JP7351423B2 - 天井搬送車及び搬送車システム - Google Patents
天井搬送車及び搬送車システム Download PDFInfo
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- B66C13/00—Other constructional features or details
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- H—ELECTRICITY
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- H—ELECTRICITY
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- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
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- H—ELECTRICITY
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66D—CAPSTANS; WINCHES; TACKLES, e.g. PULLEY BLOCKS; HOISTS
- B66D2700/00—Capstans, winches or hoists
- B66D2700/02—Hoists or accessories for hoists
- B66D2700/026—Pulleys, sheaves, pulley blocks or their mounting
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Description
上記実施形態の天井搬送車1では、メンテナンス架台150に天井搬送車1を入場させることにより、天井搬送車1の状態を取得する例を挙げて説明したが、搬送車システム100を構築するロードポート300ごとに、天井搬送車1の状態を取得してもよい。この構成では、保持ユニット7を、実際にFOUP200が載置されるロードポート300ごとに最適な傾きに調整することができる。
上記実施形態及び上記変形例の天井搬送車1では、保持ユニット7が被測定ユニット90を把持することにより、測定ユニット80及び被測定ユニット90から天井搬送車1の状態を取得する例を挙げて説明したが、各載置台に載置された被測定ユニット90に対し、測定ユニット80を把持した保持ユニット7を離反・接近させることにより、天井搬送車1の状態を取得してもよい。この構成では、メンテナンス架台150の各載置台には、測定ユニット80に比べて安価な被測定ユニット90が配置されるので、メンテナンス架台150を安価に構築することができる。
上記実施形態及び上記変形例の天井搬送車1では、天井搬送車1の状態を取得する方法として、測定ユニット80及び被測定ユニット90を例に挙げて説明したが、これに限定されない。例えば、図16に示されるように、第一カメラ160A及び第二カメラ160Bが設けられたメンテナンス架台150Aを用いて天井搬送車1の状態を取得してもよい。メンテナンス架台150Aは、例えば、第二カメラ160Bに対して相対的に低い位置に設けられた第一カメラ160Aと、当該第一カメラ160Aよりも高い位置に設けられた第二カメラ160Bと、コントローラ155と、を有している。第一カメラ160Aは、上記の第一載置台151に設けられた測定ユニット80と同様に、ベルトBの繰り出し量が相対的に大きいときの天井搬送車1の状態を取得することができる。第二カメラ160Bは、上記の第二載置台152に設けられた測定ユニット80と同様に、ベルトBの繰り出し量が相対的に小さいときの天井搬送車1の状態を取得することができる。
上記実施形態及び上記変形例の天井搬送車1では、記憶部8Aに記憶させる天井搬送車1の状態として、所定の基準位置を原点とした場合のグリッパ12の実位置(X座標,Y座標,Z座標)、角度θ、角度αx及び角度αy等の情報を例に挙げて説明したが、このような実位置(X座標,Y座標,Z座標)、角度θ、角度αx及び角度αy等の情報に基づいて決定される直動機構67の作動量(案内ローラの移動量)等の設定値であってもよい。
上記実施形態及び上記変形例の一部では、メンテナンス架台150の各載置台に、測定ユニット80の測定対象となる被測定ユニット90が配置されている例を挙げて説明したが、例えば、ロードポート300であれば、被測定ユニット90を載置する代わりにFOUP200が載置される部分に形成された位置決めピン等を測定ユニット80の測定対象として利用してもよいし、メンテナンス架台150の各載置台に測定対象となるターゲットを直接形成してもよい。
上記実施形態及び上記変形例では、測定ユニット80及び被測定ユニット90によって天井搬送車1の状態を取得する例を挙げて説明したが、これに限定されない。例えば、測定ユニット80及び被測定ユニット90に代えて、保持ユニット7の水平方向に対する傾きを取得する傾き検出部を、例えば保持ユニット7に設けてもよい。傾き検出部の例には、三軸センサ及び加速度センサ等が含まれる。
上記実施形態の天井搬送車1において、ベルトBの一端を昇降方向に移動させるために少なくとも一つの第二アイドラローラ65Bの位置を移動させる機能を有する直動機構67に代えて、同様の機能を有するカム機構(位置調整部)を設けてもよい。
Claims (7)
- 物品を把持する把持部を有する昇降部を複数の吊持部材によって昇降させるようにした天井搬送車であって、
前記複数の吊持部材の巻き取り及び繰り出しを行うことにより、前記昇降部を昇降させる巻取ドラムと、
前記巻取ドラムから繰り出される前記吊持部材が巻き掛けられる少なくとも一つの案内ローラと、
前記巻取ドラム及び前記案内ローラを支持する本体部と、
前記本体部に対する前記案内ローラの相対位置を移動させることにより、前記吊持部材の前記昇降部への接続部分を昇降方向に移動させる、少なくとも一つの位置調整部と、
前記昇降部における傾きに関する情報に基づいて前記位置調整部による前記案内ローラの移動を制御する制御部と、を備える、天井搬送車。 - 前記傾きに関する情報に基づいて決定される前記案内ローラの移動量又は前記傾きに関する情報を記憶する記憶部を更に備え、
前記制御部は、前記移動量又は前記傾きに関する情報に基づいて前記位置調整部による前記案内ローラの移動を制御する、請求項1記載の天井搬送車。 - 前記記憶部は、前記天井搬送車との間で前記物品の受け渡しが行われる移載部ごとに、前記移動量又は前記傾きに関する情報を記憶し、
前記制御部は、前記移載部ごとの前記移動量又は前記傾きに関する情報に基づいて前記位置調整部による前記案内ローラの移動を制御する、請求項2記載の天井搬送車。 - 前記昇降部に設けられ、前記傾きに関する情報を取得する取得部を更に備える、請求項1~3の何れか一項記載の天井搬送車。
- 前記昇降部に設けられ、前記傾きに関する情報を取得する取得部を更に備え、
前記取得部は、定期的に前記傾きに関する情報を取得し、
前記記憶部は、定期的に取得される前記傾きに関する情報に基づいて決定される前記案内ローラの移動量又は定期的に取得される前記傾きに関する情報を記憶する、請求項2又は3記載の天井搬送車。 - 請求項1~3の何れか一項記載の天井搬送車と、
前記天井搬送車とは別体として設けられ、前記傾きに関する情報を取得する取得部と、
前記取得部によって取得された前記傾きに関する情報を前記天井搬送車に送信する通信部と、を備える、搬送車システム。 - 前記天井搬送車を定期的に前記取得部が前記傾きに関する情報を取得可能な位置に移動させる制御装置を更に備え、
前記通信部は、定期的に前記取得部によって取得される前記傾きに関する情報を前記天井搬送車に送信する、請求項6記載の搬送車システム。
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EP (1) | EP4245694A1 (ja) |
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CN (1) | CN116438133A (ja) |
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JP2016175723A (ja) | 2015-03-19 | 2016-10-06 | 三菱重工業株式会社 | 位置調整装置 |
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JPH07115725B2 (ja) * | 1988-07-15 | 1995-12-13 | 村田機械株式会社 | 物品搬送システム |
JPH08113310A (ja) * | 1994-10-13 | 1996-05-07 | Toyo Kanetsu Kk | 搬送設備 |
KR100194410B1 (ko) | 1996-03-19 | 1999-06-15 | 윤종용 | 전화기의 표시램프 불밝기 조절방법 |
JPH10194410A (ja) | 1997-01-09 | 1998-07-28 | Toyota Autom Loom Works Ltd | 搬送台車における昇降ベルトの巻取構造及び搬送台車 |
JP2006008355A (ja) * | 2004-06-28 | 2006-01-12 | Murata Mach Ltd | 天井走行車 |
JP4461199B1 (ja) * | 2009-09-24 | 2010-05-12 | 北陽電機株式会社 | 距離測定装置 |
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2021
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