JP7237042B2 - 流体供給ユニット及びこれを有する基板処理装置 - Google Patents
流体供給ユニット及びこれを有する基板処理装置 Download PDFInfo
- Publication number
- JP7237042B2 JP7237042B2 JP2020116775A JP2020116775A JP7237042B2 JP 7237042 B2 JP7237042 B2 JP 7237042B2 JP 2020116775 A JP2020116775 A JP 2020116775A JP 2020116775 A JP2020116775 A JP 2020116775A JP 7237042 B2 JP7237042 B2 JP 7237042B2
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- Prior art keywords
- fluid
- substrate
- supply unit
- vent line
- supply pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0021—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by liquid gases or supercritical fluids
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L55/00—Devices or appurtenances for use in, or in connection with, pipes or pipe systems
- F16L55/04—Devices damping pulsations or vibrations in fluids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L55/00—Devices or appurtenances for use in, or in connection with, pipes or pipe systems
- F16L55/07—Arrangement or mounting of devices, e.g. valves, for venting or aerating or draining
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02101—Cleaning only involving supercritical fluids
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Description
410 ハウジング
420 カップ
440 支持ユニット
500 洗浄装置
600 液供給ユニット
610 流体供給源
620 供給ライン
630 ポンプ
640 ベントライン
650 レジャーバー
660 開閉バルブ
Claims (9)
- 基板を処理する装置において、
基板を処理する処理空間を有する工程チャンバーと、
前記処理空間に流体を供給する流体供給ユニットと、
を含み、
前記流体供給ユニットは、
前記処理空間と連結されて、前記処理空間に供給される流体が流れる供給管と、
前記供給管に設置されて前記流体に流動圧を提供するポンプと、
前記ポンプと前記工程チャンバーとの間に設置されて前記流体内の圧力を前記装置の外部に排出するベントラインと、
前記ベントラインに設置されて前記ベントラインを開閉するリリーフバルブと、
前記ベントラインが前記供給管で分岐される分岐点と前記ポンプとの間に設置され、前記ポンプと前記分岐点との間に位置した前記供給管の横断面より広い横断面を有する流路拡大管と、
を有する、
基板処理装置。 - 前記流路拡大管は、配管形状を有する、請求項1に記載の基板処理装置。
- 前記流路拡大管は、両端が前記供給管の横断面と同一であり、中央に行くほど、その横断面が広くなる、請求項1に記載の基板処理装置。
- 前記流体は、超臨界状態の流体である、請求項1に記載の基板処理装置。
- 前記流路拡大管には、流体の圧力ハンティング現象を抑制するための慣性を有する慣性用流体が貯蔵され、
前記慣性用流体は、二酸化炭素が含まれた液体である、
請求項1に記載の基板処理装置。 - 流体供給ユニットにおいて、
流体が流れる供給管と、
前記供給管に設置されて前記流体に流動圧を提供するポンプと、
前記ポンプ後段に設置されて前記流体内の圧力を前記流体供給ユニットの外部に排出するベントラインと、
前記ベントラインに設置されて前記ベントラインを開閉するリリーフバルブと、
を含み、
前記供給管は、
前記ポンプと前記ベントラインが前記供給管から分岐される分岐点の間に設置され、前記供給管内の圧力変動を緩和させるように前記供給管の横断面より広い横断面を有する流路拡大管
を含む、
流体供給ユニット。 - 前記流体は、超臨界状態の流体である、請求項6に記載の流体供給ユニット。
- 前記流路拡大管には、流体の圧力ハンティング現象を抑制するための慣性を有する慣性用流体が貯蔵され、
前記慣性用流体は、二酸化炭素が含まれた液体である、
請求項6に記載の流体供給ユニット。 - 前記流路拡大管は、両端が前記供給管の横断面と同一であり、中央に行くほど、その横断面が広くなる、請求項6に記載の流体供給ユニット。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2019-0083113 | 2019-07-10 | ||
KR1020190083113A KR102247680B1 (ko) | 2019-07-10 | 2019-07-10 | 유체 공급유닛 및 이를 갖는 기판 처리 장치 |
Publications (2)
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JP2021015971A JP2021015971A (ja) | 2021-02-12 |
JP7237042B2 true JP7237042B2 (ja) | 2023-03-10 |
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Application Number | Title | Priority Date | Filing Date |
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JP2020116775A Active JP7237042B2 (ja) | 2019-07-10 | 2020-07-07 | 流体供給ユニット及びこれを有する基板処理装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US11794220B2 (ja) |
JP (1) | JP7237042B2 (ja) |
KR (1) | KR102247680B1 (ja) |
CN (1) | CN112216630A (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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KR20230033256A (ko) | 2021-08-31 | 2023-03-08 | 삼성전자주식회사 | 기판 이송 유닛, 기판 처리 장치, 및 기판 처리 방법 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008177205A (ja) | 2007-01-16 | 2008-07-31 | Sony Corp | 洗浄装置および洗浄方法 |
JP2008182034A (ja) | 2007-01-24 | 2008-08-07 | Sony Corp | 基体処理方法及び基体処理装置 |
JP2012136423A (ja) | 2010-12-27 | 2012-07-19 | Mitsubishi Chemicals Corp | 窒化物結晶の製造方法および結晶製造装置 |
JP2018093110A (ja) | 2016-12-06 | 2018-06-14 | 東京エレクトロン株式会社 | 超臨界流体製造装置および基板処理装置 |
Family Cites Families (10)
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KR20020032173A (ko) | 2000-10-26 | 2002-05-03 | 윤종용 | 웨이퍼 냉각을 위한 냉각 가스 공급장치 |
KR101363265B1 (ko) * | 2011-06-30 | 2014-02-13 | 세메스 주식회사 | 기판처리장치 및 초임계유체 배출방법 |
KR101536724B1 (ko) * | 2012-05-31 | 2015-07-16 | 세메스 주식회사 | 기판 처리 장치 및 기판 처리 방법 |
IN2013MU02552A (ja) * | 2013-08-02 | 2015-06-12 | Deere & Co | |
US9829139B2 (en) * | 2015-02-19 | 2017-11-28 | Robert Bosch Gmbh | Method of dampening pressure pulsations in a working fluid within a conduit |
KR20170133694A (ko) * | 2016-05-26 | 2017-12-06 | 세메스 주식회사 | 유체 공급 유닛, 이를 가지는 기판 처리 장치 및 방법 |
JP2018066548A (ja) * | 2016-10-21 | 2018-04-26 | 株式会社東芝 | 熱交換器及び空気調和装置 |
CN108266367A (zh) * | 2016-12-30 | 2018-07-10 | 亚申科技研发中心(上海)有限公司 | 流体输送装置 |
KR20180099053A (ko) | 2017-02-28 | 2018-09-05 | 양재구 | 체크밸브 슬램 및 수충격 방지용 회동댐퍼를 구비하는 수배관 시스템 및 이를 위한 압력탱크 연결구 |
CN207345426U (zh) * | 2017-10-17 | 2018-05-11 | 湖南中铁五新重工有限公司 | 一种车用空调及换热*** |
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2019
- 2019-07-10 KR KR1020190083113A patent/KR102247680B1/ko active IP Right Grant
-
2020
- 2020-07-07 JP JP2020116775A patent/JP7237042B2/ja active Active
- 2020-07-09 CN CN202010658763.0A patent/CN112216630A/zh active Pending
- 2020-07-09 US US16/924,633 patent/US11794220B2/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008177205A (ja) | 2007-01-16 | 2008-07-31 | Sony Corp | 洗浄装置および洗浄方法 |
JP2008182034A (ja) | 2007-01-24 | 2008-08-07 | Sony Corp | 基体処理方法及び基体処理装置 |
JP2012136423A (ja) | 2010-12-27 | 2012-07-19 | Mitsubishi Chemicals Corp | 窒化物結晶の製造方法および結晶製造装置 |
JP2018093110A (ja) | 2016-12-06 | 2018-06-14 | 東京エレクトロン株式会社 | 超臨界流体製造装置および基板処理装置 |
Also Published As
Publication number | Publication date |
---|---|
US11794220B2 (en) | 2023-10-24 |
US20210008606A1 (en) | 2021-01-14 |
KR20210008192A (ko) | 2021-01-21 |
CN112216630A (zh) | 2021-01-12 |
JP2021015971A (ja) | 2021-02-12 |
KR102247680B1 (ko) | 2021-05-04 |
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