JP7240480B2 - エンハンスメント・モード及びデプレッション・モード・トランジスタの両者を有するモノリシック・マイクロ波集積回路 - Google Patents
エンハンスメント・モード及びデプレッション・モード・トランジスタの両者を有するモノリシック・マイクロ波集積回路 Download PDFInfo
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- JP7240480B2 JP7240480B2 JP2021502818A JP2021502818A JP7240480B2 JP 7240480 B2 JP7240480 B2 JP 7240480B2 JP 2021502818 A JP2021502818 A JP 2021502818A JP 2021502818 A JP2021502818 A JP 2021502818A JP 7240480 B2 JP7240480 B2 JP 7240480B2
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- 229910002601 GaN Inorganic materials 0.000 claims description 306
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 304
- 230000004888 barrier function Effects 0.000 claims description 118
- 239000000758 substrate Substances 0.000 claims description 75
- 239000004065 semiconductor Substances 0.000 claims description 42
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 4
- 229910052733 gallium Inorganic materials 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 264
- 239000000463 material Substances 0.000 description 16
- 229910010271 silicon carbide Inorganic materials 0.000 description 13
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 12
- 239000002019 doping agent Substances 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 230000007704 transition Effects 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 3
- 230000005669 field effect Effects 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 229910052594 sapphire Inorganic materials 0.000 description 3
- 239000010980 sapphire Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- AJGDITRVXRPLBY-UHFFFAOYSA-N aluminum indium Chemical compound [Al].[In] AJGDITRVXRPLBY-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910000480 nickel oxide Inorganic materials 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 230000005533 two-dimensional electron gas Effects 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
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- H01L29/76—Unipolar devices, e.g. field effect transistors
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- H01L29/7787—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT with wide bandgap charge-carrier supplying layer, e.g. direct single heterostructure MODFET
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- H01L29/66446—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET]
- H01L29/66462—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET] with a heterojunction interface channel or gate, e.g. HFET, HIGFET, SISFET, HJFET, HEMT
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- H03F1/00—Details of amplifiers with only discharge tubes, only semiconductor devices or only unspecified devices as amplifying elements
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- H03F1/0205—Modifications of amplifiers to raise the efficiency, e.g. gliding Class A stages, use of an auxiliary oscillation in transistor amplifiers
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Description
Claims (10)
- 基板と、
前記基板の第1の領域上に形成された無線周波数(RF)パワー増幅器であって、前記RFパワー増幅器が、第1の複数の窒化ガリウムに基づくデプレッション・モード・トランジスタを含み、各々の前記第1の複数の窒化ガリウムに基づくデプレッション・モード・トランジスタが、第1のゲート電極を含む、前記RFパワー増幅器と、
前記基板の第2の領域上の第2の複数の窒化ガリウムに基づくデプレッション・モード・トランジスタであって、各々の前記第2の複数の窒化ガリウムに基づくデプレッション・モード・トランジスタが、第2のゲート電極を含む、前記第2の複数の窒化ガリウムに基づくデプレッション・モード・トランジスタと、
前記基板の前記第2の領域上に形成されたデジタル回路であって、前記デジタル回路が、複数の窒化ガリウムに基づくエンハンスメント・モード・トランジスタを含み、各々の前記複数の窒化ガリウムに基づくエンハンスメント・モード・トランジスタが、第3のゲート電極を含む、前記デジタル回路と
を備え、
前記第1の複数の窒化ガリウムに基づくデプレッション・モード・トランジスタのうちの1つの第1のゲート電極の長さは、前記第2の複数の窒化ガリウムに基づくデプレッション・モード・トランジスタのうちの1つの第2のゲート電極の長さよりも短いか、又は前記複数の窒化ガリウムに基づくエンハンスメント・モード・トランジスタのうちの1つの第3のゲート電極の長さよりも短い、半導体集積回路。 - 前記基板上の窒化ガリウムに基づくチャネル層と、
前記基板とは反対側の前記窒化ガリウムに基づくチャネル層上の窒化ガリウムに基づく障壁層であって、前記窒化ガリウムに基づく障壁層が、その最上面に複数のリセスを含む、窒化ガリウムに基づく障壁層と
をさらに備え、
前記基板の前記第1の複数の窒化ガリウムに基づくデプレッション・モード・トランジスタの前記第1のゲート電極が、前記窒化ガリウムに基づく障壁層と直接接触し、
前記基板の前記複数の窒化ガリウムに基づくエンハンスメント・モード・トランジスタの前記第3のゲート電極が、前記窒化ガリウムに基づく障壁層内の前記それぞれのリセスの中へと延びる、請求項1に記載の半導体集積回路。 - 前記窒化ガリウムに基づく障壁層と前記複数の窒化ガリウムに基づくエンハンスメント・モード・トランジスタの前記それぞれのゲート電極との間の前記窒化ガリウムに基づく障壁層の前記リセス内にゲート絶縁層をさらに備える、請求項2に記載の半導体集積回路。
- 前記リセスが、前記窒化ガリウムに基づくチャネル層を露出させるために前記窒化ガリウムに基づく障壁層を完全に貫通して延びる、請求項3に記載の半導体集積回路。
- 前記リセスが、前記窒化ガリウムに基づくチャネル層の最上面の中へとさらに延びる、請求項4に記載の半導体集積回路。
- 前記ゲート絶縁層が、酸化物層を含む、請求項5に記載の半導体集積回路。
- 前記リセスが、前記窒化ガリウムに基づく障壁層の途中までだけ延び、前記基板の前記第2の領域内の前記複数の窒化ガリウムに基づくエンハンスメント・モード・トランジスタの前記第3のゲート電極が、前記窒化ガリウムに基づく障壁層のそれぞれの部分と直接接触する、請求項2に記載の半導体集積回路。
- 各々の前記複数の窒化ガリウムに基づくエンハンスメント・モード・トランジスタが、第3のソース電極及び第3のドレイン電極を含み、各々の前記複数の窒化ガリウムに基づくエンハンスメント・モード・トランジスタの前記第3のゲート電極が、それ自体の対応する第3のソース電極と第3のドレイン電極との間で等距離である、請求項1及び2から7までのいずれか一項に記載の半導体集積回路。
- 各々の前記第1の複数の窒化ガリウムに基づくデプレッション・モード・トランジスタが、第1のソース電極及び第1のドレイン電極を含み、各々の前記第1の複数の窒化ガリウムに基づくデプレッション・モード・トランジスタの前記第1のゲート電極が、それ自体の対応する第1のドレイン電極までよりも、それ自体の対応する第1のソース電極に近い、請求項1及び2から8までのいずれか一項に記載の半導体集積回路。
- 基板と、
前記基板の第1の領域上に形成された無線周波数(RF)パワー増幅器であって、前記RFパワー増幅器が、第1の複数の窒化ガリウムに基づくデプレッション・モード・トランジスタを含み、各々の前記第1の複数の窒化ガリウムに基づくデプレッション・モード・トランジスタが、第1のゲート電極を含む、前記RFパワー増幅器と、
前記基板の第2の領域上の第2の複数の窒化ガリウムに基づくデプレッション・モード・トランジスタであって、各々の前記第2の複数の窒化ガリウムに基づくデプレッション・モード・トランジスタが、第2のゲート電極を含む、前記第2の複数の窒化ガリウムに基づくデプレッション・モード・トランジスタと、
前記基板の前記第2の領域上に形成されたデジタル回路であって、前記デジタル回路が、複数の窒化ガリウムに基づくエンハンスメント・モード・トランジスタを含み、各々の前記複数の窒化ガリウムに基づくエンハンスメント・モード・トランジスタが、第3のゲート電極を含む、前記デジタル回路と
を備え、
前記第1の複数の窒化ガリウムに基づくデプレッション・モード・トランジスタのうちの1つの第1のゲート電極の幅は、前記第2の複数の窒化ガリウムに基づくデプレッション・モード・トランジスタのうちの1つの第2のゲート電極の幅よりも大きいか、又は前記複数の窒化ガリウムに基づくエンハンスメント・モード・トランジスタのうちの1つの第3のゲート電極の幅よりも大きい、半導体集積回路。
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US20230188100A1 (en) | 2021-12-10 | 2023-06-15 | Wolfspeed, Inc. | Group iii nitride based depletion mode differential amplifiers and related rf transistor amplifier circuits |
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