JP7220663B2 - バルブ - Google Patents
バルブ Download PDFInfo
- Publication number
- JP7220663B2 JP7220663B2 JP2019546307A JP2019546307A JP7220663B2 JP 7220663 B2 JP7220663 B2 JP 7220663B2 JP 2019546307 A JP2019546307 A JP 2019546307A JP 2019546307 A JP2019546307 A JP 2019546307A JP 7220663 B2 JP7220663 B2 JP 7220663B2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- connection
- closure member
- valve rod
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000000903 blocking effect Effects 0.000 claims description 32
- 239000012530 fluid Substances 0.000 claims description 29
- 238000000034 method Methods 0.000 claims description 18
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 230000001105 regulatory effect Effects 0.000 claims description 6
- 229910001092 metal group alloy Inorganic materials 0.000 claims description 2
- 239000002245 particle Substances 0.000 description 8
- 238000007789 sealing Methods 0.000 description 8
- 230000008569 process Effects 0.000 description 6
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- 230000005489 elastic deformation Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 230000008439 repair process Effects 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000499 gel Substances 0.000 description 1
- 239000010720 hydraulic oil Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
- F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
- F16B2200/00—Constructional details of connections not covered for in other groups of this subclass
- F16B2200/89—Use of a hydraulic action
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/0254—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor being operated by particular means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
- F16K3/188—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of hydraulic forces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Lift Valve (AREA)
- Check Valves (AREA)
- Self-Closing Valves And Venting Or Aerating Valves (AREA)
- Sliding Valves (AREA)
- Details Of Valves (AREA)
- Clamps And Clips (AREA)
Description
Claims (8)
- バルブ開口部(3)を閉塞するための少なくとも1つの閉塞部材(2)と、少なくとも1つのバルブロッド(4)と、を備えたバルブ(1)であって、
前記バルブロッド(4)の内側または外側に少なくとも1つの第1連結部(5)が配置され、閉塞部材(2)の内側または外側に少なくとも1つの第2連結部(6)が配置され、前記第1連結部(5)が前記第2連結部(6)に連結されることにより前記閉塞部材(2)が前記バルブロッド(4)に対して固定されるまたは固定可能であり、
前記第1連結部(5)および前記第2連結部(6)のうち少なくとも一方が、少なくとも1つの弾性的に変形可能な境界壁(7)により画定された、流体のための少なくとも1つの圧力チャンバ(8)を備え、
前記圧力チャンバ(8)に配置された流体によって、前記第1連結部(5)および前記第2連結部(6)の挟持式連結を形成するため、前記境界壁(7)が弾性変形可能であり、
前記圧力チャンバ(8)の内部の流体を遮断するまたは解放可能に遮断するための遮断要素(10)をさらに備え、
前記遮断要素(10)が、前記閉塞部材(2)、前記閉塞部材(2)に対してバルブロッド(4)により連結されている閉塞部材支持部材(13)、前記バルブロッド(4)、または、前記バルブロッド(4)もしくは前記閉塞部材(2)から導出されている流通経路(14)に配置されていることを特徴とするバルブ。 - 請求項1記載のバルブ(1)において、
弾性変形可能な前記境界壁(7)、前記第1連結部(5)および前記第2連結部(6)のうち少なくとも1つが少なくとも1種の金属または少なくとも1種の金属合金からなることを特徴とするバルブ。 - 請求項1または2記載のバルブ(1)において、
前記第1連結部(5)および前記第2連結部(6)のうち一方の連結部が収容キャビティ(9)を有し、前記第1連結部(5)および前記第2連結部(6)の挟持式連結状態において、前記第1連結部(5)および前記第2連結部(6)のうち他方の連結部が前記収容キャビティ(9)に配置されることを特徴とするバルブ。 - 請求項1~3のうちいずれか1項に記載のバルブ(1)において、
前記遮断要素(10)が、前記圧力チャンバ(8)の内部の流体の圧力を調整するための調整要素として構成されていることを特徴とするバルブ。 - 請求項1~4のうちいずれか1項に記載のバルブ(1)において、
前記遮断要素(10)が、ネジまたはウォームネジ(11)を有する、あるいは、ネジまたはウォームネジ(11)であることを特徴とするバルブ。 - 請求項1~5のうちいずれか1項に記載のバルブ(1)において、
前記遮断要素(10)が、弾性を有する圧力制限要素(12)を有することを特徴とするバルブ。 - 請求項1~6のうちいずれか1項に記載のバルブ(1)の前記閉塞部材(2)を前記バルブロッド(4)に取り付ける方法であって、
前記第1連結部(5)および前記第2連結部(6)が挟持式連結された状態で、前記圧力チャンバ(8)の内部の流体の圧力を上昇させることにより、前記境界壁(7)を弾性変形させることを特徴とする方法。 - 請求項1~6のうちいずれか1項に記載のバルブ(1)の前記閉塞部材(2)を前記バルブロッド(4)から取り外す方法であって、
前記第1連結部(5)および前記第2連結部(6)が挟持式連結された状態で、前記圧力チャンバ(8)の内部の流体の圧力を低下させることを特徴とする方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT1352017 | 2017-03-31 | ||
ATA135/2017 | 2017-03-31 | ||
PCT/EP2018/055435 WO2018177695A2 (de) | 2017-03-31 | 2018-03-06 | Ventil, insbesondere vakuumventil |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020515776A JP2020515776A (ja) | 2020-05-28 |
JP7220663B2 true JP7220663B2 (ja) | 2023-02-10 |
Family
ID=61627079
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019546307A Active JP7220663B2 (ja) | 2017-03-31 | 2018-03-06 | バルブ |
Country Status (6)
Country | Link |
---|---|
US (1) | US11215296B2 (ja) |
JP (1) | JP7220663B2 (ja) |
KR (1) | KR102478909B1 (ja) |
CN (1) | CN110520636A (ja) |
TW (1) | TWI761465B (ja) |
WO (1) | WO2018177695A2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111828663A (zh) * | 2020-08-05 | 2020-10-27 | 合肥中科离子医学技术装备有限公司 | 一种可高压差启动的真空插板阀 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002195424A (ja) | 2000-12-27 | 2002-07-10 | Smc Corp | ゲートバルブ |
JP2006046489A (ja) | 2004-08-04 | 2006-02-16 | Nippon Valqua Ind Ltd | 真空用ゲート弁 |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3202432A (en) * | 1963-03-07 | 1965-08-24 | Gordon N Cameron | Hydraulically actuated arbor and chuck construction |
DE3720281A1 (de) | 1987-06-19 | 1989-01-05 | Gelenkwellenbau Gmbh | Loesbare spannvorrichtung |
JPH0263906U (ja) * | 1988-11-01 | 1990-05-14 | ||
US4964432A (en) | 1990-03-19 | 1990-10-23 | Keystone International, Inc. | Method and means for mounting valve member on valve stem |
US5195838A (en) | 1990-04-17 | 1993-03-23 | Sidney Katz | Hydraulically securable and angularly adjustable gears |
DE19525574C1 (de) | 1995-07-13 | 1996-10-10 | Schunk Fritz Gmbh | Spannvorrichtung zum genauen gegenseitigen Fixieren zweier Bauteile |
DE10112087A1 (de) | 2001-03-12 | 2002-10-02 | Voith Safeset Ab Hudiksvall | Verfahren zum Druckaufbau in Verbindungskupplungen und Verbindungskupplung |
DE50302513D1 (de) * | 2003-11-05 | 2006-04-27 | Schunk Gmbh & Co Kg | Dehnspanneinrichtung |
US20050191122A1 (en) | 2004-03-01 | 2005-09-01 | Gethmann Douglas P. | Locking mechanism for a threaded connection |
KR100960030B1 (ko) | 2004-03-12 | 2010-05-28 | 배트 홀딩 아게 | 진공 게이트 밸브 |
DE102006018587A1 (de) * | 2006-04-21 | 2007-10-25 | Schaeffler Kg | Ventilbetätigungsvorrichtung, insbesondere für Gaswechselventile von Hubkolbenbrennkraftmaschinen |
DE102006018598A1 (de) * | 2006-04-21 | 2007-10-25 | Schaeffler Kg | Zwangssteuerung für ein Hubventil einer Brennkraftmaschine |
CH699258B1 (de) | 2006-07-11 | 2010-02-15 | Vat Holding Ag | Vakuumventil und Verschlussteller |
US7967300B2 (en) * | 2006-11-17 | 2011-06-28 | Hydra-Lock Corporation | Hydrostatically actuated workholding apparatus with high expansion and recovery sleeve |
DE102007059039A1 (de) | 2007-12-06 | 2009-06-18 | Vat Holding Ag | Vakuumventil |
EP2146122A1 (de) | 2008-07-18 | 2010-01-20 | VAT Holding AG | Vakuumventil und Verschlussteller für ein Vakuumventil |
DE102010009172B4 (de) * | 2010-02-24 | 2011-11-10 | Schunk Gmbh & Co. Kg Spann- Und Greiftechnik | Dehnspanndorn und Dehnspannfutter |
US8641014B2 (en) * | 2010-09-10 | 2014-02-04 | Applied Materials, Inc. | Gate valve |
JP5811320B2 (ja) | 2011-04-21 | 2015-11-11 | Smc株式会社 | ゲートバルブ |
KR101357104B1 (ko) * | 2012-10-24 | 2014-02-12 | 주식회사 에이엠지 | 챔버용 게이트밸브 구동장치 |
DE202013004696U1 (de) * | 2013-05-22 | 2014-08-26 | Schunk Gmbh & Co. Kg Spann- Und Greiftechnik | Dehnspanneinrichtung |
JP5963091B2 (ja) * | 2013-07-10 | 2016-08-03 | Smc株式会社 | 無摺動型ゲートバルブ |
EP2913573A1 (de) * | 2014-02-26 | 2015-09-02 | VAT Holding AG | Vakuumventil |
SE1551222A1 (en) | 2015-09-23 | 2017-03-24 | Etp Trans Ab | Hydraulic clamping device, system comprising such device andmethod of interconnecting a hub and a shaft |
-
2018
- 2018-03-06 WO PCT/EP2018/055435 patent/WO2018177695A2/de active Application Filing
- 2018-03-06 US US16/495,551 patent/US11215296B2/en active Active
- 2018-03-06 JP JP2019546307A patent/JP7220663B2/ja active Active
- 2018-03-06 CN CN201880022166.XA patent/CN110520636A/zh active Pending
- 2018-03-06 KR KR1020197027420A patent/KR102478909B1/ko active IP Right Grant
- 2018-03-09 TW TW107108080A patent/TWI761465B/zh active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002195424A (ja) | 2000-12-27 | 2002-07-10 | Smc Corp | ゲートバルブ |
JP2006046489A (ja) | 2004-08-04 | 2006-02-16 | Nippon Valqua Ind Ltd | 真空用ゲート弁 |
Also Published As
Publication number | Publication date |
---|---|
WO2018177695A3 (de) | 2019-02-28 |
TW201839303A (zh) | 2018-11-01 |
US20200096133A1 (en) | 2020-03-26 |
WO2018177695A2 (de) | 2018-10-04 |
CN110520636A (zh) | 2019-11-29 |
KR102478909B1 (ko) | 2022-12-16 |
US11215296B2 (en) | 2022-01-04 |
JP2020515776A (ja) | 2020-05-28 |
TWI761465B (zh) | 2022-04-21 |
KR20190131490A (ko) | 2019-11-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR101702170B1 (ko) | 용접된 다이어프램들을 위한 클램프 링 | |
US6629682B2 (en) | Vacuum valve | |
JP5816396B2 (ja) | 閉塞ユニット、真空バルブおよびバルブプレート | |
US7401760B2 (en) | Vacuum regulating valve | |
US8066258B2 (en) | Valve seat apparatus for use with fluid valves | |
CN102985730A (zh) | 用于流体调节器的阀杆和阀塞装置 | |
JP2008309255A (ja) | 逃がし弁 | |
JP6317255B2 (ja) | 複数の流体流動制御部材を有する流体弁 | |
JP7220663B2 (ja) | バルブ | |
JP6994259B2 (ja) | 分流弁 | |
KR20160130390A (ko) | 밸브 조립체 | |
KR20090114004A (ko) | 감압밸브 및 그 밸브의 제작방법 | |
KR20160129017A (ko) | 밸브 플런저 | |
JPH0160712B2 (ja) | ||
KR20200098689A (ko) | 밸브 장치 및 유체 제어 장치 | |
US20150211655A1 (en) | Valve arrangement | |
JP6033912B2 (ja) | ダイヤフラムバルブ | |
WO2019163879A1 (ja) | 減圧弁 | |
JP6534842B2 (ja) | ダイアフラムバルブ、流体制御装置およびこれらを用いた半導体製造方法 | |
KR20240116476A (ko) | 조절 가능한 가스 압력 감지 조립체를 갖는 압축 가스용 압력 조절기 | |
JP7069140B2 (ja) | 閉塞装置 | |
WO2023094591A1 (en) | Pressure regulator for compressed gas with adjustable gas pressure sensing assembly | |
JP2005180517A (ja) | ゲート弁 | |
KR20120124035A (ko) | 적어도 하나의 폐쇄부재를 가진 밸브 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20210118 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20220131 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220208 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220422 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220802 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220915 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20230110 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20230131 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7220663 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |