JP7403314B2 - エッチング方法及びエッチング装置 - Google Patents
エッチング方法及びエッチング装置 Download PDFInfo
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- 238000005530 etching Methods 0.000 title claims description 112
- 238000000034 method Methods 0.000 title claims description 42
- 239000007789 gas Substances 0.000 claims description 165
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 53
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 51
- 239000000758 substrate Substances 0.000 claims description 33
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 26
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 21
- 229910052799 carbon Inorganic materials 0.000 claims description 21
- 230000008569 process Effects 0.000 claims description 21
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 16
- 238000006243 chemical reaction Methods 0.000 claims description 16
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 16
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims description 15
- 239000011737 fluorine Substances 0.000 claims description 15
- 229910052731 fluorine Inorganic materials 0.000 claims description 15
- 229910052757 nitrogen Inorganic materials 0.000 claims description 13
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 claims description 5
- 239000001257 hydrogen Substances 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 2
- 125000001153 fluoro group Chemical group F* 0.000 claims 1
- 125000004433 nitrogen atom Chemical group N* 0.000 claims 1
- QKCGXXHCELUCKW-UHFFFAOYSA-N n-[4-[4-(dinaphthalen-2-ylamino)phenyl]phenyl]-n-naphthalen-2-ylnaphthalen-2-amine Chemical compound C1=CC=CC2=CC(N(C=3C=CC(=CC=3)C=3C=CC(=CC=3)N(C=3C=C4C=CC=CC4=CC=3)C=3C=C4C=CC=CC4=CC=3)C3=CC4=CC=CC=C4C=C3)=CC=C21 QKCGXXHCELUCKW-UHFFFAOYSA-N 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 238000009792 diffusion process Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000004891 communication Methods 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 229910003481 amorphous carbon Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- -1 N2+ ions Chemical class 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
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Description
図1は、本開示の一実施形態におけるプラズマ処理システムの一例を示す図である。図1に示すように、一実施形態において、プラズマ処理システム1は、プラズマ処理装置1a及び制御部1bを含む。プラズマ処理装置1aは、シリコン酸化膜をエッチングするエッチング装置の一例である。プラズマ処理装置1aは、反応チャンバ10、ガス供給部20、Radio Frequency(RF)電力供給部30及び排気システム40を含む。また、プラズマ処理装置1aは、支持部11及び上部電極シャワーヘッド12を含む。支持部11は、反応チャンバ10内のプラズマ処理空間10sの下部領域に配置される。上部電極シャワーヘッド12は、支持部11の上方に配置され、反応チャンバ10の天部(ceiling)の一部として機能し得る。
図2は、本実施形態に係るエッチング装置によってエッチングされる基板の構造の一例を示す図である。
次に、本実施形態に係るエッチング方法について説明する。図3は、本実施形態におけるエッチング処理の一例を示すフローチャートである。
続いて、図5から図9を用いて実験結果について説明する。なお、以下の説明において、温度は、基板Wのプラズマ処理(エッチング)の開始時点の温度を示している。まず、図5及び図6を用いて、各種ガスを添加した場合のエッチングレートの比較について説明する。各種ガスを添加した場合の各実験結果では、総流量を500sccmとし、HFガス450sccmに各種ガスXを50sccm添加し、シリコン酸化膜及びシリコン窒化膜に対して下記の処理条件でエッチングを行った。なお、図5及び図6では、シリコン酸化膜をOxと表記し、シリコン窒化膜をNitと表記している。ここで、各種ガスXは、N2ガス、NF3ガス、SF6ガス及びCF4ガスのうち、いずれか1つのガスである。なお、各種ガスXを添加しない場合には、HFガスの流量を500sccmとしている。また、処理条件において、RF信号の電力の「CW」は連続波を示す。
(エッチング)
反応チャンバ10内の圧力 :25mTorr(3.333Pa)
第1のRF信号の電力(40MHz) :4.4kW(CW)
第2のRF信号の電力(400kHz):7.0kW(CW)
処理時間 :30秒
温度 :-70℃
処理ガス :HF/各種ガスX=450/50sccm
(エッチング)
反応チャンバ10内の圧力 :25mTorr(3.333Pa)
第1のRF信号の電力(40MHz) :4.4kW(CW)
第2のRF信号の電力(400kHz):7.0kW(CW)
処理時間 :30秒
温度 :-70℃
処理ガス(HF/N2)の流量 :200/0sccm(0%)
:190/10sccm(5%)
:180/20sccm(10%)
:150/50sccm(25%)
:100/100sccm(50%)
(エッチング)
反応チャンバ10内の圧力 :25mTorr(3.333Pa)
第1のRF信号の電力(40MHz) :4.4kW(CW)
第2のRF信号の電力(400kHz):7.0kW(CW)
処理時間 :30秒
温度 :-70℃,-40℃,20℃
処理ガス :H2/CF4/N2=150/50/0sccm
:H2/CF4/N2=150/50/20sccm
1a プラズマ処理装置
1b 制御部
10 反応チャンバ
11 支持部
20 ガス供給部
30 RF電力供給部
40 排気システム
102 シリコン酸化膜
103 マスク
W 基板
Claims (10)
- エッチング方法であって、
シリコン酸化膜を含む被エッチング膜と、前記被エッチング膜の上に形成された炭素含有マスクとを有する基板を載置台上に提供する工程と、
前記載置台の温度を0℃以下の温度となるように設定する工程と、
HF及びN2含有ガスを含むガスであって、フッ素、窒素及び炭素を含み、前記窒素の数に対する前記フッ素の数の比率F/Nが0.5~10の範囲である前記ガスからプラズマを生成して、前記炭素含有マスクを介して前記シリコン酸化膜をエッチングする工程と、
を有するエッチング方法。 - エッチング方法であって、
シリコン酸化膜を含む被エッチング膜と、前記被エッチング膜の上に形成されたマスクとを有する基板を載置台上に提供する工程と、
前記基板が-30℃以下の温度となるように、前記載置台の温度を-30℃以下の温度となるように設定する工程と、
フッ素、窒素及び炭素を含み、前記窒素の数に対する前記フッ素の数の比率F/Nが0.5~10の範囲であるガスからプラズマを生成して、前記マスクを介して前記シリコン酸化膜をエッチングする工程と、
を有するエッチング方法。 - 前記ガスは、さらに水素含有ガスを含む、
請求項1又は2に記載のエッチング方法。 - 前記ガスは、炭素含有ガスを含む、
請求項1~3のいずれか1つに記載のエッチング方法。 - 前記ガスは、HF及びN2含有ガスを含む、
請求項2~4のいずれか1つに記載のエッチング方法。 - 前記設定する工程は、前記基板が-30℃以下の温度となるように設定する、
請求項1,3~5のいずれか1つに記載のエッチング方法。 - 前記被エッチング膜は、さらにシリコン窒化膜を含む積層膜である、
請求項1~6のいずれか1つに記載のエッチング方法。 - エッチング方法であって、
シリコン酸化膜を含む被エッチング膜と、前記被エッチング膜の上に形成されたマスクとを有する基板を載置台上に提供する工程と、
前記載置台の温度を0℃以下の温度となるように設定する工程と、
シアン化物含有ガスを含むガスであって、フッ素、窒素及び炭素を含み、前記窒素の数に対する前記フッ素の数の比率F/Nが0.5~10の範囲である前記ガスからプラズマを生成して、前記マスクを介して前記シリコン酸化膜をエッチングする工程と、
を有するエッチング方法。 - 前記エッチングする工程は、前記シリコン酸化膜の最終アスペクト比が5以上となるようにエッチングする、
請求項1~8のいずれか1つに記載のエッチング方法。 - シリコン酸化膜をエッチングする装置であって、
反応チャンバと、
前記反応チャンバ内に設けられた載置台と、
前記反応チャンバ内にプラズマを生成するプラズマ生成部と、
制御部とを有し、
前記制御部は、シリコン酸化膜を含む被エッチング膜と、前記被エッチング膜の上に形成された炭素含有マスクとを有する基板を前記載置台上に提供するよう前記装置を制御するように構成され、
前記制御部は、前記載置台の温度を0℃以下の温度となるように設定するよう前記装置を制御するように構成され、
前記制御部は、HF及びN2含有ガスを含むガスであって、フッ素、窒素及び炭素を含み、前記窒素に対する前記フッ素の比率F/Nが0.5~10の範囲である前記ガスからプラズマを生成して、前記炭素含有マスクを介して前記シリコン酸化膜をエッチングするよう前記装置を制御するように構成される、装置。
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