JP7231106B2 - 保管棚 - Google Patents
保管棚 Download PDFInfo
- Publication number
- JP7231106B2 JP7231106B2 JP2022505012A JP2022505012A JP7231106B2 JP 7231106 B2 JP7231106 B2 JP 7231106B2 JP 2022505012 A JP2022505012 A JP 2022505012A JP 2022505012 A JP2022505012 A JP 2022505012A JP 7231106 B2 JP7231106 B2 JP 7231106B2
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- JP
- Japan
- Prior art keywords
- module
- shelf
- pipe
- wiring
- main
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/14—Stack holders or separators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67389—Closed carriers characterised by atmosphere control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67389—Closed carriers characterised by atmosphere control
- H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2207/00—Indexing codes relating to constructional details, configuration and additional features of a handling device, e.g. Conveyors
- B65G2207/22—Heat or fire protection
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2207/00—Indexing codes relating to constructional details, configuration and additional features of a handling device, e.g. Conveyors
- B65G2207/30—Modular constructions
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Inorganic Insulating Materials (AREA)
- Memory System Of A Hierarchy Structure (AREA)
Description
Claims (5)
- 本体フレームと、
前記本体フレームに着脱可能に設けられるベースプレートと、前記ベースプレートに設けられた供給ノズルと、を有する、複数の棚モジュールと、
供給源から供給されるパージガスが流通するメイン配管と、
前記メイン配管に設けられると共に前記メイン配管から流路を分岐させる第一分岐部と、を備え、
前記棚モジュールには、前記供給ノズルに供給する前記パージガスの流量を調整する流量制御装置が設けられており、
前記第一分岐部には、流路を開閉する開閉バルブを介してモジュール配管が接続され、
前記モジュール配管には、前記流量制御装置を介して前記供給ノズルが接続され、
前記供給ノズルは、前記開閉バルブ及び前記流量制御装置を介して前記メイン配管に接続されており、
前記モジュール配管は、前記開閉バルブに対して着脱自在に設けられている、保管棚。 - 前記棚モジュールには、複数の前記供給ノズルと、複数の前記供給ノズルのそれぞれに対応する複数の前記流量制御装置とが設けられており、
前記保管棚は、前記モジュール配管に設けられると共に前記モジュール配管から流路を分岐させる第二分岐部を更に備え、
複数の前記流量制御装置のそれぞれは、前記第二分岐部を介して前記モジュール配管に接続されている、請求項1記載の保管棚。 - 前記モジュール配管及び/又は前記開閉バルブは、前記本体フレームに支持されている、請求項1又は2記載の保管棚。
- 前記本体フレームは、天井又は天井に固定された部材から吊り下げられ、一方向に配列される吊り下げ部材であり、
前記ベースプレートは、前記一方向に配列された前記本体フレームに架け渡されており、
前記モジュール配管及び/又は前記開閉バルブは、前記ベースプレートとは異なる部材であって、前記一方向に配列された前記本体フレームに架け渡される跨ぎ部材に支持されている、請求項1~3の何れか一項記載の保管棚。 - メインコントローラ又は電源に接続されているメイン配線と、
前記棚モジュールに設けられた前記流量制御装置又は前記供給ノズルに接続されたモジュール配線であって、容器を検出する検出センサに接続される前記モジュール配線と、
前記メイン配線に設けられており、前記メイン配線から電気的に分岐させると共に、前記モジュール配線を着脱可能に接続する第三分岐部と、を更に備える、請求項1~4の何れか一項記載の保管棚。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020037929 | 2020-03-05 | ||
JP2020037929 | 2020-03-05 | ||
PCT/JP2021/001632 WO2021176865A1 (ja) | 2020-03-05 | 2021-01-19 | 保管棚 |
Publications (3)
Publication Number | Publication Date |
---|---|
JPWO2021176865A1 JPWO2021176865A1 (ja) | 2021-09-10 |
JPWO2021176865A5 JPWO2021176865A5 (ja) | 2022-08-26 |
JP7231106B2 true JP7231106B2 (ja) | 2023-03-01 |
Family
ID=77613098
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022505012A Active JP7231106B2 (ja) | 2020-03-05 | 2021-01-19 | 保管棚 |
Country Status (8)
Country | Link |
---|---|
US (1) | US20230134774A1 (ja) |
EP (1) | EP4112506A4 (ja) |
JP (1) | JP7231106B2 (ja) |
KR (1) | KR20220103789A (ja) |
CN (1) | CN115175867B (ja) |
IL (1) | IL295872A (ja) |
TW (1) | TW202139334A (ja) |
WO (1) | WO2021176865A1 (ja) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015166710A1 (ja) | 2014-04-28 | 2015-11-05 | 村田機械株式会社 | パージ装置及びパージ方法 |
JP2015533026A (ja) | 2012-10-31 | 2015-11-16 | 株式会社ダイフク | ウェハパージ可能な天井保管装置(apparatusforstockingandpurgingwaferatceiling) |
WO2018150698A1 (ja) | 2017-02-20 | 2018-08-23 | 村田機械株式会社 | パージストッカ |
JP2019108220A (ja) | 2017-12-20 | 2019-07-04 | 株式会社ダイフク | 保管設備 |
WO2020017137A1 (ja) | 2018-07-20 | 2020-01-23 | 村田機械株式会社 | 保管棚及び保管棚の設置方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4144970B2 (ja) * | 1999-05-18 | 2008-09-03 | 株式会社日立国際電気 | 半導体製造方法及びその装置 |
US6506009B1 (en) * | 2000-03-16 | 2003-01-14 | Applied Materials, Inc. | Apparatus for storing and moving a cassette |
CN103086108A (zh) * | 2011-11-08 | 2013-05-08 | 南通金恒不锈钢制管有限公司 | 一种改进的货架 |
US9875921B2 (en) * | 2015-05-07 | 2018-01-23 | Fabmatics Gmbh | Flexible purge management system |
CN106477229A (zh) * | 2015-08-26 | 2017-03-08 | 衡阳华瑞电气有限公司 | 一种u形管放置架 |
-
2021
- 2021-01-19 JP JP2022505012A patent/JP7231106B2/ja active Active
- 2021-01-19 CN CN202180016504.0A patent/CN115175867B/zh active Active
- 2021-01-19 EP EP21763225.6A patent/EP4112506A4/en active Pending
- 2021-01-19 IL IL295872A patent/IL295872A/en unknown
- 2021-01-19 US US17/908,145 patent/US20230134774A1/en active Pending
- 2021-01-19 KR KR1020227021400A patent/KR20220103789A/ko not_active Application Discontinuation
- 2021-01-19 WO PCT/JP2021/001632 patent/WO2021176865A1/ja unknown
- 2021-03-02 TW TW110107230A patent/TW202139334A/zh unknown
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015533026A (ja) | 2012-10-31 | 2015-11-16 | 株式会社ダイフク | ウェハパージ可能な天井保管装置(apparatusforstockingandpurgingwaferatceiling) |
WO2015166710A1 (ja) | 2014-04-28 | 2015-11-05 | 村田機械株式会社 | パージ装置及びパージ方法 |
WO2018150698A1 (ja) | 2017-02-20 | 2018-08-23 | 村田機械株式会社 | パージストッカ |
JP2019108220A (ja) | 2017-12-20 | 2019-07-04 | 株式会社ダイフク | 保管設備 |
WO2020017137A1 (ja) | 2018-07-20 | 2020-01-23 | 村田機械株式会社 | 保管棚及び保管棚の設置方法 |
Also Published As
Publication number | Publication date |
---|---|
CN115175867A (zh) | 2022-10-11 |
JPWO2021176865A1 (ja) | 2021-09-10 |
WO2021176865A1 (ja) | 2021-09-10 |
EP4112506A1 (en) | 2023-01-04 |
US20230134774A1 (en) | 2023-05-04 |
EP4112506A4 (en) | 2024-04-03 |
CN115175867B (zh) | 2024-06-18 |
IL295872A (en) | 2022-10-01 |
KR20220103789A (ko) | 2022-07-22 |
TW202139334A (zh) | 2021-10-16 |
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