JP7315535B2 - 振動計測装置 - Google Patents
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- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
- G01H9/002—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means for representing acoustic field distribution
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- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02012—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal intensity variation
- G01B9/02014—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal intensity variation by using pulsed light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02062—Active error reduction, i.e. varying with time
- G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02094—Speckle interferometers, i.e. for detecting changes in speckle pattern
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02094—Speckle interferometers, i.e. for detecting changes in speckle pattern
- G01B9/02095—Speckle interferometers, i.e. for detecting changes in speckle pattern detecting deformation from original shape
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02097—Self-interferometers
- G01B9/02098—Shearing interferometers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M5/00—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings
- G01M5/0033—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings by determining damage, crack or wear
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M5/00—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings
- G01M5/0041—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings by determining deflection or stress
- G01M5/005—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings by determining deflection or stress by means of external apparatus, e.g. test benches or portable test systems
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M5/00—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings
- G01M5/0066—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings by exciting or detecting vibration or acceleration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M5/00—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings
- G01M5/0091—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings by using electromagnetic excitation or detection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8838—Stroboscopic illumination; synchronised illumination
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/061—Sources
- G01N2201/06113—Coherent sources; lasers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/063—Illuminating optical parts
- G01N2201/0635—Structured illumination, e.g. with grating
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/023—Solids
- G01N2291/0232—Glass, ceramics, concrete or stone
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/023—Solids
- G01N2291/0234—Metals, e.g. steel
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- General Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Immunology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Automation & Control Theory (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Description
被検査物体に弾性波を励起する励振部と、
波長安定化レーザ光源を用いて前記被検査物体の表面の測定領域にストロボ照明を行う照明部と、
スペックル干渉法又はスペックル・シェアリング干渉法により前記測定領域の各点の前後方向の変位を一括測定する変位測定部と
を備えることを特徴とする。
上記の例ではmmax=3としたが、mmaxを[2n+1](nは2以上の自然数)で表される数より大きく選ぶことにより、被検査物体Sに励起された弾性波のn次の成分(第n高調波成分)までを検出することができるようになる。すなわち、点Aと点Bの面外方向の相対的な変位が(2n+1)組以上得られることから、基本波の振幅、基本波の位相、第2高調波の振幅、第2高調波の位相、…第n高調波の振幅、第n高調波の位相、及び弾性波のDC成分、という(2n+1)個のパラメータの値が得られる。
11…信号発生器
12…振動子
13…波長安定化レーザ光源
14…照明光レンズ
15…スペックル・シェアリング干渉計
151…ビームスプリッタ
1521…第1反射鏡
1522…第2反射鏡
153…位相シフタ
154…集光レンズ
155…イメージセンサ
16…制御部
17…記憶部
Claims (2)
- 被検査物体に弾性波を励起する励振部と、
半導体レーザ及び該半導体レーザからの発振レーザ光の波長帯よりも狭い波長帯の光を選択的に該半導体レーザに戻すボリュームホログラフィックグレーティングとを備える波長安定化レーザ光源を用いて前記被検査物体の表面の測定領域にストロボ照明を行う照明部と、
前記弾性波の位相と前記ストロボ照明のタイミングを制御することにより、該弾性波の互いに異なる少なくとも3つの位相において前記測定領域の各点の前後方向の変位をスペックル・シェアリング干渉法により一括測定する変位測定部とを備え、
前記測定領域の全体に亘って、前記被検査物体の表面において2点から反射して前記スペックル・シェアリング干渉法により干渉する光の光路差が、前記波長安定化レーザ光源から出力されるレーザ光の可干渉距離よりも短くなるように前記変位測定部が設定されていることを特徴とする振動計測装置。 - 前記少なくとも3つの位相における位相状態の数が(2n+1)以上であって、該nが2以上の自然数であり、前記測定領域内の各点の前後方向の変位から前記弾性波のn次の高調波成分を検出することを特徴とする請求項1に記載の振動計測装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018073165 | 2018-04-05 | ||
JP2018073165 | 2018-04-05 | ||
PCT/JP2018/045902 WO2019193788A1 (ja) | 2018-04-05 | 2018-12-13 | 振動計測装置 |
Publications (2)
Publication Number | Publication Date |
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JPWO2019193788A1 JPWO2019193788A1 (ja) | 2021-04-15 |
JP7315535B2 true JP7315535B2 (ja) | 2023-07-26 |
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JP2020511594A Active JP7315535B2 (ja) | 2018-04-05 | 2018-12-13 | 振動計測装置 |
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US (1) | US20210096085A1 (ja) |
EP (1) | EP3779378B1 (ja) |
JP (1) | JP7315535B2 (ja) |
CN (1) | CN112005086A (ja) |
WO (1) | WO2019193788A1 (ja) |
Families Citing this family (1)
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CN113406003B (zh) * | 2021-04-24 | 2023-05-05 | 南京理工大学 | 基于环形光束激光超声合成孔径聚焦成像装置及方法 |
Citations (2)
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JP2004101189A (ja) | 2002-09-04 | 2004-04-02 | Hitachi Ltd | 欠陥検査装置及び欠陥検査方法 |
JP2017219318A (ja) | 2016-06-02 | 2017-12-14 | 株式会社島津製作所 | 欠陥検査方法及び欠陥検査装置 |
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JP6805930B2 (ja) * | 2017-03-29 | 2020-12-23 | 株式会社島津製作所 | 振動測定装置 |
JP6791029B2 (ja) * | 2017-06-12 | 2020-11-25 | 株式会社島津製作所 | 欠陥検出方法及び欠陥検出装置 |
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2018
- 2018-12-13 EP EP18913903.3A patent/EP3779378B1/en active Active
- 2018-12-13 JP JP2020511594A patent/JP7315535B2/ja active Active
- 2018-12-13 CN CN201880092070.0A patent/CN112005086A/zh active Pending
- 2018-12-13 WO PCT/JP2018/045902 patent/WO2019193788A1/ja active Application Filing
- 2018-12-13 US US17/044,571 patent/US20210096085A1/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004101189A (ja) | 2002-09-04 | 2004-04-02 | Hitachi Ltd | 欠陥検査装置及び欠陥検査方法 |
JP2017219318A (ja) | 2016-06-02 | 2017-12-14 | 株式会社島津製作所 | 欠陥検査方法及び欠陥検査装置 |
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CN112005086A (zh) | 2020-11-27 |
EP3779378A4 (en) | 2021-06-16 |
US20210096085A1 (en) | 2021-04-01 |
WO2019193788A1 (ja) | 2019-10-10 |
JPWO2019193788A1 (ja) | 2021-04-15 |
EP3779378A1 (en) | 2021-02-17 |
EP3779378B1 (en) | 2022-05-11 |
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