JP7065370B2 - 半導体デバイス及びその製造方法 - Google Patents
半導体デバイス及びその製造方法 Download PDFInfo
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- JP7065370B2 JP7065370B2 JP2019212011A JP2019212011A JP7065370B2 JP 7065370 B2 JP7065370 B2 JP 7065370B2 JP 2019212011 A JP2019212011 A JP 2019212011A JP 2019212011 A JP2019212011 A JP 2019212011A JP 7065370 B2 JP7065370 B2 JP 7065370B2
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Description
1.発明の分野
本開示は、半導体デバイス及びその製造方法に関し、より詳細には、ドープされたIII-V族層、導体構造及び金属層を有する半導体デバイスに関する。
例えばIII-V族の材料又はIII-V族の化合物(カテゴリ:III-V化合物)を含む半導体部品などの直接バンドギャップ半導体を含む部品は、これらの特性に応じて、(例えば異なる電圧及び周波数などの)様々な条件下で又は様々な環境で動作又は稼働することが可能である。
本開示の幾つかの実施形態では、基板、ドープされたIII-V層、導体構造及び金属層を含む半導体デバイスが提供される。ドープされたIII-V族層は、基板上に配置されている。導体構造は、ドープされたIII-V族層上に配置されている。金属層は、導体構造とドープされたIII-V族層との間に配置されている。
以下の開示は、提供される主題の様々に異なる特徴を具現化するための数多くの異なる実施形態又は例を提供する。以下に、部品及び配置の具体的な例を示す。しかし、当然のことながら、これらは単なる例に過ぎず、限定することを意図していない。本開示の以下の詳細な説明において、第2の特徴を被覆するように、又はその上に第1の特徴を形成することへの言及が、第1の特徴と第2の特徴とが直接に接触するように形成される実施形態を含んでもよく、また、第1の特徴と第2の特徴とが直接に接触しないように、第1の特徴と第2の特徴との間に更なる特徴を形成することの可能な実施形態を含んでもよい。加えて、本開示が、様々な例において参照番号及び/又は文字を繰り返してもよい。この繰り返しは、簡潔さと明瞭性とを目的としたものであり、記載されている様々な実施形態及び/又は構成間の関連性をそれ自体が規定するわけではない。
Claims (18)
- 基板と;
前記基板上に配置された、第1のIII-V族層と;
前記第1のIII-V族層上に配置された、第2のIII-V族層であって、前記第2のIII-V族層は、前記第1のIII-V族層のバンドギャップよりも高いバンドギャップを有している第2のIII-V族層と;
前記第2のIII-V族層の上に配置された、ドープされたIII-V族層と;
前記ドープされたIII-V族層の上に配置され、前記ドープされたIII-V族層の上面の第1の部分を被覆して第1の接触領域を形成している金属層であって、前記ドープされたIII-V族層の前記上面の第2の部分は前記金属層によって被覆されておらず、前記ドープされたIII-V族層の前記上面の前記第2の部分は、前記ドープされたIII-V族層の前記上面の前記第1の部分より大きな表面粗さを有している、金属層と;
前記第2のIII-V族層、前記ドープされたIII-V族層、及び前記金属層の上に配置され、前記ドープされたIII-V族層の前記上面の前記第2の部分を被覆している、第1のパッシベーション層と;
前記第1のパッシベーション層の上にコンフォーマルに配置された、第2のパッシベーション層と;
前記第2のパッシベーション層の上に配置された、第1の誘電体層と;
前記金属層上に配置され、前記第1及び第2パッシベーション層並びに前記第1の誘電体層を貫通して前記金属層と接触している導体構造と;
前記ドープされたIII-V族層から横方向に分離されたソースコンタクト及びドレインコンタクトであって、前記ソースコンタクト及びドレインコンタクトは、少なくとも、前記第1のパッシベーション層を貫通して前記第2のIII-V族層と接触している、ソースコンタクト及びドレインコンタクトと;
前記第1の誘電体層の上に配置された、第1のフィールドプレートと;
前記第1のフィールドプレート及び前記第1の誘電体層の上に配置された、第2の誘電体層と;
前記第2の誘電体層の上に配置された、第2のフィールドプレートと;
前記第2のフィールドプレート及び前記第2の誘電体層の上に配置された、第3の誘電体層と;
前記第3の誘電体層の上に配置された、第3のフィールドプレートと;
前記第3のフィールドプレート及び前記第3の誘電体層の上に配置された、第4の誘電体層と;
少なくとも前記第1、第2、第3、及び第4の誘電体層を貫通し、それぞれが前記ソースコンタクト及び前記ドレインコンタクトと接触している、少なくとも2つの相互接続構造と;
を備えるGaNベースの高電子移動度トランジスタ(HEMT)半導体デバイス。 - 前記ソースコンタクト及び前記ドレインコンタクトは、前記ドープされたIII-V族層より低い位置で前記第2のIII-V族層とそれぞれ界面を形成している、請求項1に記載の半導体デバイス。
- 前記導体構造は、本体と、前記本体に接続され前記第2の誘電体層の上に位置している張出部とを有し、前記本体は、前記第1及び第2のパッシベーション層並びに前記第1及び第2の誘電体層を貫通している、請求項1に記載の半導体デバイス。
- 前記張出部は、前記本体より広い幅を有し、前記第3のフィールドプレートの直下に縁を有している、請求項3に記載の半導体デバイス。
- 前記第1のパッシベーション層は、前記ドープされたIII-V族層及び前記金属層とコンフォーマルであり、それにより、前記第1のパッシベーション層とコンフォーマルな前記第2のパッシベーション層は、前記金属層上で第1の厚さを有し、前記金属層と離れた位置で前記第1の厚さより大きな第2の厚さを有している、請求項1に記載の半導体デバイス。
- 前記ドープされたIII-V族層は幅方向に第1の幅を有し、前記金属層は前記幅方向に第2の幅を有し、前記第2の幅は前記第1の幅より小さい、請求項1に記載の半導体デバイス。
- 前記導体構造が前記金属層と直接に接触している、請求項1に記載の半導体デバイス。
- 前記金属層が前記ドープされたIII-V族層と直接に接触している、請求項1に記載の半導体デバイス。
- 前記第1のパッシベーション層が前記導体構造の一部分を包囲している、請求項1に記載の半導体デバイス。
- 前記第1のパッシベーション層は、前記ドープされたIII-V族層の前記上面の前記第2の部分と直接に接触しており、それによって第2の接触領域を形成している、請求項1に記載の半導体デバイス。
- 前記第2のパッシベーション層が前記導体構造の一部分を包囲している、請求項1に記載の半導体デバイス。
- 前記第1のフィールドプレートは、前記導体構造の底面より高く、前記導体構造の上面より低い位置にある、請求項1に記載の半導体デバイス。
- 前記第2のフィールドプレートは、前記導体構造の上面より低い位置にある底面を有し、前記導体構造の上面より高い位置にある上面を有している、請求項1に記載の半導体デバイス。
- 前記第1、第2、及び第3のフィールドプレートの1つは、前記第1、第2、及び第3のフィールドプレートの他の1つと少なくとも垂直方向に重複している、請求項1に記載の半導体デバイス。
- 前記第1及び第2のフィールドプレートの何れも前記導体構造と垂直方向に重複していない、請求項1に記載の半導体デバイス。
- 前記第3のフィールドプレートは前記導体構造と少なくとも垂直方向に重複している、請求項1に記載の半導体デバイス。
- 前記基板上に且つ前記基板と前記第1のIII-V族層との間に配置された超格子層を更に備える、請求項1に記載の半導体デバイス。
- 第1のIII-V族層を基板上に形成することと;
前記第1のIII-V族層上に第2のIII-V族層を形成することであって、前記第2のIII-V族層は、前記第1のIII-V族層のバンドギャップよりも高いバンドギャップを有していることと;
前記第2のIII-V族層上にドープされたIII-V族層を形成することと;
前記ドープされたIII-V族層上に金属層を形成することであって、前記金属層は、前記ドープされたIII-V族層の上面の第1の部分を被覆して第1の接触領域を形成しており、前記ドープされたIII-V族層の前記上面の第2の部分は前記金属層によって被覆されておらず、前記ドープされたIII-V族層の前記上面の前記第2の部分は、前記ドープされたIII-V族層の前記上面の前記第1の部分より大きな表面粗さを有していることと;
前記第2のIII-V族層、前記ドープされたIII-V族層、及び前記金属層上に第1のパッシベーション層を形成することであって、前記第1のパッシベーション層は前記ドープされたIII-V族層の前記上面の前記第2の部分を被覆していることと;
前記第1のパッシベーション層上にコンフォーマルに第2のパッシベーション層を形成することと;
前記第2のパッシベーション層上に第1の誘電体層を形成することと;
前記金属層上に導体構造を形成することであって、前記導体構造は、前記第1及び第2のパッシベーション層並びに前記第1の誘電体層を貫通して前記金属層と接触していることと;
前記ドープされたIII-V族層から横方向に分離されたソースコンタクト及びドレインコンタクトを形成することであって、前記ソースコンタクト及びドレインコンタクトは、少なくとも、前記第1のパッシベーション層を貫通して前記第2のIII-V族層と接触していることと;
前記第1の誘電体層上に第1のフィールドプレートを形成することと;
前記第1のフィールドプレート及び前記第1の誘電体層上に第2の誘電体層を形成することと;
前記第2の誘電体層上に第2のフィールドプレートを形成することと;
前記第2のフィールドプレート及び前記第2の誘電体層上に第3の誘電体層を形成することと;
前記第3の誘電体層上に第3のフィールドプレートを形成することと;
前記第3のフィールドプレート及び前記第3の誘電体層上に第4の誘電体層を形成することと;
少なくとも前記第1、第2、第3、及び第4の誘電体層を貫通し、それぞれが前記ソースコンタクト及び前記ドレインコンタクトと接触している、少なくとも2つの相互接続構造を形成することと;
を含む半導体デバイスの製造方法。
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CN110071173B (zh) | 2023-04-18 |
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EP3734666B1 (en) | 2023-08-02 |
EP3734666A1 (en) | 2020-11-04 |
KR102339311B1 (ko) | 2021-12-13 |
US10971579B2 (en) | 2021-04-06 |
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