JP6987885B2 - イオン検出器 - Google Patents
イオン検出器 Download PDFInfo
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- JP6987885B2 JP6987885B2 JP2019562588A JP2019562588A JP6987885B2 JP 6987885 B2 JP6987885 B2 JP 6987885B2 JP 2019562588 A JP2019562588 A JP 2019562588A JP 2019562588 A JP2019562588 A JP 2019562588A JP 6987885 B2 JP6987885 B2 JP 6987885B2
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- coupled
- photomultiplier tube
- ion
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/025—Detectors specially adapted to particle spectrometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/2006—Measuring radiation intensity with scintillation detectors using a combination of a scintillator and photodetector which measures the means radiation intensity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/208—Circuits specially adapted for scintillation detectors, e.g. for the photo-multiplier section
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/28—Measuring radiation intensity with secondary-emission detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
- G01T1/2914—Measurement of spatial distribution of radiation
- G01T1/2921—Static instruments for imaging the distribution of radioactivity in one or two dimensions; Radio-isotope cameras
- G01T1/2928—Static instruments for imaging the distribution of radioactivity in one or two dimensions; Radio-isotope cameras using solid state detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/06—Electron- or ion-optical arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/30—Static spectrometers using magnetic analysers, e.g. Dempster spectrometer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- High Energy & Nuclear Physics (AREA)
- Molecular Biology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Electron Tubes For Measurement (AREA)
- Measurement Of Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Description
Claims (9)
- 第1の電位に結合され,イオンが衝突することによって電子を放出するように構成される電子放出プレート,
上記第1の電位と異なる第2の電位に結合され,上記電子放出プレートに面する前面および背面を有し,上記前面に電子が衝突することによって上記背面から光子を放出するように構成されるシンチレータ,
上記シンチレータの上記背面に光学的に結合され,上記シンチレータの上記背面から放出される光子の流れを閉じ込める管状の光ガイド,
上記光ガイドに結合され,上記光ガイドからの光子の衝突に対応する電気信号を出力するように構成される出力を有する光電子増倍管,
上記光電子増倍管に結合された第1の信号線,
上記第1の信号線から入力を受け取るように構成され,かつ離散イベント・カウント出力を提供するように構成されるデジタル・イベント・カウンタ,
上記第1の信号線と独立に上記光電子増倍管に結合された第2の信号線,ならびに
上記第2の信号線から入力を受け取るように構成され,上記デジタル・イベント・カウンタからの上記離散イベント・カウント出力と同時に積算アナログ出力を提供するように構成されるアナログ積分器を備え,
上記第1の信号線が上記光電子増倍管の入力バイアス線に結合されており,
上記第2の信号線が上記光電子増倍管の出力線に結合されている,
イオン検出器。 - 上記光電子増倍管が固体光電子増倍管を備えている,請求項1に記載のイオン検出器。
- 上記固体光電子増倍管がシリコン光電子増倍管を備えている,請求項2に記載のイオン検出器。
- 上記固体光電子増倍管が,単一の電気出力信号を提供するために結合された複数の出力を有する複数のアバランシェ・フォトダイオードのアレイを備えている,請求項2に記載のイオン検出器。
- 上記管状の光ガイドが上記光子を上記光電子増倍管に向かわせる反射面を備えている,請求項1に記載のイオン検出器。
- 上記光電子増倍管が上記管状の光ガイドの後面に結合されている,請求項1に記載のイオン検出器。
- 変圧器をさらに備え,上記第1の信号線が上記変圧器を介して入力バイアス線に結合されている,請求項1に記載のイオン検出器。
- キャパシタをさらに備え,上記第1の信号線が上記キャパシタを介して入力バイアス線に結合されている,請求項1に記載のイオン検出器。
- 上記電子放出プレートに接続されたタップ,および
上記タップに接続された電流測定センサ,をさらに備えている,
請求項1に記載のイオン検出器。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2021195242A JP7277550B2 (ja) | 2017-05-12 | 2021-12-01 | 二次イオン質量分析計 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/US2017/032447 WO2018208318A1 (en) | 2017-05-12 | 2017-05-12 | Mass spectrometer detector and system and method using the same |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021195242A Division JP7277550B2 (ja) | 2017-05-12 | 2021-12-01 | 二次イオン質量分析計 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020520069A JP2020520069A (ja) | 2020-07-02 |
JP6987885B2 true JP6987885B2 (ja) | 2022-01-05 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019562588A Active JP6987885B2 (ja) | 2017-05-12 | 2017-05-12 | イオン検出器 |
Country Status (6)
Country | Link |
---|---|
US (2) | US11183377B2 (ja) |
EP (1) | EP3622553A4 (ja) |
JP (1) | JP6987885B2 (ja) |
KR (2) | KR102431096B1 (ja) |
CN (1) | CN110914952B (ja) |
WO (1) | WO2018208318A1 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6987885B2 (ja) * | 2017-05-12 | 2022-01-05 | ノヴァ メジャリング インスツルメンツ インコーポレイテッド | イオン検出器 |
EP4098984A1 (en) | 2017-09-19 | 2022-12-07 | Beckman Coulter Inc. | Analog light measuring and photon counting in chemiluminescence measurements |
WO2020016988A1 (ja) * | 2018-07-19 | 2020-01-23 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
US11545334B2 (en) * | 2018-08-02 | 2023-01-03 | Hitachi High-Tech Corporation | Charged particle beam device |
US11536604B1 (en) * | 2019-05-30 | 2022-12-27 | El-Mul Technologies Ltd | Light sensor assembly in a vacuum environment |
US11656371B1 (en) | 2020-06-09 | 2023-05-23 | El-Mul Technologies Ltd | High dynamic range detector with controllable photon flux functionality |
US11469091B1 (en) | 2021-04-30 | 2022-10-11 | Perkinelmer Health Sciences Canada, Inc. | Mass spectrometer apparatus including ion detection to minimize differential drift |
GB2614070A (en) * | 2021-12-21 | 2023-06-28 | Thermo Fisher Scient Bremen Gmbh | Calibrating a mass spectrometer |
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2017
- 2017-05-12 JP JP2019562588A patent/JP6987885B2/ja active Active
- 2017-05-12 US US16/612,697 patent/US11183377B2/en active Active
- 2017-05-12 KR KR1020197036883A patent/KR102431096B1/ko active IP Right Grant
- 2017-05-12 KR KR1020227012809A patent/KR102523462B1/ko active IP Right Grant
- 2017-05-12 CN CN201780093081.6A patent/CN110914952B/zh active Active
- 2017-05-12 EP EP17909522.9A patent/EP3622553A4/en active Pending
- 2017-05-12 WO PCT/US2017/032447 patent/WO2018208318A1/en active Application Filing
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2021
- 2021-11-19 US US17/531,674 patent/US11823883B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
EP3622553A1 (en) | 2020-03-18 |
KR20190141264A (ko) | 2019-12-23 |
KR102523462B1 (ko) | 2023-04-20 |
WO2018208318A1 (en) | 2018-11-15 |
CN110914952A (zh) | 2020-03-24 |
CN110914952B (zh) | 2022-09-23 |
JP2020520069A (ja) | 2020-07-02 |
KR102431096B1 (ko) | 2022-08-09 |
EP3622553A4 (en) | 2020-12-02 |
KR20220054450A (ko) | 2022-05-02 |
US20200066502A1 (en) | 2020-02-27 |
US11183377B2 (en) | 2021-11-23 |
US11823883B2 (en) | 2023-11-21 |
US20220223395A1 (en) | 2022-07-14 |
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