JP7222581B2 - 隔離されたiii-n半導体デバイス - Google Patents
隔離されたiii-n半導体デバイス Download PDFInfo
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- JP7222581B2 JP7222581B2 JP2021043162A JP2021043162A JP7222581B2 JP 7222581 B2 JP7222581 B2 JP 7222581B2 JP 2021043162 A JP2021043162 A JP 2021043162A JP 2021043162 A JP2021043162 A JP 2021043162A JP 7222581 B2 JP7222581 B2 JP 7222581B2
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- 239000004065 semiconductor Substances 0.000 title claims description 52
- 230000004888 barrier function Effects 0.000 claims description 58
- 239000000758 substrate Substances 0.000 claims description 57
- 238000002955 isolation Methods 0.000 claims description 39
- 229910002601 GaN Inorganic materials 0.000 claims description 37
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 37
- 239000000463 material Substances 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 20
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 10
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 7
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 7
- 229910052782 aluminium Inorganic materials 0.000 claims description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 7
- 229910052733 gallium Inorganic materials 0.000 claims description 7
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 7
- 230000007547 defect Effects 0.000 description 21
- 239000004020 conductor Substances 0.000 description 17
- 230000015572 biosynthetic process Effects 0.000 description 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 13
- 229910052710 silicon Inorganic materials 0.000 description 13
- 239000010703 silicon Substances 0.000 description 13
- 238000004519 manufacturing process Methods 0.000 description 10
- 239000002019 doping agent Substances 0.000 description 9
- 230000005533 two-dimensional electron gas Effects 0.000 description 6
- 235000012431 wafers Nutrition 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 230000005641 tunneling Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 239000003989 dielectric material Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000004952 Polyamide Substances 0.000 description 2
- 239000002800 charge carrier Substances 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 239000007943 implant Substances 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229920002647 polyamide Polymers 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 229910002704 AlGaN Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- AUCDRFABNLOFRE-UHFFFAOYSA-N alumane;indium Chemical compound [AlH3].[In] AUCDRFABNLOFRE-UHFFFAOYSA-N 0.000 description 1
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 1
- NWAIGJYBQQYSPW-UHFFFAOYSA-N azanylidyneindigane Chemical compound [In]#N NWAIGJYBQQYSPW-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
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Description
Claims (18)
- 半導体デバイスであって、
基板と、
前記基板の上の窒化ガリウム層と、
前記窒化ガリウム層上のIII-N半導体材料を含む障壁層と、
前記障壁層上の窒化ガリウムを含むキャップ層と、
前記キャップ層上の窒化シリコン層と、
前記窒化ガリウム層と前記基板との間のドープされた層であって、前記基板に直接に接する、前記ドープされた層と、
前記窒化シリコン層と前記キャップ層とを通じて前記障壁層内に延びるソースコンタクトと、
前記ソースコンタクトから前記ドープされた層に延びる第1の導電性ビアと、
前記窒化シリコン層と前記キャップ層とを通じて前記障壁層内に延びて前記障壁層を貫通しないドレインコンタクトと、
前記ソースコンタクトと前記ドレインコンタクトとの間の前記窒化シリコン層上のゲートコンタクトと、
前記半導体デバイスが隔離電圧を有し、
前記窒化ガリウム層の第1の端と前記障壁層の第1の端と前記ドープされた層の第1の端とに沿った第1の誘電体充填トレンチと、
前記窒化ガリウム層の第2の端と前記障壁層の第2の端と前記ドープされた層の第2の端とに沿った第2の誘電体充填トレンチと、
を含む、半導体デバイス。 - 請求項1に記載の半導体デバイスであって、
前記ドレインコンタクトと前記ドープされた層との間の第2の導電性ビアを更に含む、半導体デバイス。 - 請求項1に記載の半導体デバイスであって、
前記第1の誘電体充填トレンチと前記第2の誘電体充填トレンチとの間に第1のトランジスタが形成される、半導体デバイス。 - 請求項3に記載の半導体デバイスであって、
第2のトランジスタが第1のトランジスタに近接して形成され、前記第2のトランジスタが前記第1の誘電体充填トレンチにより前記第1のトランジスタから隔離される、半導体デバイス。 - 請求項4に記載の半導体デバイスであって、
第3の誘電体充填トレンチを更に含み、
前記第2のトランジスタが、前記第1の誘電体充填トレンチと前記第3の誘電体充填トレンチとの間に位置し、前記第1の誘電体充填トレンチと前記第3の誘電体充填トレンチとの間の前記ドープされた層の一部を含む、半導体デバイス。 - 請求項5に記載の半導体デバイスであって、
前記第2のトランジスタが、第2のソースコンタクトと、前記第2のソースコンタクトと前記ドープされた層の一部との間の導電性部材とを含む、半導体デバイス。 - 請求項1に記載の半導体デバイスであって、
前記ドープされた層に近接する窒化アルミニウム層を更に含む、半導体デバイス。 - 請求項7に記載の半導体デバイスであって、
前記窒化アルミニウム層に近接するバッファ層であって、前記窒化アルミニウム層に近接する第1の層と前記窒化アルミニウム層から離れて前記第1の層に近接する第2の層とを含み、前記第1及び第2の層がアルミニウムとガリウムとを含み、前記第1の層が前記第2の層よりもより多いアルミニウムを含んでより少ないガリウムを含む、前記バッファ層を更に含む、半導体デバイス。 - 請求項8に記載の半導体デバイスであって、
前記バッファ層に近接する第2の窒化ガリウム層を更に含む、半導体デバイス。 - 半導体デバイスを形成する方法であって、
第1の導電型を有する基板の上に窒化ガリウム層を形成することと、
前記窒化ガリウム層上にIII-N半導体材料を含む障壁層を形成することと、
前記窒化ガリウム層と前記基板との間に第2の導電型のドープされた層を形成することであって、前記ドープされた層が前記基板に直接に接する、前記ドープされた層を形成することと、
前記障壁層から前記ドープされた層に延びる第1の導電性ビアを形成することと、
前記障壁層内に延びて前記第1の導電性ビアに接するソースコンタクトを形成することと、
前記障壁層内に前記障壁層を貫通せずに延びるドレインコンタクトを形成することと、
前記ソースコンタクトと前記ドレインコンタクトとの間にゲートコンタクトを形成することと、
前記窒化ガリウム層の第1の端と前記障壁層の第1の端と前記ドープされた層の第1の端とに沿って第1の誘電体充填トレンチを形成することと、
前記窒化ガリウム層の第2の端と前記障壁層の第2の端と前記ドープされた層の第2の端とに沿って第2の誘電体充填トレンチを形成することと、
を含み、
前記第1の誘電体充填トレンチと前記第2の誘電体充填トレンチとが前記基板内に延びる、方法。 - 請求項10に記載の方法であって、
前記ドレインコンタクトと前記ドープされた層との間に第2の導電性ビアを形成することを更に含む、方法。 - 請求項10に記載の方法であって、
第1のトランジスタが前記第1の誘電体充填トレンチと前記第2の誘電体充填トレンチとの間に形成される、方法。 - 請求項12に記載の方法であって、
第2のトランジスタが前記第1のトランジスタに近接して形成され、前記第2のトランジスタが前記第1の誘電体充填トレンチによって前記第1のトランジスタから隔離される、方法。 - 請求項13に記載の方法であって、
第3の誘電体充填トレンチを形成することを更に含み、
前記第2のトランジスタが、前記第1の誘電体充填トレンチと前記第3の誘電体充填トレンチとの間に位置し、前記第1の誘電体充填トレンチと第3の誘電体充填トレンチとの間に延びる前記ドープされた層の一部を含む、方法。 - 請求項14に記載の方法であって、
第2のソースコンタクトを形成することと、
前記第2のソースコンタクトと前記ドープされた層の一部との間に導電性部材を形成することと、
を更に含み、
前記第2のトランジスタが前記第2のソースコンタクトと前記導電性部材とを含む、方法。 - 請求項10に記載の方法であって、
前記ドープされた層に近接して窒化アルミニウム層を形成することを更に含む、方法。 - 請求項16に記載の方法であって、
前記窒化アルミニウム層に近接してバッファ層を形成することであって、前記バッファ層が、前記窒化アルミニウム層に近接する第1の層と、前記窒化アルミニウム層から離れて前記第1の層に近接する第2の層とを含み、前記第1の層と前記第2の層とがアルミニウムとガリウムとを含み、前記第1の層が、前記第2の層よりもより多いアルミニウムを含み、前記第2の層よりもより少ないガリウムを含む、方法。 - 請求項17に記載の方法であって、
前記バッファ層に近接して第2の窒化ガリウム層を形成することを更に含む、方法。
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US11296190B2 (en) * | 2020-01-15 | 2022-04-05 | Globalfoundries U.S. Inc. | Field effect transistors with back gate contact and buried high resistivity layer |
US11251294B2 (en) * | 2020-03-24 | 2022-02-15 | Infineon Technologies Austria Ag | High voltage blocking III-V semiconductor device |
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US11515397B2 (en) | 2020-07-21 | 2022-11-29 | Globalfoundries U.S. Inc. | III-V compound semiconductor layer stacks with electrical isolation provided by a trap-rich layer |
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US11569374B2 (en) | 2020-12-02 | 2023-01-31 | Globalfoundries U.S. Inc. | Implanted isolation for device integration on a common substrate |
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