JP7331971B2 - 温度によるエラーを低減するアンカー構造体 - Google Patents
温度によるエラーを低減するアンカー構造体 Download PDFInfo
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- JP7331971B2 JP7331971B2 JP2022022157A JP2022022157A JP7331971B2 JP 7331971 B2 JP7331971 B2 JP 7331971B2 JP 2022022157 A JP2022022157 A JP 2022022157A JP 2022022157 A JP2022022157 A JP 2022022157A JP 7331971 B2 JP7331971 B2 JP 7331971B2
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- stator
- anchor point
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- common axis
- mems device
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/006—Details of instruments used for thermal compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0081—Thermal properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0009—Structural features, others than packages, for protecting a device against environmental influences
- B81B7/0019—Protection against thermal alteration or destruction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0228—Inertial sensors
- B81B2201/0235—Accelerometers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0307—Anchors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0369—Static structures characterized by their profile
- B81B2203/0392—Static structures characterized by their profile profiles not provided for in B81B2203/0376 - B81B2203/0384
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/05—Type of movement
- B81B2203/056—Rotation in a plane parallel to the substrate
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Thermal Sciences (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Pressure Sensors (AREA)
Description
Claims (10)
- 基板面を規定する基板と、
ロータ・アンカーポイントを介して前記基板に取り付けられ、前記基板面に対して回転軸を中心に回転可能なロータと、
それぞれの位置が前記基板面に対して固定された2つのステータとを備え、
第1ステータが、第1のステータ・アンカーポイントを介して前記基板に取り付けられ、第2ステータが、第2のステータ・アンカーポイントを介して前記基板に取り付けられており、
前記第1ステータおよび前記第2ステータは、前記回転軸の片側に位置しており、
前記第1ステータおよび前記第2ステータは、電気的に分離され、前記回転軸に垂直な共通軸に対して対称であり、
前記ロータ・アンカーポイント、前記第1のステータ・アンカーポイント、および前記第2のステータ・アンカーポイントは、前記共通軸と重なる
MEMSデバイス。 - 前記ロータ・アンカーポイントの幅と前記ステータ・アンカーポイントの幅は、同じであり、前記ロータ・アンカーポイントおよび前記ステータ・アンカーポイントは、前記共通軸に沿って並んでいる
請求項1に記載のMEMSデバイス。 - 前記ロータ・アンカーポイントおよび前記ステータ・アンカーポイントは、矩形である
請求項1または2に記載のMEMSデバイス。 - 前記ステータ・アンカーポイントは、L字形であり、L字形の前記ステータ・アンカーポイントは、
前記ステータ・アンカーポイントのL字形が同じサイズであり、前記ステータ・アンカーポイントのうちの一方が他方の前記ステータ・アンカーポイントに対して180度回転しており、
各L字形の第1部分が前記共通軸と平行であり、各L字形の第2部分が前記共通軸に垂直であり、
L字形の前記ステータ・アンカーポイントの前記第2部分が前記共通軸に沿って並ぶように配置される
請求項1または2に記載のMEMSデバイス。 - L字形の前記ステータ・アンカーポイントの前記第1部分は、前記共通軸に垂直な第2軸と重なる
請求項4に記載のMEMSデバイス。 - 前記共通軸に垂直に測定される前記ロータ・アンカーポイントの幅は、L字形の前記ステータ・アンカーポイントの幅と同じである
請求項4または5に記載のMEMSデバイス。 - 前記ロータ・アンカーポイントは、形状が矩形である
請求項6に記載のMEMSデバイス。 - 前記ロータ・アンカーポイントの長さおよび前記ステータ・アンカーポイントの長さは、それぞれ前記ロータ・アンカーポイントの幅および前記ステータ・アンカーポイントの幅より小さい
請求項1~7のいずれか1項に記載のMEMSデバイス。 - 前記MEMSデバイスは、加速度計であり、前記ステータに対する前記ロータの動きを容量的に測定することによって、加速度が測定される
請求項1~8のいずれか1項に記載のMEMSデバイス。 - 前記共通軸と平行な方向における隣接するアンカーポイント間の距離は、前記共通軸と平行な方向における、前記アンカーポイントのうちのいずれの長さの2倍よりも小さい
請求項1~9のいずれか1項に記載のMEMSデバイス。
Applications Claiming Priority (2)
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FI20215191 | 2021-02-22 | ||
FI20215191 | 2021-02-22 |
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JP2022128422A JP2022128422A (ja) | 2022-09-01 |
JP7331971B2 true JP7331971B2 (ja) | 2023-08-23 |
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US (1) | US11852649B2 (ja) |
EP (1) | EP4047375B1 (ja) |
JP (1) | JP7331971B2 (ja) |
CN (1) | CN114966107A (ja) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2014061099A1 (ja) | 2012-10-16 | 2014-04-24 | 日立オートモティブシステムズ株式会社 | 慣性センサ |
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DE102009000167A1 (de) * | 2009-01-13 | 2010-07-22 | Robert Bosch Gmbh | Sensoranordnung |
CN104185792B (zh) | 2012-01-12 | 2017-03-29 | 村田电子有限公司 | 加速度传感器结构及其使用 |
JP5962900B2 (ja) | 2012-04-02 | 2016-08-03 | セイコーエプソン株式会社 | 物理量センサーおよび電子機器 |
US9410981B2 (en) * | 2012-06-05 | 2016-08-09 | Analog Devices, Inc. | MEMS sensor with dynamically variable reference capacitance |
FI20135714L (fi) * | 2013-06-28 | 2014-12-29 | Murata Manufacturing Co | Kapasitiivinen mikromekaaninen kiihtyvyysanturi |
CN205090976U (zh) * | 2014-12-11 | 2016-03-16 | 意法半导体股份有限公司 | 微机电检测结构、微机电传感器和电子器件 |
EP3757579B1 (en) | 2019-06-26 | 2023-07-26 | Murata Manufacturing Co., Ltd. | Capacitive micromechanical accelerometer |
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- 2022-02-01 EP EP22154463.8A patent/EP4047375B1/en active Active
- 2022-02-07 US US17/665,780 patent/US11852649B2/en active Active
- 2022-02-16 JP JP2022022157A patent/JP7331971B2/ja active Active
- 2022-02-21 CN CN202210158612.8A patent/CN114966107A/zh active Pending
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WO2014061099A1 (ja) | 2012-10-16 | 2014-04-24 | 日立オートモティブシステムズ株式会社 | 慣性センサ |
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US11852649B2 (en) | 2023-12-26 |
US20220268799A1 (en) | 2022-08-25 |
EP4047375B1 (en) | 2024-07-17 |
EP4047375A1 (en) | 2022-08-24 |
JP2022128422A (ja) | 2022-09-01 |
CN114966107A (zh) | 2022-08-30 |
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