JP7361497B2 - 成膜装置 - Google Patents
成膜装置 Download PDFInfo
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- JP7361497B2 JP7361497B2 JP2019098970A JP2019098970A JP7361497B2 JP 7361497 B2 JP7361497 B2 JP 7361497B2 JP 2019098970 A JP2019098970 A JP 2019098970A JP 2019098970 A JP2019098970 A JP 2019098970A JP 7361497 B2 JP7361497 B2 JP 7361497B2
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
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- H—ELECTRICITY
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- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
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- H01J37/3423—Shape
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0068—Reactive sputtering characterised by means for confinement of gases or sputtered material, e.g. screens, baffles
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
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- C—CHEMISTRY; METALLURGY
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/10—Glass or silica
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
- C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5846—Reactive treatment
- C23C14/5853—Oxidation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3435—Target holders (includes backing plates and endblocks)
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
- C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
- C23C4/11—Oxides
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- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
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- Hall/Mr Elements (AREA)
- Formation Of Insulating Films (AREA)
- Mram Or Spin Memory Techniques (AREA)
Description
以上、実施形態について説明したが、今回開示された実施形態は、全ての点で例示であって制限的なものではないと考えられるべきである。上記の実施形態は、添付の特許請求の範囲およびその主旨を逸脱することなく、様々な形態で省略、置換、変更されてもよい。
10;処理容器
10a;容器本体
10b;蓋体
20;基板保持部
30;ターゲットユニット
31;ターゲット
32;ターゲット保持部
33;ターゲットクランプ
34;防着シールド
34a;外側部
34b;中間部
34c;先端部
34f;絶縁膜
40;ガス供給部
50;酸化ガス導入機構
51;ヘッド部
57;酸化ガス供給部
60;仕切り部
W;基板
Claims (7)
- 基板に金属膜を成膜する成膜装置であって、
処理容器と、
前記処理容器内で基板を保持する基板保持部と、
前記基板保持部の上方に配置されたターゲットユニットと、
前記基板保持部に保持された基板に酸化ガスを供給する酸化ガス導入機構と、
を有し、
前記ターゲットユニットは、
金属からなり、本体部と、本体部の周囲に設けられた環状をなすフランジ部とを有し、前記本体部からスパッタ粒子を放出するターゲットと、
前記ターゲットに給電するためのターゲット電極を含み、前記ターゲットを保持するターゲット保持部と、
前記ターゲットの前記フランジ部を前記ターゲット保持部にクランプするターゲットクランプと、
前記ターゲットの本体部の周囲に、前記フランジ部、前記ターゲットクランプ、および前記ターゲット保持部を覆うように設けられ、その内側先端が、前記ターゲットの本体部と前記ターゲットクランプの間の凹部に入り込むように突出する突出部を構成し、ラビリンス構造をなす防着シールドと、
を有し、
前記ターゲット電極を介して給電された前記ターゲットからその構成金属がスパッタ粒子として放出されて前記基板上に金属膜が堆積され、前記酸化ガス導入機構から導入された酸化ガスにより前記金属膜が酸化されて金属酸化膜が形成され、
前記防着シールドは金属で構成され、当該金属の前記ターゲットに対向する面が凹凸状に形成され、成膜により前記ターゲットに付着した金属酸化膜にチャージアップした電子が前記凹凸状に形成された面の凸部に開放されて生じるマイクロアーク放電を抑制するように、前記凹凸状に形成された面に絶縁膜が形成されており、
前記絶縁膜は、スパッタリングの際のプラズマ中の電子が前記防着シールドに移動可能なように、前記防着シールドの表面の一部に設けられている、成膜装置。 - 前記防着シールドは、
前記ターゲットクランプの外側において前記ターゲット保持部に取り付けられ、前記ターゲット保持部から遠ざかるように、前記ターゲットの前記本体部の高さよりも高い位置まで延びる外側部と、
前記外側部の内側端から前記ターゲットの中心側に向けて延び、前記ターゲットの中心に向かうほど前記ターゲットの前記本体部に近づく傾斜が形成された中間部と、
前記中間部の内側端から下方に延び、前記凹部に入り込む前記突出部を有する内側部と、
を有する、請求項1に記載の成膜装置。 - 前記酸化ガス導入機構は、ヘッド部を有し、前記ヘッド部は、前記基板保持部直上の処理空間に存在する酸化処理位置と、前記処理空間から離れた退避位置との間で移動可能に設けられ、前記酸化処理位置にあるときに、前記基板に前記酸化ガスを供給する、請求項1または請求項2に記載の成膜装置。
- 前記絶縁膜は、Al2O3膜、MgO膜、SiO2膜、AlN膜から選択されたものである、請求項1から請求項3のいずれか一項に記載の成膜装置。
- 前記絶縁膜は溶射皮膜である、請求項1から請求項4のいずれか一項に記載の成膜装置。
- 前記防着シールドの前記絶縁膜が形成される金属部分がAlであり、前記絶縁膜がAl2O3溶射皮膜である、請求項5に記載の成膜装置。
- 前記防着シールドの前記絶縁膜が形成される金属部分の表面粗さRaが18~28μmの範囲であり、前記Al2O3溶射皮膜の表面粗さRaが2.2~4.2μm、前記Al2O3溶射皮膜の厚さが150~250μmである、請求項6に記載の成膜装置。
Priority Applications (4)
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JP2019098970A JP7361497B2 (ja) | 2019-05-28 | 2019-05-28 | 成膜装置 |
CN202010429448.0A CN112011768A (zh) | 2019-05-28 | 2020-05-20 | 成膜装置 |
KR1020200060831A KR20200136826A (ko) | 2019-05-28 | 2020-05-21 | 성막 장치 |
US16/883,543 US11551918B2 (en) | 2019-05-28 | 2020-05-26 | Film forming apparatus |
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JP2019098970A JP7361497B2 (ja) | 2019-05-28 | 2019-05-28 | 成膜装置 |
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JP7361497B2 true JP7361497B2 (ja) | 2023-10-16 |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013088600A1 (ja) | 2011-12-12 | 2013-06-20 | キヤノンアネルバ株式会社 | スパッタリング装置、ターゲットおよびシールド |
WO2014097540A1 (ja) | 2012-12-20 | 2014-06-26 | キヤノンアネルバ株式会社 | スパッタリング方法および機能素子の製造方法 |
WO2015064194A1 (ja) | 2013-10-30 | 2015-05-07 | 東京エレクトロン株式会社 | 成膜装置及び成膜方法 |
JP2016033244A (ja) | 2014-07-31 | 2016-03-10 | 東京エレクトロン株式会社 | 成膜装置及び成膜方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4166018A (en) * | 1974-01-31 | 1979-08-28 | Airco, Inc. | Sputtering process and apparatus |
JPH0734236A (ja) * | 1993-07-19 | 1995-02-03 | Canon Inc | 直流スパッタリング装置およびスパッタリング方法 |
US5433835B1 (en) * | 1993-11-24 | 1997-05-20 | Applied Materials Inc | Sputtering device and target with cover to hold cooling fluid |
JPH1025568A (ja) * | 1996-07-10 | 1998-01-27 | Sony Corp | スパッタリング装置 |
US7579067B2 (en) * | 2004-11-24 | 2009-08-25 | Applied Materials, Inc. | Process chamber component with layered coating and method |
WO2011117916A1 (ja) * | 2010-03-24 | 2011-09-29 | キヤノンアネルバ株式会社 | 電子デバイスの製造方法およびスパッタリング方法 |
KR20150092375A (ko) * | 2010-06-17 | 2015-08-12 | 울박, 인크 | 스퍼터 성막 장치 및 방착부재 |
KR101596174B1 (ko) * | 2011-09-09 | 2016-02-19 | 캐논 아네르바 가부시키가이샤 | 성막 장치 |
JP5998654B2 (ja) * | 2012-05-31 | 2016-09-28 | 東京エレクトロン株式会社 | 真空処理装置、真空処理方法及び記憶媒体 |
WO2015121905A1 (ja) | 2014-02-14 | 2015-08-20 | キヤノンアネルバ株式会社 | トンネル磁気抵抗効果素子の製造方法、およびスパッタリング装置 |
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WO2014097540A1 (ja) | 2012-12-20 | 2014-06-26 | キヤノンアネルバ株式会社 | スパッタリング方法および機能素子の製造方法 |
WO2015064194A1 (ja) | 2013-10-30 | 2015-05-07 | 東京エレクトロン株式会社 | 成膜装置及び成膜方法 |
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