JP7078479B2 - 搬送ロボットおよびロボットシステム - Google Patents
搬送ロボットおよびロボットシステム Download PDFInfo
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- JP7078479B2 JP7078479B2 JP2018133294A JP2018133294A JP7078479B2 JP 7078479 B2 JP7078479 B2 JP 7078479B2 JP 2018133294 A JP2018133294 A JP 2018133294A JP 2018133294 A JP2018133294 A JP 2018133294A JP 7078479 B2 JP7078479 B2 JP 7078479B2
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- Prior art keywords
- arm
- transfer robot
- motor
- built
- stator
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1679—Programme controls characterised by the tasks executed
- B25J9/1682—Dual arm manipulator; Coordination of several manipulators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J13/00—Controls for manipulators
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J18/00—Arms
- B25J18/02—Arms extensible
- B25J18/04—Arms extensible rotatable
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/0025—Means for supplying energy to the end effector
- B25J19/0029—Means for supplying energy to the end effector arranged within the different robot elements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/0084—Programme-controlled manipulators comprising a plurality of manipulators
- B25J9/0087—Dual arms
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/0084—Programme-controlled manipulators comprising a plurality of manipulators
- B25J9/009—Programme-controlled manipulators comprising a plurality of manipulators being mechanically linked with one another at their distal ends
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/06—Programme-controlled manipulators characterised by multi-articulated arms
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/104—Programme-controlled manipulators characterised by positioning means for manipulator elements with cables, chains or ribbons
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/108—Bearings specially adapted therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric
- B25J9/126—Rotary actuators
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1674—Programme controls characterised by safety, monitoring, diagnostic
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/904—Devices for picking-up and depositing articles or materials provided with rotary movements only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68792—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the construction of the shaft
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
- B65G2201/022—Flat
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Numerical Control (AREA)
Description
10 搬送ロボット
11 第1アーム
11g 開口
11h ステータ保持部
11uc カバー
12 第2アーム
12h ステータ保持部
13 ハンド
13a 基部
13b フォーク部
13ba 上面
13bb 摩擦部
13bc 先端部
15 本体部
15h ステータ保持部
16 昇降部
20 制御装置
21 制御部
21a 動作制御部
21b 動作抑制部
22 記憶部
22a 教示データ
100 ステータ部
100a モータコア
100b モータ巻線
100c 巻線ケーブル
110 ロータ部
111 軸部
112 マグネット
113 取付部
120 ベース部
120h 貫通孔
121 エンコーダ部
121c エンコーダケーブル
121e 処理基板
122 軸部
122a ベアリング押さえ部
123 回転部
150 ビルトインモータ
300 回転抑制部
550 ビルトインモータ
A0 昇降軸
A1 第1軸
A2 第2軸
A3 第3軸
B1 ベルト
B2 ベルト
B3 摩擦バンド
b1 第1ベアリング
b2 第2ベアリング
bs スペーサ
M1 回転式モータ
M2 回転式モータ
M3 直動式アクチュエータ
Claims (13)
- 被搬送物を保持可能なハンドを移動させる水平リンク式の複数のアーム
を備え、
複数の前記アームの少なくとも1つは、
当該アームまたは他の前記アームを直接的に旋回させるアーム一体型のビルトインモータを備え、
前記ビルトインモータは、
円筒状のステータ部と、
前記ステータ部の厚み内において該ステータ部の内周側と対向し、該ステータ部に対して回転する円筒状のロータ部と、
前記アームに形成され、該ステータ部における外周側の全体を保持するステータ保持部と、
該アームに固定され、該ロータ部を回転可能に内周側から支持するベース部と
を備えること
を特徴とする搬送ロボット。 - 前記ビルトインモータにおける前記ステータ部と前記ロータ部との相対的な回転を非通電時に抑制し、通電時に抑制解除する回転抑制部
を備えることを特徴とする請求項1に記載の搬送ロボット。 - 前記ステータ部は、
前記ロータ部の回転に伴って旋回する前記アームの内部に挿入され、
前記回転抑制部は、
当該アームの内部に設けられ、当該アームの内部に挿入された前記ステータ部に対して摩擦力を付与することで当該アームの旋回を抑制すること
を特徴とする請求項2に記載の搬送ロボット。 - 回転軸が同心である複数の前記ハンドが設けられる前記アームは、
複数の着脱可能な回転式モータと、
前記回転式モータの駆動力を前記ハンドへそれぞれ伝達する複数のベルトと
を内部に備えること
を特徴とする請求項1~3のいずれか一つに記載の搬送ロボット。 - 前記ハンドは、2つであり、
前記回転式モータは、
側面視において出力軸の突出向きがお互いに離れる向きとなるように2つ配置され、
前記ベルトは、
上面視において少なくとも一部が入れ子となるように2つ配置されること
を特徴とする請求項4に記載の搬送ロボット。 - 前記回転式モータおよび前記ベルトを備える前記アームである第2アームは、
前記ビルトインモータを備える前記アームである第1アームに対して旋回すること
を特徴とする請求項4または5に記載の搬送ロボット。 - 前記第1アームは、
側面視において、前記ビルトインモータが配置される端部の厚みが他の部位の厚みよりも大きく、前記第2アームへ向けて突出しており、
前記第2アームは、
側面視において、前記回転式モータおよび前記ベルトが配置される部位の厚みが、前記第1アームにおける前記端部に対応する端部の厚みよりも大きく、前記第1アームへ向けて突出していること
を特徴とする請求項6に記載の搬送ロボット。 - 前記ステータ部は、
前記ロータ部の回転軸に沿って貫通する貫通孔を有し、
前記回転式モータのケーブルは、
前記第2アームの内部から、前記貫通孔と、前記第1アームの下面側に設けられる開口とを経由して前記第1アームの内部へ配索されること
を特徴とする請求項6または7に記載の搬送ロボット。 - 前記貫通孔および前記開口を塞ぐ着脱可能なカバーを備えること
を特徴とする請求項8に記載の搬送ロボット。 - 前記複数のアームを昇降させる昇降部
をさらに備え、
前記昇降部は、
前記第1アームを旋回させる昇降部一体型のビルトインモータを備えること
を特徴とする請求項6~9のいずれか一つに記載の搬送ロボット。 - 前記ベース部は、
前記ロータ部を回転可能に支持するベアリング
をさらに備えること
を特徴とする請求項1~10のいずれか一つに記載の搬送ロボット。 - 前記ベアリングは、
前記ステータ部の中空領域に配置されること
を特徴とする請求項11に記載の搬送ロボット。 - 請求項1~12のいずれか一つに記載の搬送ロボットと、
前記搬送ロボットの動作を制御する制御装置と
を備えることを特徴とするロボットシステム。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018133294A JP7078479B2 (ja) | 2018-07-13 | 2018-07-13 | 搬送ロボットおよびロボットシステム |
KR1020190046061A KR102442748B1 (ko) | 2018-07-13 | 2019-04-19 | 반송 로봇, 로봇 시스템, 반송 로봇의 제어 방법 및 기록 매체 |
CN201910434225.0A CN110712195B (zh) | 2018-07-13 | 2019-05-23 | 运送机器人和机器人*** |
US16/435,565 US11167419B2 (en) | 2018-07-13 | 2019-06-10 | Transfer robot and robot system |
US17/475,350 US20220001541A1 (en) | 2018-07-13 | 2021-09-15 | Transfer robot and robot system |
JP2022082032A JP7306533B2 (ja) | 2018-07-13 | 2022-05-19 | 搬送ロボットおよびロボットシステム |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018133294A JP7078479B2 (ja) | 2018-07-13 | 2018-07-13 | 搬送ロボットおよびロボットシステム |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022082032A Division JP7306533B2 (ja) | 2018-07-13 | 2022-05-19 | 搬送ロボットおよびロボットシステム |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020011303A JP2020011303A (ja) | 2020-01-23 |
JP7078479B2 true JP7078479B2 (ja) | 2022-05-31 |
Family
ID=69139994
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018133294A Active JP7078479B2 (ja) | 2018-07-13 | 2018-07-13 | 搬送ロボットおよびロボットシステム |
Country Status (4)
Country | Link |
---|---|
US (2) | US11167419B2 (ja) |
JP (1) | JP7078479B2 (ja) |
KR (1) | KR102442748B1 (ja) |
CN (1) | CN110712195B (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021125640A (ja) * | 2020-02-07 | 2021-08-30 | 川崎重工業株式会社 | 水平多関節ロボット及びそれを備えた基板搬送システム |
JP2021125641A (ja) * | 2020-02-07 | 2021-08-30 | 川崎重工業株式会社 | ロボット及びそれを備えた基板搬送システム |
CN111573282B (zh) * | 2020-05-12 | 2021-07-20 | 广东思谷智能技术有限公司 | 一种用于喷墨印刷的基板传送装置 |
US11602064B2 (en) * | 2020-09-01 | 2023-03-07 | Applied Materials, Inc. | Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers |
KR102226061B1 (ko) | 2020-11-03 | 2021-03-09 | 김상봉 | 클린룸용 로봇암 및 그의 제조방법 |
TW202218839A (zh) * | 2020-11-12 | 2022-05-16 | 日商發那科股份有限公司 | 分隔板及線條構件的保護構件 |
KR102348259B1 (ko) * | 2021-05-31 | 2022-01-10 | (주) 티로보틱스 | 기판 이송 로봇을 진공 챔버 내에서 주행하기 위한 주행 로봇 |
KR102577853B1 (ko) * | 2021-06-22 | 2023-09-13 | 티오에스주식회사 | 기판 처리 장비용 고토크형 매뉴퓰레이터 |
CN113787513B (zh) * | 2021-10-19 | 2022-11-01 | 芯导精密(北京)设备有限公司 | 一种用于传送晶圆机械臂的联动结构及其机械臂 |
JP2023174279A (ja) * | 2022-05-27 | 2023-12-07 | 株式会社安川電機 | 搬送ロボットおよびロボットシステム |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002134585A (ja) | 2000-10-24 | 2002-05-10 | Hirata Corp | ワーク搬送装置 |
JP2008036762A (ja) | 2006-08-04 | 2008-02-21 | Aitec Corp | 基板搬送ロボット |
US20080067966A1 (en) | 2006-09-18 | 2008-03-20 | Gang Ou | Direct drive robotic manipulator |
JP2011224743A (ja) | 2010-04-21 | 2011-11-10 | Yaskawa Electric Corp | 水平多関節ロボットおよびそれを備えた基板搬送システム |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61293791A (ja) * | 1985-05-30 | 1986-12-24 | ぺんてる株式会社 | ダイレクトドライブモ−タ−を用いた関節型ロボツトの回動装置 |
JPH0829513B2 (ja) * | 1986-07-09 | 1996-03-27 | ヤマハ発動機株式会社 | 産業用ロボツト |
JPS63191584A (ja) * | 1987-01-30 | 1988-08-09 | 株式会社日立製作所 | 産業用ロボツト |
JPH03256690A (ja) * | 1990-03-05 | 1991-11-15 | Hitachi Ltd | 産業用ロボット |
US6485250B2 (en) * | 1998-12-30 | 2002-11-26 | Brooks Automation Inc. | Substrate transport apparatus with multiple arms on a common axis of rotation |
US7578649B2 (en) * | 2002-05-29 | 2009-08-25 | Brooks Automation, Inc. | Dual arm substrate transport apparatus |
WO2004008611A1 (ja) * | 2002-07-10 | 2004-01-22 | Nikon Corporation | モータ、ロボット、基板ローダ及び露光装置 |
JP3999712B2 (ja) | 2003-07-14 | 2007-10-31 | 川崎重工業株式会社 | 多関節ロボット |
US9076830B2 (en) * | 2011-11-03 | 2015-07-07 | Applied Materials, Inc. | Robot systems and apparatus adapted to transport dual substrates in electronic device manufacturing with wrist drive motors mounted to upper arm |
JP2013158849A (ja) * | 2012-02-01 | 2013-08-19 | Yaskawa Electric Corp | ロボット |
JP5729319B2 (ja) * | 2012-02-01 | 2015-06-03 | 株式会社安川電機 | ロボット |
JP6051021B2 (ja) * | 2012-08-09 | 2016-12-21 | 日本電産サンキョー株式会社 | 産業用ロボットおよび産業用ロボットの制御方法 |
CN104823272B (zh) * | 2012-11-30 | 2017-07-14 | 应用材料公司 | 具有非等长前臂的多轴机械手设备、电子装置制造***、及用于在电子装置制造中传送基板的方法 |
JP6164948B2 (ja) * | 2013-06-20 | 2017-07-19 | キヤノン株式会社 | ロボット装置及び部品の製造方法 |
US20160036301A1 (en) * | 2014-08-01 | 2016-02-04 | Kabushiki Kaisha Yaskawa Denki | Electric rotating machine |
CN105313134A (zh) * | 2015-07-20 | 2016-02-10 | 中科新松有限公司 | 轻量型机械臂模块化关节 |
CN209375362U (zh) * | 2018-02-27 | 2019-09-10 | 前沿驱动(北京)技术有限公司 | 一种执行器、机械臂及机器人 |
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002134585A (ja) | 2000-10-24 | 2002-05-10 | Hirata Corp | ワーク搬送装置 |
JP2008036762A (ja) | 2006-08-04 | 2008-02-21 | Aitec Corp | 基板搬送ロボット |
US20080067966A1 (en) | 2006-09-18 | 2008-03-20 | Gang Ou | Direct drive robotic manipulator |
JP2011224743A (ja) | 2010-04-21 | 2011-11-10 | Yaskawa Electric Corp | 水平多関節ロボットおよびそれを備えた基板搬送システム |
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US20220001541A1 (en) | 2022-01-06 |
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