JP7402112B2 - 圧電性単結晶膜を備えた複合基板の製造方法 - Google Patents
圧電性単結晶膜を備えた複合基板の製造方法 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims description 267
- 239000013078 crystal Substances 0.000 title claims description 110
- 239000002131 composite material Substances 0.000 title claims description 63
- 238000000034 method Methods 0.000 title claims description 50
- 238000004519 manufacturing process Methods 0.000 title claims description 18
- 238000005468 ion implantation Methods 0.000 claims description 69
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 23
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 21
- 150000002500 ions Chemical class 0.000 claims description 21
- 229910052710 silicon Inorganic materials 0.000 claims description 21
- 239000010703 silicon Substances 0.000 claims description 21
- -1 hydrogen atom ions Chemical class 0.000 claims description 20
- 125000004429 atom Chemical group 0.000 claims description 17
- 229910052594 sapphire Inorganic materials 0.000 claims description 14
- 239000010980 sapphire Substances 0.000 claims description 14
- 238000010438 heat treatment Methods 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 10
- 239000001257 hydrogen Substances 0.000 claims description 8
- 229910052739 hydrogen Inorganic materials 0.000 claims description 8
- 238000002347 injection Methods 0.000 claims description 7
- 239000007924 injection Substances 0.000 claims description 7
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 3
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 229910052596 spinel Inorganic materials 0.000 claims description 3
- 239000011029 spinel Substances 0.000 claims description 3
- 239000010408 film Substances 0.000 description 83
- 239000010410 layer Substances 0.000 description 69
- 238000000926 separation method Methods 0.000 description 19
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 12
- 230000007423 decrease Effects 0.000 description 11
- 238000005498 polishing Methods 0.000 description 11
- 238000001069 Raman spectroscopy Methods 0.000 description 9
- 238000010897 surface acoustic wave method Methods 0.000 description 9
- 239000002344 surface layer Substances 0.000 description 8
- 230000004913 activation Effects 0.000 description 6
- 238000007654 immersion Methods 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 230000003746 surface roughness Effects 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 5
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- 239000000126 substance Substances 0.000 description 4
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- 238000003917 TEM image Methods 0.000 description 3
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- 230000002336 repolarization Effects 0.000 description 3
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
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- 238000010884 ion-beam technique Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- CFJYNSNXFXLKNS-UHFFFAOYSA-N p-menthane Chemical compound CC(C)C1CCC(C)CC1 CFJYNSNXFXLKNS-UHFFFAOYSA-N 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- GNLJOAHHAPACCT-UHFFFAOYSA-N 4-diethoxyphosphorylmorpholine Chemical compound CCOP(=O)(OCC)N1CCOCC1 GNLJOAHHAPACCT-UHFFFAOYSA-N 0.000 description 1
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 1
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- 238000003841 Raman measurement Methods 0.000 description 1
- 239000003522 acrylic cement Substances 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Natural products N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 238000003776 cleavage reaction Methods 0.000 description 1
- 239000008119 colloidal silica Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
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- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- 229930004008 p-menthane Natural products 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000002798 polar solvent Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000007017 scission Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
- H03H3/10—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves for obtaining desired frequency or temperature coefficient
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/072—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8542—Alkali metal based oxides, e.g. lithium, sodium or potassium niobates
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
- H03H2003/0414—Resonance frequency
- H03H2003/0421—Modification of the thickness of an element
- H03H2003/0442—Modification of the thickness of an element of a non-piezoelectric layer
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Ceramic Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Description
Li/(Li+Ta)=(53.15-0.5FWHM1)/100 (数式1)
ここで、「FWHM1」は、600cm-1付近のラマンシフトピークの半値幅である。測定条件の詳細については上記文献を参照されたい。
圧電性単結晶基板として、400μmの厚みを有する片面鏡面の42°回転YカットのLiTaO3基板(コングルーエント組成:Li量48.5%)と、仮接合基板として、400μmの厚みを有する片側鏡面の単結晶シリコン基板と、支持基板として、400μmの厚みを有する片側鏡面のサファイア基板とを用意した。これら3つの基板の鏡面側の表面粗さがRMSで1.0nm以下である事を確認した。その後、LT基板の鏡面側に、水素イオン(H+)をドーズ量1×1017atoms/cm2、加速電圧160KeVの条件にてイオン注入処理を施し、イオン注入層を形成した。
単結晶シリコン基板の鏡面側にも、水素イオン(H+)をドーズ量1.25×1017atoms/cm2、加速電圧130KeVの条件にてイオン注入処理を施したことを除いて、実施例1と同様にして、LT基板と単結晶シリコン基板を準備し、イオン注入処理を施し、LT基板とシリコン基板を常温接合法により接合し、接合基板を得た。そして、この接合基板を実施例1と同様に加熱して、LT基板のイオン注入層を単結晶シリコン基板側に残してLT基板の残りの部分を接合基板から剥離することで、単結晶シリコン基板上に900nm厚の薄化したLT膜が残ったLTonシリコンの第一の複合体を作製した。
実施例1と同様のLT基板とシリコン基板を準備し、LT基板の鏡面側に、水素イオン(H+)をドーズ量1×1017atoms/cm2、加速電圧160KeVの条件にてイオン注入処理を施すとともに、LT基板とシリコン基板を常温接合法により接合し、この接合基板を120℃に加熱し、LT基板をイオン注入層に沿って分離することでシリコン基板上に900nm厚の薄化したLT膜が残ったLTonシリコンの複合基板を作製した。
11 イオン注入層
11a 表層部
11b 深層部
2 仮接合基板
3 支持基板
4 第一の複合体
5 第二の複合体
10 複合基板
20 複合基板(比較例)
21 LT膜
21a 表層部
21b 深層部
22 分離界面
23 支持基板
Claims (5)
- 圧電性単結晶膜を備えた複合基板の製造方法であって、
タンタル酸リチウムまたはニオブ酸リチウムからなる圧電性単結晶基板の一方の面に対してイオン注入処理を行い、前記圧電性単結晶基板の内部にイオン注入層を形成する工程であって、前記イオン注入処理のイオン種が水素原子イオン(H+)および水素分子イオン(H2 +)の少なくとも一方を含み、イオン注入量が水素原子イオン(H+)換算で1.0×1016atoms/cm2以上、3.0×1017atoms/cm2以下である工程と、
単結晶シリコン基板である仮接合基板の前記圧電性単結晶基板との接合面に対してイオン注入処理を行い、前記仮接合基板の内部にイオン注入層を形成する工程と、
前記圧電性単結晶基板の前記イオン注入層が形成された面と前記仮接合基板の前記イオン注入処理をした接合面とを接合する工程と、
前記圧電性単結晶基板を前記イオン注入層とその残りの部分とに分離し、前記仮接合基板上に2μm以下の厚みを有する圧電性単結晶膜を形成する工程と、
前記圧電性単結晶膜の前記仮接合基板の接合面と対向する面に、支持基板を接合する工程と、
前記仮接合基板の一部を前記圧電性単結晶膜から分離する工程であって、前記仮接合基板を前記仮接合基板のイオン注入層とその残りの部分とに分離することによって行われ、前記圧電性単結晶膜上に2μm以下の厚みを有する単結晶シリコン膜を形成する工程と
を含む、圧電性単結晶膜を備えた複合基板の製造方法。 - 前記仮接合基板へのイオン注入処理は、イオン種が水素原子イオン(H+)および水素分子イオン(H2 +)の少なくとも一方を含み、イオン注入量が水素原子イオン(H+)換算で1.0×1016atoms/cm2以上、2.0×1017atoms/cm2以下であり、前記仮接合基板へのイオン注入量は、前記圧電性単結晶基板へのイオン注入量よりも少なくする請求項1に記載の圧電性単結晶膜を備えた複合基板の製造方法。
- 前記仮接合基板を前記仮接合基板のイオン注入層とその残りの部分とに分離することが、熱処理、機械的衝撃、ジェット噴射、超音波振動および光照射からなる群から選択される少なくとも1つにより行われる請求項1又は2に記載の圧電性単結晶膜を備えた複合基板の製造方法。
- 前記支持基板の材質が、ガラス、シリコン、石英、サファイア、スピネル、炭化ケイ素、窒化ケイ素および窒化アルミニウムからなる群から選ばれる請求項1~3のいずれか一項に記載の圧電性単結晶膜を備えた複合基板の製造方法。
- 前記圧電性単結晶基板のイオン注入層とその残りの部分とに分離することが、熱処理、機械的衝撃、ジェット噴射、超音波振動および光照射からなる群から選択される少なくとも1つにより行われる請求項1~4のいずれか一項に記載の圧電性単結晶膜を備えた複合基板の製造方法。
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JP2020082667A JP7402112B2 (ja) | 2020-05-08 | 2020-05-08 | 圧電性単結晶膜を備えた複合基板の製造方法 |
CN202180033640.0A CN115516760A (zh) | 2020-05-08 | 2021-04-28 | 设置有压电单晶膜的复合基底的制造方法 |
US17/998,171 US20230216463A1 (en) | 2020-05-08 | 2021-04-28 | Method for manufacturing composite substrate provided with piezoelectric single crystal film |
PCT/JP2021/016937 WO2021225102A1 (ja) | 2020-05-08 | 2021-04-28 | 圧電性単結晶膜を備えた複合基板の製造方法 |
EP21800359.8A EP4148995A4 (en) | 2020-05-08 | 2021-04-28 | METHOD FOR PRODUCING A COMPOSITE SUBSTRATE WITH A PIEZOELECTRIC SINGLE CRYSTAL LAYER |
KR1020227038131A KR20230007356A (ko) | 2020-05-08 | 2021-04-28 | 압전성 단결정막을 구비한 복합 기판의 제조 방법 |
TW110116338A TW202213942A (zh) | 2020-05-08 | 2021-05-06 | 具備壓電性單結晶膜之複合基板的製造方法 |
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