JP6920977B2 - Sliding surface structure - Google Patents

Sliding surface structure Download PDF

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JP6920977B2
JP6920977B2 JP2017241632A JP2017241632A JP6920977B2 JP 6920977 B2 JP6920977 B2 JP 6920977B2 JP 2017241632 A JP2017241632 A JP 2017241632A JP 2017241632 A JP2017241632 A JP 2017241632A JP 6920977 B2 JP6920977 B2 JP 6920977B2
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sliding
sliding surface
groove
unevenness
periodic structure
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JP2019108921A (en
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博司 沢田
博司 沢田
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Canon Machinery Inc
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Description

本発明は、摺動面構造に関するものである。 The present invention relates to a sliding surface structure.

例えば回転軸とすべり軸受との摺動において、なじみ性を確保して、低摩擦性を確保するものがある（特許文献１）。特許文献１のものは、すべり軸受の摺動面を、軸受合金層の表面を覆う低摩擦性合成樹脂製のオーバーレイ層とし、このオーバーレイ層の表面に環状溝による凹凸面を形成している。これにより、回転軸による荷重がすべり軸受に加わった際に、凸部を塑性変形させることによって、回転軸とすべり軸受とをなじませ、オーバーレイ層が摩耗することによって、低摩擦性合成樹脂製による低摩擦性を確保するものである。 For example, in sliding between a rotating shaft and a slide bearing, there is one that ensures familiarity and low friction (Patent Document 1). In Patent Document 1, the sliding surface of the slide bearing is an overlay layer made of a low-friction synthetic resin that covers the surface of the bearing alloy layer, and an uneven surface formed by an annular groove is formed on the surface of the overlay layer. As a result, when a load from the rotating shaft is applied to the slide bearing, the convex portion is plastically deformed so that the rotating shaft and the slide bearing are made to fit, and the overlay layer is worn, resulting in a low friction synthetic resin. It ensures low friction.

特開２０１１−１７９５６６号公報Japanese Unexamined Patent Publication No. 2011-179566

ところで、部材同士が摺動する際、シビア摩耗（すべり距離の増加により摩耗量が増加するような摩耗）からマイルド摩耗（すべり距離が増加しても摩耗量がほとんど増加しない摩耗であって、摩耗率がシビア摩耗の摩耗率よりも一桁以上低い）へ遷移する場合がある。摺動初期において、この遷移が生じれば、結果的に総摩耗量を低減することができる。シビア摩耗からマイルド摩耗に遷移するためには、微細な摩耗粉（マイルド摩耗粉）を生成し、微細な摩耗粉がのしつぶされることによって、一方又は両方の摺動面に強固に固着された移着層を形成することが必要である。 By the way, when the members slide with each other, from severe wear (wear in which the amount of wear increases due to an increase in the sliding distance) to mild wear (wear in which the amount of wear hardly increases even if the sliding distance increases). The rate may transition to (more than an order of magnitude lower than the wear rate of severe wear). If this transition occurs at the initial stage of sliding, the total amount of wear can be reduced as a result. In order to transition from severe wear to mild wear, fine wear debris (mild wear debris) is generated, and the fine wear debris is crushed and firmly adhered to one or both sliding surfaces. It is necessary to form a transfer layer.

前記特許文献１のものは、摺動面に形成された凸部を塑性変形させることによるなじみ促進を目的とするものであって、摺動面が互いに固体同士で接触するような境界潤滑下では、摩擦上昇を回避するものに過ぎないものとなる。すなわち、特許文献１のものは、移着層の形成能力が低くマイルド摩耗促進効果がないため、特に境界潤滑下においては摩擦低減効果が生じない。 The object of Patent Document 1 is intended to promote familiarity by plastically deforming a convex portion formed on a sliding surface, and under boundary lubrication in which the sliding surfaces are in contact with each other. , It will only avoid the increase in friction. That is, since Patent Document 1 has a low ability to form a transfer layer and does not have a mild wear promoting effect, a friction reducing effect does not occur particularly under boundary lubrication.

本発明は、上記課題に鑑みて、摩耗粉の成長が生じやすい混合潤滑下または境界潤滑下での面接触摺動または線接触摺動においても、長期にわたって低摩擦・低摩耗を維持することができる摺動面構造を提供する。 In view of the above problems, the present invention can maintain low friction and low wear for a long period of time even in surface contact sliding or line contact sliding under mixed lubrication or boundary lubrication where wear powder is likely to grow. Provide a sliding surface structure that can be used.

本発明の摺動面構造は、摺動面を有する第１部材と、第１部材の摺動面に対して混合潤滑下または境界潤滑下で相対的に摺動する接触部を有する第２部材とを備えた摺動面構造であって、第１部材の摺動面と第２部材の接触部との少なくともいずれかに、摺動方向において前記接触部の最大長さよりも狭い幅を有する溝が設けられるとともに、第１部材の摺動面と第２部材の接触部との少なくともいずれかに、摺動時において前記溝に連通するグレーティング状凹凸の周期構造が設けられるものであり、前記溝の深さ及び前記溝が延びる方向の溝幅が、前記グレーティング状凹凸の周期構造の凹凸及び周期ピッチの５倍以上であるものである。 The sliding surface structure of the present invention has a first member having a sliding surface and a second member having a contact portion that slides relative to the sliding surface of the first member under mixed lubrication or boundary lubrication. A groove having a width narrower than the maximum length of the contact portion in the sliding direction at least one of the sliding surface of the first member and the contact portion of the second member. together are provided, on at least one of the sliding surfaces and the contact portion of the second member of the first member, which periodic structure of the grating-like unevenness which communicates with the groove at the time of sliding is provided, said groove The depth of the groove and the width of the groove in the direction in which the groove extends are five times or more the unevenness and the periodic pitch of the periodic structure of the grating-like unevenness .

本発明の摺動面構造によれば、第１部材側と第２部材側との少なくともいずれかにグレーティング状凹凸の周期構造が設けられていることで、摺動時に微細な摩耗粉を発生しながら、なじみが進行する。この際、周期構造が微細な摩耗粉をトラップすることで、シビア摩耗を引き起こす大型の摩耗粉の生成が抑制され、シビア摩耗を防止することができる。さらに、周期構造にトラップされた微細な摩耗粉が摺動面に固着することで、摩耗率がシビア摩耗の１／１０〜１／１０００となるマイルド摩耗遷移が促進される。 According to the sliding surface structure of the present invention, since a periodic structure of grating-like unevenness is provided on at least one of the first member side and the second member side, fine wear powder is generated during sliding. However, familiarity progresses. At this time, since the periodic structure traps fine wear debris, the generation of large wear debris that causes severe wear can be suppressed, and severe wear can be prevented. Further, the fine wear powder trapped in the periodic structure adheres to the sliding surface, which promotes a mild wear transition in which the wear rate becomes 1/10 to 1/1000 of severe wear.

前記溝は、前記摺動面と接触部との摺動領域内から摺動領域外に延びるものであってもよい。これにより、周期構造がトラップしきれない大型の摩耗粉や余剰の摩耗粉が摺動領域内から摺動領域外へ排出され、シビア摩耗を一層抑制することができる。 The groove may extend from the inside of the sliding region between the sliding surface and the contact portion to the outside of the sliding region. As a result, large-sized wear debris and excess wear debris whose periodic structure cannot be completely trapped are discharged from the sliding region to the outside of the sliding region, and severe wear can be further suppressed.

前記溝は、摺動領域を、摺動方向とは異なる方向で延びるものであってもよい。これにより、周期構造がトラップしきれない摩耗粉を摺動領域の両側周縁（摺動領域外）に排出することができる。 The groove may extend the sliding region in a direction different from the sliding direction. As a result, wear debris whose periodic structure cannot be completely trapped can be discharged to both side peripheral edges (outside the sliding region) of the sliding region.

前記構成において、前記グレーティング状凹凸の周期構造は、微小の凹部と微小の凸部とが交互に交互に所定ピッチで配設され、凹部及び凸部が摺動方向に沿って延びるように設けられていてもよい。これにより、余剰の摩耗粉を溝に排出することができるとともに、マイルド摩耗の前駆体となる微細な摩耗粉を摺動面内に適度に拘束することでマイルド摩耗遷移が促進される。 In the above configuration, in the periodic structure of the grating-like unevenness , minute concave portions and minute convex portions are alternately arranged at a predetermined pitch, and the concave portions and the convex portions are provided so as to extend along the sliding direction. You may be. As a result, excess wear debris can be discharged into the groove, and fine wear debris, which is a precursor of mild wear, is appropriately restrained in the sliding surface to promote the mild wear transition.

前記構成において、前記グレーティング状凹凸の周期構造の凹凸が５０ｎｍ以上１０μｍ以下、かつ周期ピッチが１０μｍ以下であってもよい。これにより、マイルド摩耗の前駆体となる微細な摩耗粉の保持とシビア摩耗を引き起こす大型の摩耗粉の生成抑制が可能となる。 In the above configuration, the unevenness of the periodic structure of the grating-like unevenness may be 50 nm or more and 10 μm or less, and the periodic pitch may be 10 μm or less. This makes it possible to retain fine wear debris that is a precursor of mild wear and suppress the generation of large wear debris that causes severe wear.

前記溝の深さ及び前記溝が延びる方向の溝幅が、前記グレーティング状凹凸の周期構造の凹凸及び周期ピッチの５倍以上とすることにより、周期構造がトラップしきれない大型の摩耗粉や余剰の摩耗粉が効率的に摺動領域内から摺動領域外へ排出され、シビア摩耗が抑制される。 Groove width in the direction depth and the groove of the groove extends is, by more than five times the irregularities and the period pitch of the periodic structure of the grating-like unevenness, large abrasion powder and surplus periodic structure not be trapped Wear powder is efficiently discharged from the sliding region to the outside of the sliding region, and severe wear is suppressed.

前記構成において、前記グレーティング状凹凸の周期構造は、未摺動時において凸部頂点が非平坦面となって連続的に高さが変化しているものであってもよい。これにより、摺動開始時に小さな曲率半径をもつ周期構造先端が摩耗し、微細な摩耗粉を発生しながら、速やかになじみが進行する。また、凹部の開口が広いため、周期構造が微細な摩耗粉を効率的にトラップすることができる。 In the above configuration, the periodic structure of the grating-like unevenness may be such that the apex of the convex portion becomes a non-flat surface and the height changes continuously when not sliding. As a result, the tip of the periodic structure having a small radius of curvature wears at the start of sliding, and the familiarization progresses quickly while generating fine wear powder. Further, since the opening of the recess is wide, it is possible to efficiently trap abrasion powder having a fine periodic structure.

前記構成において、前記第１部材側と第２部材側との少なくともいずれかに非晶質炭素膜が形成されているものであってもよい。これにより、低摩擦化の実現に重要な低硬度カーボンを含む微細な摩耗粉がのしつぶされ、強固に固着された低硬度カーボン移着層が形成されるため、長期にわたって摺動特性が向上する。 In the above configuration, an amorphous carbon film may be formed on at least one of the first member side and the second member side. As a result, fine wear powder containing low-hardness carbon, which is important for achieving low friction, is crushed and a firmly fixed low-hardness carbon transfer layer is formed, so that the sliding characteristics are improved over a long period of time. do.

本発明の摺動部材は、シビア摩耗を引き起こす大型の摩耗粉の成長を抑制することで、摩耗粉の成長が生じやすい混合潤滑下または境界潤滑下での面接触摺動または線接触摺動においても、長期にわたって低摩擦・低摩耗を維持することができる。 The sliding member of the present invention suppresses the growth of large wear debris that causes severe wear, so that in surface contact sliding or line contact sliding under mixed lubrication or boundary lubrication where wear debris tends to grow. However, low friction and low wear can be maintained for a long period of time.

本発明の実施形態を示す摺動面構造であり、（ａ）は簡略平面図、（ｂ）は簡略断面図である。It is a sliding surface structure which shows the embodiment of this invention, (a) is a simplified plan view, (b) is a simplified sectional view. 第１部材の摺動面の拡大断面図である。It is an enlarged cross-sectional view of the sliding surface of the 1st member. 本発明の他の実施形態を示す摺動面構造の簡略平面図である。It is a simplified plan view of the sliding surface structure which shows the other embodiment of this invention. ＳＵＳ４４０Ｃ基板に形成したＤＬＣ成膜後の周期構造であり、（ａ）は周期構造の拡大平面図であり、（ｂ）は周期構造の断面プロファイル図である。It is a periodic structure after the DLC film formation formed on the SUS440C substrate, (a) is an enlarged plan view of the periodic structure, and (b) is a cross-sectional profile view of the periodic structure. 溝ありと溝なしの２種類のプレート試験片の摩擦係数の比較を示すグラフ図である。It is a graph which shows the comparison of the friction coefficient of two kinds of plate test pieces with a groove and without a groove.

以下本発明の実施の形態を図１〜図５に基づいて説明する。 Hereinafter, embodiments of the present invention will be described with reference to FIGS. 1 to 5.

本発明に係る摺動面構造は、図１に示すように、平面状の摺動面１ａを有する第１部材１と、前記第１部材１の摺動面１ａに対して相対的に摺動する接触部２ａを有する第２部材２とを備えたものである。第１部材１と第２部材２とは混合潤滑下または境界潤滑下で相対的に摺動するものである。ここで、混合潤滑とは、摺動面１ａと接触部２ａとの２面間に僅かな潤滑膜が存在するものの、摺動面１ａと接触部２ａとが固体接触するような状態をいい、境界潤滑とは、２面間に潤滑膜が存在せず、摺動面１ａと接触部２ａとが固体接触するような状態をいう。第１部材１側（摺動面１ａ）には、非晶質炭素膜が形成されている。 As shown in FIG. 1, the sliding surface structure according to the present invention slides relative to the first member 1 having a planar sliding surface 1a and the sliding surface 1a of the first member 1. It is provided with a second member 2 having a contact portion 2a. The first member 1 and the second member 2 slide relatively under mixed lubrication or boundary lubrication. Here, the mixed lubrication refers to a state in which the sliding surface 1a and the contact portion 2a are in solid contact with each other, although a slight lubricating film is present between the two surfaces of the sliding surface 1a and the contact portion 2a. Boundary lubrication refers to a state in which a lubricating film does not exist between the two surfaces and the sliding surface 1a and the contact portion 2a are in solid contact with each other. An amorphous carbon film is formed on the first member 1 side (sliding surface 1a).

本実施形態では、第１部材１を例えば平板体とし、第２部材２を例えば直方体形状のブロック体としている。第１部材１の平面状の上面が前記摺動面１ａとなり、第２部材２の一面（本実施形態では下面）が前記接触部２ａとなる。第２部材２は、第１部材１を矢印Ａの方向に摺動し、第２部材２の接触部２ａが第１部材１の摺動面１ａと接触しうる領域を摺動領域（図１（ａ）の範囲Ｈ）という。 In the present embodiment, the first member 1 is, for example, a flat plate body, and the second member 2 is, for example, a rectangular parallelepiped block body. The flat upper surface of the first member 1 serves as the sliding surface 1a, and one surface (lower surface in the present embodiment) of the second member 2 serves as the contact portion 2a. The second member 2 slides the first member 1 in the direction of the arrow A, and the region where the contact portion 2a of the second member 2 can come into contact with the sliding surface 1a of the first member 1 is a sliding region (FIG. 1). It is called the range H) of (a).

第１部材１の摺動面１ａには、摺動方向Ａにおいて接触部２ａの最大長さＬ（図１（ａ）参照）よりも狭い幅を有する溝３が設けられている。図１における図示例では溝３の数は３つであるが、実際は、摺動領域Ｈにおいて、さらに多数の溝３が設けられている。溝３は、摺動面１ａと接触部２ａとの摺動領域Ｈ内から摺動領域Ｈ外に延びるものである。また、溝３は、摺動領域Ｈを、摺動方向Ａとは異なる方向で延びるものであり、本実施形態では、溝３は摺動方向Ａとほぼ直交する方向に延びている。溝の深さＤ（図１（ｂ）参照）及び溝３が延びる方向の溝幅Ｗ（図１（ａ）参照）は、後述するグレーティング状凹凸の周期構造４の凹凸及び周期ピッチの５倍以上となっている。 The sliding surface 1a of the first member 1 is provided with a groove 3 having a width narrower than the maximum length L of the contact portion 2a (see FIG. 1A) in the sliding direction A. In the illustrated example in FIG. 1, the number of grooves 3 is three, but in reality, a larger number of grooves 3 are provided in the sliding region H. The groove 3 extends from the inside of the sliding region H between the sliding surface 1a and the contact portion 2a to the outside of the sliding region H. Further, the groove 3 extends the sliding region H in a direction different from the sliding direction A, and in the present embodiment, the groove 3 extends in a direction substantially orthogonal to the sliding direction A. The groove depth D (see FIG. 1B) and the groove width W in the direction in which the groove 3 extends (see FIG. 1A) are five times the unevenness and periodic pitch of the periodic structure 4 of the grating-like unevenness described later. That is all.

第１部材１の摺動面１ａには、摺動時において溝３に連通するグレーティング状凹凸の周期構造４が設けられている。すなわち、溝３と、隣合う溝３との間の夫々に周期構造４が形成されている。図２に示すように、周期構造４は、溝３の溝幅Ｗよりも周期間隔の狭いピッチで微小の凹部５と微小の凸部６とが交互に所定ピッチで配設されてなるものであり、摺動方向Ａに沿って延びるように設けられている。凸部６の頂点は、非平坦面となって連続的に高さが変化している。また、周期構造４の凹凸は、５０ｎｍ以上１０μｍ以下、かつ周期ピッチが１０μｍ以下とするのが好ましい。 The sliding surface 1a of the first member 1 is provided with a periodic structure 4 having grating-like irregularities communicating with the groove 3 during sliding. That is, a periodic structure 4 is formed between the groove 3 and the adjacent groove 3. As shown in FIG. 2, the periodic structure 4 is formed by alternately arranging minute concave portions 5 and minute convex portions 6 at a predetermined pitch at a pitch narrower than the groove width W of the groove 3. Yes, it is provided so as to extend along the sliding direction A. The apex of the convex portion 6 becomes a non-flat surface, and the height changes continuously. Further, it is preferable that the unevenness of the periodic structure 4 is 50 nm or more and 10 μm or less, and the periodic pitch is 10 μm or less.

このような第１部材１と第２部材２とを備えた摺動面構造において、第２部材２が第１部材１に対して無潤滑（境界潤滑下）で相対的に摺動すると、周期構造４が設けられていることで、摺動時に微細な摩耗粉を発生しながら、なじみが進行する。この際、周期構造４が微細な摩耗粉をトラップすることで、シビア摩耗を引き起こす大型の摩耗粉の生成が抑制され、シビア摩耗を防止することができる。さらに、周期構造４にトラップされた微細な摩耗粉が摺動面１ａまたは接触部２ａに固着することで、摩耗率がシビア摩耗の１／１０〜１／１０００となるマイルド摩耗遷移が促進される。このように、本発明では、シビア摩耗を引き起こす大型の摩耗粉の成長を抑制することで、摩耗粉の成長が生じやすい境界潤滑下での面接触摺動においても、長期にわたって低摩擦・低摩耗を維持することができる。 In such a sliding surface structure including the first member 1 and the second member 2, when the second member 2 slides relative to the first member 1 without lubrication (under boundary lubrication), the period Since the structure 4 is provided, familiarization progresses while generating fine wear powder during sliding. At this time, since the periodic structure 4 traps fine wear debris, the generation of large wear debris that causes severe wear can be suppressed, and severe wear can be prevented. Further, the fine wear debris trapped in the periodic structure 4 adheres to the sliding surface 1a or the contact portion 2a, thereby promoting a mild wear transition in which the wear rate becomes 1/10 to 1/1000 of severe wear. .. As described above, in the present invention, by suppressing the growth of large wear debris that causes severe wear, low friction and low wear over a long period of time even in surface contact sliding under boundary lubrication where wear debris tends to grow. Can be maintained.

しかも、溝３は、摺動面１ａと接触部２ａとの摺動領域Ｈ内から摺動領域Ｈ外に延び、摺動領域Ｈを、摺動方向Ａとは異なる方向（本実施形態では、摺動方向Ａとほぼ直交する方向）で延び、溝３の深さＤ及び溝が延びる方向の溝幅Ｗが周期構造４の凹凸及び周期ピッチの各々の５倍以上としているため、周期構造４がトラップしきれない大型の摩耗粉や余剰の摩耗粉が摺動領域Ｈ内から摺動領域Ｈ外へ排出され、シビア摩耗を一層抑制することができる。 Moreover, the groove 3 extends from the inside of the sliding region H between the sliding surface 1a and the contact portion 2a to the outside of the sliding region H, and the sliding region H is oriented in a direction different from the sliding direction A (in this embodiment, in the present embodiment). Since it extends in a direction substantially orthogonal to the sliding direction A) and the depth D of the groove 3 and the groove width W in the direction in which the groove extends are 5 times or more each of the unevenness and the periodic pitch of the periodic structure 4, the periodic structure 4 Large-sized wear debris and excess wear debris that cannot be completely trapped are discharged from the inside of the sliding region H to the outside of the sliding region H, and severe wear can be further suppressed.

周期構造４が摺動方向Ａに沿って延びるように設けられていることで、余剰の摩耗粉を溝３に排出することができるとともに、マイルド摩耗の前駆体となる微細な摩耗粉を摺動面内に適度に拘束することでマイルド摩耗遷移が促進される。また、周期構造４の凹凸を５０ｎｍ以上１０μｍ以下、かつ周期ピッチが１０μｍ以下としているため、マイルド摩耗の前駆体となる微細な摩耗粉の保持とシビア摩耗を引き起こす大型の摩耗粉の生成抑制が可能となる。さらに、周期構造４は、未摺動時において凸部頂点が非平坦面となって連続的に高さが変化しているものとしているため、摺動開始時に小さな曲率半径をもつ周期構造先端が摩耗し、微細な摩耗粉を発生しながら、速やかになじみが進行する。また、凹部５の開口が広いため、周期構造４が微細な摩耗粉を効率的にトラップすることができる。 Since the periodic structure 4 is provided so as to extend along the sliding direction A, excess wear powder can be discharged into the groove 3, and fine wear powder which is a precursor of mild wear can be slid. Moderate restraint in the plane promotes mild wear transitions. Further, since the unevenness of the periodic structure 4 is 50 nm or more and 10 μm or less and the periodic pitch is 10 μm or less, it is possible to retain fine wear debris that is a precursor of mild wear and suppress the generation of large wear debris that causes severe wear. It becomes. Further, in the periodic structure 4, since the apex of the convex portion becomes a non-flat surface and the height changes continuously when not sliding, the tip of the periodic structure having a small radius of curvature at the start of sliding As it wears and produces fine abrasion powder, it quickly becomes familiar. Further, since the opening of the recess 5 is wide, the periodic structure 4 can efficiently trap fine abrasion powder.

第１部材１側に非晶質炭素膜が形成されているため、低摩擦化の実現に重要な低硬度カーボンを含む微細な摩耗粉がのしつぶされ、強固に固着された低硬度カーボン移着層が形成されるため、長期にわたって摺動特性が向上する。 Since the amorphous carbon film is formed on the first member 1 side, fine wear powder containing low hardness carbon, which is important for achieving low friction, is crushed and firmly fixed low hardness carbon transfer. Since the layer is formed, the sliding characteristics are improved over a long period of time.

本発明は前記実施形態に限定されることなく種々の変形が可能であって、例えば、摺動部材（第１部材１及び第２部材２）の形状はどのようなものであってもよく、摺動方向は直線状ではなく、円弧状等であってもよい。例えば、図３（ａ）に示すように、第１部材１の摺動面１ａが円形などの曲面を有しており、第２部材２が回転運動するものであってもよい。第２部材２の接触部２ａの形状も、矩形、円形、多角形、規則性の無いもの等、種々のものとすることができ、第１部材１と第２部材２との摺動は、面接触、線接触のいずれであってもよい。摺動部材の摺動方法としては、実施形態のように第１部材１側を固定して第２部材２を第１部材１に対して摺動させても、逆に、第２部材２側を固定して第１部材１を第２部材２に対して摺動させてもよく、第１部材１と第２部材２とを摺動させてもよい。 The present invention is not limited to the above embodiment, and various modifications can be made. For example, the shape of the sliding member (first member 1 and second member 2) may be any shape. The sliding direction may be an arc shape or the like instead of a linear shape. For example, as shown in FIG. 3A, the sliding surface 1a of the first member 1 may have a curved surface such as a circle, and the second member 2 may rotate. The shape of the contact portion 2a of the second member 2 can also be various, such as rectangular, circular, polygonal, and non-regular, and the sliding between the first member 1 and the second member 2 can be made. Either surface contact or line contact may be used. As a method of sliding the sliding member, even if the first member 1 side is fixed and the second member 2 is slid with respect to the first member 1 as in the embodiment, on the contrary, the second member 2 side The first member 1 may be slid with respect to the second member 2, or the first member 1 and the second member 2 may be slid.

溝３の幅、深さ、断面形状、平面形状、数、位置は種々のものとすることができ、必要性に応じて適宜決定することができる。例えば、実施形態における溝３は、摺動領域Ｈ内から摺動領域Ｈ外に延びるものであったが、図３（ｂ）のように、摺動領域Ｈ内で延びるもの（つまり、摺動領域Ｈ外まで延びないもの）であってもよい。また、図３（ｃ）のように、溝３が摺動方向Ａと直交する方向以外の方向に延びるものであってもよい。溝３の配設ピッチは等間隔であっても不等間隔であってもよく、全ての溝３の大きさや形状を一致させる必要はなく、種々の形状や大きさの溝３が混在していてもよい。 The width, depth, cross-sectional shape, planar shape, number, and position of the groove 3 can be various, and can be appropriately determined according to the necessity. For example, the groove 3 in the embodiment extends from the inside of the sliding region H to the outside of the sliding region H, but extends within the sliding region H (that is, slides) as shown in FIG. 3 (b). It may not extend outside the region H). Further, as shown in FIG. 3C, the groove 3 may extend in a direction other than the direction orthogonal to the sliding direction A. The arrangement pitch of the grooves 3 may be equal or unequal, and it is not necessary to match the sizes and shapes of all the grooves 3, and the grooves 3 of various shapes and sizes are mixed. You may.

周期構造４の延びる方向は、図３（ｄ）に示すように、摺動方向Ａに沿っていなくてもよい。全ての周期構造４の延びる方向を同一にする必要はない。 As shown in FIG. 3D, the extending direction of the periodic structure 4 does not have to be along the sliding direction A. It is not necessary for all the periodic structures 4 to extend in the same direction.

溝３及び周期構造４は、第２部材２側に形成されていてもよいし、第１部材１側と第２部材２側（接触部２ａ）との両方に形成されていてもよい。また、一方の部材側に溝３を形成し、他方の部材側に周期構造４が形成されていてもよい。第２部材２側（接触部２ａ）に非晶質炭素膜が形成されていてもよく、第１部材１側と第２部材２側との両方に非晶質炭素膜が形成されていてもよい。 The groove 3 and the periodic structure 4 may be formed on the second member 2 side, or may be formed on both the first member 1 side and the second member 2 side (contact portion 2a). Further, the groove 3 may be formed on one member side and the periodic structure 4 may be formed on the other member side. An amorphous carbon film may be formed on the second member 2 side (contact portion 2a), or an amorphous carbon film may be formed on both the first member 1 side and the second member 2 side. good.

第１部材１及び第２部材２は、炭素鋼、銅、アルミニウム、白金、超硬合金等であっても、炭化ケイ素や窒化ケイ素等のシリコン系セラミックスであっても、エンジニアプラスチック等であってもよい。また、混合潤滑下での摺動の場合、潤滑剤として、水やアルコールであっても、さらにはエンジンオイル等の潤滑油等であってもよい。すなわち、第１・第２部材１、２の材質、使用する環境等に応じて種々の潤滑剤を用いることができる。 The first member 1 and the second member 2 are carbon steel, copper, aluminum, platinum, cemented carbide or the like, silicon-based ceramics such as silicon carbide or silicon nitride, engineer plastic or the like. May be good. Further, in the case of sliding under mixed lubrication, the lubricant may be water or alcohol, or may be a lubricating oil such as engine oil. That is, various lubricants can be used depending on the materials of the first and second members 1 and 2, the environment in which they are used, and the like.

周期構造４の形成には、フェムト秒レーザ、ピコ秒レーザ、およびナノ秒レーザといったパルスレーザを使用することができる。 A pulsed laser such as a femtosecond laser, a picosecond laser, and a nanosecond laser can be used to form the periodic structure 4.

摺動領域内から摺動領域外に延びる溝と、溝に連通するグレーティング状凹凸の周期構造を有するＤＬＣ膜の作成およびその摺動特性を評価し、グレーティング状凹凸の周期構造と溝との複合化による摩擦低減について検証した。 The formation of a DLC film having a groove extending from the inside of the sliding region to the outside of the sliding region and a periodic structure of grating-like unevenness communicating with the groove and its sliding characteristics were evaluated, and a composite of the periodic structure of the grating-like unevenness and the groove was evaluated. We verified the reduction of friction due to the conversion.

ＳＵＳ４４０Ｃ基板にフェムト秒レーザを加工しきい値近傍のエネルギー密度で照射し、グレーティング状凹凸の周期構造（ピッチ約７００ｎｍ、深さ約２００ｎｍ）を形成した後、プラズマイオン注入法でａ―Ｃ：ＨのＤＬＣ膜を成膜した。原料ガスにはトルエン（Ｃ7Ｈ8）を用い、中間層としてＳｉ／Ｃ傾斜層を設けた。中間層の膜厚は２５０ｎｍ、中間層を含むＤＬＣの膜厚は１μｍとした。成膜後のＤＬＣ表面のＡＦＭ像および断面プロファイルを図４（ａ）（ｂ）に示す。ＤＬＣ表面には深さ５０ｎｍ前後の周期構造形状が認められる。周期構造形成後にＤＬＣを成膜しているため、図４に示す周期構造ＤＬＣはレーザ未照射基板に成膜したものと形態が異なるだけで組成的には同一である。 The SUS440C substrate is irradiated with a femtosecond laser at an energy density near the processing threshold to form a periodic structure of grating-like irregularities (pitch of about 700 nm, depth of about 200 nm), and then a-C: H by plasma ion implantation method. DLC film was formed. Toluene (C 7 H 8 ) was used as the raw material gas, and a Si / C inclined layer was provided as an intermediate layer. The film thickness of the intermediate layer was 250 nm, and the film thickness of the DLC including the intermediate layer was 1 μm. The AFM image and the cross-sectional profile of the DLC surface after the film formation are shown in FIGS. 4 (a) and 4 (b). A periodic structure with a depth of about 50 nm is observed on the DLC surface. Since the DLC is formed after the periodic structure is formed, the periodic structure DLC shown in FIG. 4 is the same in composition as the one formed on the laser-unirradiated substrate, except that the form is different.

次に、往復式摺動試験機を用いて摩擦評価を実施した。プレート試験片は周期構造ＤＬＣ（溝なし）および摺動領域を横切るように溝を設けた周期構造ＤＬＣ（溝あり）とした。溝深さはＤＬＣ表面の周期構造深さより十分深く、溝ピッチは８００μｍ、溝幅は４０μｍとした。周期構造の方向はスライダー試験片の摺動方向に平行とした。したがって、溝ありの場合、周期構造は溝に連通することとなる。スライダー試験片の材質はＳＵＪ２とした。摺動条件は面圧４０ＭＰａ、ストローク２０ｍｍ、往復周波数０．５Ｈｚとし、１０００往復までの摺動抵抗をロードセルにより測定した。 Next, a friction evaluation was carried out using a reciprocating sliding tester. The plate test piece was a periodic structure DLC (without groove) and a periodic structure DLC (with groove) provided with a groove so as to cross the sliding region. The groove depth was sufficiently deeper than the periodic structure depth of the DLC surface, the groove pitch was 800 μm, and the groove width was 40 μm. The direction of the periodic structure was parallel to the sliding direction of the slider test piece. Therefore, when there is a groove, the periodic structure communicates with the groove. The material of the slider test piece was SUJ2. The sliding conditions were a surface pressure of 40 MPa, a stroke of 20 mm, and a reciprocating frequency of 0.5 Hz, and sliding resistance up to 1000 reciprocations was measured with a load cell.

２種類のプレート試験片の摩擦係数の比較を図５に示す。溝を設けることで早期に摩擦が低減し、溝なしに対して１５〜２０％程度の摩擦低減効果が得られた。これにより、摩耗粉の成長が生じやすい面接触の境界潤滑下においても、摺動領域を横切る溝と、溝に連通する周期構造を併せて設けることで、周期構造がトラップしきれない大型の摩耗粉や余剰の摩耗粉が溝により摺動領域内から摺動領域外へ排出され、低摩擦・低摩耗を維持できることが確認された。 A comparison of the friction coefficients of the two types of plate test pieces is shown in FIG. By providing the groove, the friction was reduced at an early stage, and the friction reduction effect of about 15 to 20% was obtained as compared with the case without the groove. As a result, even under the boundary lubrication of surface contact where wear debris is likely to grow, a groove that crosses the sliding region and a periodic structure that communicates with the groove are provided together, so that the periodic structure cannot be completely trapped. It was confirmed that powder and excess wear powder were discharged from the inside of the sliding region to the outside of the sliding region by the groove, and low friction and low wear could be maintained.

１ 第１部材
１ａ 摺動面
２ 第２部材
２ａ 接触部
３ 溝
４ 周期構造
６ 凸部
Ａ 摺動方向
Ｈ 摺動領域
Ｄ 溝の深さ
Ｗ 溝幅 1 1st member 1a Sliding surface 2 2nd member 2a Contact part 3 Groove 4 Periodic structure 6 Convex part A Sliding direction H Sliding area D Groove depth W Groove width

Claims (7)

摺動面を有する第１部材と、第１部材の摺動面に対して混合潤滑下または境界潤滑下で相対的に摺動する接触部を有する第２部材とを備えた摺動面構造であって、
第１部材の摺動面と第２部材の接触部との少なくともいずれかに、摺動方向において前記接触部の最大長さよりも狭い幅を有する溝が設けられるとともに、第１部材の摺動面と第２部材の接触部との少なくともいずれかに、摺動時において前記溝に連通するグレーティング状凹凸の周期構造が設けられるものであり、前記溝の深さ及び前記溝が延びる方向の溝幅が、前記グレーティング状凹凸の周期構造の凹凸及び周期ピッチの５倍以上であることを特徴とする摺動面構造。 A sliding surface structure including a first member having a sliding surface and a second member having a contact portion that slides relative to the sliding surface of the first member under mixed lubrication or boundary lubrication. There,
At least one of the sliding surface of the first member and the contact portion of the second member is provided with a groove having a width narrower than the maximum length of the contact portion in the sliding direction, and the sliding surface of the first member. At least one of the contact portion between the surface and the contact portion of the second member is provided with a periodic structure of grating-like unevenness communicating with the groove during sliding , and the depth of the groove and the groove width in the direction in which the groove extends. However, the sliding surface structure is characterized in that the unevenness of the periodic structure of the grating-like unevenness and the periodic pitch are 5 times or more. 前記溝は、前記摺動面と接触部との摺動領域内から摺動領域外に延びるものであることを特徴とする請求項１に記載の摺動面構造。 The sliding surface structure according to claim 1, wherein the groove extends from the inside of the sliding region between the sliding surface and the contact portion to the outside of the sliding region. 前記溝は、摺動領域を、摺動方向とは異なる方向で延びるものであることを特徴とする請求項１又は請求項２に記載の摺動面構造。 The sliding surface structure according to claim 1 or 2, wherein the groove extends in a direction different from the sliding direction. 前記グレーティング状凹凸の周期構造は、微小の凹部と微小の凸部とが交互に交互に所定ピッチで配設され、凹部及び凸部が摺動方向に沿って延びるように設けられていることを特徴とする請求項１〜請求項３のいずれか１項に記載の摺動面構造。 The periodic structure of the grating-like unevenness is such that minute concave portions and minute convex portions are alternately arranged at a predetermined pitch, and the concave portions and convex portions are provided so as to extend along the sliding direction. The sliding surface structure according to any one of claims 1 to 3. 前記グレーティング状凹凸の周期構造の凹凸が５０ｎｍ以上１０μｍ以下、かつ周期ピッチが１０μｍ以下であることを特徴とする請求項１〜請求項４のいずれか１項に記載の摺動面構造。 The sliding surface structure according to any one of claims 1 to 4, wherein the unevenness of the periodic structure of the grating-like unevenness is 50 nm or more and 10 μm or less, and the periodic pitch is 10 μm or less. 前記グレーティング状凹凸の周期構造は、未摺動時において凸部頂点が非平坦面となって連続的に高さが変化していることを特徴とする請求項１〜請求項５のいずれか１項に記載の摺動面構造。 Any one of claims 1 to 5 , wherein the periodic structure of the grating-like unevenness has a convex portion apex as a non-flat surface and the height is continuously changed when the grating-like unevenness is not slid. The sliding surface structure according to the item. 前記第１部材側と第２部材側との少なくともいずれかに非晶質炭素膜が形成されていることを特徴とする請求項１〜請求項６のいずれか１項に記載の摺動面構造。 The sliding surface structure according to any one of claims 1 to 6 , wherein an amorphous carbon film is formed on at least one of the first member side and the second member side. ..
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