JP7144126B1 - 流量制御装置 - Google Patents
流量制御装置 Download PDFInfo
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- JP7144126B1 JP7144126B1 JP2022080423A JP2022080423A JP7144126B1 JP 7144126 B1 JP7144126 B1 JP 7144126B1 JP 2022080423 A JP2022080423 A JP 2022080423A JP 2022080423 A JP2022080423 A JP 2022080423A JP 7144126 B1 JP7144126 B1 JP 7144126B1
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- Prior art keywords
- flow
- flow rate
- opening
- control valve
- valve
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- 239000012530 fluid Substances 0.000 claims abstract description 16
- 238000005259 measurement Methods 0.000 claims abstract description 12
- 230000001629 suppression Effects 0.000 claims abstract description 7
- 238000005070 sampling Methods 0.000 claims description 5
- 230000004043 responsiveness Effects 0.000 abstract description 6
- 238000001514 detection method Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000013459 approach Methods 0.000 description 4
- 238000004891 communication Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005389 magnetism Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000012937 correction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0623—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the set value given to the control element
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A20/00—Water conservation; Efficient water supply; Efficient water use
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Flow Control (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
Abstract
Description
2:流量計
3:流量計基板
4:流量調節弁
5:ステッピングモータ
6:位置検出センサ
7:制御基板
8:流路
9:PFAチューブ
10:流入口
11:流出口
12:測定管
13:超音波センサ
14:超音波センサ
15:弁体
16:ダイヤフラム
17:ニードル
18:モータアクチュエータ
19:軸体
20:モータ軸
21:ばね部材
22:弁座
23:コネクタ基板
24:I/Oコネクタ
25:通信コネクタ
26:マグネット
50:外部制御機器
Claims (3)
- 流路を流れる流体の流量を測定する流量計と、
前記流路を流れる流体の流量を調節する流量調節弁と、
前記流量計の測定結果に基づき前記流量調節弁の開度を制御する制御部と、を備え、
前記流量調節弁の開度が全閉で、かつ、流量制御を開始した時点で、前記流量調節弁の開度を全閉から指定開度まで強制的に開くことにより前記流体の流れ出しを早める低流量急速バルブオープン機能と、
前記低流量急速バルブオープン機能の動作直後に、予め設定された待機時間に到達するか、又は、予め設定された流量閾値に到達するまで前記流量調節弁の開度を前記指定開度まで強制的に開いたままの状態で待機することによりオーバーシュートを抑制するオーバーシュート抑制機能と、を有する
ことを特徴とする流量制御装置。 - 前記低流量急速バルブオープン機能において、
前記流量調節弁の開度が全閉で、かつ、前記流量計で測定した瞬時流量値が0L/minの状態で、前記流量調節弁の開度を全閉から指定開度まで強制的に開くように設定されている
ことを特徴とする請求項1に記載の流量制御装置。 - 前記オーバーシュート抑制機能において、
指定変化量以下かつ指定サンプリング回数以上を検知した場合、又は、複数回連続で設定流量値以上を検知した場合に、前記予め設定された流量閾値に到達したと判断する
ことを特徴とする請求項1に記載の流量制御装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2022080423A JP7144126B1 (ja) | 2022-05-16 | 2022-05-16 | 流量制御装置 |
KR1020220139659A KR102553311B1 (ko) | 2022-05-16 | 2022-10-26 | 유량 제어 장치 |
CN202211398414.5A CN115857568A (zh) | 2022-05-16 | 2022-11-09 | 流量控制装置 |
US18/079,872 US12001231B2 (en) | 2022-05-16 | 2022-12-12 | Flow rate control device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2022080423A JP7144126B1 (ja) | 2022-05-16 | 2022-05-16 | 流量制御装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP7144126B1 true JP7144126B1 (ja) | 2022-09-29 |
JP2023168989A JP2023168989A (ja) | 2023-11-29 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022080423A Active JP7144126B1 (ja) | 2022-05-16 | 2022-05-16 | 流量制御装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US12001231B2 (ja) |
JP (1) | JP7144126B1 (ja) |
KR (1) | KR102553311B1 (ja) |
CN (1) | CN115857568A (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012002236A (ja) | 2010-05-17 | 2012-01-05 | Isuzu Motors Ltd | 流量制御弁の制御装置 |
WO2013115298A1 (ja) | 2012-02-03 | 2013-08-08 | 日立金属株式会社 | 流量制御装置及びプログラム |
JP2022083102A (ja) | 2020-11-24 | 2022-06-03 | 株式会社堀場エステック | 流体制御装置、流体制御方法、及び、流体制御装置用プログラム |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56149605A (en) * | 1980-04-23 | 1981-11-19 | Hitachi Ltd | Valve controller |
JPS5757298A (en) * | 1980-09-25 | 1982-04-06 | Tokyo Shibaura Electric Co | Flow rate control device for nuclear reactor coolant cleanup system |
JP2509556B2 (ja) * | 1985-04-30 | 1996-06-19 | 株式会社東芝 | 流量制御装置 |
JPS6214201A (ja) * | 1985-07-11 | 1987-01-22 | Mitsubishi Heavy Ind Ltd | 流量制御装置 |
JP4578607B2 (ja) | 2000-02-23 | 2010-11-10 | 株式会社堀場エステック | マスフローコントローラ |
US6655408B2 (en) * | 2001-06-13 | 2003-12-02 | Applied Materials, Inc. | Tunable ramp rate circuit for a mass flow controller |
JP5082989B2 (ja) * | 2008-03-31 | 2012-11-28 | 日立金属株式会社 | 流量制御装置、その検定方法及び流量制御方法 |
US8915262B2 (en) * | 2011-08-09 | 2014-12-23 | Hitachi Metals, Ltd. | Mass flow controller algorithm with adaptive valve start position |
JP5868796B2 (ja) * | 2012-07-03 | 2016-02-24 | 株式会社堀場エステック | 圧力制御装置、流量制御装置、及び、圧力制御装置用プログラム、流量制御装置用プログラム |
KR102155105B1 (ko) * | 2014-07-15 | 2020-09-11 | 히타치 긴조쿠 가부시키가이샤 | 유체의 유량을 제어하는 방법, 당해 방법을 실행하는 질량 유량 제어 장치 및 당해 질량 유량 제어 장치를 사용한 질량 유량 제어 시스템 |
JP7164938B2 (ja) * | 2017-07-31 | 2022-11-02 | 株式会社堀場エステック | 流量制御装置、流量制御方法、及び、流量制御装置用プログラム |
CN107607609A (zh) * | 2017-10-01 | 2018-01-19 | 江苏天瑞仪器股份有限公司 | 一种阀门开度自动修正的数字式气体流量控制器 |
JP7190186B2 (ja) * | 2017-11-30 | 2022-12-15 | 株式会社フジキン | 流量制御装置の自己診断方法 |
JP7224089B1 (ja) * | 2022-05-16 | 2023-02-17 | 東フロコーポレーション株式会社 | 流量制御装置 |
-
2022
- 2022-05-16 JP JP2022080423A patent/JP7144126B1/ja active Active
- 2022-10-26 KR KR1020220139659A patent/KR102553311B1/ko active IP Right Grant
- 2022-11-09 CN CN202211398414.5A patent/CN115857568A/zh active Pending
- 2022-12-12 US US18/079,872 patent/US12001231B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012002236A (ja) | 2010-05-17 | 2012-01-05 | Isuzu Motors Ltd | 流量制御弁の制御装置 |
WO2013115298A1 (ja) | 2012-02-03 | 2013-08-08 | 日立金属株式会社 | 流量制御装置及びプログラム |
JP2022083102A (ja) | 2020-11-24 | 2022-06-03 | 株式会社堀場エステック | 流体制御装置、流体制御方法、及び、流体制御装置用プログラム |
Also Published As
Publication number | Publication date |
---|---|
US20230367338A1 (en) | 2023-11-16 |
KR102553311B1 (ko) | 2023-07-07 |
CN115857568A (zh) | 2023-03-28 |
US12001231B2 (en) | 2024-06-04 |
JP2023168989A (ja) | 2023-11-29 |
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