JP6934526B2 - 移動体の案内装置 - Google Patents
移動体の案内装置 Download PDFInfo
- Publication number
- JP6934526B2 JP6934526B2 JP2019541610A JP2019541610A JP6934526B2 JP 6934526 B2 JP6934526 B2 JP 6934526B2 JP 2019541610 A JP2019541610 A JP 2019541610A JP 2019541610 A JP2019541610 A JP 2019541610A JP 6934526 B2 JP6934526 B2 JP 6934526B2
- Authority
- JP
- Japan
- Prior art keywords
- lubricating oil
- moving body
- axis
- guide device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000010687 lubricating oil Substances 0.000 claims description 236
- 239000003921 oil Substances 0.000 claims description 32
- 238000007599 discharging Methods 0.000 claims description 2
- 238000011084 recovery Methods 0.000 claims description 2
- 239000000314 lubricant Substances 0.000 claims 2
- 230000007246 mechanism Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 4
- 238000003754 machining Methods 0.000 description 3
- 230000010349 pulsation Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/02—Parts of sliding-contact bearings
- F16C33/04—Brasses; Bushes; Linings
- F16C33/06—Sliding surface mainly made of metal
- F16C33/10—Construction relative to lubrication
- F16C33/1025—Construction relative to lubrication with liquid, e.g. oil, as lubricant
- F16C33/106—Details of distribution or circulation inside the bearings, e.g. details of the bearing surfaces to affect flow or pressure of the liquid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/02—Sliding-contact bearings
- F16C29/025—Hydrostatic or aerostatic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
- B23Q11/12—Arrangements for cooling or lubricating parts of the machine
- B23Q11/121—Arrangements for cooling or lubricating parts of the machine with lubricating effect for reducing friction
- B23Q11/124—Arrangements for cooling or lubricating parts of the machine with lubricating effect for reducing friction for lubricating linear guiding systems
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/02—Sliding-contact bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0629—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion
- F16C32/064—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion the liquid being supplied under pressure
- F16C32/0644—Details of devices to control the supply of liquids to the bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0629—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion
- F16C32/064—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a liquid cushion, e.g. oil cushion the liquid being supplied under pressure
- F16C32/0651—Details of the bearing area per se
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
- F16C32/067—Details of hydrostatic bearings independent of fluid supply or direction of load of bearings adjustable for aligning, positioning, wear or play
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/02—Parts of sliding-contact bearings
- F16C33/04—Brasses; Bushes; Linings
- F16C33/06—Sliding surface mainly made of metal
- F16C33/10—Construction relative to lubrication
- F16C33/1025—Construction relative to lubrication with liquid, e.g. oil, as lubricant
- F16C33/106—Details of distribution or circulation inside the bearings, e.g. details of the bearing surfaces to affect flow or pressure of the liquid
- F16C33/1065—Grooves on a bearing surface for distributing or collecting the liquid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/02—Parts of sliding-contact bearings
- F16C33/04—Brasses; Bushes; Linings
- F16C33/06—Sliding surface mainly made of metal
- F16C33/10—Construction relative to lubrication
- F16C33/1025—Construction relative to lubrication with liquid, e.g. oil, as lubricant
- F16C33/106—Details of distribution or circulation inside the bearings, e.g. details of the bearing surfaces to affect flow or pressure of the liquid
- F16C33/1085—Channels or passages to recirculate the liquid in the bearing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2322/00—Apparatus used in shaping articles
- F16C2322/39—General build up of machine tools, e.g. spindles, slides, actuators
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Bearings For Parts Moving Linearly (AREA)
- Auxiliary Devices For Machine Tools (AREA)
- Machine Tool Units (AREA)
- Sliding-Contact Bearings (AREA)
Description
図3を参照すると、B軸ベース110には、摺動面10の潤滑油ポケット20の進行方向両端部に開口している潤滑油帰還通路28と、潤滑油源30から潤滑油帰還通路28に連通し、潤滑油ポケット20へ向けて潤滑油を供給するための潤滑油供給通路24と、潤滑油帰還通路28に連通し、潤滑油帰還通路28を通して潤滑油ポケット20内の潤滑油を排出する潤滑油排出通路26とが形成されている。潤滑油排出通路26は、潤滑油源30に接続されている。図3の例では、移動体としてのB軸ベース110は2つの潤滑油ポケット20を備えており、潤滑油供給管路32は分岐して2つの潤滑油供給通路24に接続され、潤滑油排出管路34は2本の潤滑油排出通路26から潤滑油を受け取る。
B軸ベース110が、図6において矢印Z1で示すように、ベッド102に対して相対的に潤滑油帰還通路28の第1のポート44側に移動するとき、潤滑油ポケット20内の潤滑油は、矢印L1で示すように、B軸ベース110に対して相対的に潤滑油帰還通路28の第2のポート46側に移動する。これによって、潤滑油ポケット20内では、B軸ベース110の移動方向に関して後側となる第2のポート46側が相対的に高圧になり第1のポート44側が低圧となる。従って、潤滑油源30から潤滑油供給管路32を介して潤滑油供給通路24へ供給された低温の潤滑油は、その一部が第1のポート44および該第1のポート44が開口する油溝19の第1の辺部分19aから潤滑油ポケット20内に流入し、残りの部分は潤滑油排出通路26へ向けて潤滑油帰還通路28内を流通する。
図8に示す実施形態では、圧力検出手段は、B軸ベース110と摺動部材14との間に配設されたシート状の面圧センサを具備することができる。特に、図8に示すように、B軸ベース110に複数の摺動部材14を貼付して、該複数の摺動部材14とB軸ベース110との間に複数の面圧センサ70、72、74、76を配設することができる。また、図8の実施形態では、圧力制御手段は、2本に分岐した潤滑油供給管路32の一方に設けられた圧力制御弁78を具備している。また、図8の例では、潤滑油制御装置50は、一方の摺動部材14とB軸ベース110の間に配設された2つの面圧センサ70、72の測定値を平均し、他方の摺動部材14とB軸ベース110の間に配設された2つの面圧センサ74、76の測定値の平均値と比較し、面圧の高い方の摺動部材14が形成する潤滑油ポケット20に供給される潤滑油の圧力が高くなるように、圧力制御弁78を制御する。これによって、例えば、ワークWがZ軸方向に長い形状を有し、一方の摺動部材14に負荷が大きく印加される場合でも、該摺動部材14に作用する面圧を低減することが可能となり、複数の摺動部材14間で面圧が均一化される。このように摺動部材14の負荷が大きくなった場合でも、既述したように、ランド部18を超えて潤滑油が漏洩することを防止することが可能となる。また、工作機械の仕様書に記載の最大積載重量を超えたワークを積載して加工する場合であっても、潤滑油ポケット20に供給される潤滑油の圧力を高くすることによって、摺動部材14の面圧を高くすることなく、応急的に対応することができる。
18 ランド部
19 油溝
20 潤滑油ポケット
24 潤滑油供給通路
26 潤滑油排出通路
28 潤滑油帰還通路
30 潤滑油源
44 第1のポート
46 第2のポート
Claims (7)
- 支持体の案内面と移動体の摺動面との間に潤滑油を供給して移動体を案内する移動体の案内装置において、
前記移動体の摺動面に周囲をランド部で囲った潤滑油ポケットが設けられ、その潤滑油ポケットの中の摺動面に互いに連通する複数の凹部が形成され、前記ランド部の内周に沿って、前記移動体の移動方向に対して垂直に延設された第1と第2の辺部分と、移動方向に対して平行に延設された第3と第4の辺部分とを有する矩形の閉ループ状の油溝が隣接する前記複数の凹部と連通するように形成された潤滑油ポケットと、
前記潤滑油ポケットの前記油溝の前記第1と第2の辺部分に少なくとも部分的に開口され、前記移動体の移動に伴って、移動方向の後部に溜った潤滑油が移動方向の前部へ流れるように前記潤滑油ポケットの中の前部と後部を連通した潤滑油帰還通路と、
前記潤滑油帰還通路に連通し、潤滑油源から供給される潤滑油を前記潤滑油帰還通路を通して前記潤滑油ポケットに供給する潤滑油供給通路と、
前記潤滑油帰還通路に連通し、前記潤滑油ポケットから潤滑油を前記潤滑油帰還通路を通して前記潤滑油源へ回収する潤滑油回収通路と、
を具備することを特徴とした移動体の案内装置。 - 前記潤滑油源は、前記潤滑油回収通路から潤滑油を受入れる潤滑油タンクと、前記潤滑油タンクから前記潤滑油供給通路へ潤滑油を吐出するポンプと、を具備する請求項1に記載の移動体の案内装置。
- 移動体の案内装置は、前記支持体と前記移動体との間の接触面に作用する面圧を検出する圧力検出手段と、該圧力検出手段によって検出された面圧に基づいて前記潤滑油ポケットに供給される潤滑油の圧力を制御する圧力制御手段とを具備する請求項2に記載の移動体の案内装置。
- 前記圧力検出手段は、前記移動体を駆動するサーボモータへ供給する電力に基づいて、前記面圧を間接的に検出する請求項3に記載の移動体の案内装置。
- 前記圧力検出手段は、前記移動体に取付けた面圧センサシートを具備する請求項3に記載の移動体の案内装置。
- 前記移動体の摺動面に複数の前記潤滑油ポケットを配設し、各潤滑油ポケットの近傍に面圧センサシートを配設して、該複数の面圧センサシートで検出する面圧が均一になるように、前記複数の潤滑油ポケットの各々に供給する潤滑油の圧力を制御する請求項3に記載の移動体の案内装置。
- 前記潤滑油ポケット内において前記ランド部と同じ高さの表面が、前記ランド部の内側の面積の15〜50%となるように前記複数の凹部を形成した請求項1に記載の移動体の案内装置。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2017/033575 WO2019053895A1 (ja) | 2017-09-15 | 2017-09-15 | 移動体の案内装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2019053895A1 JPWO2019053895A1 (ja) | 2020-04-09 |
JP6934526B2 true JP6934526B2 (ja) | 2021-09-15 |
Family
ID=65722498
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019541610A Active JP6934526B2 (ja) | 2017-09-15 | 2017-09-15 | 移動体の案内装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US11131342B2 (ja) |
EP (1) | EP3683010B1 (ja) |
JP (1) | JP6934526B2 (ja) |
CN (1) | CN110997227B (ja) |
TW (1) | TWI678255B (ja) |
WO (1) | WO2019053895A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6779350B1 (ja) * | 2019-09-06 | 2020-11-04 | 株式会社牧野フライス製作所 | 滑り直動ガイド装置および滑り直動ガイド装置のキャリッジに摺動部材を貼付する方法 |
JP2022026427A (ja) * | 2020-07-31 | 2022-02-10 | 株式会社小松製作所 | 案内装置 |
CN112692358A (zh) * | 2020-12-24 | 2021-04-23 | 占立 | 一种摩擦造成磨损解决旋切晃动的液压旋切机 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3355990A (en) * | 1964-08-26 | 1967-12-05 | Henschef Werke A G | Hydrostatic positioning of worktables of machine tools |
JPS6195842A (ja) * | 1984-10-17 | 1986-05-14 | Mitsubishi Heavy Ind Ltd | 荷重補償案内面を備えた機械 |
JPS62241629A (ja) * | 1986-04-11 | 1987-10-22 | Citizen Watch Co Ltd | 複合案内機構 |
US4865465A (en) * | 1987-08-20 | 1989-09-12 | Toyoda Koki Kabushiki Kaisha | Hydrostatically supporting device for slide |
JP3658821B2 (ja) * | 1995-12-11 | 2005-06-08 | 豊田工機株式会社 | 姿勢制御型すべり案内装置 |
JP4190738B2 (ja) * | 2001-02-07 | 2008-12-03 | 株式会社ジェイテクト | 工作機械における半浮上式スライド案内機構 |
US20040042689A1 (en) * | 2002-08-30 | 2004-03-04 | Hardinge Inc. | Hydrostatic bearing for linear motion guidance |
JP4356385B2 (ja) * | 2003-07-10 | 2009-11-04 | 株式会社ジェイテクト | すべり案内装置 |
JP4492200B2 (ja) * | 2004-04-28 | 2010-06-30 | 株式会社ジェイテクト | 案内装置 |
JP2006266287A (ja) * | 2005-03-22 | 2006-10-05 | Jtekt Corp | 案内装置 |
JP4817843B2 (ja) * | 2005-12-28 | 2011-11-16 | 株式会社牧野フライス製作所 | 移動体の案内装置 |
TWM348658U (en) | 2008-07-16 | 2009-01-11 | Weibo Prec Co Ltd | Hydrostatic linear slide track |
JP2010149946A (ja) * | 2008-12-24 | 2010-07-08 | Hitachi Ltd | 移動体の案内装置 |
JP4901946B2 (ja) * | 2009-12-16 | 2012-03-21 | 株式会社牧野フライス製作所 | 滑り案内装置 |
EP2478995B1 (de) * | 2011-01-21 | 2013-08-21 | Fritz Studer AG | Vorrichtung mit einem verfahrbaren Schlitten und einer Linearführung |
JP5306437B2 (ja) * | 2011-10-27 | 2013-10-02 | 株式会社牧野フライス製作所 | 移動体の案内装置 |
TWI458586B (zh) * | 2012-08-21 | 2014-11-01 | Ind Tech Res Inst | 複合式可變流阻液靜壓滑塊模組 |
CN203566255U (zh) * | 2013-12-02 | 2014-04-30 | 哈尔滨理工大学 | 一种浅油腔静压中心架垫式托瓦 |
US9845828B2 (en) * | 2014-10-28 | 2017-12-19 | Toshiba Kikai Kabushiki Kaisha | Guide mechanism of machine tool and machine tool |
JP6559937B2 (ja) * | 2014-10-28 | 2019-08-14 | 東芝機械株式会社 | 油静圧案内機構および工作機械 |
JP2016215304A (ja) * | 2015-05-19 | 2016-12-22 | 東芝機械株式会社 | 工作機械 |
JP6981734B2 (ja) * | 2016-03-08 | 2021-12-17 | トーヨーエイテック株式会社 | 静圧パッド |
-
2017
- 2017-09-15 JP JP2019541610A patent/JP6934526B2/ja active Active
- 2017-09-15 CN CN201780093972.1A patent/CN110997227B/zh active Active
- 2017-09-15 US US16/647,126 patent/US11131342B2/en active Active
- 2017-09-15 EP EP17924882.8A patent/EP3683010B1/en active Active
- 2017-09-15 WO PCT/JP2017/033575 patent/WO2019053895A1/ja unknown
- 2017-10-26 TW TW106136929A patent/TWI678255B/zh active
Also Published As
Publication number | Publication date |
---|---|
EP3683010A4 (en) | 2021-04-28 |
EP3683010A1 (en) | 2020-07-22 |
EP3683010B1 (en) | 2022-12-07 |
CN110997227A (zh) | 2020-04-10 |
JPWO2019053895A1 (ja) | 2020-04-09 |
WO2019053895A1 (ja) | 2019-03-21 |
US20210025449A1 (en) | 2021-01-28 |
CN110997227B (zh) | 2022-02-22 |
US11131342B2 (en) | 2021-09-28 |
TW201914729A (zh) | 2019-04-16 |
TWI678255B (zh) | 2019-12-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6934526B2 (ja) | 移動体の案内装置 | |
KR100989668B1 (ko) | 선형 운동 안내용 유체정역학적 베어링 | |
US7101080B2 (en) | Hydrostatic pressure linear guide device | |
US9845828B2 (en) | Guide mechanism of machine tool and machine tool | |
US9020629B2 (en) | Main spindle device of machine tool | |
JP2002239859A (ja) | 工作機械における半浮上式スライド案内機構 | |
KR101795157B1 (ko) | 공작 기계의 안내 기구 및 공작 기계 | |
JP2010240815A (ja) | 工作機械の直動案内装置 | |
JP2005238442A (ja) | 滑り案内装置 | |
JP5306437B2 (ja) | 移動体の案内装置 | |
JP4492200B2 (ja) | 案内装置 | |
JP5039597B2 (ja) | 工作機械 | |
JP4817843B2 (ja) | 移動体の案内装置 | |
EP2759373A2 (en) | A method of fluid pressure control in a hydrostatic burnishing tool and hydrostatic burnishing tool | |
EP1413389A1 (en) | Machine tool comprising a hydrostatic slideway | |
EP2620232A1 (en) | Linear bearing plate for rolling mill | |
KR100959508B1 (ko) | 공기 부상 방식의 슬라이드 장치 | |
JP2020189371A (ja) | 機械 | |
JP4901946B2 (ja) | 滑り案内装置 | |
JP4356385B2 (ja) | すべり案内装置 | |
KR101492440B1 (ko) | 습동면 정압윤활 장치 | |
JP2019214089A (ja) | 工作機械のガイド機構、工作機械および工作機械のガイド部材 | |
JPH08150527A (ja) | 静圧軸受油圧シリンダ装置 | |
CN115383473A (zh) | 应用于机床的预载式液体静压导轨组件及机床 | |
KR20170014077A (ko) | 유정압 테이블 장치 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20191204 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20210119 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210322 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20210803 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20210823 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6934526 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |