JP7362756B2 - リソグラフィを用いた三次元部品の積層造形方法 - Google Patents
リソグラフィを用いた三次元部品の積層造形方法 Download PDFInfo
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- JP7362756B2 JP7362756B2 JP2021549914A JP2021549914A JP7362756B2 JP 7362756 B2 JP7362756 B2 JP 7362756B2 JP 2021549914 A JP2021549914 A JP 2021549914A JP 2021549914 A JP2021549914 A JP 2021549914A JP 7362756 B2 JP7362756 B2 JP 7362756B2
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- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/10—Processes of additive manufacturing
- B29C64/106—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
- B29C64/124—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified
- B29C64/129—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified characterised by the energy source therefor, e.g. by global irradiation combined with a mask
- B29C64/135—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified characterised by the energy source therefor, e.g. by global irradiation combined with a mask the energy source being concentrated, e.g. scanning lasers or focused light sources
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- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/10—Processes of additive manufacturing
- B29C64/106—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
- B29C64/124—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
- B29C64/227—Driving means
- B29C64/236—Driving means for motion in a direction within the plane of a layer
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
- B29C64/245—Platforms or substrates
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
- B29C64/255—Enclosures for the building material, e.g. powder containers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
- B29C64/264—Arrangements for irradiation
- B29C64/268—Arrangements for irradiation using laser beams; using electron beams [EB]
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
- B29C64/264—Arrangements for irradiation
- B29C64/286—Optical filters, e.g. masks
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y10/00—Processes of additive manufacturing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2995/00—Properties of moulding materials, reinforcements, fillers, preformed parts or moulds
- B29K2995/0037—Other properties
- B29K2995/0094—Geometrical properties
- B29K2995/0097—Thickness
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Description
Claims (12)
- リソグラフィに基づく三次元部品(3)の生成方法であって、照射装置から照射された電磁照射線は材料内の焦点(5)に連続的に集束され、それぞれの場合において、焦点(5)に位置する材料の体積要素は多光子吸収によって固化され、複数の部分構造(6)が構築され、前記照射装置の書き込み領域(4)において複数の体積要素から、前記複数の部分構造(6)のそれぞれが構築され、前記複数の部分構造(6)は前記書き込み領域を異なる位置に変位させることによって構築され、前記複数の部分構造(6)は、複数の上部構造(6)と複数の下部構造(6)とを備え、前記構築をすることは、a)前記複数の下部構造(6)が隣り合わせに配置されることと、b)前記複数の上部構造(6)が、隣り合わせに配置された前記複数の下部構造(6)間の界面(7)を橋渡しするように、前記複数の下部構造(6)上に配置されることを含み、
前記書き込み領域(4)が、前記照射装置を前記三次元部品(3)に対して相対的に移動させることなく、または、前記三次元部品(3)を前記照射装置に対して相対的に移動させることなく、前記照射装置から照射された前記電磁照射線が前記材料内で前記焦点(5)を合わせることができる幅に対応する延長部を有する領域である、方法。 - 請求項1に記載の方法であって、構成部品が、互いに隣接して配置された複数の下部構造(6)からそれぞれ形成された複数の重ね合わせた層(10)からなり、構成部品(3)が層状に構築されており、上層の層(10)の上部構造が、直下に配置された層(10)の隣接する下側となる下部構造(6)の間の界面(7)を橋渡しすることを特徴とする方法。
- 請求項2に記載の方法であって、他の層の上にある層(10)の間の界面(11)が全体的に平坦であることを特徴とする方法。
- 請求項1または2に記載の方法で、1つ上にある上部構造(6)と下部構造(6)の間の界面(11)が段差になっていることを特徴とする方法。
- 前記複数の部分構造のうちのひとつの下部構造(6)が構築された後に、前記複数の部分構造のうちのひとつの次の隣接する下部構造(6)を構築するために、照射装置の照射方向(2)に対して横方向の材料に対する照射装置の相対的な位置を変更することによって、照射装置の書き込み領域(4)を変位させることを特徴とする請求項1~4のいずれか1項に記載の方法。
- 界面(7)で隣接する前記複数の下部構造(6)のうちの2つの下部構造が、この界面(7)を橋渡しする上部構造(6)によって、それぞれ10%以上重なっていることを特徴とする、請求項1~5のいずれか1項に記載の方法。
- 下部構造(6)および/または層(10)の厚さが、100μm未満であることを特徴とする、請求項1~6のいずれか1項に記載の方法。
- 請求項1~7のいずれか1項に記載の方法であって、材料キャリア上に存在し、材料が照射線に対して少なくとも部分的に透明な材料キャリアを介して下から照射されることを特徴とする方法。
- 請求項8に記載の方法で、材料キャリアから離れた位置に構築プラットフォームを配置し、構築プラットフォームと材料キャリアの間に配置された材料を固めることで、構築プラットフォーム上に構成部品を構築することを特徴とする方法。
- 異なる体積の固化した体積要素から構成部品(3)が構築されるように、構成部品の構築中に焦点(5)の体積を少なくとも1回変化させることを特徴とする請求項1~9のいずれか1項に記載の方法。
- 請求項10に記載の方法において、焦点体積の変化は、少なくとも1つの空間方向方向で行われることを特徴とする方法。
- 請求項1~11のいずれか1項に記載の方法で、書き込み領域(4)内の焦点(5)を照射方向(2)に対して本質的に垂直な面内に調整するために、偏向ユニットを用いて電磁照射を偏向させることを特徴とする方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP19450004.7A EP3702132B1 (de) | 2019-02-26 | 2019-02-26 | Verfahren zur lithographiebasierten generativen fertigung eines dreidimensionalen bauteils |
EP19450004.7 | 2019-02-26 | ||
PCT/IB2020/051626 WO2020174411A1 (de) | 2019-02-26 | 2020-02-26 | Verfahren zur lithographiebasierten generativen fertigung eines dreidimensionalen bauteils |
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JP2022521626A JP2022521626A (ja) | 2022-04-11 |
JP7362756B2 true JP7362756B2 (ja) | 2023-10-17 |
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US (1) | US11787106B2 (ja) |
EP (1) | EP3702132B1 (ja) |
JP (1) | JP7362756B2 (ja) |
KR (1) | KR20210131390A (ja) |
CN (1) | CN113453874A (ja) |
CA (1) | CA3131320C (ja) |
ES (1) | ES2938985T3 (ja) |
IL (1) | IL285753A (ja) |
LT (1) | LT3702132T (ja) |
WO (1) | WO2020174411A1 (ja) |
Citations (2)
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JP2016210189A (ja) | 2015-05-13 | 2016-12-15 | ナノスクライブ ゲーエムベーハーNanoscribe GmbH | 三次元の構造を製作する方法 |
WO2018206161A1 (de) | 2017-05-11 | 2018-11-15 | Nanoscribe Gmbh | Verfahren zum erzeugen einer 3d-struktur mittels laserlithographie mit geänderter belichtdosis an randabschnitten, sowie entsprechendes computerprogrammprodukt |
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JP4564655B2 (ja) | 1998-04-21 | 2010-10-20 | ユニバーシティ オブ コネチカット | 多光子励起を用いたフリーフォームナノ製作 |
DE10111422A1 (de) | 2001-03-09 | 2002-09-26 | Hannover Laser Zentrum | Verfahren und Vorrichtung zur Herstellung eines Formkörpers aus einem durch Bestrahlung zu verfestigenden flüssigen Material |
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EP3135459A1 (en) * | 2015-08-31 | 2017-03-01 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Method and apparatus for layerwise production of a tangible object |
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EP3266594B1 (de) | 2016-07-07 | 2020-03-11 | Technische Universität Wien | Verfahren und vorrichtung zur lithographiebasierten generativen fertigung von dreidimensionalen bauteilen |
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- 2019-02-26 ES ES19450004T patent/ES2938985T3/es active Active
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- 2020-02-26 WO PCT/IB2020/051626 patent/WO2020174411A1/de active Application Filing
- 2020-02-26 JP JP2021549914A patent/JP7362756B2/ja active Active
- 2020-02-26 KR KR1020217030508A patent/KR20210131390A/ko not_active Application Discontinuation
- 2020-02-26 CN CN202080017000.6A patent/CN113453874A/zh active Pending
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JP2016210189A (ja) | 2015-05-13 | 2016-12-15 | ナノスクライブ ゲーエムベーハーNanoscribe GmbH | 三次元の構造を製作する方法 |
WO2018206161A1 (de) | 2017-05-11 | 2018-11-15 | Nanoscribe Gmbh | Verfahren zum erzeugen einer 3d-struktur mittels laserlithographie mit geänderter belichtdosis an randabschnitten, sowie entsprechendes computerprogrammprodukt |
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IL285753A (en) | 2021-10-31 |
CA3131320A1 (en) | 2020-09-03 |
US20220118691A1 (en) | 2022-04-21 |
EP3702132B1 (de) | 2023-01-11 |
ES2938985T3 (es) | 2023-04-18 |
US11787106B2 (en) | 2023-10-17 |
JP2022521626A (ja) | 2022-04-11 |
CN113453874A (zh) | 2021-09-28 |
KR20210131390A (ko) | 2021-11-02 |
EP3702132A1 (de) | 2020-09-02 |
WO2020174411A1 (de) | 2020-09-03 |
LT3702132T (lt) | 2023-02-27 |
CA3131320C (en) | 2023-10-31 |
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