JP7313884B2 - 液体吐出ヘッド及びその製造方法 - Google Patents
液体吐出ヘッド及びその製造方法 Download PDFInfo
- Publication number
- JP7313884B2 JP7313884B2 JP2019080839A JP2019080839A JP7313884B2 JP 7313884 B2 JP7313884 B2 JP 7313884B2 JP 2019080839 A JP2019080839 A JP 2019080839A JP 2019080839 A JP2019080839 A JP 2019080839A JP 7313884 B2 JP7313884 B2 JP 7313884B2
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- Prior art keywords
- recording element
- element substrate
- substrate
- ejection head
- liquid ejection
- Prior art date
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Description
図2は、本発明の第1の実施形態の液体吐出ヘッドの構成を示す模式断面図であり、(a)から(c)の順で、記録素子基板1に対してFPC2を電気的に接続する過程を示している。第1の実施形態の液体吐出ヘッドに搭載される記録素子基板1は、シリコン(Si)基板11から構成されるものであり、図2(a)に示すように、記録素子基板1の第1の面、すなわちシリコン基板11の第1の面に対して吐出口形成部材17が配置している。吐出口形成部材17には複数の吐出口16が貫通孔として設けられている。吐出口16の形成位置において吐出口形成部材17はシリコン基板11の第1の面からは離隔して設けられており、吐出口形成部材17とシリコン基板11との間には圧力室と呼ばれる空間が形成されている。吐出口形成部材17は、吐出されるべき液体、例えばインクなどと接触するから、吐出口形成部材17を構成する材料には吐出液体に対する耐性が求められる。吐出口16からインクを吐出する液体吐出ヘッドの場合、吐出口形成部材17には耐インク性を有する感光性樹脂などを用いることができる。
次に本発明の第2の実施形態の液体吐出ヘッドについて説明する。上述した第1の実施形態では、記録素子基板1とFPC2との機械的接合にUV硬化型の接着剤81を用いている。この接着剤81は硬化前は液状であり、記録素子基板1をFPC2に向けて押圧したときに押しつぶされて接合部からはみ出し、液体供給口を介して液体供給路15に流れ込んだりFPC2の露出している配線導体21上に付着したりする可能性がある。接着剤81が液体供給路15の内部に流れ込むと、記録素子基板1の第1の面側への液体の供給に支障をきたし、その結果、吐出口16からの液体の吐出にも支障をきたすようになる。また接着剤81が配線導体21に付着すると、ワイヤーボンディングによる記録素子基板1とFPC2との電気的接続を行うことができなくなる。第2の実施形態の液体吐出ヘッドは、第1の実施形態の液体吐出ヘッドと同様のものであるが、接着剤81がはみ出すことによってここで述べたような不具合が発生することを防ぐために、記録素子基板1の第2の面92に溝や切欠きを設けている。
次に、本発明の第3の実施形態の液体吐出ヘッドについて説明する。図10は、第3の実施形態の液体吐出ヘッドに用いられる記録素子基板1を示す図であり、(a)は模式断面図、(b)は第2の面92の側を見た斜視図である。第1の実施形態では、記録素子基板1とFPC2との接合体を流路部材7に接合させたときに傾かないように、流路部材7に段部76を設けている。この第3の実施形態では、流路部材7に段部76を設ける代わりに、記録素子基板1の第2の面92においてFPC2が接合される部分が一段凹むように、凹み部13を設けている。凹み部13の深さは、接着剤81の厚みを無視できるとして、FPC2のベースフィルム25の厚みと同等のものとする。凹み部13の外周形状は、FPC2の先端部をちょうど受け入れることができるようなものかそれより大きなものとなっている。
次に、本発明の第4の実施形態の液体吐出ヘッドについて説明する。図14は、本実施形態の液体吐出ヘッドを説明する図であって、(a)は記録素子基板1の模式断面図であり、(b)は記録素子基板1の第2の面の側を見た斜視図である。さらに(c)は接着剤81によってFPC2を記録素子基板1に接合した状態の斜視図であり、(d)はシーラント90を塗布した状態での斜視図である。第2の実施形態では、記録素子基板1の第2の面92に切欠き71と溝72とを設け、はみ出した接着剤81の切欠き71及び溝72で吸収するようにしているが、この第4の実施形態では、切欠き71の代わりに第2の面92に溝73を設けている。結局、記録素子基板1の第2の面92において、液体供給路15の液体供給口と記録素子基板1の端部との間に2本の溝72,73が設けられていることになる。溝72,73は相互にほぼ平行に設けられ、溝72と溝73との間の領域においてFPC2が記録素子基板1の第2の面92に対して接着剤81によって接合される。各々の溝72,73の長さはFPC2の横幅Wよりも長いことが好ましい。液体供給口に近い方の溝の主な役割は、FPC2と記録素子基板1との接合に用いられる接着剤81の液体供給路15の内部への流れ込みを抑制することである。記録素子基板1の端部に近い方の溝73の主な役割は、電気接続部を覆う電気絶縁性のシーラント90がFPC2の側縁部30を伝わって記録素子基板1の第2の面92へと回り込み液体供給口にまで達するのを抑制することである。もちろん、溝73は、FPC2において露出している配線導体21に対して接着剤81が付着することを付着することを抑制する役割も有している。
次に、本発明の第5の実施形態について説明する。図20は、第5の実施形態の液体吐出ヘッドで用いられる記録素子基板1を示す図であって、(a)は模式断面図であり、(b)は記録素子基板1の第2の面92を見る斜視図である。本実施形態において記録素子基板1は、液体を吐出するために必要なエネルギーを発生する記録素子18と吐出口形成部材17とが形成されている第1の基板10と、液体供給路15の液体供給口が形成された第2の基板20とを接合したものである。第1の実施形態において説明したものと同様に、吐出口形成部材17には吐出口16が形成されている。第1の基板10にの図示上側の表面が記録素子基板1の第1の面となり、第2の基板20の図示下側の面が記録素子基板1の第2の面92となる。第1の基板10の表面には電気接続用のパッド12も設けられている。第1の基板10には、記録素子18の位置にまで液体を供給するために、液体供給路15に連通する個別供給路19が貫通している。
2 フレキシブルプリント基板(FPC)
12 パッド
15 液体供給路
21 配線導体
51 ボンディングワイヤー
92 第2の面
Claims (19)
- 第1の面に形成された電気接続用のパッドと前記第1の面とは反対側となる第2の面に形成された液体供給口とを備える記録素子基板と、基材と当該基材の第3の面の側に形成された配線導体とを備えるフレキシブル電気配線基板と、を有する液体吐出ヘッドにおいて、
前記第2の面の側における前記液体供給口と前記記録素子基板の縁部との間の領域の少なくとも一部において、前記フレキシブル電気配線基板における前記基材の前記第3の面と前記記録素子基板とが接合し、
前記配線導体と前記パッドとがボンディングワイヤーによって電気的に接続された電気接続部を有することを特徴とする液体吐出ヘッド。 - 前記液体吐出ヘッドを平面視した際に、前記パッドと、前記記録素子基板と前記フレキシブル電気配線基板とが接合する領域と、の少なくとも一部が互いに重複している、請求項1に記載の液体吐出ヘッド。
- 前記電気接続部が電気絶縁性のシーラントによって覆われている、請求項1または2に記載の液体吐出ヘッド。
- 前記フレキシブル電気配線基板は、該フレキシブル電気配線基板の先端部において該フレキシブル電気配線基板の長手方向に平行な面によって前記記録素子基板と接合する、請求項1乃至3のいずれか1項に記載の液体吐出ヘッド
- 前記フレキシブル電気配線基板において前記配線導体の先端の位置は、前記記録素子基板の前記縁部に対応する位置よりも前記フレキシブル電気配線基板の前記長手方向の根元側に位置する、請求項4に記載の液体吐出ヘッド。
- 前記記録素子基板の前記縁部における前記フレキシブル電気配線基板が横断する位置において、前記記録素子基板の稜線の少なくとも一部が切り欠かれている、請求項4または5に記載の液体吐出ヘッド。
- 前記フレキシブル電気配線基板と前記記録素子基板とが接合する領域において前記記録素子基板の表面に、前記長手方向と直交する方向に延びる溝が形成されている、請求項4乃至6のいずれか1項に記載の液体吐出ヘッド。
- 前記溝の長さは前記フレキシブル電気配線基板の前記長手方向に直交する方向での幅よりも大きい、請求項7に記載の液体吐出ヘッド
- 前記フレキシブル電気配線基板の先端が前記液体供給口に最も近い前記溝を閉塞しないように、前記フレキシブル電気配線基板が前記記録素子基板に接合している、請求項7または8に記載の液体吐出ヘッド。
- 相互に平行な複数の前記溝を有する請求項7乃至9のいずれか1項に記載の液体吐出ヘッド。
- 前記液体供給口から遠いほど前記溝の容積が大きい、請求項10に記載の液体吐出ヘッド。
- 前記第2の面の一部に、前記記録素子基板の前記縁部に接続する凹み部が形成され、前記凹み部において前記フレキシブル電気配線基板が前記記録素子基板に接合している、請求項1乃至11のいずれか1項に記載の液体吐出ヘッド。
- 前記記録素子基板は、前記第1の面を含んで前記パッドが形成されている第1の基板と、前記第2の面を含んで前記液体供給口が形成されている第2の基板とを接合したものである、請求項1乃至11のいずれか1項に記載の液体吐出ヘッド。
- 前記第1の基板の前記第1の面と反対側となる面の一部が、前記第2の基板に覆われずに前記フレキシブル電気配線基板と接合している、請求項13に記載の液体吐出ヘッド。
- 前記液体供給口に液体を供給するための流路を備える流路部材を有し、
前記フレキシブル電気配線基板は、前記流路部材と前記記録素子基板との間に設けられている、請求項1乃至11のいずれか1項に記載の液体吐出ヘッド。 - 第1の面に形成された電気接続用のパッドと前記第1の面とは反対側となる第2の面に形成された液体供給口とを備える記録素子基板と、配線導体を備えるフレキシブル電気配線基板と、を有する液体吐出ヘッドの製造方法において、
前記記録素子基板の、前記第2の面の側における前記液体供給口と前記記録素子基板の縁部との間の領域と、前記フレキシブル電気配線基板と、を接合する工程と、
前記接合する工程ののち、前記配線導体と前記パッドとをボンディングワイヤーによって電気的に接続する電気接続部を形成する工程と、
前記フレキシブル電気配線基板を介して前記記録素子基板に電気信号を送り、前記記録素子基板の電気的特性の検査を行う工程と、
を有することを特徴とする液体吐出ヘッドの製造方法。 - 前記電気的に接続する工程ののち、前記電気的特性の検査を行う前に、前記電気接続部を電気絶縁性のシーラントによって覆う工程を有する、請求項16に記載の液体吐出ヘッドの製造方法。
- 前記記録素子基板は、前記第1の面を含んで前記パッドが形成されている第1の基板と、前記第2の面を含んで前記液体供給口が形成されている第2の基板とを接合したものであり、
前記記録素子基板を形成する工程は、
複数の前記第1の基板が一体に形成された第1のウエハと複数の前記第2の基板が一体に形成された第2のウエハを接合する工程と、
前記第2のウエハを接合する工程ののち、ダイシングによって個々の前記記録素子基板を分離する工程と、
を有する、請求項16または17に記載の液体吐出ヘッドの製造方法。 - 前記記録素子基板は、前記第1の面を含んで前記パッドが形成されている第1の基板と
、前記第2の面を含んで前記液体供給口が形成されている第2の基板とを接合したものであり、
前記記録素子基板を形成する工程は、
複数の前記第1の基板が一体に形成された第1のウエハに対してダイシングを行って個々の第1の基板を得る第1の分離工程と、
複数の前記第2の基板が一体に形成された第2のウエハに対してダイシングを行って個々の第2の基板を得る第2の分離工程と、
前記第1の分離工程で得られた前記第1の基板と前記第2の分離工程で得られた前記第2の基板とを接合する工程と、
を有する、請求項16または17に記載の液体吐出ヘッドの製造方法。
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