JP7422479B2 - SiCインゴット及びSiCインゴットの製造方法 - Google Patents
SiCインゴット及びSiCインゴットの製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 239000002344 surface layer Substances 0.000 claims description 56
- 239000013078 crystal Substances 0.000 claims description 50
- 239000002019 doping agent Substances 0.000 claims description 23
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 18
- 238000001816 cooling Methods 0.000 claims description 14
- 229910052757 nitrogen Inorganic materials 0.000 claims description 8
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 83
- 229910010271 silicon carbide Inorganic materials 0.000 description 80
- 239000007789 gas Substances 0.000 description 30
- 238000000034 method Methods 0.000 description 16
- 230000002093 peripheral effect Effects 0.000 description 12
- 239000002994 raw material Substances 0.000 description 12
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 10
- 235000012431 wafers Nutrition 0.000 description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 229910052786 argon Inorganic materials 0.000 description 5
- 230000008602 contraction Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 238000005092 sublimation method Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000004088 simulation Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- -1 for example Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B21/00—Unidirectional solidification of eutectic materials
- C30B21/02—Unidirectional solidification of eutectic materials by normal casting or gradient freezing
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/002—Controlling or regulating
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/02—Epitaxial-layer growth
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/60—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
- C30B29/605—Products containing multiple oriented crystallites, e.g. columnar crystallites
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- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
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- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02378—Silicon carbide
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- H01L21/02365—Forming inorganic semiconducting materials on a substrate
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- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
すなわち、本発明は、上記課題を解決するために、以下の手段を提供する。
α=(Δr1/r1)/(Δr2/r2) ・・・(1)
ここでΔr1はSiCインゴット1の中央部の収縮変位であり、r1はSiCインゴット1の中央部の測定点とSiCインゴット1の中心軸との距離であり、Δr2はSiCインゴット1の外周部の収縮変位であり、r2はSiCインゴット1の外周部の測定点とSiCインゴット1の中心軸との距離である。図7では、中央部の測定点を中心軸から2mmの位置とし、外周部の測定点を中心軸から80mmの位置とした。
直径160mmのSiCインゴットを作製するために、種結晶を準備した。まず種結晶の原子配列面の湾曲量を直交する2方向([1-100]方向と[11-20]方向)で測定した。原子配列面の湾曲量d1は、原子配列面の成長方向における上端と下端との距離である(図4参照)。原子配列面の湾曲量は、X線回折(XRD)により測定した。測定する面は測定する方向に応じて決定され、測定方向[hkil]に対して、測定面は(mh mk mi n)の関係を満たす。
比較例1は、成長時間の最後の5時間において、アルゴンガス中における窒素濃度を変更しなかった点が実施例1と異なる。つまり、コア部の表面には表面層は形成されていない。
3 外周
4 規定円
10 坩堝
11 台座
20 コイル
30 チャンバー
31 ガス導入口
32 ガス排出口
100 製造装置
C 単結晶
C1 表面層
S 種結晶
G 原料
R1、R2 領域
Claims (5)
- コア部と、
前記コア部の成長方向の表面のみに形成され、前記コア部の厚さよりも薄い表面層と、を備え、
前記表面層の線膨張係数は、前記コア部の線膨張係数より小さく、
前記表面層の窒素濃度が前記コア部の窒素濃度よりも高い、SiCインゴット。 - 前記表面層の線膨張係数が、前記コア部の線膨張係数よりも0.1ppm/℃以上小さい、請求項1に記載のSiCインゴット。
- 前記表面層のドーパント濃度が前記コア部のドーパント濃度の1.5倍以上である、請求項1又は2に記載のSiCインゴット。
- 前記表面層の厚みが0.3mm以上である、請求項1~3のいずれか一項に記載のSiCインゴット。
- 種結晶の一面にコア部となる単結晶を成長させる第1工程と、
前記コア部の前記種結晶と反対側の面のみに、前記第1工程より窒素ガスの濃度が高い雰囲気で表面層を成長させ、コア部と、コア部よりも窒素濃度が高く前記コア部の厚さよりも薄い表面層を備えたSiCインゴットを作製する第2工程と、
前記第2工程の後に、作製されたSiCインゴットを冷却する第3工程と、を有する、SiCインゴットの製造方法。
Priority Applications (3)
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JP2017246784A JP7422479B2 (ja) | 2017-12-22 | 2017-12-22 | SiCインゴット及びSiCインゴットの製造方法 |
CN201811539291.6A CN109957840B (zh) | 2017-12-22 | 2018-12-17 | SiC锭及SiC锭的制造方法 |
US16/223,185 US11459669B2 (en) | 2017-12-22 | 2018-12-18 | SiC ingot and method of manufacturing SiC ingot |
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JP2017246784A JP7422479B2 (ja) | 2017-12-22 | 2017-12-22 | SiCインゴット及びSiCインゴットの製造方法 |
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JP2019112258A JP2019112258A (ja) | 2019-07-11 |
JP7422479B2 true JP7422479B2 (ja) | 2024-01-26 |
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JP7132454B1 (ja) * | 2022-05-31 | 2022-09-06 | 昭和電工株式会社 | SiC基板及びSiCエピタキシャルウェハ |
WO2024042591A1 (ja) * | 2022-08-22 | 2024-02-29 | 日本碍子株式会社 | SiC基板及びSiC複合基板 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6780243B1 (en) | 2001-11-01 | 2004-08-24 | Dow Corning Enterprises, Inc. | Method of silicon carbide monocrystalline boule growth |
JP2006248825A (ja) | 2005-03-09 | 2006-09-21 | Denso Corp | 炭化珪素インゴットおよびその製造方法 |
JP2007320814A (ja) | 2006-06-02 | 2007-12-13 | National Institute Of Advanced Industrial & Technology | バルク結晶の成長方法 |
JP2010510946A (ja) | 2006-09-27 | 2010-04-08 | トゥー‐シックス・インコーポレイテッド | 段階的な定期的摂動技術によって成長する低転位密度のSiC単結晶 |
JP2015003850A (ja) | 2013-06-24 | 2015-01-08 | 新日鐵住金株式会社 | 炭化珪素単結晶の製造方法 |
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WO1996020298A1 (de) * | 1994-12-27 | 1996-07-04 | Siemens Aktiengesellschaft | Verfahren zum herstellen von mit bor dotiertem, einkristallinem siliciumcarbid |
JP4673528B2 (ja) | 2001-09-28 | 2011-04-20 | 新日本製鐵株式会社 | 炭化珪素単結晶インゴットおよびその製造方法 |
US9797064B2 (en) * | 2013-02-05 | 2017-10-24 | Dow Corning Corporation | Method for growing a SiC crystal by vapor deposition onto a seed crystal provided on a support shelf which permits thermal expansion |
US9017804B2 (en) * | 2013-02-05 | 2015-04-28 | Dow Corning Corporation | Method to reduce dislocations in SiC crystal growth |
JP5854013B2 (ja) * | 2013-09-13 | 2016-02-09 | トヨタ自動車株式会社 | SiC単結晶の製造方法 |
US9279192B2 (en) * | 2014-07-29 | 2016-03-08 | Dow Corning Corporation | Method for manufacturing SiC wafer fit for integration with power device manufacturing technology |
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- 2017-12-22 JP JP2017246784A patent/JP7422479B2/ja active Active
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- 2018-12-17 CN CN201811539291.6A patent/CN109957840B/zh active Active
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6780243B1 (en) | 2001-11-01 | 2004-08-24 | Dow Corning Enterprises, Inc. | Method of silicon carbide monocrystalline boule growth |
JP2006248825A (ja) | 2005-03-09 | 2006-09-21 | Denso Corp | 炭化珪素インゴットおよびその製造方法 |
JP2007320814A (ja) | 2006-06-02 | 2007-12-13 | National Institute Of Advanced Industrial & Technology | バルク結晶の成長方法 |
JP2010510946A (ja) | 2006-09-27 | 2010-04-08 | トゥー‐シックス・インコーポレイテッド | 段階的な定期的摂動技術によって成長する低転位密度のSiC単結晶 |
JP2015003850A (ja) | 2013-06-24 | 2015-01-08 | 新日鐵住金株式会社 | 炭化珪素単結晶の製造方法 |
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CN109957840A (zh) | 2019-07-02 |
CN109957840B (zh) | 2021-06-25 |
US11459669B2 (en) | 2022-10-04 |
US20190194822A1 (en) | 2019-06-27 |
JP2019112258A (ja) | 2019-07-11 |
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