JP7390389B2 - Sawモジュールを備えた香味吸引器具およびsawモジュールを備えた香味吸引器具の製造方法 - Google Patents
Sawモジュールを備えた香味吸引器具およびsawモジュールを備えた香味吸引器具の製造方法 Download PDFInfo
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- JP7390389B2 JP7390389B2 JP2021550434A JP2021550434A JP7390389B2 JP 7390389 B2 JP7390389 B2 JP 7390389B2 JP 2021550434 A JP2021550434 A JP 2021550434A JP 2021550434 A JP2021550434 A JP 2021550434A JP 7390389 B2 JP7390389 B2 JP 7390389B2
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- 239000000796 flavoring agent Substances 0.000 title claims description 26
- 235000019634 flavors Nutrition 0.000 title claims description 26
- 238000000034 method Methods 0.000 title claims description 19
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 239000000758 substrate Substances 0.000 claims description 147
- 239000011247 coating layer Substances 0.000 claims description 110
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- 235000012239 silicon dioxide Nutrition 0.000 claims description 5
- 238000005229 chemical vapour deposition Methods 0.000 claims description 4
- 239000000377 silicon dioxide Substances 0.000 claims description 4
- 238000005507 spraying Methods 0.000 claims description 4
- 238000011282 treatment Methods 0.000 claims description 4
- 238000005520 cutting process Methods 0.000 claims description 3
- 229910052681 coesite Inorganic materials 0.000 claims description 2
- 229910052906 cristobalite Inorganic materials 0.000 claims description 2
- 229910052682 stishovite Inorganic materials 0.000 claims description 2
- 229910052905 tridymite Inorganic materials 0.000 claims description 2
- 238000010897 surface acoustic wave method Methods 0.000 description 67
- 239000007788 liquid Substances 0.000 description 30
- 238000010586 diagram Methods 0.000 description 14
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- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 2
- 238000000889 atomisation Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- RTCWKUOBAKIBGZ-UHFFFAOYSA-N N-[ethyl(methyl)amino]silyl-N-methylethanamine Chemical compound CCN(C)[SiH2]N(C)CC RTCWKUOBAKIBGZ-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 229920000052 poly(p-xylylene) Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
- B06B1/0662—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface
-
- A—HUMAN NECESSITIES
- A24—TOBACCO; CIGARS; CIGARETTES; SIMULATED SMOKING DEVICES; SMOKERS' REQUISITES
- A24F—SMOKERS' REQUISITES; MATCH BOXES; SIMULATED SMOKING DEVICES
- A24F40/00—Electrically operated smoking devices; Component parts thereof; Manufacture thereof; Maintenance or testing thereof; Charging means specially adapted therefor
- A24F40/05—Devices without heating means
-
- A—HUMAN NECESSITIES
- A24—TOBACCO; CIGARS; CIGARETTES; SIMULATED SMOKING DEVICES; SMOKERS' REQUISITES
- A24F—SMOKERS' REQUISITES; MATCH BOXES; SIMULATED SMOKING DEVICES
- A24F40/00—Electrically operated smoking devices; Component parts thereof; Manufacture thereof; Maintenance or testing thereof; Charging means specially adapted therefor
- A24F40/70—Manufacture
-
- A—HUMAN NECESSITIES
- A24—TOBACCO; CIGARS; CIGARETTES; SIMULATED SMOKING DEVICES; SMOKERS' REQUISITES
- A24F—SMOKERS' REQUISITES; MATCH BOXES; SIMULATED SMOKING DEVICES
- A24F47/00—Smokers' requisites not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
- B05B15/14—Arrangements for preventing or controlling structural damage to spraying apparatus or its outlets, e.g. for breaking at desired places; Arrangements for handling or replacing damaged parts
- B05B15/18—Arrangements for preventing or controlling structural damage to spraying apparatus or its outlets, e.g. for breaking at desired places; Arrangements for handling or replacing damaged parts for improving resistance to wear, e.g. inserts or coatings; for indicating wear; for handling or replacing worn parts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
- B05B17/0653—Details
- B05B17/0661—Transducer materials
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/25—Constructional features of resonators using surface acoustic waves
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/02—Forming enclosures or casings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
- H10N30/883—Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings
-
- A—HUMAN NECESSITIES
- A24—TOBACCO; CIGARS; CIGARETTES; SIMULATED SMOKING DEVICES; SMOKERS' REQUISITES
- A24F—SMOKERS' REQUISITES; MATCH BOXES; SIMULATED SMOKING DEVICES
- A24F40/00—Electrically operated smoking devices; Component parts thereof; Manufacture thereof; Maintenance or testing thereof; Charging means specially adapted therefor
- A24F40/10—Devices using liquid inhalable precursors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
- B05B17/0653—Details
- B05B17/0676—Feeding means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
- B06B2201/70—Specific application
- B06B2201/77—Atomizers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Description
背景技術で説明したように、IDTの表面に絶縁性のコーティング層を形成する技術が提案されている。しかしながら、圧電素子基板の端面で液体を霧化させる場合には、SAWの振動によりIDTの表面に形成したコーティング層が剥離することがある。また、圧電素子基板の表面にマイクロクラックが入っている場合には、SAWの振動により圧電素子基板にクラックを生じることがある。そのため、SAWモジュールの耐久性についてさらなる改善が望まれている。
(SAWモジュール)
以下において、実施形態に係るSAWモジュールについて説明する。図1は、実施形態に係るSAWモジュール30を示す図である。図2は、SAWモジュール30を圧電素子基板31の表面側から見た平面視を示す図である。図3は、SAWモジュール30の断面を示す図である。SAWモジュール30は、例えば図示しない香味吸引器具に用いられ、例えば図示しない液貯蔵部から供給される、霧化すべき液体を霧化する。
以下において、実施形態に係るSAWモジュールの製造方法について説明する。まず、圧電体を含む圧電素子基板31のウエハの表面に、櫛形電極対33によって構成されるIDTを複数形成する。続いて、IDTが形成されたウエハをSAWモジュール30のモジュール単位に切断する。
30…SAWモジュール
31…圧電素子基板
32…本体部分
33…櫛形電極対
34…コーティング層
35…放熱機構
31B…裏面
31C…角部
31E…端面
31F…表面
Claims (8)
- SAWモジュールを備えた香味吸引器具であって、
前記SAWモジュールは、
圧電体を含む圧電素子基板と、
前記圧電素子基板の表面上に設けられ、櫛形電極対によって構成されるIDTと、
前記圧電素子基板および前記IDTを被覆するコーティング層と、を備え、
前記コーティング層は、前記圧電素子基板の表面、前記圧電素子基板の端面、および前記圧電素子基板の表面と前記圧電素子基板の端面との間の角部に設けられている
香味吸引器具。 - 請求項1に記載の香味吸引器具であって、
前記コーティング層は、前記圧電素子基板の表面において、600nm~1400nmの厚みを有する
香味吸引器具。 - 請求項1または請求項2に記載の香味吸引器具であって、
前記コーティング層は、前記圧電素子基板の端面において、600nm以上であって、かつ前記圧電素子基板の表面における前記コーティング層の厚みの50%以上の厚みを有する
香味吸引器具。 - 請求項1から請求項3までのいずれか1項に記載の香味吸引器具であって、
前記コーティング層は、前記圧電素子基板の表面と前記圧電素子基板の端面との間の角部において、600nm以上であって、かつ前記圧電素子基板の表面における前記コーティング層の厚みの50%以上の厚みを有する
香味吸引器具。 - 請求項1から請求項4までのいずれか1項に記載の香味吸引器具であって、
前記コーティング層は、SiO2およびSiNのいずれかを含む
香味吸引器具。 - SAWモジュールを備えた香味吸引器具の製造方法であって、
圧電体を含む圧電素子基板のウエハの表面に、櫛形電極対によって構成されるIDTを複数形成する工程と、
前記ウエハをモジュール単位に切断する工程と、
切断された前記圧電素子基板および前記IDTを被覆するコーティング層を形成する工程と、を有し、
前記コーティング層を形成する工程では、前記圧電素子基板の表面、前記圧電素子基板の端面、および前記圧電素子基板の表面と前記圧電素子基板の端面との間の角部に前記コーティング層を形成する
SAWモジュールを備えた香味吸引器具の製造方法。 - 請求項6に記載のSAWモジュールを備えた香味吸引器具の製造方法であって、
前記コーティング層を形成する工程では、CVD法、ALD法およびスプレーコーティングのいずれかにより前記コーティング層を形成する
SAWモジュールを備えた香味吸引器具の製造方法。 - 請求項6または請求項7に記載のSAWモジュールを備えた香味吸引器具の製造方法であって、
前記コーティング層に親水性を高める処理を行う工程をさらに有する
SAWモジュールを備えた香味吸引器具の製造方法。
Applications Claiming Priority (3)
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JP2019185128 | 2019-10-08 | ||
JP2019185128 | 2019-10-08 | ||
PCT/JP2020/032308 WO2021070501A1 (ja) | 2019-10-08 | 2020-08-27 | Sawモジュール、香味吸引器具およびsawモジュールの製造方法 |
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JPWO2021070501A1 JPWO2021070501A1 (ja) | 2021-04-15 |
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US (1) | US20220212231A1 (ja) |
EP (1) | EP4043108A4 (ja) |
JP (1) | JP7390389B2 (ja) |
CN (1) | CN114556781A (ja) |
TW (1) | TW202116418A (ja) |
WO (1) | WO2021070501A1 (ja) |
Citations (3)
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JP2003087094A (ja) | 2001-07-02 | 2003-03-20 | Toshiba Corp | 弾性表面波装置及びその製造方法 |
JP2008073570A (ja) | 2006-09-19 | 2008-04-03 | Seiko Epson Corp | 霧化器、吸引装置 |
WO2012063374A1 (ja) | 2010-11-11 | 2012-05-18 | 株式会社セラフト | 霧化デバイス |
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KR0126909B1 (ko) * | 1991-01-11 | 1998-10-01 | 무라따 야스따가 | 표면파 장치 |
JPH11114467A (ja) | 1997-10-13 | 1999-04-27 | Sharp Corp | 霧化装置及び霧化装置の駆動方法並びに霧化方法 |
JP2012024646A (ja) | 2010-07-20 | 2012-02-09 | Murata Mfg Co Ltd | 液体霧化装置 |
AU2013201383B2 (en) | 2013-03-01 | 2015-07-02 | Royal Melbourne Institute Of Technology | Atomisation apparatus using surface acoustic wave generaton |
GB2548071B (en) * | 2015-12-18 | 2018-05-02 | Thermo Fisher Scient Bremen Gmbh | Liquid sample introduction system and method, for analytical plasma spectrometer |
JP6465363B2 (ja) * | 2016-01-07 | 2019-02-06 | 太陽誘電株式会社 | 弾性波デバイスおよびその製造方法 |
US11717845B2 (en) | 2016-03-30 | 2023-08-08 | Altria Client Services Llc | Vaping device and method for aerosol-generation |
JP7037333B2 (ja) * | 2017-11-13 | 2022-03-16 | 太陽誘電株式会社 | 弾性波デバイスおよびその製造方法、フィルタ並びにマルチプレクサ |
WO2019198162A1 (ja) * | 2018-04-10 | 2019-10-17 | 日本たばこ産業株式会社 | 霧化ユニット |
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2020
- 2020-08-27 WO PCT/JP2020/032308 patent/WO2021070501A1/ja unknown
- 2020-08-27 EP EP20874221.3A patent/EP4043108A4/en active Pending
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JP2003087094A (ja) | 2001-07-02 | 2003-03-20 | Toshiba Corp | 弾性表面波装置及びその製造方法 |
JP2008073570A (ja) | 2006-09-19 | 2008-04-03 | Seiko Epson Corp | 霧化器、吸引装置 |
WO2012063374A1 (ja) | 2010-11-11 | 2012-05-18 | 株式会社セラフト | 霧化デバイス |
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