JP7121447B2 - 正確な温度及び流量制御を備えたマルチステーションチャンバリッド - Google Patents
正確な温度及び流量制御を備えたマルチステーションチャンバリッド Download PDFInfo
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- JP7121447B2 JP7121447B2 JP2021516578A JP2021516578A JP7121447B2 JP 7121447 B2 JP7121447 B2 JP 7121447B2 JP 2021516578 A JP2021516578 A JP 2021516578A JP 2021516578 A JP2021516578 A JP 2021516578A JP 7121447 B2 JP7121447 B2 JP 7121447B2
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Description
Claims (15)
- 処理チャンバリッドであって、
上面及び底面を有するリッド本体、
各開口部が外周エッジを有している、前記上面から前記リッド本体を通って前記底面まで延びる複数のステーション開口部、
前記複数のステーション開口部の各々の前記外周エッジの周りに延びるステーション分離パージチャネルであって、前記ステーション分離パージチャネルから前記リッド本体の前記底面まで延びる複数の開孔を有しており、前記複数の開孔が前記複数のステーション開口部の周りに間隔を空けて配置されている、ステーション分離パージチャネル、及び
隣接したステーション開口部間に前記リッド本体の中心部から前記リッド本体の外周エッジ部分まで延びる複数の角度付きパージチャネルであって、前記角度付きパージチャネルの各々が前記角度付きパージチャネルから前記リッド本体の前記底面まで延びる複数の間隔を空けた開孔を備えている、複数の角度付きパージチャネル
を備えている、処理チャンバリッド。 - 2つから6つの範囲のステーション開口部が存在する、請求項1に記載の処理チャンバリッド。
- 前記ステーション開口部の各々が同じ直径を有する、請求項2に記載の処理チャンバリッド。
- 前記ステーション開口部が少なくとも2つの異なる直径を有する、請求項2に記載の処理チャンバリッド。
- 前記ステーション分離パージチャネルが前記ステーション開口部の周りに複数の円形部分を含む、請求項4に記載の処理チャンバリッド。
- 前記ステーション分離パージチャネルが複数の入り口を備えている、請求項1に記載の処理チャンバリッド。
- 前記ステーション分離パージチャネルにステーション開口部と同数の入り口が存在する、請求項6に記載の処理チャンバリッド。
- 前記複数の角度付きパージチャネルが、前記リッド本体の中心部に位置する単一の入り口に接続している、請求項1に記載の処理チャンバリッド。
- 前記リッド本体の幅にわたって延びるリッド支持ビームをさらに備えており、前記リッド支持ビームが前記リッド本体の中心部に接続されている、請求項1に記載の処理チャンバリッド。
- 前記リッド支持ビームが、最大約5mmのたわみを補償するためにリッド本体の変形補償を提供するように構成されている、請求項9に記載の処理チャンバリッド。
- 前記リッド支持ビームが、コントローラと通信しているモータ/アクチュエータをさらに備えており、前記コントローラが、上面又は底面に向けられた力を前記リッド本体の中心部に提供するように構成されている、請求項10に記載の処理チャンバリッド。
- 高温計又はレベルファインダのうちの1つ以上を備えた、1つ以上のセンサをさらに含む、請求項1に記載の処理チャンバリッド。
- 処理方法であって、
複数のステーション開口部の外周エッジの周りに延びるステーション分離パージチャネルを通じてパージガスを流すことであって、前記ステーション分離パージチャネルが、処理ステーションの周りの処理チャンバの内部容積へと前記ステーション分離パージチャネルからリッド本体の底面まで延びる複数の開孔を有している、パージガスを流すこと、及び
隣接したステーション開口部間に前記リッド本体の中心部から前記リッド本体の外周エッジ部分まで延びる複数の角度付きパージチャネルを通じてパージガスを流すことであって、前記角度付きパージチャネルの各々が、前記角度付きパージチャネルから前記リッド本体の前記底面まで延び、前記パージガスを前記処理ステーション間の前記処理チャンバの前記内部容積に流す、複数の間隔を空けた開孔を含む、パージガスを流すこと
を含む、処理方法。 - 前記リッド本体の温度を制御すること、及び最大約5mmのたわみの変形補償を提供するように構成されたリッド支持ビームを使用して前記リッド本体のたわみを補償することをさらに含む、請求項13に記載の処理方法。
- 非一時的コンピュータ可読媒体であって、処理チャンバのコントローラによって実行されると、前記処理チャンバに次の動作:
複数のステーション開口部の外周エッジの周りに延びるステーション分離パージチャネルを通じてパージガスを流すことであって、前記ステーション分離パージチャネルが、処理ステーションの周りの処理チャンバの内部容積へと前記ステーション分離パージチャネルからリッド本体の底面まで延びる複数の開孔を有している、パージガスを流すこと、及び
隣接したステーション開口部間に前記リッド本体の中心部から前記リッド本体の外周エッジ部分まで延びる複数の角度付きパージチャネルを通じてパージガスを流すことであって、前記角度付きパージチャネルの各々が、前記角度付きパージチャネルから前記リッド本体の前記底面まで延び、前記パージガスを前記処理ステーション間の前記処理チャンバの前記内部容積に流す、複数の間隔を空けた開孔を含む、パージガスを流すこと
を実行させる命令を含む、非一時的コンピュータ可読媒体。
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