JP7382244B2 - 膜電極構造体の検査方法 - Google Patents
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- 239000012528 membrane Substances 0.000 title claims description 110
- 238000000034 method Methods 0.000 title claims description 25
- 238000007689 inspection Methods 0.000 title claims description 4
- 239000003054 catalyst Substances 0.000 claims description 105
- 239000002184 metal Substances 0.000 claims description 67
- 229910052751 metal Inorganic materials 0.000 claims description 67
- 239000003792 electrolyte Substances 0.000 claims description 54
- 238000009792 diffusion process Methods 0.000 claims description 48
- 238000001514 detection method Methods 0.000 claims description 28
- 238000004519 manufacturing process Methods 0.000 claims description 16
- 230000002950 deficient Effects 0.000 claims description 11
- 239000000126 substance Substances 0.000 claims description 9
- 239000000463 material Substances 0.000 description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- 229910052799 carbon Inorganic materials 0.000 description 7
- 238000000576 coating method Methods 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000003575 carbonaceous material Substances 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- UQSQSQZYBQSBJZ-UHFFFAOYSA-N fluorosulfonic acid Chemical compound OS(F)(=O)=O UQSQSQZYBQSBJZ-UHFFFAOYSA-N 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
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- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
- H01M4/88—Processes of manufacture
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- H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
- H01M4/90—Selection of catalytic material
- H01M4/92—Metals of platinum group
- H01M4/925—Metals of platinum group supported on carriers, e.g. powder carriers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
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Description
電解質膜を、第1電極触媒層と第1ガス拡散層を有する第1電極層と、第2電極触媒層と第2ガス拡散層を有する第2電極層で挟むことで構成される膜電極構造体を検査する膜電極構造体の検査方法であって、
前記第1電極触媒層及び前記第2電極触媒層、又は前記電解質膜と、金属異物との元素を検出可能な検出媒体を、前記第1電極層側から前記第2電極層側に向かう厚み方向に沿って焦点を移動させるように発信し、検出信号の厚み方向のプロファイルを得る第1工程と、
前記厚み方向プロファイルにおける前記検出信号の強度から解析手段により前記金属異物の厚さ方向の位置を特定するとともに、前記厚み方向プロファイルにおける前記検出信号の強度から前記解析手段により前記第1電極触媒層及び前記第2電極触媒層、又は前記電解質膜の厚さ方向の位置を特定する第2工程と、
前記第2工程で特定された前記金属異物の厚さ方向の位置と、前記第1電極触媒層及び前記第2電極触媒層、又は前記電解質膜の厚さ方向の位置とを比較し、前記金属異物が前記第1電極触媒層及び前記第2電極触媒層、又は前記電解質膜から厚さ方向に所定値以上離隔していない場合には、欠陥品と判定する第3工程と、
を備え、
前記所定値は、前記金属異物が前記第1ガス拡散層又は前記第2ガス拡散層に存在する場合に前記欠陥品と判定しないような値に設定されることを特徴とする。
前記第2工程で特定された前記金属異物の厚さ方向の位置と、前記第1電極触媒層及び前記第2電極触媒層、又は前記電解質膜の厚さ方向の位置とを比較し、前記金属異物が前記第1電極触媒層及び前記第2電極触媒層、又は前記電解質膜から厚さ方向に所定値以上離隔している場合には、良品と判定する第3工程と、
を備える。
前記所定値は、前記金属異物が前記第1ガス拡散層又は前記第2ガス拡散層に存在する場合の値に設定される。
前記第1工程の前に、前記膜電極構造体の表面を走査し、前記金属異物の存在の有無を検出する走査工程を備え、
前記走査工程で前記金属異物が検出された場所で、前記第1工程及び前記第2工程を行うことが好ましい。
10 第1電極層
11 第1ガス拡散層
12 第1電極触媒層
20 第2電極層
21 第2ガス拡散層
22 第2電極触媒層
30 電解質膜
40 金属異物
50 X線照射装置
60 透過像検出器
70 蛍光X線検出器
F1 第1焦点
F2 第2焦点
F3 第3焦点
Claims (3)
- 電解質膜を、第1電極触媒層と第1ガス拡散層を有する第1電極層と、第2電極触媒層と第2ガス拡散層を有する第2電極層で挟むことで構成される膜電極構造体を検査する膜電極構造体の検査方法であって、
前記第1電極触媒層及び前記第2電極触媒層、又は前記電解質膜と、金属異物との元素を検出可能な検出媒体を、前記第1電極層側から前記第2電極層側に向かう厚み方向に沿って焦点を移動させるように発信し、検出信号の厚み方向のプロファイルを得る第1工程と、
前記厚み方向プロファイルにおける前記検出信号の強度から解析手段により前記金属異物の厚さ方向の位置を特定するとともに、前記厚み方向プロファイルにおける前記検出信号の強度から前記解析手段により前記第1電極触媒層及び前記第2電極触媒層、又は前記電解質膜の厚さ方向の位置を特定する第2工程と、
前記第2工程で特定された前記金属異物の厚さ方向の位置と、前記第1電極触媒層及び前記第2電極触媒層、又は前記電解質膜の厚さ方向の位置とを比較し、前記金属異物が前記第1電極触媒層及び前記第2電極触媒層、又は前記電解質膜から厚さ方向に所定値以上離隔していない場合には、欠陥品と判定する第3工程と、
を備え、
前記所定値は、前記金属異物が前記第1ガス拡散層又は前記第2ガス拡散層に存在する場合に前記欠陥品と判定しないような値に設定されることを特徴とする膜電極構造体の検査方法。 - 請求項1に記載の膜電極構造体の検査方法であって、
前記第1工程の前に、前記膜電極構造体の表面を走査し、前記金属異物の存在の有無を検出する走査工程を備え、
前記走査工程で前記金属異物が検出された場所で、前記第1工程及び前記第2工程を行うことを特徴とする膜電極構造体の検査方法。 - 請求項1または請求項2に記載の膜電極構造体の検査方法であって、
前記第2工程で特定された前記金属異物の厚さ方向の位置と、前記第1電極触媒層及び前記第2電極触媒層、又は前記電解質膜の厚さ方向の位置とを比較し、前記金属異物が前記第1電極触媒層及び前記第2電極触媒層、又は前記電解質膜、又は前記膜電極構造体の製造工程のうち、いずれの製造工程で混入したかを特定する第4工程と、を備えることを特徴とする膜電極構造体の検査方法。
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JP2020017230A JP7382244B2 (ja) | 2020-02-04 | 2020-02-04 | 膜電極構造体の検査方法 |
CN202110108656.5A CN113218344B (zh) | 2020-02-04 | 2021-01-27 | 膜电极构造体的检查方法 |
US17/163,950 US11421985B2 (en) | 2020-02-04 | 2021-02-01 | Method for inspecting membrane electrode structure |
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JP2014196925A (ja) | 2013-03-29 | 2014-10-16 | 株式会社島津製作所 | 蛍光x線分析装置及びそれに用いられる深さ方向分析方法 |
JP2019066246A (ja) | 2017-09-29 | 2019-04-25 | 本田技研工業株式会社 | 電解質膜の膜厚測定方法及びその装置 |
WO2019082596A1 (ja) | 2017-10-23 | 2019-05-02 | 東レ株式会社 | 樹脂成形品の検査方法および製造方法、樹脂成形品の検査装置および製造装置 |
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JPH085354A (ja) * | 1994-06-14 | 1996-01-12 | Murata Mfg Co Ltd | セラミック電子部品の測定方法 |
JPH10232113A (ja) * | 1997-02-20 | 1998-09-02 | Hitachi Electron Eng Co Ltd | 液晶セルの電極間ギャップ測定方法 |
CN100356135C (zh) * | 2004-08-31 | 2007-12-19 | 精碟科技股份有限公司 | 薄膜厚度量测装置 |
JP5489477B2 (ja) * | 2009-01-22 | 2014-05-14 | 日本ゴア株式会社 | 蛍光x線分析(xrf)を用いた積層体の表裏を判別する方法 |
JP7106323B2 (ja) * | 2018-03-29 | 2022-07-26 | 住友化学株式会社 | 異物検査装置および異物検査方法 |
JP2019174410A (ja) * | 2018-03-29 | 2019-10-10 | 住友化学株式会社 | 画像処理装置、異物検査装置及び画像処理方法 |
CN110345889A (zh) * | 2019-08-30 | 2019-10-18 | 郑州大学 | 一种利用能谱分析无损检测试样膜厚的方法 |
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JP2014196925A (ja) | 2013-03-29 | 2014-10-16 | 株式会社島津製作所 | 蛍光x線分析装置及びそれに用いられる深さ方向分析方法 |
JP2019066246A (ja) | 2017-09-29 | 2019-04-25 | 本田技研工業株式会社 | 電解質膜の膜厚測定方法及びその装置 |
WO2019082596A1 (ja) | 2017-10-23 | 2019-05-02 | 東レ株式会社 | 樹脂成形品の検査方法および製造方法、樹脂成形品の検査装置および製造装置 |
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JP2021125342A (ja) | 2021-08-30 |
CN113218344A (zh) | 2021-08-06 |
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