JP7100475B2 - Processing equipment - Google Patents

Processing equipment Download PDF

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Publication number
JP7100475B2
JP7100475B2 JP2018067874A JP2018067874A JP7100475B2 JP 7100475 B2 JP7100475 B2 JP 7100475B2 JP 2018067874 A JP2018067874 A JP 2018067874A JP 2018067874 A JP2018067874 A JP 2018067874A JP 7100475 B2 JP7100475 B2 JP 7100475B2
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plate
shaped work
holding
tub
cleaning member
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JP2019179830A (en
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裕樹 阿部
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Disco Corp
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Disco Corp
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Priority to JP2018067874A priority Critical patent/JP7100475B2/en
Priority to KR1020190028060A priority patent/KR102672866B1/en
Priority to CN201910215867.1A priority patent/CN110315435B/en
Priority to TW108110554A priority patent/TWI779181B/en
Publication of JP2019179830A publication Critical patent/JP2019179830A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
    • B08B1/14—Wipes; Absorbent members, e.g. swabs or sponges
    • B08B1/143—Wipes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
    • B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/34—Accessories
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/06—Dust extraction equipment on grinding or polishing machines

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)

Description

本発明は、板状ワークを加工する加工装置に関する。 The present invention relates to a processing apparatus for processing a plate-shaped work.

板状ワークを研削する研削装置は、保持テーブルの保持面で保持した板状ワークを、研削砥石を環状に配設した研削ホイールを回転させ研削砥石で研削している。そして、研削した板状ワークを保持テーブルから離脱させる前に保持テーブル上で被研削面を洗浄し、その後、搬出手段で板状ワークを保持し、保持テーブルから板状ワークを離間させ、保持テーブルに保持されていた板状ワークの下面（被保持面）を洗浄ブラシ（例えば、特許文献１参照）や洗浄スポンジで洗浄している。 The grinding device that grinds the plate-shaped work grinds the plate-shaped work held by the holding surface of the holding table by rotating the grinding wheel in which the grinding wheel is arranged in an annular shape. Then, the surface to be ground is washed on the holding table before the ground plate-shaped work is separated from the holding table, and then the plate-shaped work is held by the carrying-out means, the plate-shaped work is separated from the holding table, and the holding table is separated. The lower surface (held surface) of the plate-shaped work held in the table is cleaned with a cleaning brush (see, for example, Patent Document 1) or a cleaning sponge.

特開２００３－０４５８４１号公報Japanese Patent Application Laid-Open No. 2003-045841

しかし、板状ワークの下面の洗浄において、板状ワークに付着していたゴミが洗浄ブラシ又は洗浄スポンジに付着する。そして、そのゴミが板状ワークに再付着することで、板状ワークが十分に洗浄された状態にならないことがある。これを防ぐために、作業者が洗浄ブラシ又は洗浄スポンジの清掃を定期的に行っている。
よって、加工後の板状ワークの下面（被保持面）を洗浄する場合においては、作業者が洗浄ブラシ又は洗浄スポンジ等の洗浄部材の清掃作業を行わなくとも、綺麗な洗浄部材で板状ワークを継続して洗浄し続けることができるようにするという課題がある。 However, in cleaning the lower surface of the plate-shaped work, dust adhering to the plate-shaped work adheres to the cleaning brush or the cleaning sponge. Then, the dust may reattach to the plate-shaped work, so that the plate-shaped work may not be sufficiently cleaned. To prevent this, workers regularly clean the cleaning brush or cleaning sponge.
Therefore, when cleaning the lower surface (held surface) of the plate-shaped work after processing, the plate-shaped work is cleaned with a clean cleaning member without the need for the operator to clean the cleaning member such as a cleaning brush or a cleaning sponge. There is a problem of being able to continue cleaning.

上記課題を解決するための本発明は、保持面で板状ワークを保持する保持手段と、該保持面で保持した板状ワークを研削砥石で研削または研磨パッドで研磨する加工手段と、該加工手段で加工された板状ワークを該保持面に直交する方向で該保持面から離間させる搬出手段と、該搬出手段が保持する板状ワークの下面を洗浄する洗浄機構と、該保持面に平行なＹ軸方向に該保持手段を移動させる移動手段と、を備えた加工装置であって、該洗浄機構は、該Ｙ軸方向に対して水平面内において交差する方向で且つ該保持面に平行に板状ワークの長手方向の長さ以上に延在する円筒状のロール洗浄部材と、該ロール洗浄部材の中心軸を軸に回転させる回転手段と、該ロール洗浄部材の側面の一部を延在方向に細長く露出させた露出部を形成すると共に該ロール洗浄部材の該露出部以外を収容し水没させる桶と、該桶に貯水する水供給手段と、を備え、該移動手段によって該保持手段と共に該Ｙ軸方向に移動可能であり、該保持手段に対して、板状ワークの下面を洗浄する際の該保持手段の進行方向である＋Ｙ方向の反対側となる－Ｙ方向側に配置され、該水供給手段により供給される水を該桶の上部から溢れさせながら、該移動手段によって該洗浄機構を該＋Ｙ方向に進行させ、該桶内で回転する該ロール洗浄部材の該露出部を該搬出手段が保持した該板状ワークの下面に当接させ、該板状ワークの下面を洗浄する加工装置である。 The present invention for solving the above problems includes a holding means for holding a plate-shaped work on a holding surface, a processing means for grinding the plate-shaped work held on the holding surface with a grinding wheel or a polishing pad, and the processing. A carry-out means for separating the plate-shaped work processed by the means from the holding surface in a direction orthogonal to the holding surface, a cleaning mechanism for cleaning the lower surface of the plate-shaped work held by the carrying-out means, and parallel to the holding surface. A processing device including a moving means for moving the holding means in the Y-axis direction , wherein the cleaning mechanism intersects the Y-axis direction in a horizontal plane and is parallel to the holding surface. A cylindrical roll cleaning member extending beyond the length in the longitudinal direction of the plate-shaped work, a rotating means for rotating the central axis of the roll cleaning member as an axis, and a part of a side surface of the roll cleaning member extending. It is provided with a tub for forming an exposed portion elongated in the direction and accommodating and submerging other than the exposed portion of the roll cleaning member, and a water supply means for storing water in the tub, together with the holding means by the moving means. It is movable in the Y-axis direction, and is arranged on the −Y direction side opposite to the + Y direction, which is the traveling direction of the holding means when cleaning the lower surface of the plate-shaped work, with respect to the holding means. While overflowing the water supplied by the water supply means from the upper part of the tub, the cleaning mechanism is advanced in the + Y direction by the moving means, and the exposed portion of the roll cleaning member rotating in the tub is covered with the exposed portion. It is a processing device that abuts on the lower surface of the plate-shaped work held by the carrying-out means and cleans the lower surface of the plate-shaped work.

上記加工装置は、前記ロール洗浄部材の延在方向に平行に延び、板状ワークの下面を洗浄するために前記＋Ｙ方向に進行する前記洗浄機構よりも前記－Ｙ方向側に配設され、前記搬出手段が保持した板状ワークの下面にエアを噴射するエア噴射手段を備え、該洗浄機構を該＋Ｙ方向に進行させることにより洗浄された板状ワークの下面を該エアで後から追うように乾燥させると好ましい。 The processing apparatus is arranged on the −Y direction side of the cleaning mechanism that extends in parallel to the extending direction of the roll cleaning member and advances in the + Y direction in order to clean the lower surface of the plate-shaped work. An air injection means for injecting air to the lower surface of the plate-shaped work held by the carrying-out means is provided, and the lower surface of the plate-shaped work cleaned by advancing the cleaning mechanism in the + Y direction is followed by the air. It is preferable to dry it.

本発明に係る加工装置は、保持面で板状ワークを保持する保持手段と、搬出手段が保持する板状ワークの下面を洗浄する洗浄機構と、保持面に平行なＹ軸方向に保持手段を移動させる移動手段と、を備えた加工装置であって、洗浄機構は、Ｙ軸方向に対して水平面内において交差する方向で且つ保持面に平行に板状ワークの長手方向の長さ以上に延在する円筒状のロール洗浄部材と、ロール洗浄部材の中心軸を軸に回転させる回転手段と、ロール洗浄部材の側面の一部を延在方向に細長く露出させた露出部を形成すると共にロール洗浄部材の露出部以外を収容し水没させる桶と、桶に貯水する水供給手段と、を備え、移動手段によって保持手段と共にＹ軸方向に移動可能であり、保持手段に対して、板状ワークの下面を洗浄する際の保持手段の進行方向である＋Ｙ方向の反対側となる－Ｙ方向側に配置され、水供給手段により供給される水を桶の上部から溢れさせながら、移動手段によって洗浄機構を＋Ｙ方向に進行させ、桶内で回転するロール洗浄部材の露出部を搬出手段が保持した板状ワークの下面に当接させ、板状ワークの下面を洗浄するため、ワーク洗浄中にロール洗浄部材に付着したゴミを桶の水中で濯ぎ落として、洗浄中にロール洗浄部材から板状ワークにゴミを再付着させないようにして、綺麗なロール洗浄部材で継続して板状ワークの下面を洗浄できる。また、搬出手段が板状ワークを吸引保持可能な位置と、板状ワークを加工手段が加工可能な加工位置とに保持手段を移動させる移動手段によって、洗浄機構を板状ワークの下面を洗浄させるために移動させることが可能となるため、従来と異なり、洗浄機構を板状ワークの下面を洗浄させるために移動させる用途のみの移動機構を備えずに済み、装置の小型化、低コスト化を図ることが可能となる。さらに、移動手段によって保持手段と共に移動可能な洗浄機構が、保持手段に対して、板状ワークの下面を洗浄する際の保持手段の進行方向である＋Ｙ方向の反対側となる－Ｙ方向側（進行方向における保持手段の後方側）に配置されていることで、搬出手段が保持する板状ワークの下方を保持手段が通過した後に、洗浄機構により板状ワークの下面の洗浄が開始されるため、保持手段が洗浄後の板状ワークから垂れ落ちる洗浄水によって汚されることが無い。 The processing apparatus according to the present invention includes a holding means for holding the plate-shaped work on the holding surface, a cleaning mechanism for cleaning the lower surface of the plate-shaped work held by the carrying-out means, and a holding means in the Y-axis direction parallel to the holding surface. A processing device provided with a moving means for moving, wherein the cleaning mechanism extends beyond the longitudinal length of the plate-shaped work in a direction intersecting the Y-axis direction in the horizontal plane and parallel to the holding surface. A cylindrical roll cleaning member, a rotating means for rotating the central axis of the roll cleaning member, and an exposed portion in which a part of the side surface of the roll cleaning member is exposed in the extending direction are formed and the roll cleaning is performed. It is equipped with a tub for accommodating and submerging parts other than the exposed part of the member and a water supply means for storing water in the tub, and can be moved in the Y-axis direction together with the holding means by the moving means. The cleaning mechanism is arranged by the moving means while overflowing the water supplied by the water supply means from the upper part of the tub, which is arranged on the -Y direction side opposite to the + Y direction, which is the traveling direction of the holding means when cleaning the lower surface. In the + Y direction, the exposed part of the roll cleaning member rotating in the tub is brought into contact with the lower surface of the plate-shaped work held by the carrying-out means, and the lower surface of the plate-shaped work is cleaned. Rinse off the dust adhering to the member in the water of the tub to prevent the dust from reattaching from the roll cleaning member to the plate-shaped work during cleaning, and continuously clean the lower surface of the plate-shaped work with a clean roll cleaning member. can. Further, the cleaning mechanism cleans the lower surface of the plate-shaped work by the moving means for moving the holding means to the position where the carrying-out means can suck and hold the plate-shaped work and the processing position where the plate-shaped work can be machined. Therefore, unlike the conventional method, it is not necessary to have a moving mechanism only for the purpose of moving the cleaning mechanism to clean the lower surface of the plate-shaped work, which makes the device smaller and lower in cost. It is possible to plan. Further, the cleaning mechanism that can be moved together with the holding means by the moving means is opposite to the holding means in the + Y direction, which is the traveling direction of the holding means when cleaning the lower surface of the plate-shaped work. Since it is arranged on the rear side of the holding means in the traveling direction), the cleaning mechanism starts cleaning the lower surface of the plate-shaped work after the holding means passes under the plate-shaped work held by the carrying-out means. The holding means is not contaminated by the washing water dripping from the plate-shaped work after washing.

加工装置は、ロール洗浄部材の延在方向に平行に延び、板状ワークの下面を洗浄するために＋Ｙ方向に進行する洗浄機構よりも－Ｙ方向側に配設され、搬出手段が保持した板状ワークの下面にエアを噴射するエア噴射手段を備えることで、板状ワークの長手方向の長さ以上に延在するロール洗浄部材により洗浄された板状ワークの下面を、洗浄の後を追うようにエアで乾燥させることができるため、移動手段による板状ワークの一方向の洗浄送りで板状ワークの下面全面を洗浄及び乾燥させて洗浄時間を短縮することができる。 The processing apparatus is arranged in the −Y direction side of the cleaning mechanism that extends in parallel to the extending direction of the roll cleaning member and proceeds in the + Y direction to clean the lower surface of the plate-shaped work, and is held by the carrying-out means. By providing an air injection means for injecting air on the lower surface of the shaped work, the lower surface of the plate-shaped work cleaned by the roll cleaning member extending beyond the length in the longitudinal direction of the plate-shaped work is cleaned. Since it can be dried with air so as to follow the above, the entire lower surface of the plate-shaped work can be washed and dried by the one-way cleaning feed of the plate-shaped work by the moving means, and the cleaning time can be shortened.

加工装置の一例を示す斜視図である。It is a perspective view which shows an example of a processing apparatus. 洗浄機構及びエア噴射手段の一例を拡大して示す斜視図である。It is a perspective view which shows an enlarged example of a cleaning mechanism and an air injection means. 洗浄機構による板状ワークの下面の洗浄を開始した状態を示す斜視図である。It is a perspective view which shows the state which started the cleaning of the lower surface of a plate-shaped work by the cleaning mechanism. 洗浄機構により板状ワークの下面を洗浄し、エア噴射手段により板状ワークの下面を乾燥している状態を示す断面図である。It is sectional drawing which shows the state which the lower surface of a plate-shaped work is cleaned by the cleaning mechanism, and the lower surface of a plate-shaped work is dried by an air injection means.

図１に示す加工装置１は、保持手段３０に保持された板状ワークＷを研削砥石７４０を備える加工手段７により研削加工する装置であり、Ｙ軸方向に延びるベース１０と、ベース１０上の後部側（＋Ｙ方向側）に立設されたコラム１１とを備えている。なお、加工装置１は、回転可能に装着された研磨パッドによって板状ワークＷに研磨加工を施すことができる研磨装置であってもよい。 The processing device 1 shown in FIG. 1 is a device for grinding a plate-shaped work W held by the holding means 30 by a processing means 7 provided with a grinding wheel 740, and is a device that grinds the plate-shaped work W held by the holding means 30 on a base 10 extending in the Y-axis direction and on the base 10. It is provided with a column 11 erected on the rear side (+ Y direction side). The processing device 1 may be a polishing device capable of polishing the plate-shaped work W by a polishing pad rotatably mounted.

例えば外形が円形の保持手段３０は、ポーラス部材等からなり板状ワークＷを吸着する吸着部３００と、吸着部３００を支持する枠体３０１とを備える。吸着部３００は、真空発生装置等の図示しない吸引源に連通し、吸引源が吸引することで生み出された吸引力が、吸着部３００の露出面である保持面３００ａに伝達されることで、保持手段３０は保持面３００ａ上で板状ワークＷを吸引保持できる。
また、保持手段３０は、保持手段３０と共に移動可能なカバー３９により周囲を囲まれつつ、保持手段３０の下方に配設された回転手段３４によりＺ軸方向の軸心周りに回転可能となっている。 For example, the holding means 30 having a circular outer shape includes a suction portion 300 which is made of a porous member or the like and sucks the plate-shaped work W, and a frame body 301 which supports the suction portion 300. The suction unit 300 communicates with a suction source (not shown) such as a vacuum generator, and the suction force generated by the suction source sucking is transmitted to the holding surface 300a which is the exposed surface of the suction unit 300. The holding means 30 can suck and hold the plate-shaped work W on the holding surface 300a.
Further, the holding means 30 can be rotated around the axis in the Z-axis direction by the rotating means 34 arranged below the holding means 30 while being surrounded by a cover 39 that can move together with the holding means 30. There is.

保持手段３０、カバー３９、及びカバー３９に連結された蛇腹カバー３９ａの下方には、保持手段３０を保持面３００ａ方向（Ｙ軸方向）に移動させる移動手段１４が配設されている。移動手段１４は、Ｙ軸方向の軸心を有するボールネジ１４０と、ボールネジ１４０と平行に配設された一対のガイドレール１４１と、ボールネジ１４０に連結しボールネジ１４０を回動させるモータ１４２と、内部に備えるナットがボールネジ１４０に螺合し底部がガイドレール１４１上を摺動する可動板１４３とを備えており、モータ１４２がボールネジ１４０を回動させると、これに伴い可動板１４３がガイドレール１４１にガイドされてＹ軸方向に移動し、可動板１４３上に回転手段３４を介して配設された保持手段３０及びカバー３９がＹ軸方向に移動する。また、蛇腹カバー３９ａは保持手段３０の移動に伴ってＹ軸方向に伸縮する。 Below the holding means 30, the cover 39, and the bellows cover 39a connected to the cover 39, a moving means 14 for moving the holding means 30 in the holding surface 300a direction (Y-axis direction) is arranged. The moving means 14 includes a ball screw 140 having an axial center in the Y-axis direction, a pair of guide rails 141 arranged in parallel with the ball screw 140, a motor 142 connected to the ball screw 140 and rotating the ball screw 140, and the inside thereof. The provided nut is screwed into the ball screw 140, and the bottom portion is provided with a movable plate 143 that slides on the guide rail 141. When the motor 142 rotates the ball screw 140, the movable plate 143 becomes the guide rail 141 accordingly. Guided and moved in the Y-axis direction, the holding means 30 and the cover 39 arranged on the movable plate 143 via the rotating means 34 move in the Y-axis direction. Further, the bellows cover 39a expands and contracts in the Y-axis direction with the movement of the holding means 30.

コラム１１の前面には加工手段７を保持手段３０の保持面３００ａに対して離間又は接近するＺ軸方向（鉛直方向）に加工送りする加工送り手段５が配設されている。加工送り手段５は、Ｚ軸方向の軸心を有するボールネジ５０と、ボールネジ５０と平行に配設された一対のガイドレール５１と、ボールネジ５０の上端に連結しボールネジ５０を回動させるモータ５２と、内部のナットがボールネジ５０に螺合し側部がガイドレール５１に摺接する昇降板５３とを備えており、モータ５２がボールネジ５０を回動させることに伴い昇降板５３がガイドレール５１にガイドされてＺ軸方向に往復移動し、昇降板５３に固定された加工手段７がＺ軸方向に加工送りされる。 On the front surface of the column 11, a machining feed means 5 for machining and feeding the machining means 7 in the Z-axis direction (vertical direction) separated or approaching the holding surface 300a of the holding means 30 is arranged. The machining feed means 5 includes a ball screw 50 having an axial center in the Z-axis direction, a pair of guide rails 51 arranged in parallel with the ball screw 50, and a motor 52 connected to the upper end of the ball screw 50 to rotate the ball screw 50. It is provided with an elevating plate 53 in which an internal nut is screwed into the ball screw 50 and a side portion is in sliding contact with the guide rail 51, and the elevating plate 53 guides the elevating plate 53 to the guide rail 51 as the motor 52 rotates the ball screw 50. Then, it reciprocates in the Z-axis direction, and the machining means 7 fixed to the elevating plate 53 is machined and fed in the Z-axis direction.

保持手段３０に保持された板状ワークＷを研削加工する加工手段７は、軸方向がＺ軸方向である回転軸７０と、回転軸７０を回転可能に支持するハウジング７１と、回転軸７０を回転駆動するモータ７２と、回転軸７０の下端に接続された円形板状のマウント７３と、マウント７３の下面に着脱可能に装着された研削ホイール７４と、ハウジング７１を支持し加工送り手段５の昇降板５３にその側面が固定されたホルダ７５とを備える。 The processing means 7 for grinding the plate-shaped work W held by the holding means 30 includes a rotating shaft 70 whose axial direction is the Z-axis direction, a housing 71 that rotatably supports the rotating shaft 70, and a rotating shaft 70. A rotary drive motor 72, a circular plate-shaped mount 73 connected to the lower end of the rotary shaft 70, a grinding wheel 74 detachably mounted on the lower surface of the mount 73, and a machining feed means 5 that supports the housing 71. The elevating plate 53 is provided with a holder 75 whose side surface is fixed.

研削ホイール７４の底面には、略直方体形状の複数の研削砥石７４０が環状に固定されている。回転軸７０の内部には、研削水供給源に連通し研削水の通り道となる流路が、回転軸７０の軸方向に貫通して設けられており、流路は、マウント７３を通り、研削ホイール７４の底面において研削砥石７４０に向かって研削水を噴出できるように開口している。
なお、加工手段７は、不織布等からなる研磨パッドを備える研磨手段であってもよい。 A plurality of grinding wheels 740 having a substantially rectangular cuboid shape are fixed to the bottom surface of the grinding wheel 74 in an annular shape. Inside the rotating shaft 70, a flow path that communicates with the grinding water supply source and serves as a path for grinding water is provided so as to penetrate in the axial direction of the rotating shaft 70, and the flow path passes through the mount 73 and grinds. The bottom surface of the wheel 74 is opened so that grinding water can be ejected toward the grinding wheel 740.
The processing means 7 may be a polishing means provided with a polishing pad made of a non-woven fabric or the like.

ベース１０上のコラム１１の前方かつ加工手段７の下方となる位置には、例えば、箱状の加工室１６が配設されている。加工室１６を構成する側板１６０には搬入出口１６１が形成されており、搬入出口１６１を保持手段３０が通過することで、保持手段３０を加工室１６内に収容することができる。搬入出口１６１は図示しないシャッターによって開閉可能となっている。加工室１６を構成する天板１６２には、加工手段７を加工室１６内に進入させる円形状の加工手段進入口１６３が形成されている。 For example, a box-shaped processing chamber 16 is arranged in front of the column 11 on the base 10 and below the processing means 7. A carry-in outlet 161 is formed in the side plate 160 constituting the processing chamber 16, and the holding means 30 can be accommodated in the processing chamber 16 by passing the carry-in outlet 161 through the carrying-in outlet 161. The carry-in outlet 161 can be opened and closed by a shutter (not shown). The top plate 162 constituting the processing chamber 16 is formed with a circular processing means entrance 163 that allows the processing means 7 to enter the processing chamber 16.

ベース１０上の保持手段３０の移動経路脇には、加工手段７で加工された板状ワークＷを保持手段３０の保持面３００ａに直交する方向（Ｚ軸方向）で保持面３００ａから離間させる搬出手段４が配設されている。
搬出手段４は、例えば、ベース１０上に立設され後述する保持パッド４２を所定の高さ位置に移動可能とするシリンダ機構４０と、シリンダ機構４０の上端側に固定され保持手段３０の移動経路の上方側に水平（＋Ｘ方向）に延びるアーム部４１と、アーム部４１の先端側の下面に配設され板状ワークＷを吸引保持する保持パッド４２とを備えている。 On the side of the movement path of the holding means 30 on the base 10, the plate-shaped work W machined by the processing means 7 is carried out so as to be separated from the holding surface 300a in the direction orthogonal to the holding surface 300a of the holding means 30 (Z-axis direction). Means 4 are arranged.
The carrying-out means 4 is, for example, a cylinder mechanism 40 that is erected on the base 10 and enables the holding pad 42 described later to be moved to a predetermined height position, and a moving path of the holding means 30 that is fixed to the upper end side of the cylinder mechanism 40. It is provided with an arm portion 41 extending horizontally (in the + X direction) on the upper side of the arm portion 41 and a holding pad 42 disposed on the lower surface of the arm portion 41 on the tip end side to suck and hold the plate-shaped work W.

保持パッド４２は、例えば、板状ワークＷの外形に合わせた矩形状をしており、その下面が、ポーラス部材等からなり板状ワークＷを吸引保持する保持面となる。保持パッド４２の該保持面は、吸引管４２１を介して真空発生装置等の吸引源４３に連通している。 The holding pad 42 has, for example, a rectangular shape that matches the outer shape of the plate-shaped work W, and its lower surface is a holding surface made of a porous member or the like for sucking and holding the plate-shaped work W. The holding surface of the holding pad 42 communicates with a suction source 43 such as a vacuum generator via a suction pipe 421.

図１、２に示すように、加工装置１は、搬出手段４が保持する板状ワークＷの下面Ｗａを洗浄する洗浄機構８を備えている。洗浄機構８は、保持手段３０の近傍に配設され、保持手段３０と共に移動手段１４によってＹ軸方向に往復移動可能となっている。即ち、洗浄機構８は、例えば、カバー３９の上面上に配設されている。
なお、洗浄機構８の配設箇所は本実施形態に示す例に限定されず、例えば、保持手段３０の枠体３０１の側面に連結部材を介して所定距離－Ｙ方向に離した状態で取り付けられていてもよい。 As shown in FIGS. 1 and 2, the processing apparatus 1 includes a cleaning mechanism 8 for cleaning the lower surface Wa of the plate-shaped work W held by the carrying-out means 4. The cleaning mechanism 8 is arranged in the vicinity of the holding means 30, and can be reciprocated in the Y-axis direction by the moving means 14 together with the holding means 30. That is, the cleaning mechanism 8 is arranged, for example, on the upper surface of the cover 39.
The location of the cleaning mechanism 8 is not limited to the example shown in the present embodiment, and is, for example, attached to the side surface of the frame body 301 of the holding means 30 via a connecting member in a state of being separated from each other in the predetermined distance −Y direction. May be.

図２に拡大して示す洗浄機構８は、移動手段１４が保持手段３０を移動させる方向（Ｙ軸方向）に対して交差（直交差）する方向（Ｘ軸方向）で且つ保持手段３０の保持面３００ａに平行に延在する円筒状のロール洗浄部材８０と、ロール洗浄部材８０の中心軸を軸に回転させる回転手段８１と、ロール洗浄部材８０の側面の一部を延在方向（Ｘ軸方向）に細長く露出させた露出部８０１を形成すると共にロール洗浄部材８０の露出部８０１以外を収容し水没させる桶８２と、桶８２に洗浄水を供給して貯水する水供給手段８３と、を備えている。 The cleaning mechanism 8 enlarged and shown in FIG. 2 is held in a direction (X-axis direction) in which the moving means 14 intersects (orthogonally different) with respect to the direction in which the holding means 30 is moved (Y-axis direction) and holds the holding means 30. A cylindrical roll cleaning member 80 extending parallel to the surface 300a, a rotating means 81 for rotating the central axis of the roll cleaning member 80 as an axis, and a part of the side surface of the roll cleaning member 80 in the extending direction (X-axis). A tub 82 for forming an elongated exposed portion 801 and submerging the roll cleaning member 80 other than the exposed portion 801 and a water supply means 83 for supplying and storing cleaning water to the tub 82. I have.

Ｘ軸方向に延びる円筒状のロール洗浄部材８０は、本実施形態においては、所定の厚みを備えるスポンジを円筒状に成型したものであり、板状ワークＷの長手方向の長さ以上の長さを備えている。スポンジとしては、例えば、ポリウレタンを発泡成形して作られるスポンジ、ＰＶＡスポンジ、又はゴムに発泡剤等を練り込み成形されるスポンジ等を用いる。なお、ロール洗浄部材８０は、スポンジに限定されるものではなく、例えば、弾力性を備える化学繊維等を直毛状に形成し密集させ、さらにロール状に形成した洗浄ブラシであってもよい。
ロール洗浄部材８０は、その筒内に回転手段８１の回転シャフト８１０が挿入され、回転シャフト８１０に対して固定された状態となっている。 In the present embodiment, the cylindrical roll cleaning member 80 extending in the X-axis direction is formed by molding a sponge having a predetermined thickness into a cylindrical shape, and has a length equal to or longer than the length of the plate-shaped work W in the longitudinal direction. It is equipped with. As the sponge, for example, a sponge made by foam-molding polyurethane, a PVA sponge, or a sponge formed by kneading a foaming agent or the like into rubber is used. The roll cleaning member 80 is not limited to the sponge, and may be, for example, a cleaning brush in which elastic chemical fibers or the like are formed in a straight hair shape and densely formed, and further formed in a roll shape.
The roll cleaning member 80 is in a state in which the rotary shaft 810 of the rotary means 81 is inserted into the cylinder and is fixed to the rotary shaft 810.

桶８２は、例えば、略長方形状の底板８２ａと、底板８２ａの四辺から立設される４枚の側板とからなり上部が開口している。例えば、桶８２を構成する２枚の側板８２ｂ、８２ｃ（桶８２の長手方向（Ｘ軸方向）において対面する側板８２ｂ、８２ｃ）には、軸受けを備える図示しない貫通孔がそれぞれ厚さ方向に向かって貫通形成されており、ロール洗浄部材８０が固定された回転シャフト８１０が、この貫通孔を通して桶８２に挿通されている。 The tub 82 is composed of, for example, a substantially rectangular bottom plate 82a and four side plates erected from the four sides of the bottom plate 82a, and the upper portion thereof is open. For example, through holes (not shown) provided with bearings face in the thickness direction of the two side plates 82b and 82c (side plates 82b and 82c facing each other in the longitudinal direction (X-axis direction) of the tub 82) constituting the tub 82. A rotary shaft 810 to which the roll cleaning member 80 is fixed is inserted into the tub 82 through the through hole.

桶８２の容積は、例えば、ロール洗浄部材８０全体を収容可能な大きさとなっている。図２に示すように、ロール洗浄部材８０が装着された回転シャフト８１０の桶８２内の配設高さ位置が調整されることで、ロール洗浄部材８０の側面の一部が延在方向（Ｘ軸方向）に細長く桶８２内からはみ出し露出した露出部８０１となる。また、ロール洗浄部材８０と桶８２の底板８２ａとの間には所定の大きさの隙間（図４参照）が形成された状態になる。 The volume of the tub 82 is, for example, large enough to accommodate the entire roll cleaning member 80. As shown in FIG. 2, by adjusting the arrangement height position in the tub 82 of the rotary shaft 810 on which the roll cleaning member 80 is mounted, a part of the side surface of the roll cleaning member 80 is extended in the extending direction (X). The exposed portion 801 is elongated in the axial direction) and protrudes from the inside of the tub 82. Further, a gap (see FIG. 4) having a predetermined size is formed between the roll cleaning member 80 and the bottom plate 82a of the tub 82.

回転シャフト８１０の＋Ｘ方向側の一端には、カップリング等を介してモータ８１１が連結されている。モータ８１１が回転シャフト８１０を回転させることで、回転シャフト８１０に装着されたロール洗浄部材８０も桶８２内でＸ軸方向の軸心周りに回転する。 A motor 811 is connected to one end of the rotary shaft 810 on the + X direction side via a coupling or the like. When the motor 811 rotates the rotary shaft 810, the roll cleaning member 80 mounted on the rotary shaft 810 also rotates around the axis in the X-axis direction in the tub 82.

図２、４に示すように、桶８２は、例えば、桶８２と同方向に延在しカバー３９上に固定された一対の支持台８６の上に固定されており、桶８２の下方の隙間には、可撓性を有するチューブ等からなる水供給管８３０が配設されている。水供給管８３０は、ポンプ等から構成され純水等の洗浄水を供給可能な水供給源８３１に連通しており、水供給管８３０と水供給源８３１とにより桶８２に水を貯水する水供給手段８３が構成される。図４に示すように、例えば、桶８２の底板８２ａには、桶８２の延在方向に等間隔空けて複数の水供給口８２０が形成されており、各水供給口８２０は水供給管８３０に連通している。 As shown in FIGS. 2 and 4, the tub 82 is fixed on a pair of support bases 86 extending in the same direction as the tub 82 and fixed on the cover 39, and the gap below the tub 82 is fixed. Is provided with a water supply pipe 830 made of a flexible tube or the like. The water supply pipe 830 communicates with a water supply source 831 which is composed of a pump or the like and can supply washing water such as pure water, and the water is stored in the tub 82 by the water supply pipe 830 and the water supply source 831. The supply means 83 is configured. As shown in FIG. 4, for example, the bottom plate 82a of the tub 82 is formed with a plurality of water supply ports 820 at equal intervals in the extending direction of the tub 82, and each water supply port 820 is a water supply pipe 830. Communicate with.

図２、４に示すように、本実施形態における加工装置１は、ロール洗浄部材８０の延在方向（Ｘ軸方向）に平行に延び、且つ板状ワークＷを洗浄する時の搬出手段４に対する洗浄機構８の進行方向（＋Ｙ方向）において洗浄機構８の後方側（－Ｙ方向側）に配設され、搬出手段４が保持した板状ワークＷにエアを噴射するエア噴射手段２を備える。 As shown in FIGS. The air injection means 2 is provided on the rear side (−Y direction side) of the cleaning mechanism 8 in the traveling direction (+ Y direction) of the cleaning mechanism 8 and injects air into the plate-shaped work W held by the carrying-out means 4.

エア噴射手段２は、例えば、桶８２の側板に配設されている。エア噴射手段２は、例えば、Ｘ軸方向に延びる台部２０と、台部２０の上面に複数所定間隔を空けて並ぶように開口する噴射口２１と、コンプレッサー及び圧縮エア貯留タンク等からなり各噴射口２１に圧縮エアを供給するエア供給源２２と、噴射口２１から噴射したエアを例えばロール洗浄部材８０側に導く誘導板２３とを備えている。
台部２０と同程度の長さを備える誘導板２３は、例えば、台部２０の上面に固定されており、ロール洗浄部材８０側に向かってなだらかに湾曲している。 The air injection means 2 is arranged, for example, on the side plate of the tub 82. The air injection means 2 includes, for example, a pedestal 20 extending in the X-axis direction, an injection port 21 opening on the upper surface of the pedestal 20 so as to line up at a plurality of predetermined intervals, a compressor, a compressed air storage tank, and the like. It includes an air supply source 22 that supplies compressed air to the injection port 21, and a guide plate 23 that guides the air injected from the injection port 21 to, for example, the roll cleaning member 80 side.
The guide plate 23 having a length similar to that of the base portion 20 is fixed to the upper surface of the base portion 20, for example, and is gently curved toward the roll cleaning member 80 side.

各噴射口２１は、図２に示すような丸穴状に形成される例に限定されず、例えば、細幅のスリット状に形成されていてもよいし、台部２０の上面に一本連続的に直線状に延びる細幅のスリットに形成されていてもよい。
また、各噴射口２１は真上を向いているのではなく、＋Ｙ方向側の斜め上方に向かうように開口していてもよいし、誘導板２３を備えないものとしてもよい。 Each injection port 21 is not limited to the example formed in the shape of a round hole as shown in FIG. 2, and may be formed in the shape of a narrow slit, for example, or one continuous injection port 21 on the upper surface of the base portion 20. It may be formed in a narrow slit extending linearly.
Further, each injection port 21 may be opened so as to be diagonally upward on the + Y direction side instead of facing directly upward, or may not be provided with the guide plate 23.

例えば、カバー３９上の保持手段３０と洗浄機構８との間には、区切り壁３８が配設されており、区切り壁３８は、洗浄機構８の桶８２から溢れ出た研削屑等のゴミが混じった洗浄水が保持手段３０側に流れていくことを防ぐ。 For example, a partition wall 38 is disposed between the holding means 30 on the cover 39 and the cleaning mechanism 8, and the partition wall 38 contains dust such as grinding debris overflowing from the tub 82 of the cleaning mechanism 8. It prevents the mixed washing water from flowing to the holding means 30 side.

以下に、保持手段３０に保持された板状ワークＷを研削加工する場合の加工装置１の動作について説明する。図１に示す板状ワークＷは、例えば、外形が矩形状の大型の基板であり、図１において下方を向いている板状ワークＷの下面Ｗａには回路が形成されており、上方を向いている板状ワークＷの上面Ｗｂは、研削加工が施される被研削面となる。なお、板状ワークＷは図示の例に限定されるものではなく、円形板状の半導体ウェーハ等であってもよい。 The operation of the processing apparatus 1 when grinding the plate-shaped work W held by the holding means 30 will be described below. The plate-shaped work W shown in FIG. 1 is, for example, a large substrate having a rectangular outer shape, and a circuit is formed on the lower surface Wa of the plate-shaped work W facing downward in FIG. 1 and faces upward. The upper surface Wb of the plate-shaped work W is a surface to be ground to be ground. The plate-shaped work W is not limited to the illustrated example, and may be a circular plate-shaped semiconductor wafer or the like.

まず、板状ワークＷが保持手段３０の保持面３００ａに載置され吸引保持される。次いで、移動手段１４が、板状ワークＷを保持した保持手段３０を＋Ｙ方向へ移動させる。また、加工室１６の図示しないシャッターが開き、保持手段３０が側板１６０の搬入出口１６１を通り加工室１６内に搬入された後、シャッターが閉じられる。 First, the plate-shaped work W is placed on the holding surface 300a of the holding means 30 and is sucked and held. Next, the moving means 14 moves the holding means 30 holding the plate-shaped work W in the + Y direction. Further, a shutter (not shown) of the processing chamber 16 is opened, and the holding means 30 is carried into the processing chamber 16 through the carry-in outlet 161 of the side plate 160, and then the shutter is closed.

板状ワークＷを保持した保持手段３０が加工手段７の下まで移動して、研削砥石７４０の回転軌道が板状ワークＷの回転中心を通るように板状ワークＷと加工手段７との位置合わせがなされる。
図１に示すモータ７２により回転軸７０が回転駆動されるのに伴って、研削ホイール７４が回転する。また、加工手段７が図１に示す加工送り手段５により－Ｚ方向へと送られ、研削ホイール７４が加工手段進入口１６３を通り加工室１６内に進入していく。そして、回転する研削砥石７４０が板状ワークＷの上面Ｗｂに当接することで研削加工が行われる。また、回転手段３４が保持手段３０を回転させることで保持面３００ａ上に保持された板状ワークＷも回転するので、板状ワークＷの上面Ｗｂの全面が研削される。研削加工中は、研削水が研削砥石７４０と板状ワークＷとの接触部位に対して供給され、接触部位の冷却・洗浄がなされる。 The position of the plate-shaped work W and the processing means 7 so that the holding means 30 holding the plate-shaped work W moves to the bottom of the processing means 7 and the rotation trajectory of the grinding wheel 740 passes through the rotation center of the plate-shaped work W. Matching is done.
As the rotary shaft 70 is rotationally driven by the motor 72 shown in FIG. 1, the grinding wheel 74 rotates. Further, the machining means 7 is fed in the −Z direction by the machining feed means 5 shown in FIG. 1, and the grinding wheel 74 passes through the machining means entrance 163 and enters the machining chamber 16. Then, the rotating grinding wheel 740 comes into contact with the upper surface Wb of the plate-shaped work W to perform the grinding process. Further, since the plate-shaped work W held on the holding surface 300a is also rotated by the rotating means 34 rotating the holding means 30, the entire surface of the upper surface Wb of the plate-shaped work W is ground. During the grinding process, grinding water is supplied to the contact portion between the grinding wheel 740 and the plate-shaped work W, and the contact portion is cooled and washed.

板状ワークＷの上面Ｗｂが所定量研削された後、加工手段７が加工送り手段５により＋Ｚ方向へと引き上げられて、研削砥石７４０が板状ワークＷから離間する。次いで、移動手段１４が、研削済みの板状ワークＷを保持した保持手段３０を－Ｙ方向へ移動させる。また、加工室１６の図示しないシャッターが開き、保持手段３０が図示しない搬入出口１６１を通り加工室１６外に搬出される。 After the upper surface Wb of the plate-shaped work W is ground by a predetermined amount, the machining means 7 is pulled up in the + Z direction by the machining feed means 5, and the grinding wheel 740 is separated from the plate-shaped work W. Next, the moving means 14 moves the holding means 30 holding the ground plate-shaped work W in the −Y direction. Further, a shutter (not shown) of the processing chamber 16 is opened, and the holding means 30 is carried out of the processing chamber 16 through a carry-in outlet 161 (not shown).

移動手段１４が、板状ワークＷを吸引保持した保持手段３０を搬出手段４の真下の位置まで－Ｙ方向に移動させる。
図３に示すように、シリンダ機構４０が保持パッド４２を降下させて、保持パッド４２の保持面と板状ワークＷの上面Ｗｂとを接触させる。吸引源４３が作動して生み出される吸引力が保持パッド４２の保持面に伝達されることで、保持パッド４２が板状ワークＷを吸引保持する。保持手段３０による板状ワークＷの吸引保持が解除され、搬出手段４が、加工手段７で加工された板状ワークＷを保持手段３０の保持面３００ａから＋Ｚ方向に離間させる The moving means 14 moves the holding means 30 that sucks and holds the plate-shaped work W to a position directly below the carrying-out means 4 in the −Y direction.
As shown in FIG. 3, the cylinder mechanism 40 lowers the holding pad 42 to bring the holding surface of the holding pad 42 into contact with the upper surface Wb of the plate-shaped work W. The suction force generated by the operation of the suction source 43 is transmitted to the holding surface of the holding pad 42, so that the holding pad 42 sucks and holds the plate-shaped work W. The suction holding of the plate-shaped work W by the holding means 30 is released, and the carrying-out means 4 separates the plate-shaped work W machined by the processing means 7 from the holding surface 300a of the holding means 30 in the + Z direction.

図４に示すように、水供給源８３１が水供給管８３０に洗浄水を送出し、該洗浄水が桶８２内に貯水されていく。桶８２内が洗浄水で満たされた後も、水供給源８３１からの洗浄水の供給が継続してなされることで、洗浄水が桶８２の上部から溢れ出る状態になり、ロール洗浄部材８０の露出部８０１以外が桶８２に収容され水没した状態になる。また、ロール洗浄部材８０全体が洗浄水を十分に含んだ状態になる。 As shown in FIG. 4, the water supply source 831 sends wash water to the water supply pipe 830, and the wash water is stored in the tub 82. Even after the inside of the tub 82 is filled with the washing water, the washing water is continuously supplied from the water supply source 831, so that the washing water overflows from the upper part of the tub 82, and the roll cleaning member 80 Except for the exposed portion 801 of the above, the portion other than the exposed portion 801 is housed in the tub 82 and is submerged. In addition, the entire roll cleaning member 80 is in a state of sufficiently containing cleaning water.

板状ワークＷを吸引保持する搬出手段４の保持パッド４２が、板状ワークＷの下面Ｗａがロール洗浄部材８０の露出部８０１に接触するように、シリンダ機構４０（図３参照）により所定の高さ位置に位置付けられる。また、図４に示すように、移動手段１４が、洗浄機構８を＋Ｙ方向に所定の洗浄送り速度で移動させることで、ロール洗浄部材８０の露出部８０１が、板状ワークＷの下面Ｗａに対して接触していく。即ち、露出部８０１が板状ワークＷに押し付けられ板状ワークＷの下面Ｗａに合わせて変形していき、その接触面積が最大化される。
この状態で、モータ８１１が回転シャフト８１０を回転させることで、回転シャフト８１０と共に回転するロール洗浄部材８０が板状ワークＷの下面Ｗａを－Ｙ方向側から＋Ｙ方向側に向かって洗浄していく。 The holding pad 42 of the carrying-out means 4 that sucks and holds the plate-shaped work W is determined by the cylinder mechanism 40 (see FIG. 3) so that the lower surface Wa of the plate-shaped work W comes into contact with the exposed portion 801 of the roll cleaning member 80. Positioned at the height position. Further, as shown in FIG. 4, the moving means 14 moves the cleaning mechanism 8 in the + Y direction at a predetermined cleaning feed rate, so that the exposed portion 801 of the roll cleaning member 80 is moved to the lower surface Wa of the plate-shaped work W. I will contact you. That is, the exposed portion 801 is pressed against the plate-shaped work W and deformed in accordance with the lower surface Wa of the plate-shaped work W, and the contact area thereof is maximized.
In this state, the motor 811 rotates the rotary shaft 810, and the roll cleaning member 80 that rotates together with the rotary shaft 810 cleans the lower surface Wa of the plate-shaped work W from the −Y direction side to the + Y direction side. ..

ロール洗浄部材８０の露出部８０１が板状ワークＷの下面Ｗａを洗浄していくのに伴って、回転するロール洗浄部材８０の側面には、板状ワークＷに付着していた研削屑等のゴミが付着する。このロール洗浄部材８０に付着したゴミは、ロール洗浄部材８０の回転に伴って桶８２内に入り、桶８２に貯水されている洗浄水によりロール洗浄部材８０の側面から濯ぎ落とされる。該ゴミが、洗浄水よりも比重が小さい場合には、桶８２から溢れ出る洗浄水と共に桶８２の外部に流下するので、ロール洗浄部材８０に再び付着することはない。したがって、水供給源８３１から洗浄水が桶８２に供給され続けることで、桶８２内は一定量の清潔な洗浄水が貯水された状態が保たれる。
一方で、該ゴミが洗浄水よりも比重が大きい場合には、該ゴミは桶８２の底板８２ａに沈殿しないように、洗浄水を桶８２の底板８２ａ側から供給させ、ゴミが沈殿する前に桶８２から洗浄水と共に溢れ出させ、桶８２の内部を綺麗な状態で維持させ、ゴミをロール洗浄部材８０に再び付着させないようにする。また、板状ワークＷを１枚洗浄するごとに桶８２の洗浄水を排水させる排水弁（不図示）を備えてもよい。 As the exposed portion 801 of the roll cleaning member 80 cleans the lower surface Wa of the plate-shaped work W, the side surface of the rotating roll cleaning member 80 is covered with grinding debris and the like adhering to the plate-shaped work W. Dust adheres. The dust adhering to the roll cleaning member 80 enters the tub 82 as the roll cleaning member 80 rotates, and is rinsed off from the side surface of the roll cleaning member 80 by the cleaning water stored in the tub 82. When the dust has a lower specific gravity than the washing water, it flows down to the outside of the tub 82 together with the washing water overflowing from the tub 82, so that the dust does not adhere to the roll cleaning member 80 again. Therefore, by continuing to supply the washing water from the water supply source 831 to the tub 82, a certain amount of clean washing water is kept in the tub 82.
On the other hand, when the dust has a higher specific gravity than the washing water, the washing water is supplied from the bottom plate 82a side of the tub 82 so that the dust does not settle on the bottom plate 82a of the tub 82, and before the dust settles. It overflows from the tub 82 together with the washing water to keep the inside of the tub 82 in a clean state and prevent dust from adhering to the roll cleaning member 80 again. Further, a drain valve (not shown) for draining the washing water of the tub 82 every time the plate-shaped work W is washed may be provided.

本実施形態においては、上記洗浄機構８による板状ワークＷの下面Ｗａの洗浄を行うと共に、板状ワークＷの洗浄後の下面Ｗａを洗浄機構８と共に＋Ｙ方向に移動するエア噴射手段２により乾燥させていく。即ち、エア供給源２２が作動して圧縮エアを台部２０に供給し、該エアを噴射口２１から板状ワークＷの下面Ｗａに向かって噴射させる。その結果、洗浄された板状ワークＷの下面Ｗａに付着していた洗浄水が該エアにより吹き飛ばされ、板状ワークＷの下面Ｗａが乾燥する。即ち、板状ワークＷの下面Ｗａの洗浄された箇所が後から追いかけられるように乾燥されていく。 In the present embodiment, the lower surface Wa of the plate-shaped work W is cleaned by the cleaning mechanism 8, and the lower surface Wa after cleaning of the plate-shaped work W is dried by the air injection means 2 that moves in the + Y direction together with the cleaning mechanism 8. Let me do it. That is, the air supply source 22 operates to supply compressed air to the base portion 20, and the air is injected from the injection port 21 toward the lower surface Wa of the plate-shaped work W. As a result, the washing water adhering to the lower surface Wa of the washed plate-shaped work W is blown off by the air, and the lower surface Wa of the plate-shaped work W is dried. That is, the washed portion of the lower surface Wa of the plate-shaped work W is dried so as to be chased afterwards.

洗浄機構８及びエア噴射手段２が、搬出手段４で保持された板状ワークＷの下方を通過しきる＋Ｙ方向の所定の位置まで移動することで、板状ワークＷの下面Ｗａが洗浄され乾燥された状態になる。 The cleaning mechanism 8 and the air injection means 2 move to a predetermined position in the + Y direction that passes under the plate-shaped work W held by the carrying-out means 4, so that the lower surface Wa of the plate-shaped work W is washed and dried. It becomes a state.

上記のように本発明に係る加工装置１は、搬出手段４が保持する板状ワークＷの下面Ｗａを洗浄する洗浄機構８と、Ｙ軸方向に搬出手段４と洗浄機構８とを相対的に移動させる移動手段１４と、を備え、洗浄機構８は、移動手段１４の移動方向に対して交差する方向で且つ保持手段３０の保持面３００ａに平行に延在する円筒状のロール洗浄部材８０と、ロール洗浄部材８０の中心軸を軸に回転させる回転手段８１と、ロール洗浄部材８０の側面の一部を延在方向に細長く露出させた露出部８０１を形成すると共にロール洗浄部材８０の露出部８０１以外を収容し水没させる桶８２と、桶８２に貯水する水供給手段８３と、を備え、水供給手段８３により供給される水を桶８２の上部から溢れさせながら桶８２内で回転するロール洗浄部材８０の露出部８０１に搬出手段４が保持する板状ワークＷの下面Ｗａを当接させ、板状ワークＷの下面Ｗａを洗浄するため、ワーク洗浄中にロール洗浄部材８０に付着したゴミを桶８２の水中で濯ぎ落として、洗浄中にロール洗浄部材８０から板状ワークＷにゴミを再付着させないようにして、綺麗なロール洗浄部材８０で継続して板状ワークＷの下面Ｗａを洗浄できる。 As described above, in the processing apparatus 1 according to the present invention, the cleaning mechanism 8 for cleaning the lower surface Wa of the plate-shaped work W held by the unloading means 4 and the unloading means 4 and the cleaning mechanism 8 are relatively relative to each other in the Y-axis direction. The cleaning mechanism 8 includes a moving means 14 to be moved, and the cleaning mechanism 8 includes a cylindrical roll cleaning member 80 extending in a direction intersecting the moving direction of the moving means 14 and parallel to the holding surface 300a of the holding means 30. , A rotating means 81 that rotates around the central axis of the roll cleaning member 80 and an exposed portion 801 in which a part of the side surface of the roll cleaning member 80 is elongated in the extending direction are formed, and the exposed portion of the roll cleaning member 80 is formed. A roll that includes a tub 82 that accommodates and submerges other than 801 and a water supply means 83 that stores water in the tub 82, and rotates in the tub 82 while overflowing the water supplied by the water supply means 83 from the upper part of the tub 82. Dust adhering to the roll cleaning member 80 during work cleaning in order to bring the lower surface Wa of the plate-shaped work W held by the carrying-out means 4 into contact with the exposed portion 801 of the cleaning member 80 to clean the lower surface Wa of the plate-shaped work W. Is rinsed off in the water of the tub 82 so that dust does not reattach from the roll cleaning member 80 to the plate-shaped work W during cleaning, and the lower surface Wa of the plate-shaped work W is continuously cleaned with the clean roll cleaning member 80. Can be washed.

加工装置１は、ロール洗浄部材８０の延在方向に平行に延び、且つ板状ワークＷを洗浄する時の搬出手段４に対する洗浄機構８の進行方向（＋Ｙ方向）において洗浄機構８の後方側に配設され、搬出手段４が保持した板状ワークＷの下面Ｗａにエアを噴射するエア噴射手段２を備えることで、ロール洗浄部材８０により洗浄された板状ワークＷの下面Ｗａを後から追うようにエアで乾燥させていくことができるため、移動手段１４による板状ワークＷの一方向の洗浄送り（＋Ｙ方向への１パスの洗浄送り）で板状ワークＷの下面Ｗａを洗浄及び乾燥させて洗浄時間を短縮することができる。 The processing apparatus 1 extends parallel to the extending direction of the roll cleaning member 80, and is located behind the cleaning mechanism 8 in the traveling direction (+ Y direction) of the cleaning mechanism 8 with respect to the carrying-out means 4 when cleaning the plate-shaped work W. By providing the air injection means 2 for injecting air onto the lower surface Wa of the plate-shaped work W arranged and held by the carrying-out means 4, the lower surface Wa of the plate-shaped work W cleaned by the roll cleaning member 80 is followed later. Since it can be dried with air as described above, the lower surface Wa of the plate-shaped work W is washed and dried by the one-way cleaning feed (one-pass cleaning feed in the + Y direction) by the moving means 14. The cleaning time can be shortened.

なお、本発明に係る加工装置１は上記実施形態に限定されるものではなく、また、添付図面に図示されている装置の各構成の形状等についても、これに限定されず、本発明の効果を発揮できる範囲内で適宜変更可能である。
例えば、搬出手段４をＹ軸方向に移動可能な構成として、板状ワークＷの下面Ｗａの洗浄時に、保持手段３０はＹ軸方向に移動させず、板状ワークＷを保持する搬出手段４を保持手段３０に対して相対的に移動させて洗浄を行ってもよい。 The processing apparatus 1 according to the present invention is not limited to the above embodiment, and the shape and the like of each configuration of the apparatus shown in the attached drawings are not limited to this, and the effect of the present invention is not limited to this. Can be changed as appropriate within the range in which the above can be exhibited.
For example, the carrying-out means 4 is configured to be movable in the Y-axis direction, and when cleaning the lower surface Wa of the plate-shaped work W, the holding means 30 does not move in the Y-axis direction, and the carrying-out means 4 for holding the plate-shaped work W is provided. Cleaning may be performed by moving the holding means 30 relative to the holding means 30.

Ｗ：板状ワーク
１：加工装置 １０：ベース １１：コラム
３０：保持手段 ３００：吸着部 ３００ａ：保持面 ３０１：枠体 ３９：カバー
３９ａ：蛇腹カバー ３８：区切り壁
１４：移動手段 １４０：ボールネジ １４１：ガイドレール １４２：モータ １４３：可動板
５：加工送り手段 ７：加工手段 ７４０：研削砥石
１６：加工室 １６０：側板 １６１：搬入出口 １６２：天板 １６３：加工手段進入口
４：搬出手段 ４０：シリンダ機構 ４１：アーム部 ４２：保持パッド ４２１：吸引管 ４３：吸引源
８：洗浄機構 ８０：ロール洗浄部材 ８０１：露出部
８１：回転手段 ８１０：回転シャフト ８１１：モータ
８２：桶 ８２ａ：底板 ８２ｂ、８２ｃ：側板 ８２０：水供給口
８３：水供給手段 ８３０：水供給管 ８３１：水供給源
８６：支持台
２：エア噴射手段 W: Plate-shaped work
1: Processing equipment 10: Base 11: Column
30: Holding means 300: Suction part 300a: Holding surface 301: Frame 39: Cover 39a: Bellows cover 38: Separation wall 14: Transportation means 140: Ball screw 141: Guide rail 142: Motor 143: Movable plate 5: Processing feed means 7: Processing means 740: Grinding wheel
16: Machining chamber 160: Side plate 161: Carry-in / exit 162: Top plate 163: Machining means entrance 4: Carry-out means 40: Cylinder mechanism 41: Arm part 42: Holding pad 421: Suction pipe 43: Suction source 8: Cleaning mechanism 80 : Roll cleaning member 801: Exposed part 81: Rotating means 810: Rotating shaft 811: Motor 82: Oke 82a: Bottom plate 82b, 82c: Side plate 820: Water supply port 83: Water supply means 830: Water supply pipe 831: Water supply source 86: Support stand 2: Air injection means

Claims (2)

保持面で板状ワークを保持する保持手段と、該保持面で保持した板状ワークを研削砥石で研削または研磨パッドで研磨する加工手段と、該加工手段で加工された板状ワークを該保持面に直交する方向で該保持面から離間させる搬出手段と、該搬出手段が保持する板状ワークの下面を洗浄する洗浄機構と、該保持面に平行なＹ軸方向に該保持手段を移動させる移動手段と、を備えた加工装置であって、
該洗浄機構は、該Ｙ軸方向に対して水平面内において交差する方向で且つ該保持面に平行に板状ワークの長手方向の長さ以上に延在する円筒状のロール洗浄部材と、該ロール洗浄部材の中心軸を軸に回転させる回転手段と、該ロール洗浄部材の側面の一部を延在方向に細長く露出させた露出部を形成すると共に該ロール洗浄部材の該露出部以外を収容し水没させる桶と、該桶に貯水する水供給手段と、を備え、該移動手段によって該保持手段と共に該Ｙ軸方向に移動可能であり、該保持手段に対して、板状ワークの下面を洗浄する際の該保持手段の進行方向である＋Ｙ方向の反対側となる－Ｙ方向側に配置され、
該水供給手段により供給される水を該桶の上部から溢れさせながら、該移動手段によって該洗浄機構を該＋Ｙ方向に進行させ、該桶内で回転する該ロール洗浄部材の該露出部を該搬出手段が保持した該板状ワークの下面に当接させ、該板状ワークの下面を洗浄する加工装置。 The holding means for holding the plate-shaped work on the holding surface, the processing means for grinding the plate-shaped work held on the holding surface with a grinding wheel or polishing with a polishing pad, and the holding means for holding the plate-shaped work processed by the processing means. A carrying means that separates the holding surface from the holding surface in a direction orthogonal to the surface, a cleaning mechanism that cleans the lower surface of the plate-shaped work held by the carrying means, and the holding means that moves the holding means in the Y-axis direction parallel to the holding surface. A processing device equipped with a means of transportation,
The cleaning mechanism includes a cylindrical roll cleaning member extending in a direction intersecting the Y-axis direction in a horizontal plane and parallel to the holding surface and extending beyond the length in the longitudinal direction of the plate-shaped work , and the roll. A rotating means for rotating the central axis of the cleaning member and an exposed portion in which a part of the side surface of the roll cleaning member is exposed in the extending direction are formed, and other than the exposed portion of the roll cleaning member is accommodated. It is provided with a tub to be submerged and a water supply means for storing water in the tub, and can be moved in the Y-axis direction together with the holding means by the moving means, and the lower surface of the plate-shaped work is washed with respect to the holding means. It is arranged on the -Y direction side, which is the opposite side of the + Y direction, which is the traveling direction of the holding means.
While overflowing the water supplied by the water supply means from the upper part of the tub, the cleaning mechanism is advanced in the + Y direction by the moving means, and the exposed portion of the roll cleaning member rotating in the tub is covered with the exposed portion. A processing device that abuts the lower surface of the plate-shaped work held by the carrying-out means and cleans the lower surface of the plate-shaped work. 前記ロール洗浄部材の延在方向に平行に延び、板状ワークの下面を洗浄するために前記＋Ｙ方向に進行する前記洗浄機構よりも前記－Ｙ方向側に配設され、前記搬出手段が保持した板状ワークの下面にエアを噴射するエア噴射手段を備え、該洗浄機構を該＋Ｙ方向に進行させることにより洗浄された板状ワークの下面を該エアで後から追うように乾燥させる請求項１記載の加工装置。 It is arranged in the −Y direction side of the cleaning mechanism that extends in parallel with the extending direction of the roll cleaning member and proceeds in the + Y direction in order to clean the lower surface of the plate-shaped work, and is held by the carrying-out means. Claim 1 is provided with an air injection means for injecting air on the lower surface of the plate-shaped work, and the lower surface of the plate-shaped work cleaned by advancing the cleaning mechanism in the + Y direction is dried so as to be followed by the air. The processing equipment described.
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