JP7057795B2 - 薄膜トランジスタ、薄膜トランジスタを有する表示装置、及び薄膜トランジスタの製造方法 - Google Patents
薄膜トランジスタ、薄膜トランジスタを有する表示装置、及び薄膜トランジスタの製造方法 Download PDFInfo
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- JP7057795B2 JP7057795B2 JP2020040568A JP2020040568A JP7057795B2 JP 7057795 B2 JP7057795 B2 JP 7057795B2 JP 2020040568 A JP2020040568 A JP 2020040568A JP 2020040568 A JP2020040568 A JP 2020040568A JP 7057795 B2 JP7057795 B2 JP 7057795B2
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- 239000010409 thin film Substances 0.000 title claims description 51
- 238000000034 method Methods 0.000 title description 15
- 238000004519 manufacturing process Methods 0.000 title description 13
- 239000010408 film Substances 0.000 claims description 169
- 239000003963 antioxidant agent Substances 0.000 claims description 87
- 230000003078 antioxidant effect Effects 0.000 claims description 87
- 239000010410 layer Substances 0.000 claims description 58
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 48
- 239000001301 oxygen Substances 0.000 claims description 48
- 229910052760 oxygen Inorganic materials 0.000 claims description 48
- 239000011229 interlayer Substances 0.000 claims description 40
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 18
- 239000004065 semiconductor Substances 0.000 claims description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 4
- 239000000463 material Substances 0.000 description 28
- 239000004020 conductor Substances 0.000 description 21
- 239000007789 gas Substances 0.000 description 13
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 12
- 238000010438 heat treatment Methods 0.000 description 10
- 239000004973 liquid crystal related substance Substances 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 238000001312 dry etching Methods 0.000 description 7
- 230000002950 deficient Effects 0.000 description 6
- 238000005530 etching Methods 0.000 description 6
- 239000011787 zinc oxide Substances 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 210000002858 crystal cell Anatomy 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 229910044991 metal oxide Inorganic materials 0.000 description 5
- 150000004706 metal oxides Chemical class 0.000 description 5
- 238000002161 passivation Methods 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 4
- 125000004429 atom Chemical group 0.000 description 4
- 229910052733 gallium Inorganic materials 0.000 description 4
- 229910052738 indium Inorganic materials 0.000 description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 4
- 239000011810 insulating material Substances 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 206010021143 Hypoxia Diseases 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- JAONJTDQXUSBGG-UHFFFAOYSA-N dialuminum;dizinc;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Al+3].[Al+3].[Zn+2].[Zn+2] JAONJTDQXUSBGG-UHFFFAOYSA-N 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004205 SiNX Inorganic materials 0.000 description 1
- GENZLHCFIPDZNJ-UHFFFAOYSA-N [In+3].[O-2].[Mg+2] Chemical compound [In+3].[O-2].[Mg+2] GENZLHCFIPDZNJ-UHFFFAOYSA-N 0.000 description 1
- FDLSOIWNAZCAMB-UHFFFAOYSA-N [O--].[O--].[O--].[Mg++].[Sn+4] Chemical compound [O--].[O--].[O--].[Mg++].[Sn+4] FDLSOIWNAZCAMB-UHFFFAOYSA-N 0.000 description 1
- DZLPZFLXRVRDAE-UHFFFAOYSA-N [O--].[O--].[O--].[O--].[Al+3].[Zn++].[In+3] Chemical compound [O--].[O--].[O--].[O--].[Al+3].[Zn++].[In+3] DZLPZFLXRVRDAE-UHFFFAOYSA-N 0.000 description 1
- WGCXSIWGFOQDEG-UHFFFAOYSA-N [Zn].[Sn].[In] Chemical compound [Zn].[Sn].[In] WGCXSIWGFOQDEG-UHFFFAOYSA-N 0.000 description 1
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 1
- VGLYDBMDZXTCJA-UHFFFAOYSA-N aluminum zinc oxygen(2-) tin(4+) Chemical compound [O-2].[Al+3].[Sn+4].[Zn+2] VGLYDBMDZXTCJA-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 229910001195 gallium oxide Inorganic materials 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical compound [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 description 1
- PNHVEGMHOXTHMW-UHFFFAOYSA-N magnesium;zinc;oxygen(2-) Chemical compound [O-2].[O-2].[Mg+2].[Zn+2] PNHVEGMHOXTHMW-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- NQBRDZOHGALQCB-UHFFFAOYSA-N oxoindium Chemical compound [O].[In] NQBRDZOHGALQCB-UHFFFAOYSA-N 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 230000003449 preventive effect Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- YSRUGFMGLKANGO-UHFFFAOYSA-N zinc hafnium(4+) indium(3+) oxygen(2-) Chemical compound [O-2].[Zn+2].[In+3].[Hf+4] YSRUGFMGLKANGO-UHFFFAOYSA-N 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
- BNEMLSQAJOPTGK-UHFFFAOYSA-N zinc;dioxido(oxo)tin Chemical compound [Zn+2].[O-][Sn]([O-])=O BNEMLSQAJOPTGK-UHFFFAOYSA-N 0.000 description 1
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- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
- H10K59/1213—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements the pixel elements being TFTs
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Description
130 アクティブ層
131 チャネル領域
132 ソース領域
133 ドレイン領域
140 ゲート絶縁膜
150 ゲート電極
160 層間絶縁膜
161 第1コンタクトホール
162 第2コンタクトホール
171 ソース電極
172 ドレイン電極
180 パッシベーション膜
190 画素電極
Claims (6)
- 基板上に位置し、ソース領域、ドレイン領域、及び前記ソース領域と前記ドレイン領域との間に位置するチャネル領域を有する酸化物半導体のアクティブ層と、
前記アクティブ層の前記チャネル領域上に位置するゲート電極と、
前記アクティブ層と前記ゲート電極との間に位置するゲート絶縁膜と、
前記アクティブ層の前記ソース領域の上部に形成される第1酸化防止膜であって、前記ソース領域の第1導電性領域に配置される第1酸化防止膜と、
前記アクティブ層の前記ドレイン領域の上部に形成される第2酸化防止膜であって、前記ドレイン領域の第2導電性領域に配置される第2酸化防止膜と、
前記第1酸化防止膜、前記第2酸化防止膜、及び前記ゲート電極上に位置する層間絶縁膜とを備え、
前記層間絶縁膜は、前記第1酸化防止膜及び前記第2酸化防止膜と接触し、
前記第1酸化防止膜及び前記第2酸化防止膜は、前記酸化物半導体及びSiを含み、
前記ソース領域と前記ドレイン領域のそれぞれは前記基板と前記第1及び第2酸化防止膜との間に導電性領域を含み、
前記ソース領域と前記ドレイン領域のそれぞれの前記導電性領域は、前記酸化物半導体の導体化された領域であり、
前記導電性領域の単位体積あたりの酸素量を示す酸素濃度は、チャネル領域の酸素濃度よりも低い、薄膜トランジスタ。 - 前記導電性領域と前記チャネル領域はSiを含まない酸化物半導体を含む、請求項1に記載の薄膜トランジスタ。
- 前記酸化防止膜の酸素比率は、前記チャネル領域に対して20%~80%である、請求項1に記載の薄膜トランジスタ。
- 酸化防止膜におけるSi量は、1×1022/cm3~4×1022/cm3である、請求項1に記載の薄膜トランジスタ。
- 前記酸化防止膜の厚さは50Å~100Åである、請求項1に記載の薄膜トランジスタ。
- 前記層間絶縁膜は酸化シリコン(SiO2)で形成される、請求項1に記載の薄膜トランジスタ。
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CN108389867A (zh) * | 2018-02-26 | 2018-08-10 | 深圳市华星光电半导体显示技术有限公司 | 阵列基板及阵列基板的制作方法 |
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US20200098924A1 (en) * | 2018-09-20 | 2020-03-26 | Samsung Display Co., Ltd. | Transistor substrate, method of manufacturing the same, and display device including the same |
US11450748B2 (en) | 2020-05-28 | 2022-09-20 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor device and manufacturing method thereof |
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US11404543B2 (en) | 2020-06-19 | 2022-08-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor device and manufacturing method thereof |
WO2024005610A1 (ko) * | 2022-06-30 | 2024-01-04 | 주식회사 에이치피에스피 | 박막 트랜지스터 및 박막 트랜지스터의 제조 방법 |
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CN106935655A (zh) | 2017-07-07 |
US20200335629A1 (en) | 2020-10-22 |
KR20170080320A (ko) | 2017-07-10 |
EP3188247B1 (en) | 2020-05-06 |
EP3188247A1 (en) | 2017-07-05 |
CN106935655B (zh) | 2020-10-23 |
US11777039B2 (en) | 2023-10-03 |
JP6560186B2 (ja) | 2019-08-14 |
JP2020174174A (ja) | 2020-10-22 |
US11322621B2 (en) | 2022-05-03 |
JP2018191014A (ja) | 2018-11-29 |
KR20240002239A (ko) | 2024-01-04 |
JP2017120910A (ja) | 2017-07-06 |
US20170194502A1 (en) | 2017-07-06 |
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