JP7037669B2 - 多段真空ポンプ及び複数の真空チャンバを差動的にポンピングする方法 - Google Patents
多段真空ポンプ及び複数の真空チャンバを差動的にポンピングする方法 Download PDFInfo
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- JP7037669B2 JP7037669B2 JP2020563828A JP2020563828A JP7037669B2 JP 7037669 B2 JP7037669 B2 JP 7037669B2 JP 2020563828 A JP2020563828 A JP 2020563828A JP 2020563828 A JP2020563828 A JP 2020563828A JP 7037669 B2 JP7037669 B2 JP 7037669B2
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
- F04C28/26—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves using bypass channels
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
20 中間入口
30 排出口
12 入口段
22、32、42、52、62 中間段
72 排出段
80 真空チャンバ入口オリフィス
82 真空チャンバ内部オリフィス
84 主入口チャンバ
86 高真空チャンバ
Claims (13)
- 複数の入口(10、20)を備える多段容量式真空ポンプであって、前記真空ポンプは、
対応する少なくとも1つのシャフト上で回転するように取り付けられ排出口(30)を通して流出できるように前記ポンプの複数の段(12、22、32、42、52、62、72)を通してガスをポンピングするための少なくとも1つのロータを収容するハウジングを備え、前記ハウジングは、前記複数の入口(10、20)を含み、前記複数の入口(10、20)は、
前記真空ポンプの入口段(12)にガスを入れるように構成された第1の入口(10)と、
前記真空ポンプの中間段(22、32、42、52、62)にガスを入れるように構成された追加の入口(20)と、
前記中間段(22)の第1の入口側のポンプ段(12)から前記中間段(22)の排出側のポンプ段(32)までガス流を迂回させるための迂回経路と、を備え、
前記ポンプは、前記第1の入口(10)及び前記追加の入口(20)の各々を通して入れられたガスが、前記中間段の下流の前記真空ポンプの少なくとも1つの段によって複合ガス流として一緒にポンピングされるように構成され、
前記真空ポンプは、複数のチャンバ(84、86)を差動的にポンピングするように構成され、前記第1の入口(10)は、低真空チャンバ(84)に接続するように構成され、
前記追加の入口(20)は、高真空チャンバ(86)をポンピングする二次真空ポンプのための補助ポンプの入口として作動するように構成される、
ことを特徴とする真空ポンプ。 - 前記中間段(22)は、前記中間段(22)によってポンピングされた流れを前記中間段(22)の第1の入口側のポンプ段(12)に向かって迂回させるための出口を備えている、
請求項1に記載の真空ポンプ。 - 前記真空ポンプは、複数段ルーツポンプ、複数段クローポンプ、又は複数段スクリューポンプの1つである、
請求項1または2に記載の真空ポンプ。 - 前記真空ポンプは、対のシャフト上で回転するように取り付けられた対のロータを含む、
請求項1ないし3のいずれか1項に記載の真空ポンプ。 - 前記真空ポンプは、前記入口段(12)から前記少なくとも1つのシャフトに沿って複数の中間段(22、32、42、52、62)を通って排出段(72)に連続的に配置された4又は5以上の段(12、22、32、42、52、62、72)を備えている、
請求項1ないし4のいずれか1項に記載の真空ポンプ。 - 前記中間段(22、32)は、前記入口段(12)に隣接する段(22)又は前記入口段(12)の1つ隣の段(42)の1つを備えている、
請求項1ないし5のいずれか1項に記載の真空ポンプ。 - 前記真空ポンプは、前記追加の入口(20)よりも前記第1の入口(10)を通してより高いガス流量でポンピングするように構成される、
請求項1ないし6のいずれか1項に記載の真空ポンプ。 - 前記真空ポンプは、前記追加の入口(20)を通るガス流量よりも10倍を超えて高い前記第1の入口(10)を通るガス流量をポンピングするように構成される、
請求項7に記載の真空ポンプ。 - 前記真空ポンプは、前記第1の入口(10)を通る5~10slmのガス流量をポンピングするように構成される、
請求項7又は8に記載の真空ポンプ。 - 前記真空ポンプは、前記第1の入口(10)で3~5ミリバールの真空、及び前記追加の入口(20)で二次ポンプを補助するのに適した圧力を提供するように構成されている、
請求項1ないし9のいずれか1項に記載の真空ポンプ。 - 前記追加の入口(20)に提供される圧力は、0.8~10ミリバール、好ましくは0.8~2.5ミリバールである、
請求項10に記載の真空ポンプ。 - 真空システムにおいて複数の真空チャンバ(84、86)を差動的にポンピングする方法であって
請求項1から11のいずれかに記載の真空ポンプの前記第1の入口(10)を低真空チャンバ(84)に接続する段階と、
前記追加の入口(20)を、高真空チャンバ(86)をポンピングする高真空ポンプの排出口に接続する段階と、を含む、
ことを特徴とする方法。 - 前記真空システムは、連続する真空チャンバ(84、86)によって段階的に圧力が低減される質量分析システムを備え、前記真空チャンバ(84、86)は、前記真空チャンバ(84、86)の間の流れを制御するために制限部(82)を介して接続されている、
請求項12に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1806177.0 | 2018-04-16 | ||
GB1806177.0A GB2572958C (en) | 2018-04-16 | 2018-04-16 | A multi-stage vacuum pump and a method of differentially pumping multiple vacuum chambers |
PCT/GB2019/050973 WO2019202297A1 (en) | 2018-04-16 | 2019-04-04 | A multi-stage vacuum pump and a method of differentially pumping multiple vacuum chambers |
Publications (2)
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JP2021513026A JP2021513026A (ja) | 2021-05-20 |
JP7037669B2 true JP7037669B2 (ja) | 2022-03-16 |
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JP2020563828A Active JP7037669B2 (ja) | 2018-04-16 | 2019-04-04 | 多段真空ポンプ及び複数の真空チャンバを差動的にポンピングする方法 |
Country Status (7)
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US (1) | US11326604B2 (ja) |
EP (1) | EP3701148B1 (ja) |
JP (1) | JP7037669B2 (ja) |
KR (1) | KR102282682B1 (ja) |
CN (1) | CN111542699B (ja) |
GB (1) | GB2572958C (ja) |
WO (1) | WO2019202297A1 (ja) |
Families Citing this family (1)
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WO2023223031A1 (en) * | 2022-05-18 | 2023-11-23 | Edwards Limited | Multi-stage vacuum pump |
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JP2011106466A (ja) | 2004-05-21 | 2011-06-02 | Edwards Ltd | ポンピング装置 |
US20130209222A1 (en) | 2012-02-08 | 2013-08-15 | Edwards Limited | Pump |
JP2013213498A (ja) | 2012-03-30 | 2013-10-17 | Pfeiffer Vacuum Gmbh | 複数のチャンバーからガスの真空引きを行うためのポンプシステム及びポンプシステムを制御するための方法 |
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2018
- 2018-04-16 GB GB1806177.0A patent/GB2572958C/en active Active
-
2019
- 2019-04-04 US US16/954,466 patent/US11326604B2/en active Active
- 2019-04-04 EP EP19717569.8A patent/EP3701148B1/en active Active
- 2019-04-04 CN CN201980007712.7A patent/CN111542699B/zh active Active
- 2019-04-04 JP JP2020563828A patent/JP7037669B2/ja active Active
- 2019-04-04 WO PCT/GB2019/050973 patent/WO2019202297A1/en unknown
- 2019-04-04 KR KR1020207018155A patent/KR102282682B1/ko active IP Right Grant
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2011106466A (ja) | 2004-05-21 | 2011-06-02 | Edwards Ltd | ポンピング装置 |
US20130209222A1 (en) | 2012-02-08 | 2013-08-15 | Edwards Limited | Pump |
JP2013213498A (ja) | 2012-03-30 | 2013-10-17 | Pfeiffer Vacuum Gmbh | 複数のチャンバーからガスの真空引きを行うためのポンプシステム及びポンプシステムを制御するための方法 |
Also Published As
Publication number | Publication date |
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US20210079914A1 (en) | 2021-03-18 |
JP2021513026A (ja) | 2021-05-20 |
KR102282682B1 (ko) | 2021-07-27 |
GB2572958C (en) | 2021-06-23 |
GB2572958A (en) | 2019-10-23 |
US11326604B2 (en) | 2022-05-10 |
CN111542699A (zh) | 2020-08-14 |
EP3701148A1 (en) | 2020-09-02 |
WO2019202297A1 (en) | 2019-10-24 |
CN111542699B (zh) | 2022-05-13 |
GB201806177D0 (en) | 2018-05-30 |
GB2572958B (en) | 2020-10-14 |
EP3701148B1 (en) | 2021-06-30 |
KR20200085343A (ko) | 2020-07-14 |
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