JP7374026B2 - 基板処理装置及び基板処理装置の製造方法 - Google Patents
基板処理装置及び基板処理装置の製造方法 Download PDFInfo
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Description
基板が載置される載置台と、ターゲットを保持するターゲットホルダとを内部に備えている処理容器と、
前記載置台の下面との間に隙間を備えて配設され、冷凍機と前記冷凍機に積層される冷凍熱媒体とを備えている冷凍装置と、
前記冷凍装置を昇降させる第一昇降装置と、
前記冷凍装置の内部に設けられ、前記隙間に冷媒を供給する冷媒流路と、
前記冷媒流路に供給される冷媒を圧縮する圧縮装置と、
前記冷凍装置における前記冷媒流路の流路口である第一接続固定部と、前記圧縮装置に流体連通する第二接続固定部との双方に接続固定される冷媒移送管と、を有し、
前記冷媒移送管は、前記第一接続固定部と前記第二接続固定部との間において、少なくとも一部が湾曲した状態で延設しており、
前記第二接続固定部において、前記冷媒移送管がサポート部材の上に載置されている。
図1及び図2を参照して、本開示の実施形態に係る基板処理装置とその製造方法の一例について説明する。ここで、図1は、実施形態に係る基板処理装置の一例を示す縦断面図であり、図2は、基板処理装置を構成する制御装置のハードウェア構成の一例を、周辺機器とともに示す図である。
11:ターゲットホルダ
20:載置台
30:冷凍装置
31:冷凍機
35:冷凍熱媒体
51:冷媒供給流路(冷媒流路)
77:第一昇降装置
91,92:第一接続固定部
100:冷媒移送管(第一冷媒移送管)
110:冷媒移送管(第二冷媒移送管)
121,122:第二接続固定部
131,132:サポート部材
140:圧縮装置
200:基板処理装置
W:基板
T:ターゲット
G:隙間
Claims (8)
- 基板が載置される載置台と、ターゲットを保持するターゲットホルダとを内部に備えている処理容器と、
前記載置台の下面との間に隙間を備えて配設され、冷凍機と前記冷凍機に積層される冷凍熱媒体とを備えている冷凍装置と、
前記冷凍装置を昇降させる第一昇降装置と、
前記冷凍装置の内部に設けられ、前記隙間に冷媒を供給する冷媒流路と、
前記冷媒流路に供給される冷媒を圧縮する圧縮装置と、
前記冷凍装置における前記冷媒流路の流路口である第一接続固定部と、前記圧縮装置に流体連通する第二接続固定部との双方に接続固定される冷媒移送管と、を有し、
前記冷媒移送管は、前記第一接続固定部と前記第二接続固定部との間において、少なくとも一部が湾曲した状態で延設しており、
前記第二接続固定部において、前記冷媒移送管がサポート部材の上に載置されており、
少なくとも、前記冷媒移送管と前記第二接続固定部と前記サポート部材が、筐体の内部に収容されている、基板処理装置。 - 前記第一昇降装置が前記冷凍装置と前記載置台をともに昇降させる、請求項1に記載の基板処理装置。
- 前記載置台を昇降させる第二昇降装置と、制御装置とをさらに有し、
前記制御装置は、前記第一昇降装置と前記第二昇降装置の同期制御を実行して、前記ターゲットと前記載置台の間の距離を調整する、請求項1に記載の基板処理装置。 - 前記圧縮装置と前記第二接続固定部の間に第三接続固定部があり、
前記圧縮装置と前記第三接続固定部が流体連通し、前記第三接続固定部と前記第二接続固定部が流体連通している、請求項1乃至3のいずれか一項に記載の基板処理装置。 - 前記冷媒移送管が、前記第一接続固定部に接続固定される第一ハード管と、前記第二接続固定部に接続固定される第一フレキ管とを有し、前記第一フレキ管が湾曲した状態で延設している、請求項1乃至4のいずれか一項に記載の基板処理装置。
- 前記第一ハード管と前記第一フレキ管の間に、鉛直方向に延設する第二フレキ管とU型の第二ハード管とを有し、
前記第一ハード管に前記第二フレキ管の一端が接続され、前記第二フレキ管の他端に前記第二ハード管の一端が接続され、前記第二ハード管の他端に前記第一フレキ管の一端が固定されている、請求項5に記載の基板処理装置。 - 前記冷媒流路は、前記冷媒を前記隙間に供給する供給流路と、前記載置台の冷却により昇温した前記冷媒を前記隙間から排出する排出流路と、を備え、
前記冷媒移送管は、前記供給流路に前記冷媒を供給する第一冷媒移送路と、前記排出流路から前記冷媒を排出する第二冷媒移送路と、を備え、
前記第一冷媒移送路と前記第二冷媒移送路が、それぞれに固有の前記サポート部材の上に載置されている、請求項1乃至6のいずれか一項に記載の基板処理装置。 - 基板が載置される載置台と、ターゲットを保持するターゲットホルダとを内部に備えている処理容器と、
前記載置台の下面との間に隙間を備えて配設され、冷凍機と前記冷凍機に積層される冷凍熱媒体とを備えている冷凍装置と、
前記冷凍装置を昇降させる第一昇降装置と、
前記冷凍装置の内部に設けられ、前記隙間に冷媒を供給する冷媒流路と、
前記冷媒流路に供給される冷媒を圧縮する圧縮装置と、
前記冷凍装置における前記冷媒流路の流路口である第一接続固定部と、前記圧縮装置に流体連通する第二接続固定部との双方に接続固定される冷媒移送管と、を有する、基板処理装置の製造方法であって、
前記冷媒移送管を、前記第一接続固定部と前記第二接続固定部との間において、少なくとも一部が湾曲した状態で延設し、前記第二接続固定部において、前記冷媒移送管をサポート部材の上に載置し、少なくとも、前記冷媒移送管と前記第二接続固定部と前記サポート部材を、筐体の内部に収容する工程を有する、基板処理装置の製造方法。
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