソース電極と、第1ソース電極と第2ソース電極の間の、第2窒化物半導体層の上に設けられた第1ゲート電極と、第2ソース電極と第1ゲート電極の間の、第2窒化物半導体層の上に設けられた第2ゲート電極と、第1ゲート電極と第2ゲート電極の間の、第2窒化物半導体層の上に設けられ、第1配線と、第2ゲート電極と第1配線の間に設けられた第2配線と、第1配線と第2配線の間の下の第2窒化物半導体層に設けられた素子分離領域と、第1配線、第2配線及び素子分離領域の上に設けられ、第1配線及び第2配線と電気的に接続された第4配線と、を有するドレイン電極と、素子分離領域と第4配線の間に設けられた絶縁膜と、を備える。
本実施形態の半導体装置は、基板と、基板上に設けられた第1窒化物半導体層と、第1窒化物半導体層の上に設けられ、第1窒化物半導体層よりバンドギャップの大きな第2窒化物半導体層と、第2窒化物半導体層の上に設けられ、基板の基板面に平行な第1方向に延伸し、第1方向に延伸するに従い、第1方向に交差する第2方向における幅が増加する第1ソース電極と、第2窒化物半導体層の上に設けられ、第1方向に延伸し、第1方向に延伸するに従い、第2方向における幅が増加する第2ソース電極と、第1ソース電極と第2ソース電極の間の、第2窒化物半導体層の上に、第1ソース電極及び第2ソース電極と離間して設けられた第1ゲート電極と、第2ソース電極と第1ゲート電極の間の、第2窒化物半導体層の上に、第2ソース電極及び第1ゲート電極と離間して設けられた第2ゲート電極と、第1ゲート電極と第2ゲート電極の間の第2窒化物半導体層の上に設けられ、第1方向に延伸し、第1方向に延伸するに従い、第2方向における幅が減少する第4配線と、第2窒化物半導体層と第4配線の間に設けられ、第1ゲート電極に対向する第1ソース電極の側面に実質的に平行に延伸する第1配線と、第1配線と第2ゲート電極の間の、第2窒化物半導体層と第4配線の間に設けられ、第2ゲート電極に対向する第2ソース電極の側面に実質的に平行に延伸する第2配線と、第1配線と第2配線の間の下の、第2窒化物半導体層に設けられた素子分離領域と、を有するドレイン電極と、素子分離領域と第4配線の間に設けられた絶縁膜と、を備える。
2a :基板面
6 :第1窒化物半導体層
8 :第2窒化物半導体層
10 :ソース電極
10a :ソース電極(第1ソース電極)
10b :ソース電極(第2ソース電極)
12 :ゲート電極
12a :ゲート電極(第1ゲート電極)
12b :ゲート電極(第2ゲート電極)
20 :ドレイン電極
22a :第1配線
22b :第2配線
24a :第5配線
24b :第6配線
26a :絶縁膜
28a :第4配線
281 :側面
282 :側面
30 :第3配線
40 :素子分離領域
61 :第1領域
62 :第2領域
63 :第3領域
64 :第4領域
65 :第5領域
66 :第6領域
67 :第7領域
100 :半導体装置
110 :半導体装置
120 :半導体装置
h1 :高さ
h2 :高さ
Claims (3)
- 基板と、
前記基板上に設けられた第1窒化物半導体層と、
前記第1窒化物半導体層の上に設けられ、前記第1窒化物半導体層よりバンドギャップの大きな第2窒化物半導体層と、
前記第2窒化物半導体層の上に設けられ、前記基板の基板面に平行な第1方向に延伸する第1ソース電極と、
前記第2窒化物半導体層の上に設けられ、前記第1方向に延伸する第2ソース電極と、
前記第1ソース電極と前記第2ソース電極の間の、前記第2窒化物半導体層の上に設けられ、前記第1方向に延伸する第1ゲート電極と、
前記第2ソース電極と前記第1ゲート電極の間の、前記第2窒化物半導体層の上に設けられ、前記第1方向に延伸する第2ゲート電極と、
前記第1ゲート電極と前記第2ゲート電極の間の、前記第2窒化物半導体層の上に設けられ、
前記第1方向に延伸する第1配線と、
前記第2ゲート電極と前記第1配線の間に設けられ、前記第1方向に延伸する第2配線と、
前記第1配線と前記第2配線の間の下の前記第2窒化物半導体層に、前記第1方向にそれぞれ離間して設けられた複数の素子分離領域と、
前記複数の素子分離領域の間の前記第2窒化物半導体層の上に設けられ、前記第1配線と前記第2配線を電気的に接続する複数の第3配線と、
前記第1配線、前記第2配線、前記複数の素子分離領域及び前記複数の第3配線の上に設けられた第4配線と、
を有するドレイン電極と、
前記複数の素子分離領域と前記第4配線の間に設けられた絶縁膜と、
を備える半導体装置。 - 前記複数の第3配線の高さは、前記第1配線の高さ及び前記第2配線の高さより高く、前記複数の第3配線は前記第4配線に電気的に接続されている請求項1記載の半導体装置。
- 前記基板は、Si(シリコン)基板である請求項1又は請求項2記載の半導体装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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JP2020155011A JP7476062B2 (ja) | 2020-09-15 | 2020-09-15 | 半導体装置 |
CN202110023207.0A CN114188411A (zh) | 2020-09-15 | 2021-01-08 | 半导体装置 |
US17/190,070 US11830916B2 (en) | 2020-09-15 | 2021-03-02 | Nitride semiconductor device with element isolation area |
US18/490,965 US20240047533A1 (en) | 2020-09-15 | 2023-10-20 | Nitride semiconductor device with element isolation area |
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JP2020155011A JP7476062B2 (ja) | 2020-09-15 | 2020-09-15 | 半導体装置 |
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JP2022048931A JP2022048931A (ja) | 2022-03-28 |
JP7476062B2 true JP7476062B2 (ja) | 2024-04-30 |
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US (2) | US11830916B2 (ja) |
JP (1) | JP7476062B2 (ja) |
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005303137A (ja) | 2004-04-14 | 2005-10-27 | Sumitomo Electric Ind Ltd | 横型半導体デバイスの配線構造 |
JP2012028441A (ja) | 2010-07-21 | 2012-02-09 | Sumitomo Electric Ind Ltd | 半導体装置 |
JP2012099542A (ja) | 2010-10-29 | 2012-05-24 | Panasonic Corp | 半導体装置 |
JP2016063167A (ja) | 2014-09-19 | 2016-04-25 | 株式会社東芝 | 半導体装置 |
WO2017098603A1 (ja) | 2015-12-09 | 2017-06-15 | 三菱電機株式会社 | 窒化物半導体装置 |
WO2019053905A1 (ja) | 2017-09-15 | 2019-03-21 | サンケン電気株式会社 | 半導体装置 |
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---|---|---|---|---|
EP2188842B1 (en) * | 2007-09-12 | 2015-02-18 | Transphorm Inc. | Iii-nitride bidirectional switches |
US20110147796A1 (en) * | 2009-12-17 | 2011-06-23 | Infineon Technologies Austria Ag | Semiconductor device with metal carrier and manufacturing method |
JP5658472B2 (ja) | 2010-03-26 | 2015-01-28 | ルネサスエレクトロニクス株式会社 | 電界効果トランジスタ |
JP2014060358A (ja) * | 2012-09-19 | 2014-04-03 | Toshiba Corp | 半導体装置 |
US9269789B2 (en) * | 2013-03-15 | 2016-02-23 | Semiconductor Components Industries, Llc | Method of forming a high electron mobility semiconductor device and structure therefor |
JP6133191B2 (ja) | 2013-10-18 | 2017-05-24 | 古河電気工業株式会社 | 窒化物半導体装置、ダイオード、および電界効果トランジスタ |
DE102014113467B4 (de) * | 2014-09-18 | 2022-12-15 | Infineon Technologies Austria Ag | Metallisierung eines Feldeffekt-Leistungstransistors |
JP6299665B2 (ja) | 2015-04-30 | 2018-03-28 | 三菱電機株式会社 | 電界効果トランジスタ |
JP6555082B2 (ja) | 2015-10-30 | 2019-08-07 | 富士通株式会社 | 半導体装置 |
JP6400618B2 (ja) * | 2016-03-09 | 2018-10-03 | 株式会社東芝 | 半導体装置 |
FR3059467B1 (fr) * | 2016-11-29 | 2019-05-17 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Transistor a heterojonction a structure verticale |
-
2020
- 2020-09-15 JP JP2020155011A patent/JP7476062B2/ja active Active
-
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Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005303137A (ja) | 2004-04-14 | 2005-10-27 | Sumitomo Electric Ind Ltd | 横型半導体デバイスの配線構造 |
JP2012028441A (ja) | 2010-07-21 | 2012-02-09 | Sumitomo Electric Ind Ltd | 半導体装置 |
JP2012099542A (ja) | 2010-10-29 | 2012-05-24 | Panasonic Corp | 半導体装置 |
JP2016063167A (ja) | 2014-09-19 | 2016-04-25 | 株式会社東芝 | 半導体装置 |
WO2017098603A1 (ja) | 2015-12-09 | 2017-06-15 | 三菱電機株式会社 | 窒化物半導体装置 |
WO2019053905A1 (ja) | 2017-09-15 | 2019-03-21 | サンケン電気株式会社 | 半導体装置 |
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